JP7264134B2 - 分光分析装置、光学系、及び方法 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
- G01N2021/3155—Measuring in two spectral ranges, e.g. UV and visible
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
2 光導波路
2b、2d 反射面
2a、2c 表面
3 金属薄膜(膜)
4 プリズム
5 フィルタ
10 第1照射部
20 第1検出部
30 第2照射部
31 広帯域光源
32 導光部品
33 光平行化部品
40 第2検出部
41 集光部品
42 導光部品
43 検出器
50 記憶部
60 入力部
70 出力部
80 制御部
L1 第1照射光
L2 第1測定光
L3 第2照射光
L4 第2測定光
S 試料
θ1、θ2 角度
Claims (10)
- 分光分析の対象となる試料が接触する膜と、
前記膜の界面に付着した、有機物を含む付着物が分解する遷移エネルギーを有する第1照射光を照射する第1照射部と、
前記第1照射部から照射された前記第1照射光を伝搬させる光導波路と、
前記試料の領域にしみ出す第2エバネッセント波を発生させる第2照射光を前記膜に照射する第2照射部と、
前記第2照射部によって照射された前記第2照射光に基づく第2測定光であって、前記試料の吸収スペクトルの第2情報を含む前記第2測定光を検出する第2検出部と、
前記第2照射光及び前記第2測定光が透過するプリズムと、
を備え、
前記光導波路の表面において、前記付着物の付着領域にしみ出す前記第1照射光に基づく第1エバネッセント波が発生する、
分光分析装置。 - 前記光導波路は、前記光導波路に入射した前記第1照射光が前記光導波路内で全反射しながら伝搬するように全反射する反射面を有する、
請求項1に記載の分光分析装置。 - 前記第1照射部によって照射された前記第1照射光に基づく、前記光導波路から出射する第1測定光であって、前記付着物の吸収スペクトルの第1情報を含む前記第1測定光を検出する第1検出部を備える、
請求項1又は2に記載の分光分析装置。 - 前記第1情報を前記第1検出部から取得する制御部を備え、
前記制御部は、
取得された前記第1情報に基づいて、前記吸収スペクトルのピークがスペクトル強度に関する閾値に達したか否かを判定し、
閾値に達したと判定すると、前記第1照射光の照射強度を前記第1照射部により変動させる、
請求項3に記載の分光分析装置。 - 前記制御部は、前記吸収スペクトルのピークが高くなることで前記閾値に達したと判定すると、前記第1照射光の照射強度を前記第1照射部により増大させる、
請求項4に記載の分光分析装置。 - 前記第1照射光及び前記第1測定光のそれぞれの波長帯域は紫外域に含まれる、
請求項3乃至5のいずれか1項に記載の分光分析装置。 - 前記プリズムと前記光導波路との間に配置され、前記第1照射光に対する透過率よりも前記第2照射光に対する透過率が高いフィルタを備える、
請求項1乃至6のいずれか1項に記載の分光分析装置。 - 前記第2照射光及び前記第2測定光のそれぞれの波長帯域は近赤外域に含まれる、
請求項7に記載の分光分析装置。 - 分光分析の対象となる試料が接触する膜と、
前記膜の界面に付着した、有機物を含む付着物が分解する遷移エネルギーを有する第1照射光を伝搬させる光導波路であって、前記光導波路の表面において、前記付着物の付着領域にしみ出す前記第1照射光に基づく第1エバネッセント波が発生する前記光導波路と、
前記光導波路に対して前記膜と反対側に配置され、前記試料の領域にしみ出して前記試料に吸収される第2エバネッセント波を発生させる第2照射光が透過するプリズムと、
を備える、
光学系。 - 分光分析の対象となる試料が接触する膜の界面に付着した、有機物を含む付着物が分解する遷移エネルギーを有する第1照射光を照射するステップと、
照射された前記第1照射光を光導波路に伝搬させ、かつ前記付着物の付着領域にしみ出す前記第1照射光に基づく第1エバネッセント波を前記光導波路の表面に発生させるステップと、
前記試料の領域にしみ出す第2エバネッセント波を発生させる第2照射光を、プリズムを透過させて前記膜に照射するステップと、
照射された前記第2照射光に基づく第2測定光であって、前記試料の吸収スペクトルの第2情報を含む前記第2測定光を、前記プリズムを透過させて検出するステップと、
を含む、
方法。
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JP2020142851A JP7264134B2 (ja) | 2020-08-26 | 2020-08-26 | 分光分析装置、光学系、及び方法 |
US17/406,653 US11940326B2 (en) | 2020-08-26 | 2021-08-19 | Spectroscopic analysis device, optical system, and method |
EP21193094.6A EP3961191B1 (en) | 2020-08-26 | 2021-08-25 | Spectroscopic analysis device, optical system, and spectroscopic method |
CN202110987862.8A CN114112947A (zh) | 2020-08-26 | 2021-08-26 | 光谱分析设备、光学系统及方法 |
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JP2014035311A (ja) | 2012-08-10 | 2014-02-24 | Shimadzu Corp | ガス濃度測定装置 |
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CN103376244A (zh) | 2012-04-18 | 2013-10-30 | 中国科学院电子学研究所 | 表面等离子体共振芯片及应用该芯片的传感器 |
JP2014035311A (ja) | 2012-08-10 | 2014-02-24 | Shimadzu Corp | ガス濃度測定装置 |
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EP3961191A1 (en) | 2022-03-02 |
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