JP7280198B2 - 高反射鏡のための銀コーティング積層体の反射帯域幅の拡大 - Google Patents
高反射鏡のための銀コーティング積層体の反射帯域幅の拡大 Download PDFInfo
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- JP7280198B2 JP7280198B2 JP2019569377A JP2019569377A JP7280198B2 JP 7280198 B2 JP7280198 B2 JP 7280198B2 JP 2019569377 A JP2019569377 A JP 2019569377A JP 2019569377 A JP2019569377 A JP 2019569377A JP 7280198 B2 JP7280198 B2 JP 7280198B2
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- 229910052709 silver Inorganic materials 0.000 title description 77
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title description 63
- 239000004332 silver Substances 0.000 title description 63
- 239000010410 layer Substances 0.000 claims description 506
- 239000000463 material Substances 0.000 claims description 141
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- 239000000758 substrate Substances 0.000 claims description 60
- 238000005496 tempering Methods 0.000 claims description 55
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- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 35
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 32
- 238000005260 corrosion Methods 0.000 claims description 23
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- 238000000034 method Methods 0.000 description 50
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 40
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- 239000002184 metal Substances 0.000 description 33
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 22
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- 239000010936 titanium Substances 0.000 description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 7
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
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- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
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- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 238000009499 grossing Methods 0.000 description 1
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- 239000011777 magnesium Substances 0.000 description 1
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- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 239000010955 niobium Substances 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- JHYILIUWFVFNFI-UHFFFAOYSA-M oxygen(2-) ytterbium(3+) fluoride Chemical compound [O--].[F-].[Yb+3] JHYILIUWFVFNFI-UHFFFAOYSA-M 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- FSJWWSXPIWGYKC-UHFFFAOYSA-M silver;silver;sulfanide Chemical compound [SH-].[Ag].[Ag+] FSJWWSXPIWGYKC-UHFFFAOYSA-M 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
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- 238000000427 thin-film deposition Methods 0.000 description 1
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- 238000007740 vapor deposition Methods 0.000 description 1
- XASAPYQVQBKMIN-UHFFFAOYSA-K ytterbium(iii) fluoride Chemical compound F[Yb](F)F XASAPYQVQBKMIN-UHFFFAOYSA-K 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0875—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising two or more metallic layers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762520833P | 2017-06-16 | 2017-06-16 | |
| US62/520,833 | 2017-06-16 | ||
| PCT/US2018/037609 WO2018232162A1 (en) | 2017-06-16 | 2018-06-14 | Extending the reflection bandwidth of silver coating stacks for highly reflective mirrors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020523642A JP2020523642A (ja) | 2020-08-06 |
| JP2020523642A5 JP2020523642A5 (enExample) | 2021-07-26 |
| JP7280198B2 true JP7280198B2 (ja) | 2023-05-23 |
Family
ID=62817099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019569377A Active JP7280198B2 (ja) | 2017-06-16 | 2018-06-14 | 高反射鏡のための銀コーティング積層体の反射帯域幅の拡大 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11143800B2 (enExample) |
| EP (1) | EP3639069B1 (enExample) |
| JP (1) | JP7280198B2 (enExample) |
| WO (1) | WO2018232162A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018075881A1 (en) * | 2016-10-21 | 2018-04-26 | Gentex Corporation | Antireflection coatings |
| CN110221368B (zh) * | 2019-05-31 | 2020-11-17 | 西安工业大学 | 单元素多层红外高反膜及其制备方法 |
| EP3771930A1 (en) * | 2019-07-31 | 2021-02-03 | Ningbo Radi-Cool Advanced Energy Technologies Co., Ltd. | Solar reflecting film and preparation method thereof |
| AU2020210219B2 (en) * | 2019-07-31 | 2022-04-07 | Ningbo Radi-Cool Advanced Energy Technologies Co., Ltd. | Solar reflecting film and preparation method thereof |
| JP7567797B2 (ja) * | 2019-09-13 | 2024-10-16 | 株式会社レゾナック | 積層体およびその製造方法 |
| CN111733390A (zh) * | 2019-12-30 | 2020-10-02 | 宁波瑞凌新能源科技有限公司 | 一种用于双反射层膜中的复合阻隔材料及其应用 |
| CN111312069A (zh) * | 2020-04-03 | 2020-06-19 | 武汉华星光电技术有限公司 | 一种背光板、其制备方法以及背光模组 |
| EP4166998A4 (en) * | 2020-06-12 | 2024-09-04 | Nitto Denko Corporation | MIRROR EFFECT FILM LAMINATE, AND MIRROR ELEMENT |
| CN113151783B (zh) * | 2021-03-02 | 2022-04-19 | 中国电器科学研究院股份有限公司 | 一种组合型反射膜及其制备方法 |
| JP7703214B2 (ja) * | 2021-08-23 | 2025-07-07 | 東海光学株式会社 | 青色レーザー光用ミラーの製造方法 |
| CN117991427B (zh) * | 2024-03-13 | 2024-08-09 | 同济大学 | 一种低损耗、高反射率的193nm薄膜及其制备方法 |
| CN119101885A (zh) * | 2024-08-01 | 2024-12-10 | 深圳市原速光电科技有限公司 | 镀膜件及其制备方法 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006010930A (ja) | 2003-06-27 | 2006-01-12 | Asahi Glass Co Ltd | 高反射鏡 |
| US20060141272A1 (en) | 2004-11-23 | 2006-06-29 | The Regents Of The University Of California | Durable silver mirror with ultra-violet thru far infra-red reflection |
| CN101806927A (zh) | 2010-02-25 | 2010-08-18 | 海洋王照明科技股份有限公司 | 一种高反膜及其制备方法 |
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| JP2006010930A (ja) | 2003-06-27 | 2006-01-12 | Asahi Glass Co Ltd | 高反射鏡 |
| US20060141272A1 (en) | 2004-11-23 | 2006-06-29 | The Regents Of The University Of California | Durable silver mirror with ultra-violet thru far infra-red reflection |
| CN101806927A (zh) | 2010-02-25 | 2010-08-18 | 海洋王照明科技股份有限公司 | 一种高反膜及其制备方法 |
| JP2012198330A (ja) | 2011-03-18 | 2012-10-18 | Fujifilm Corp | 光学部材及びその製造方法 |
| US20170139085A1 (en) | 2014-06-20 | 2017-05-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Optical Element Comprising a Reflective Coating |
| WO2016054126A1 (en) | 2014-10-03 | 2016-04-07 | Corning Incorporated | Mirror substrates with highly finishable corrosion-resistant coating |
| WO2016066562A1 (de) | 2014-10-27 | 2016-05-06 | Almeco Gmbh | Temperatur- und korrosionsstabiler oberflächenreflektor |
| DE102015103494A1 (de) | 2015-03-10 | 2016-09-15 | Friedrich-Schiller-Universität Jena | Verfahren zur Herstellung eines Reflektorelements und Reflektorelement |
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| US20180364402A1 (en) | 2018-12-20 |
| US11143800B2 (en) | 2021-10-12 |
| WO2018232162A1 (en) | 2018-12-20 |
| EP3639069A1 (en) | 2020-04-22 |
| EP3639069B1 (en) | 2024-10-23 |
| WO2018232162A8 (en) | 2019-06-27 |
| JP2020523642A (ja) | 2020-08-06 |
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