JP7228209B2 - 濃度測定方法 - Google Patents
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Description
Maximum))の値は、より小さくなる。
式(1)において、I0は測定セルに入射する入射光の強度、Iは測定セル内のガス中を通過した光の強度、αはモル吸光係数(m2/mol)、Lは光路長(m)、CMはモル濃度(mol/m3)である。モル吸光係数αは物質によって決まる係数(ただし、ここでは、自然対数に対する吸光係数αを用いている)である。I/I0は、一般に透過率と呼ばれる。透過率I/I0が100%のときに吸光度Aλは0となり、透過率I/I0が0%のときに吸光度Aλは無限大となる。なお、式(1)における入射光強度I0については、測定セル1内に吸光性のガスが存在しないとき(例えば、紫外光を吸収しないガスが充満しているときや、真空に引かれているとき)に光検出器24によって検出された光の強度を入射光強度I0とみなしてよい。
式(2)において、Rは気体定数=0.0623(Torr・m3/K/mol)であり、Pは圧力(Torr)であり、Tは温度(K)である。また、式(2)のモル吸光係数αは、透過率の自然対数に対応する吸光係数αである。
また、式(3)を変形すると、以下の式(4)が得られる。
したがって、式(4)によれば、各測定値(ガス温度T、全圧Pt、および透過光強度I)に基づいて、測定光波長における測定ガス濃度(体積%)を演算により求めることが可能である。このようにすれば、ガス温度やガス圧力も考慮して混合ガス中における吸光ガスの濃度を求めることができる。なお、測定ガスの吸光係数αaは、既知濃度(例えば100%濃度)の測定ガスを流したときの測定値(T、Pt、I)から、式(3)または(4)に従って予め求めておくことができる。このようにして求められた吸光係数αaはメモリに格納されており、式(4)に基づいて未知濃度の測定ガスの濃度演算を行うときは、吸光係数αaをメモリから読み出して用いることができる。
ここで、Caceは、上記の式(4)より、Cace=(RT/αaceLPt)・ln(I0/I)で与えられる。
2 窓部
3 コリメータ
4 反射部材
5 圧力センサ
6 温度センサ
10 流体ユニット
11 光ファイバケーブル(入射用)
12 光ファイバケーブル(出射用)
20 電気ユニット
22 光源
23a、23b 発光素子
30 バンドパスフィルタ
24 光検出器
26 参照光検出器
28 処理回路
100 濃度測定装置
Claims (6)
- 光源および光検出器を有する電気ユニットと、ガスが流れる測定セルを有する流体ユニットと、前記光源から前記測定セルに入射したあと前記測定セルを通過した光の強度を前記光検出器で検出し、前記光検出器の出力に基づいて前記ガスの濃度を演算するように構成された処理回路とを有する濃度測定装置において行われる濃度測定方法であって、
前記測定セルに基準ガスを流すことにより前記光検出器を用いて前記基準ガスに関連付けて求められた基準吸光係数と、測定ガスに関連付けられた補正ファクタとを用いて、前記測定ガスの吸光係数を決定するステップと、
前記測定ガスの吸光係数を用いて、前記測定セル内を流れる測定ガスの濃度を求めるステップとを含み、
前記光源から発せられる光源光のピーク波長に対して、前記光源光の吸収による濃度測定を行う波長域における前記測定ガスの吸光ピーク波長が長いときは、前記光源光のピーク波長に対して前記波長域における吸光ピーク波長が長い第1の種の基準ガスについて求めた基準吸光係数を用いて前記測定ガスの吸光係数を決定し、一方で、
前記光源光のピーク波長に対して、前記光源光の吸収による濃度測定を行う波長域における前記測定ガスの吸光ピーク波長が短いときは、前記光源光のピーク波長に対して前記波長域における吸光ピーク波長が短い、前記第1の種とは異なる第2の種の基準ガスについて求めた基準吸光係数を用いて前記測定ガスの吸光係数を決定する、濃度測定方法。 - 前記光源から発せられる光は近紫外光であり、前記測定ガスおよび前記基準ガスは、前記近紫外光の吸収波長域において、300nmより長い吸光ピーク波長を有するガスである、請求項1に記載の濃度測定方法。
- 前記基準ガスは、アセトンガス、アセトアルデヒドガス、SO2ガス、Cl2ガス、または、NO2ガスのいずれかである、請求項1に記載の濃度測定方法。
