CN113727804A - 加工系统、加工方法、机器人系统、连接装置以及终端效果器装置 - Google Patents

加工系统、加工方法、机器人系统、连接装置以及终端效果器装置 Download PDF

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Publication number
CN113727804A
CN113727804A CN201980095238.8A CN201980095238A CN113727804A CN 113727804 A CN113727804 A CN 113727804A CN 201980095238 A CN201980095238 A CN 201980095238A CN 113727804 A CN113727804 A CN 113727804A
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CN
China
Prior art keywords
movable member
processing
irradiation device
processing system
coating film
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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CN201980095238.8A
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English (en)
Chinese (zh)
Inventor
佐藤真路
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Nikon Corp
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Nikon Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/02—Carriages for supporting the welding or cutting element
    • B23K37/0247—Driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1628—Program controls characterised by the control loop
    • B25J9/1641—Program controls characterised by the control loop compensation for backlash, friction, compliance, elasticity in the joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/02—Carriages for supporting the welding or cutting element
    • B23K37/0205—Carriages for supporting the welding or cutting element guided by hand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0075—Manipulators for painting or coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/006—Vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles ; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Robotics (AREA)
  • Laser Beam Processing (AREA)
  • Manipulator (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
CN201980095238.8A 2019-04-12 2019-04-12 加工系统、加工方法、机器人系统、连接装置以及终端效果器装置 Pending CN113727804A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/015966 WO2020208808A1 (ja) 2019-04-12 2019-04-12 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

Publications (1)

Publication Number Publication Date
CN113727804A true CN113727804A (zh) 2021-11-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980095238.8A Pending CN113727804A (zh) 2019-04-12 2019-04-12 加工系统、加工方法、机器人系统、连接装置以及终端效果器装置

Country Status (6)

Country Link
US (1) US20220281104A1 (https=)
EP (2) EP4477349A3 (https=)
JP (3) JP7298681B2 (https=)
CN (1) CN113727804A (https=)
TW (1) TW202042987A (https=)
WO (1) WO2020208808A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3960359B1 (en) * 2019-04-24 2025-01-08 Nikon Corporation Processing apparatus and method
DE102021109043A1 (de) 2021-04-12 2022-10-13 Jenoptik Automatisierungstechnik Gmbh Verfahren und Steuergerät zum Steuern eines Laser-Bearbeitungsprozesses einer Oberfläche eines Werkstücks und Bearbeitungssystem zum Bearbeiten einer Oberfläche eines Werkstücks mittels eines Laser-Bearbeitungsprozesses
JP7692396B2 (ja) * 2022-10-06 2025-06-13 三菱重工業株式会社 レーザ加工装置
CN117066711A (zh) * 2023-08-16 2023-11-17 海目星激光科技集团股份有限公司 一种产品装夹定位夹具
CN117102159A (zh) * 2023-09-25 2023-11-24 上海韵申新能源科技有限公司 一种还原炉底盘激光自动清洗机

