JP7278676B1 - 薄膜型減光フィルタ及びその製造方法 - Google Patents
薄膜型減光フィルタ及びその製造方法 Download PDFInfo
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- JP7278676B1 JP7278676B1 JP2023510375A JP2023510375A JP7278676B1 JP 7278676 B1 JP7278676 B1 JP 7278676B1 JP 2023510375 A JP2023510375 A JP 2023510375A JP 2023510375 A JP2023510375 A JP 2023510375A JP 7278676 B1 JP7278676 B1 JP 7278676B1
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- iron oxide
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- 230000007935 neutral effect Effects 0.000 title claims abstract description 63
- 239000010409 thin film Substances 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims abstract description 72
- 239000010408 film Substances 0.000 claims abstract description 57
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 35
- 230000008033 biological extinction Effects 0.000 claims abstract description 34
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 12
- 229910052742 iron Inorganic materials 0.000 claims abstract description 8
- 230000003647 oxidation Effects 0.000 claims abstract description 7
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 18
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 230000031700 light absorption Effects 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 169
- 238000002834 transmittance Methods 0.000 description 45
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 44
- 230000007613 environmental effect Effects 0.000 description 28
- 239000000463 material Substances 0.000 description 23
- 230000003287 optical effect Effects 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910015189 FeOx Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
- 230000005274 electronic transitions Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004697 Polyetherimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical class O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
- Optical Filters (AREA)
Abstract
Description
発明者は、真空蒸着作業中の酸素ガス流量のわずかな変化によって酸化鉄の成分が変化し、その結果酸化鉄層の光学特性が大きく変化するという新たな知見を得た。
Claims (7)
- 一または複数の酸化鉄層及び一または複数の、該一または複数の酸化鉄層よりも低い屈折率を有する低屈折率層を含む多層膜を備えた薄膜型減光フィルタであって、該多層膜において各酸化鉄層及び各低屈折率層は交互に積層され、各酸化鉄層の鉄原子の数に対する酸素原子数の比が4/3以上で3/2よりも小さく、各酸化鉄層の消衰係数は700-2000ナノメータの波長範囲のいずれかの波長の光に対して0.1以上である薄膜型減光フィルタ。
- 700-2000ナノメータの波長範囲のいずれかの波長の光に対して複数の酸化鉄層の消衰係数の最大値と最小値との差が0.1以上である請求項1に記載の薄膜型減光フィルタ。
- 該酸化鉄層の厚さの合計値は500ナノメータよりも小さい請求項1に記載の薄膜型減光フィルタ。
- 該多層膜がプラスチック基板上に備わる請求項1に記載の薄膜型減光フィルタ。
- 一または複数の酸化鉄層及び一または複数の、該一または複数の酸化鉄層よりも低い屈折率を有する低屈折率層を含む多層膜を備えた薄膜型減光フィルタの製造方法であって、基板上に鉄原子の数に対する酸素原子数の比が4/3以上で3/2よりも小さい酸化鉄層及び低屈折率層を交互に積層するステップを含み、該多層膜は、各酸化鉄層の消衰係数は700-2000ナノメータの波長範囲のいずれかの波長の光に対して0.1以上となるように形成され、各酸化鉄層の鉄原子の数に対する酸素原子数の比及び酸化鉄層の厚さの合計値によって該多層膜の光線の吸収を調節する薄膜型減光フィルタの製造方法。
- 700-2000ナノメータの波長範囲のいずれかの波長の光に対して複数の酸化鉄層の消衰係数の最大値と最小値との差が0.1以上となるように該多層膜を形成する請求項5に記載の薄膜型減光フィルタの製造方法。
- 該多層膜を真空蒸着法またはスパッタリングによって形成する請求項5に記載の薄膜型減光フィルタの製造方法。
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PCT/JP2022/024675 WO2023248334A1 (ja) | 2022-06-21 | 2022-06-21 | 薄膜型減光フィルタ及びその製造方法 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010191471A (ja) * | 2010-05-26 | 2010-09-02 | Hitachi Maxell Ltd | 光学フィルタ |
WO2013024531A1 (ja) * | 2011-08-16 | 2013-02-21 | ナルックス株式会社 | 薄膜型光吸収膜 |
JP2017188415A (ja) * | 2016-03-31 | 2017-10-12 | 東芝ライテック株式会社 | ハロゲンランプ |
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- 2022-06-21 JP JP2023510375A patent/JP7278676B1/ja active Active
- 2022-06-21 WO PCT/JP2022/024675 patent/WO2023248334A1/ja unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010191471A (ja) * | 2010-05-26 | 2010-09-02 | Hitachi Maxell Ltd | 光学フィルタ |
WO2013024531A1 (ja) * | 2011-08-16 | 2013-02-21 | ナルックス株式会社 | 薄膜型光吸収膜 |
JP2017188415A (ja) * | 2016-03-31 | 2017-10-12 | 東芝ライテック株式会社 | ハロゲンランプ |
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