JP7268991B2 - 拡大観察装置 - Google Patents

拡大観察装置 Download PDF

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Publication number
JP7268991B2
JP7268991B2 JP2018223947A JP2018223947A JP7268991B2 JP 7268991 B2 JP7268991 B2 JP 7268991B2 JP 2018223947 A JP2018223947 A JP 2018223947A JP 2018223947 A JP2018223947 A JP 2018223947A JP 7268991 B2 JP7268991 B2 JP 7268991B2
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Prior art keywords
image
unit
unevenness
illumination
focus
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JP2018223947A
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Japanese (ja)
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JP2020086293A (ja
JP2020086293A5 (https=
Inventor
隼人 大庭
宇範 康
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Keyence Corp
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Keyence Corp
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Priority to JP2018223947A priority Critical patent/JP7268991B2/ja
Priority to US16/595,551 priority patent/US10890747B2/en
Priority to DE102019217878.2A priority patent/DE102019217878A1/de
Publication of JP2020086293A publication Critical patent/JP2020086293A/ja
Publication of JP2020086293A5 publication Critical patent/JP2020086293A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G02B21/084—Condensers for incident illumination only having annular illumination around the objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/368—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements details of associated display arrangements, e.g. mounting of LCD monitor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2018223947A 2018-11-29 2018-11-29 拡大観察装置 Active JP7268991B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018223947A JP7268991B2 (ja) 2018-11-29 2018-11-29 拡大観察装置
US16/595,551 US10890747B2 (en) 2018-11-29 2019-10-08 Magnifying observation apparatus
DE102019217878.2A DE102019217878A1 (de) 2018-11-29 2019-11-20 VERGRÖßERNDE BEOBACHTUNGSVORRICHTUNG

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018223947A JP7268991B2 (ja) 2018-11-29 2018-11-29 拡大観察装置

Publications (3)

Publication Number Publication Date
JP2020086293A JP2020086293A (ja) 2020-06-04
JP2020086293A5 JP2020086293A5 (https=) 2021-10-21
JP7268991B2 true JP7268991B2 (ja) 2023-05-08

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ID=70681001

Family Applications (1)

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JP2018223947A Active JP7268991B2 (ja) 2018-11-29 2018-11-29 拡大観察装置

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US (1) US10890747B2 (https=)
JP (1) JP7268991B2 (https=)
DE (1) DE102019217878A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4184150A4 (en) * 2020-07-15 2024-01-17 Panasonic Intellectual Property Management Co., Ltd. IMAGING SYSTEM, INSPECTION SYSTEM, INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD AND PROGRAM THEREOF, AND IMAGING CONTROL METHOD AND PROGRAM THEREOF
US11184553B1 (en) * 2020-09-23 2021-11-23 Qualcomm Incorporated Image signal processing in multi-camera system
JP2022127535A (ja) 2021-02-19 2022-08-31 株式会社キーエンス 拡大観察装置、拡大画像観察方法、拡大画像観察プログラム及びコンピュータで読み取り可能な記録媒体並びに記憶した機器
JP7768680B2 (ja) * 2021-02-19 2025-11-12 株式会社キーエンス 拡大観察装置、拡大画像観察方法、拡大画像観察プログラム及びコンピュータで読み取り可能な記録媒体並びに記憶した機器
JP7780256B2 (ja) * 2021-02-19 2025-12-04 株式会社キーエンス 拡大観察装置、拡大画像観察方法、拡大画像観察プログラム及びコンピュータで読み取り可能な記録媒体並びに記憶した機器
DE102021105946A1 (de) 2021-03-11 2022-09-15 Asml Netherlands B.V. Messvorrichtung und Verfahren zur Rauheits- und/oder Defektmessung an einer Oberfläche
DE102022124523A1 (de) 2021-09-27 2023-03-30 Okuma Corporation System zur Messung einer dreidimensionalen Form und Werkzeugmaschinensystem
JP2024064354A (ja) 2022-10-28 2024-05-14 株式会社キーエンス 拡大観察装置、拡大観察方法、拡大観察プログラムおよび記録媒体

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015083975A (ja) 2013-10-25 2015-04-30 ゲルハルト シューベルト ゲーエムベーハーＧｅｒｈａｒｄ Ｓｃｈｕｂｅｒｔ ＧｍｂＨ 走行面上の複数の製品の位置と三次元的な形状を非接触で検出する方法およびスキャナ
JP2016063522A (ja) 2014-09-22 2016-04-25 カシオ計算機株式会社 画像処理装置、および方法、ならびにプログラム
WO2016158780A1 (ja) 2015-03-31 2016-10-06 オリンパス株式会社 観察装置および観察方法
WO2018037604A1 (ja) 2016-08-26 2018-03-01 パナソニックＩｐマネジメント株式会社 画像処理システム及び画像処理方法
JP2018066967A (ja) 2016-10-21 2018-04-26 株式会社キーエンス 拡大観察装置および拡大観察装置の制御方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4357355B2 (ja) * 2004-05-07 2009-11-04 株式会社日立ハイテクノロジーズ パターン検査方法及びその装置
JP6266302B2 (ja) * 2013-10-25 2018-01-24 株式会社キーエンス 顕微鏡撮像装置、顕微鏡撮像方法および顕微鏡撮像プログラム
JP6290651B2 (ja) * 2014-02-27 2018-03-07 株式会社キーエンス 画像測定器
US10725279B2 (en) * 2016-04-08 2020-07-28 Arizona Board Of Regents On Behalf Of The University Of Arizona Systems and methods for extended depth-of-field microscopy
JP6667393B2 (ja) 2016-07-22 2020-03-18 株式会社キーエンス 拡大観察装置
JP7029763B2 (ja) 2017-03-27 2022-03-04 株式会社サンセイアールアンドディ 遊技機

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015083975A (ja) 2013-10-25 2015-04-30 ゲルハルト シューベルト ゲーエムベーハーＧｅｒｈａｒｄ Ｓｃｈｕｂｅｒｔ ＧｍｂＨ 走行面上の複数の製品の位置と三次元的な形状を非接触で検出する方法およびスキャナ
JP2016063522A (ja) 2014-09-22 2016-04-25 カシオ計算機株式会社 画像処理装置、および方法、ならびにプログラム
WO2016158780A1 (ja) 2015-03-31 2016-10-06 オリンパス株式会社 観察装置および観察方法
WO2018037604A1 (ja) 2016-08-26 2018-03-01 パナソニックＩｐマネジメント株式会社 画像処理システム及び画像処理方法
JP2018066967A (ja) 2016-10-21 2018-04-26 株式会社キーエンス 拡大観察装置および拡大観察装置の制御方法

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Publication number Publication date
US10890747B2 (en) 2021-01-12
DE102019217878A1 (de) 2020-06-04
US20200174240A1 (en) 2020-06-04
JP2020086293A (ja) 2020-06-04

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