JP7198801B2 - 適合性コーティングを含む研磨物品及びそれによる研磨システム - Google Patents

適合性コーティングを含む研磨物品及びそれによる研磨システム Download PDF

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Publication number
JP7198801B2
JP7198801B2 JP2020500814A JP2020500814A JP7198801B2 JP 7198801 B2 JP7198801 B2 JP 7198801B2 JP 2020500814 A JP2020500814 A JP 2020500814A JP 2020500814 A JP2020500814 A JP 2020500814A JP 7198801 B2 JP7198801 B2 JP 7198801B2
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Japan
Prior art keywords
diamond
layer
abrasive article
conformable
polishing
Prior art date
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JP2020500814A
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English (en)
Japanese (ja)
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JP2020526406A (ja
JP2020526406A5 (enExample
Inventor
チェン，チ－ファン
ティー． ネルソン，カレブ
エム． デイヴィッド，モーゼズ
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2020526406A5 publication Critical patent/JP2020526406A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2020500814A 2017-07-11 2018-07-05 適合性コーティングを含む研磨物品及びそれによる研磨システム Active JP7198801B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762530976P 2017-07-11 2017-07-11
US62/530,976 2017-07-11
PCT/IB2018/054978 WO2019012389A1 (en) 2017-07-11 2018-07-05 ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS AND POLISHING SYSTEM MANUFACTURED THEREFROM

Publications (3)

Publication Number Publication Date
JP2020526406A JP2020526406A (ja) 2020-08-31
JP2020526406A5 JP2020526406A5 (enExample) 2021-08-12
JP7198801B2 true JP7198801B2 (ja) 2023-01-04

Family

ID=65001911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020500814A Active JP7198801B2 (ja) 2017-07-11 2018-07-05 適合性コーティングを含む研磨物品及びそれによる研磨システム

Country Status (5)

Country Link
US (1) US12043785B2 (enExample)
JP (1) JP7198801B2 (enExample)
CN (1) CN110914016A (enExample)
TW (1) TWI791028B (enExample)
WO (1) WO2019012389A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102712203B1 (ko) * 2019-07-24 2024-10-02 엠.씨.케이 (주) 연마제품 및 이의 제조방법
GB2590511B (en) * 2019-11-20 2023-10-25 Best Engineered Surface Tech Llc Hybrid CMP conditioning head
TWI859404B (zh) * 2020-01-30 2024-10-21 台灣積體電路製造股份有限公司 可攜式清潔裝置
US12370648B2 (en) 2020-01-30 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Surface clean system and method
EP4121249A1 (en) * 2020-03-18 2023-01-25 3M Innovative Properties Company Abrasive article
WO2021262602A1 (en) * 2020-06-26 2021-12-30 Applied Materials, Inc. Conditioner disk for use on soft or 3d printed pads during cmp
TWI772171B (zh) * 2021-09-08 2022-07-21 明志科技大學 化學機械研磨墊修整器的保護膜及保護膜疊層
EP4408615A4 (en) * 2021-09-29 2025-11-12 Entegris Inc BUFFER CONDITIONER WITH POLYMER SUPPORT PLATE
CN117464554A (zh) * 2022-07-20 2024-01-30 格科半导体(上海)有限公司 一种研磨垫修整装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003526010A (ja) 2000-03-05 2003-09-02 スリーエム イノベイティブ プロパティズ カンパニー ダイヤモンド状ガラス薄膜
JP2012528735A (ja) 2009-06-02 2012-11-15 サンーゴバン アブレイシブズ，インコーポレイティド 耐腐食性ｃｍｐコンディショニング工具並びにその作製および使用法
JP2017503670A (ja) 2014-01-24 2017-02-02 スリーエム イノベイティブ プロパティズ カンパニー 構造化表面を有する研磨材料

Family Cites Families (23)

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Publication number Priority date Publication date Assignee Title
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5352493A (en) 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
RU2124978C1 (ru) 1993-09-13 1999-01-20 Миннесота Майнинг Энд Мэнюфекчуринг Компани Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US5921856A (en) 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
JP2004303983A (ja) 2003-03-31 2004-10-28 Fuji Photo Film Co Ltd 研磨パッド
US7160178B2 (en) 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
EP1726682A1 (en) 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
KR101024674B1 (ko) 2007-12-28 2011-03-25 신한다이아몬드공업 주식회사 소수성 절삭공구 및 그제조방법
EP2259900A1 (en) 2008-03-10 2010-12-15 Morgan Advanced Ceramics, Inc. Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
EP2454052A4 (en) * 2009-07-16 2015-08-26 Saint Gobain Abrasives Inc ABRASIVE TOOL WITH FLAT AND COHERENT SURFACE TOPOGRAPHY FOR CONDITIONING A CHEMICAL MECHANICAL POLISHING PAD AND METHOD FOR MANUFACTURING THE SAME
SG11201407232YA (en) 2012-05-04 2014-12-30 Entegris Inc Cmp conditioner pads with superabrasive grit enhancement
EP2879836B1 (en) * 2012-08-02 2019-11-13 3M Innovative Properties Company Abrasive element with precisely shaped features, abrasive article fabricated therefrom and method of making thereof
SG11201500802TA (en) 2012-08-02 2015-04-29 3M Innovative Properties Co Abrasive articles with precisely shaped features and method of making thereof
WO2014141889A1 (ja) * 2013-03-12 2014-09-18 国立大学法人九州大学 研磨パッド及び研磨方法
WO2015153597A1 (en) 2014-04-03 2015-10-08 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same
WO2015164468A1 (en) 2014-04-24 2015-10-29 3M Innovative Properties Company Fluid control films with hydrophilic surfaces, methods of making same, and processes for cleaning structured surfaces
WO2019012391A1 (en) 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS, AND POLISHING SYSTEM MANUFACTURED THEREFROM
SG11202000246QA (en) 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003526010A (ja) 2000-03-05 2003-09-02 スリーエム イノベイティブ プロパティズ カンパニー ダイヤモンド状ガラス薄膜
JP2012528735A (ja) 2009-06-02 2012-11-15 サンーゴバン アブレイシブズ，インコーポレイティド 耐腐食性ｃｍｐコンディショニング工具並びにその作製および使用法
JP2017503670A (ja) 2014-01-24 2017-02-02 スリーエム イノベイティブ プロパティズ カンパニー 構造化表面を有する研磨材料

Also Published As

Publication number Publication date
TWI791028B (zh) 2023-02-01
JP2020526406A (ja) 2020-08-31
US12043785B2 (en) 2024-07-23
US20200172780A1 (en) 2020-06-04
CN110914016A (zh) 2020-03-24
WO2019012389A1 (en) 2019-01-17
TW201910055A (zh) 2019-03-16

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