- 前記濃度測定装置は、前記光源からの光を通過させるバンドパスフィルタを有し、半値幅が狭められた光を用いて濃度測定を行う、請求項1から3のいずれかに記載の濃度測定方法。
- 前記測定ガスの濃度を測定するときの光源光のピーク波長を測定するステップを含み、
光源光のピーク波長に対応付けられた複数の基準吸光係数を参照したうえで、前記測定された光源光のピーク波長に基づいて決定された基準吸光係数を用いて前記測定ガスの濃度を求める、請求項1から4のいずれかに記載の濃度測定方法。 - 前記測定ガスの濃度を測定するときのガス温度を測定するステップを含み、
測定セル内のガス温度に対応付けられた複数の基準吸光係数を参照したうえで、前記測定されたガス温度に基づいて決定された基準吸光係数を用いて前記測定ガスの濃度を求める、請求項1から5のいずれかに記載の濃度測定方法。
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JP2017129374A (ja) | 2016-01-18 | 2017-07-27 | 株式会社堀場製作所 | 分析装置、及び、分析方法 |
WO2020158506A1 (ja) | 2019-01-31 | 2020-08-06 | 株式会社フジキン | 濃度測定装置 |
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JPS62266440A (ja) * | 1986-05-14 | 1987-11-19 | Fujitsu Ltd | ガス検出装置 |
JPH08128955A (ja) * | 1994-09-27 | 1996-05-21 | Okitoronikusu Kk | ガス濃度計の検査方法およびガス濃度計 |
JP4472156B2 (ja) * | 2000-11-02 | 2010-06-02 | 中部電力株式会社 | ガス成分測定装置及び方法 |
DE102012007016B3 (de) * | 2012-04-05 | 2013-10-10 | Dräger Safety AG & Co. KGaA | Optischer Gassensor |
JP5885699B2 (ja) | 2013-05-09 | 2016-03-15 | 株式会社フジキン | 脆性破壊性光透過窓板の固定構造及びこれを用いた脆性破壊性光透過窓板の固定方法 |
KR20170103779A (ko) * | 2014-11-23 | 2017-09-13 | 가부시키가이샤 후지킨 | 광학적 가스 농도측정 방법 및 그 방법에 의한 가스 농도 모니터 방법 |
CN106062533A (zh) * | 2015-01-20 | 2016-10-26 | 株式会社东芝 | 呼气测量装置和呼气测量方法以及气室 |
KR102082172B1 (ko) | 2015-08-18 | 2020-02-27 | 가부시키가이샤 후지킨 | 농도 측정 장치 |
TW201719154A (zh) * | 2015-11-26 | 2017-06-01 | 財團法人工業技術研究院 | 光學感測模組 |
JP6643715B2 (ja) * | 2016-03-29 | 2020-02-12 | 東亜ディーケーケー株式会社 | オゾン測定装置 |
TWI592647B (zh) * | 2016-05-25 | 2017-07-21 | 熱映光電股份有限公司 | 氣體測量裝置及氣體濃度測量方法 |
JP6912766B2 (ja) * | 2016-07-29 | 2021-08-04 | 国立大学法人徳島大学 | 濃度測定装置 |
JP6786099B2 (ja) * | 2016-08-12 | 2020-11-18 | 株式会社フジキン | 濃度測定装置 |
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WO2020158506A1 (ja) | 2019-01-31 | 2020-08-06 | 株式会社フジキン | 濃度測定装置 |
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US20230124208A1 (en) | 2023-04-20 |
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