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04197589A (ja) * 1990-11-28 1992-07-17 Amada Co Ltd レーザパンチプレス、当該パンチプレスに用いるレーザ加工ヘッドユニット、レーザ加工ヘッドユニットとレーザ発振器とを接続する接続装置及びレーザ光路調整時に用いられるビーム検出装置
JPH0831162A (ja) * 1994-07-14 1996-02-02 Mitsubishi Electric Corp ディスク装置
JPH09327781A (ja) * 1996-06-12 1997-12-22 Ishikawajima Harima Heavy Ind Co Ltd レーザ光照射ヘッド位置決め装置
JPH106092A (ja) * 1996-04-19 1998-01-13 Amada Co Ltd レーザ・パンチ複合加工機の光学装置の防振装置
JPH11309593A (ja) * 1998-04-22 1999-11-09 Tdk Corp レーザ位置決め加工方法及び装置
JP2000176760A (ja) * 1998-12-16 2000-06-27 Amada Eng Center Co Ltd レーザ・パンチ複合加工機
JP2002239856A (ja) * 2001-02-16 2002-08-28 Amada Eng Center Co Ltd 防振装置およびこの防振装置を用いたパンチ・レーザ複合加工機
JP2003071760A (ja) * 2001-08-31 2003-03-12 Ricoh Co Ltd 組立ロボット
CN103429400A (zh) * 2011-03-16 2013-12-04 菲尔罗伯蒂克斯顺从式机器人技术有限公司 接触作业的主动操作装置和方法
JP2018183853A (ja) * 2017-04-27 2018-11-22 住友理工株式会社 接触検出装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214253A (ja) * 1984-04-10 1985-10-26 Mitsubishi Heavy Ind Ltd 水中検査装置
GB2226970B (en) 1989-01-11 1992-10-21 British Aerospace Methods of manufacture and surface treatment using laser radiation
JPH05272922A (ja) * 1992-01-29 1993-10-22 Mitsubishi Electric Corp 視覚センサ装置
EP0776264A1 (en) * 1995-05-19 1997-06-04 Waterjet Systems, Inc. Mobile robotic system
DE19636458C1 (de) * 1996-09-07 1998-04-02 Schweistechnische Lehr Und Ver Manuell zu positionierende und zu betätigende Einrichtung zum Laserstrahlschweißen
JP2003048183A (ja) 2001-08-03 2003-02-18 Mitsubishi Heavy Ind Ltd 作業装置システム、および、発掘方法
US7363180B2 (en) * 2005-02-15 2008-04-22 Electro Scientific Industries, Inc. Method for correcting systematic errors in a laser processing system
DE102009021608B4 (de) * 2009-05-15 2015-10-15 Airbus Operations Gmbh Einrichtung und Verfahren zum Lackieren gekrümmter Außenoberflächen eines Luftfahrzeuges
JP2011194476A (ja) * 2010-03-17 2011-10-06 Toyota Auto Body Co Ltd レーザー加工表示装置及びこれを用いたロボットの教示方法
JP6244017B2 (ja) 2014-04-23 2017-12-06 国立研究開発法人科学技術振興機構 ブレード複合型開放流路装置およびその接合体
US9839986B2 (en) * 2014-11-06 2017-12-12 The Boeing Company Performing surface treatments using an automated guided vehicle
GB2536434A (en) * 2015-03-16 2016-09-21 Sony Corp A cutting device, cutting equipment and method
JP6386501B2 (ja) * 2016-08-12 2018-09-05 ファナック株式会社 レーザ加工ロボットシステム及びレーザ加工方法
US10596700B2 (en) * 2016-09-16 2020-03-24 Carbon Robotics, Inc. System and calibration, registration, and training methods
KR101789673B1 (ko) * 2016-10-31 2017-11-20 한국생산기술연구원 로봇 가공부하 진동 저감장치 및 이를 이용한 진동 저감방법
EP4730068A2 (en) * 2017-01-17 2026-04-22 Graco Minnesota Inc. Unmanned aerial vehicle for painting structures
JP6464213B2 (ja) * 2017-02-09 2019-02-06 ファナック株式会社 レーザ加工ヘッドおよび撮影装置を備えるレーザ加工システム
JP2018167334A (ja) 2017-03-29 2018-11-01 セイコーエプソン株式会社 教示装置および教示方法
DE102017206968B4 (de) * 2017-04-26 2019-10-10 4Jet Microtech Gmbh & Co. Kg Verfahren und Vorrichtung zum Herstellen von Riblets
JP7145851B2 (ja) * 2017-06-13 2022-10-03 川崎重工業株式会社 作業システム
CN107962591B (zh) * 2017-11-23 2021-05-07 哈尔滨工业大学 一种用于柔性机器人关节上能测力矩的被动减振弹性元件
JP6678154B2 (ja) * 2017-12-05 2020-04-08 株式会社大気社 大型物体用の表面処理システム

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04197589A (ja) * 1990-11-28 1992-07-17 Amada Co Ltd レーザパンチプレス、当該パンチプレスに用いるレーザ加工ヘッドユニット、レーザ加工ヘッドユニットとレーザ発振器とを接続する接続装置及びレーザ光路調整時に用いられるビーム検出装置
JPH0831162A (ja) * 1994-07-14 1996-02-02 Mitsubishi Electric Corp ディスク装置
JPH106092A (ja) * 1996-04-19 1998-01-13 Amada Co Ltd レーザ・パンチ複合加工機の光学装置の防振装置
JPH09327781A (ja) * 1996-06-12 1997-12-22 Ishikawajima Harima Heavy Ind Co Ltd レーザ光照射ヘッド位置決め装置
JPH11309593A (ja) * 1998-04-22 1999-11-09 Tdk Corp レーザ位置決め加工方法及び装置
JP2000176760A (ja) * 1998-12-16 2000-06-27 Amada Eng Center Co Ltd レーザ・パンチ複合加工機
JP2002239856A (ja) * 2001-02-16 2002-08-28 Amada Eng Center Co Ltd 防振装置およびこの防振装置を用いたパンチ・レーザ複合加工機
JP2003071760A (ja) * 2001-08-31 2003-03-12 Ricoh Co Ltd 組立ロボット
CN103429400A (zh) * 2011-03-16 2013-12-04 菲尔罗伯蒂克斯顺从式机器人技术有限公司 接触作业的主动操作装置和方法
US20140005831A1 (en) * 2011-03-16 2014-01-02 Ferrobotics Compliant Robot Technology Gmbh Active handling apparatus and method for contact tasks
JP2018183853A (ja) * 2017-04-27 2018-11-22 住友理工株式会社 接触検出装置

Also Published As

Publication number Publication date
WO2020208808A1 (ja) 2020-10-15
EP4477349A3 (en) 2025-10-15
JP2025081529A (ja) 2025-05-27
US20220281104A1 (en) 2022-09-08
JP2023116669A (ja) 2023-08-22
EP3954493A4 (en) 2023-01-04
JPWO2020208808A1 (https=) 2020-10-15
EP3954493A1 (en) 2022-02-16
EP3954493B1 (en) 2024-12-04
TW202042987A (zh) 2020-12-01
JP7639851B2 (ja) 2025-03-05
JP7298681B2 (ja) 2023-06-27
EP4477349A2 (en) 2024-12-18

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