JP7209372B2 - 独立して圧力および流量を調節する電子顕微鏡試料ホルダーの流体取扱方法 - Google Patents
独立して圧力および流量を調節する電子顕微鏡試料ホルダーの流体取扱方法 Download PDFInfo
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- JP7209372B2 JP7209372B2 JP2020500071A JP2020500071A JP7209372B2 JP 7209372 B2 JP7209372 B2 JP 7209372B2 JP 2020500071 A JP2020500071 A JP 2020500071A JP 2020500071 A JP2020500071 A JP 2020500071A JP 7209372 B2 JP7209372 B2 JP 7209372B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Sampling And Sample Adjustment (AREA)
Description
Claims (12)
- 電子顕微鏡試料ホルダーを通る気体の流量を調節するためのシステムであって
気体を供給する圧力調節装置と、
前記圧力調節装置から前記電子顕微鏡試料ホルダーに気体を供給するための流入管路と、
前記電子顕微鏡試料ホルダーから気体を受け入れるための流出管路と、
前記流出管路内の気体の流量を計測する可変の漏出弁と、を備え、
前記気体は上流タンクと下流タンクとの間の圧力差により、前記圧力調節装置の前記上流タンクから前記電子顕微鏡試料ホルダーおよび前記可変の漏出弁を通って前記圧力調節装置の前記下流タンクに流れ、
前記上流タンクおよび前記下流タンクの少なくとも一方の圧力変化率に基づいて、前記気体の流量を計算する気体流量調節システム。 - 前記可変の漏出弁を前記電子顕微鏡試料ホルダーの近くに支持するためのブームをさらに備える、請求項1に記載の気体流量調節システム。
- 前記電子顕微鏡試料ホルダーに搭載入口弁をさらに備える、請求項1に記載の気体流量調節システム。
- 前記可変の漏出弁と前記圧力調節装置との間にインライン残留気体分析計(RGA)をさらに備える、請求項1に記載の気体流量調節システム。
- 前記可変の漏出弁は、前記RGAに直接取り付けられる、請求項4に記載の気体流量調節システム。
- 弁を備えた残留気体分析計(RGA)をさらに含み、
前記弁は、前記流出管路からの流出気体を前記圧力調節装置または前記RGAのどちらかに導くことを特徴とする請求項1に記載の気体流量調節システム。 - 直接残留気体分析計(RGA)をさらに含み、前記流出管路が前記RGAに直接つながる、請求項1に記載の気体流量調節システム。
- 前記上流タンクおよび前記下流タンク内の圧力は、気体に依存しない圧力計で測定される、請求項1に記載の気体流量調節システム。
- 前記上流タンクおよび前記下流タンクは、各々、固定された容量を有する、請求項1に記載の気体流量調節システム。
- ソフトウェア又はファームウェア制御部によって流量を計算する、請求項8または9に記載の気体流量調節システム。
- 前記可変の漏出弁は目標流量を達成するために、前記ソフトウェア又はファームウェア制御部によって調節される、請求項10に記載の気体流量調節システム。
- 前記システム内の最大の圧力降下は、前記可変の漏出弁を通じて生じる、請求項1に記載の気体流量調節システム。
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JP2022209976A JP2023030159A (ja) | 2017-07-06 | 2022-12-27 | 圧力調節装置 |
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US201762529195P | 2017-07-06 | 2017-07-06 | |
US62/529,195 | 2017-07-06 | ||
PCT/US2018/041048 WO2019010390A1 (en) | 2017-07-06 | 2018-07-06 | ELECTRONIC MICROSCOPE SAMPLE HOLDER FLUID MANAGEMENT WITH INDEPENDENT PRESSURE AND FLOW CONTROL |
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JP2022209976A Division JP2023030159A (ja) | 2017-07-06 | 2022-12-27 | 圧力調節装置 |
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JP2020526879A JP2020526879A (ja) | 2020-08-31 |
JP7209372B2 true JP7209372B2 (ja) | 2023-01-20 |
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JP2020500071A Active JP7209372B2 (ja) | 2017-07-06 | 2018-07-06 | 独立して圧力および流量を調節する電子顕微鏡試料ホルダーの流体取扱方法 |
JP2022209976A Pending JP2023030159A (ja) | 2017-07-06 | 2022-12-27 | 圧力調節装置 |
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US (2) | US11222765B2 (ja) |
EP (1) | EP3649529B1 (ja) |
JP (2) | JP7209372B2 (ja) |
WO (1) | WO2019010390A1 (ja) |
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KR102413749B1 (ko) * | 2020-08-13 | 2022-06-29 | 한국과학기술연구원 | 나노 인덴터를 위한 기체 교환 장치 및 이를 이용한 샘플 측정 방법 |
