JP7293360B2 - パッケージング基板及びこれを含む半導体装置 - Google Patents
パッケージング基板及びこれを含む半導体装置 Download PDFInfo
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- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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Description
30:半導体素子部 32:第1半導体素子
34:第2半導体素子 36:第3半導体素子
20:パッケージング基板 22:コア層
223:コア絶縁層 21、21a:ガラス基板
213:第1面 214:第2面
23:コアビア 233:第1開口部
234:第2開口部 235:最小内径部
24:コア分配層 241:コア分配パターン
241a:第1面分配パターン 241b:コアビア分配パターン
241c:第2面分配パターン 26:上部層
25:上部分配層 251:上部分配パターン
252:ブラインドビア 253:上部絶縁層
27:上面接続層 271:上面接続電極
272:上面連結パターン 29:下部層
291:下部分配層 291a:下部分配パターン
291b:下部絶縁層 292:下面接続層
292a:下面接続電極 292b:下面連結パターン
50:連結部 51:素子連結部
52:ボード連結部 60:カバー層
21b:ガラス欠陥 21c:シード層、プライマー層
21d:コア分配層 21e:コア分配層のエッチング層
23a:絶縁層 23b:絶縁層のエッチング層
23c:電気伝導性層 23d:電気伝導性層のエッチング層
23e:絶縁層 23f:絶縁層のエッチング層
23g:電気伝導性層 23h:電気伝導性層のエッチング層
Claims (5)
- 1以上の半導体素子が位置する半導体素子部;前記半導体素子と電気的に連結されるパッケージング基板;及び前記パッケージング基板と電気的に連結され、前記半導体素子に外部の電気的信号を伝達し、前記半導体素子を互いに連結するマザーボード;を含み、
前記パッケージング基板は、コア層、及び前記コア層上に位置する上部層を含み、
前記コア層は、ガラス基板及びコアビアを含み、
前記ガラス基板は、互いに向かい合う第1面及び第2面を有し、
前記コアビアは、前記ガラス基板を厚さ方向に貫通するものであって、多数個配置され、
前記コア層は、前記ガラス基板又はコアビアの表面上に位置するコア分配層を含み、
前記コア分配層は、少なくともその一部が前記コアビアを介して前記第1面上の電気伝導性層と前記第2面上の電気伝導性層とを電気的に連結し、
前記コア分配層は、前記ガラス基板の第1面と第2面とを前記コアビアを介して電気的に連結する電気伝導性層であるコア分配パターンと、前記コア分配パターンを覆うコア絶縁層とを含み、
前記コア絶縁層は、平均直径が1nm~約100nmの粒子型フィラーを含み、
前記上部層は、前記第1面上に位置し、前記コア分配層と外部の半導体素子部とを電気的に連結する電気伝導性層を含み、
前記コア分配層の電気伝導性層のうち薄いものの厚さは、前記上部層の電気伝導性層のうち薄いものの幅と同じがそれより厚く、
前記コアビアは、前記第1面と接する第1開口部と、前記第2面と接する第2開口部と、前記第1開口部と前記第2開口部とを連結する全体のコアビアにおいてその内径が最も狭い区域である最小内径部を含み、
前記最小内径部での電気伝導性層の厚さは、前記上部層の電気伝導性層のうち薄いものの幅と同じかそれより厚い、半導体装置。 - 前記コア分配層の電気伝導性層のうち薄いものの厚さは、前記上部層の電気伝導性層のうち薄いものの幅を基準にして約1倍乃至約12倍厚い、請求項1に記載の半導体装置。
- 上部絶縁層及び上部分配パターンを含み、
前記上部絶縁層は、前記第1面上に位置する絶縁層で、
前記上部分配パターンは、前記コア分配層とその少なくとも一部が電気的に連結される電気伝導性層で、
前記上部分配パターンは、前記上部絶縁層に内蔵され、
前記上部分配パターンは、少なくともその一部に微細パターンを含み、
前記微細パターンは、幅が約4μm未満で、互いに隣り合う微細パターン間の間隔が約4μm未満であるものを含む、請求項1に記載の半導体装置。 - 第2面分配パターンは、前記第2面上に位置する電気伝導性層で、
前記第2面分配パターンのうち厚いものの幅は、前記上部層の電気伝導性層のうち薄いものの幅の約1倍乃至約20倍である、請求項1に記載の半導体装置。 - コア層、及び前記コア層上に位置する上部層を含み、
前記コア層は、ガラス基板及びコアビアを含み、
前記ガラス基板は、互いに向かい合う第1面及び第2面を有し、
前記コアビアは、前記ガラス基板を厚さ方向に貫通するものであって、多数個配置され、
前記コア層は、前記ガラス基板又はコアビアの表面上に位置するコア分配層を含み、
前記コア分配層は、少なくともその一部が前記コアビアを介して前記第1面上の電気伝導性層と前記第2面上の電気伝導性層とを電気的に連結し、
前記コア分配層は、前記ガラス基板の第1面と第2面とを前記コアビアを介して電気的に連結する電気伝導性層であるコア分配パターンと、前記コア分配パターンを覆うコア絶縁層とを含み、
前記コア絶縁層は、平均直径が1nm~約100nmの粒子型フィラーを含み、
前記上部層は、前記第1面上に位置し、前記コア分配層と外部の半導体素子部とを電気的に連結する電気伝導性層を含み、
前記コア分配層の電気伝導性層のうち薄いものの厚さは、前記上部層の電気伝導性層のうち薄いものの幅と同じかそれより厚く、
前記コアビアは、前記第1面と接する第1開口部と、前記第2面と接する第2開口部と、前記第1開口部と前記第2開口部とを連結する全体のコアビアにおいてその内径が最も狭い区域である最小内径部を含み、
前記最小内径部での電気伝導性層の厚さは、前記上部層の電気伝導性層のうち薄いものの幅と同じかそれより厚い、パッケージング基板。
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US62/814,949 | 2019-03-07 | ||
PCT/KR2020/003167 WO2020180145A1 (ko) | 2019-03-07 | 2020-03-06 | 패키징 기판 및 이를 포함하는 반도체 장치 |
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