CN113624785A (zh) * | 2021-06-10 | 2021-11-09 | 中国科学院金属研究所 | 一种原位气体透射电子显微镜的常压流动供气系统 |
CN114397068B (zh) * | 2021-12-20 | 2023-10-20 | 北京无线电计量测试研究所 | 一种热力管线泄露监测方法和系统 |
Citations (4)
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JP2003308801A (ja) | 2002-04-15 | 2003-10-31 | National Institute Of Advanced Industrial & Technology | 電子ビーム装置 |
JP2011175809A (ja) | 2010-02-24 | 2011-09-08 | Hitachi High-Technologies Corp | 電子顕微鏡、および試料ホルダ |
JP2014026840A (ja) | 2012-07-27 | 2014-02-06 | Hitachi High-Technologies Corp | 電子顕微鏡および電子顕微鏡用試料保持装置 |
US20160033355A1 (en) | 2014-08-03 | 2016-02-04 | Protochips, Inc. | Method for safe control of gas delivery to an electron microscope sample holder |
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DE69229432T2 (de) * | 1991-10-24 | 2000-02-17 | Hitachi Ltd | Probenhalter für Elektronenmikroskop |
US9196457B2 (en) * | 2011-05-24 | 2015-11-24 | The Trustees Of The University Of Pennsylvania | Flow cells for electron microscope imaging with multiple flow streams |
EP2555221B1 (en) * | 2011-08-03 | 2013-07-24 | Fei Company | Method of studying a sample in an ETEM |
JP6364167B2 (ja) * | 2013-09-30 | 2018-07-25 | 株式会社日立ハイテクノロジーズ | 環境制御型荷電粒子観察システム |
JP6207344B2 (ja) * | 2013-10-30 | 2017-10-04 | 日本電子株式会社 | 荷電粒子線装置 |
WO2016047829A1 (ko) * | 2014-09-26 | 2016-03-31 | 한국기초과학지원연구원 | 기상 또는 액상에서의 시료관찰을 위한 전자현미경 홀더 |
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- 2018-07-06 EP EP18827985.5A patent/EP3649529B1/en active Active
- 2018-07-06 JP JP2020500071A patent/JP7209372B2/ja active Active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003308801A (ja) | 2002-04-15 | 2003-10-31 | National Institute Of Advanced Industrial & Technology | 電子ビーム装置 |
JP2011175809A (ja) | 2010-02-24 | 2011-09-08 | Hitachi High-Technologies Corp | 電子顕微鏡、および試料ホルダ |
JP2014026840A (ja) | 2012-07-27 | 2014-02-06 | Hitachi High-Technologies Corp | 電子顕微鏡および電子顕微鏡用試料保持装置 |
US20160033355A1 (en) | 2014-08-03 | 2016-02-04 | Protochips, Inc. | Method for safe control of gas delivery to an electron microscope sample holder |
Non-Patent Citations (1)
Title |
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M.Cem Akatay et al.,Gas mixing system for imaging of nanomaterials under dynamic environments by environmental transmission electron microscopy,REVIEW OF SCIENTIFIC INSTRUMENTS ,2014年,VOL.85,P.033704-1~033704-5 |
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EP3649529C0 (en) | 2023-12-06 |
US20200144020A1 (en) | 2020-05-07 |
EP3649529A1 (en) | 2020-05-13 |
EP3649529A4 (en) | 2021-04-07 |
US20220130637A1 (en) | 2022-04-28 |
WO2019010390A1 (en) | 2019-01-10 |
JP2020526879A (ja) | 2020-08-31 |
US11222765B2 (en) | 2022-01-11 |
JP2023030159A (ja) | 2023-03-07 |
EP3649529B1 (en) | 2023-12-06 |
US11869744B2 (en) | 2024-01-09 |
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