CN110914016A - 包括可适形涂层的磨料制品和由其制成的抛光系统 - Google Patents

包括可适形涂层的磨料制品和由其制成的抛光系统 Download PDF

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Publication number
CN110914016A
CN110914016A CN201880046028.5A CN201880046028A CN110914016A CN 110914016 A CN110914016 A CN 110914016A CN 201880046028 A CN201880046028 A CN 201880046028A CN 110914016 A CN110914016 A CN 110914016A
Authority
CN
China
Prior art keywords
diamond
layer
abrasive
abrasive article
conformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201880046028.5A
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English (en)
Chinese (zh)
Inventor
陈季汎
凯莱布·T·纳尔逊
摩西·M·戴维
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN110914016A publication Critical patent/CN110914016A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
CN201880046028.5A 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统 Pending CN110914016A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762530976P 2017-07-11 2017-07-11
US62/530,976 2017-07-11
PCT/IB2018/054978 WO2019012389A1 (en) 2017-07-11 2018-07-05 ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS AND POLISHING SYSTEM MANUFACTURED THEREFROM

Publications (1)

Publication Number Publication Date
CN110914016A true CN110914016A (zh) 2020-03-24

Family

ID=65001911

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880046028.5A Pending CN110914016A (zh) 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统

Country Status (5)

Country Link
US (1) US12043785B2 (enExample)
JP (1) JP7198801B2 (enExample)
CN (1) CN110914016A (enExample)
TW (1) TWI791028B (enExample)
WO (1) WO2019012389A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117464554A (zh) * 2022-07-20 2024-01-30 格科半导体(上海)有限公司 一种研磨垫修整装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102712203B1 (ko) * 2019-07-24 2024-10-02 엠.씨.케이 (주) 연마제품 및 이의 제조방법
GB2590511B (en) * 2019-11-20 2023-10-25 Best Engineered Surface Tech Llc Hybrid CMP conditioning head
TWI859404B (zh) * 2020-01-30 2024-10-21 台灣積體電路製造股份有限公司 可攜式清潔裝置
US12370648B2 (en) 2020-01-30 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Surface clean system and method
WO2021186326A1 (en) * 2020-03-18 2021-09-23 3M Innovative Properties Company Abrasive article
WO2021262602A1 (en) * 2020-06-26 2021-12-30 Applied Materials, Inc. Conditioner disk for use on soft or 3d printed pads during cmp
TWI772171B (zh) * 2021-09-08 2022-07-21 明志科技大學 化學機械研磨墊修整器的保護膜及保護膜疊層
WO2023055663A1 (en) * 2021-09-29 2023-04-06 Entegris, Inc. Pad conditioner with polymer backing plate

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US20100330886A1 (en) * 2009-06-02 2010-12-30 Saint-Gobain Abrasives, Inc. Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same
CN102470505A (zh) * 2009-07-16 2012-05-23 圣戈班磨料磨具有限公司 用于修整cmp垫的具有平且一致平面形貌的研磨工具及制造方法
CN105102188A (zh) * 2013-03-12 2015-11-25 国立大学法人九州大学 研磨垫及研磨方法
US20170008143A1 (en) * 2014-01-24 2017-01-12 3M Innovative Properties Company Abrasive material having a structured surface

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US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5352493A (en) 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
WO1995007797A1 (en) 1993-09-13 1995-03-23 Minnesota Mining And Manufacturing Company Abrasive article, method of manufacture of same, method of using same for finishing, and a production tool
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US5921856A (en) 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
JP2004303983A (ja) 2003-03-31 2004-10-28 Fuji Photo Film Co Ltd 研磨パッド
US7160178B2 (en) 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
EP1726682A1 (en) 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
KR101024674B1 (ko) 2007-12-28 2011-03-25 신한다이아몬드공업 주식회사 소수성 절삭공구 및 그제조방법
KR20100133415A (ko) 2008-03-10 2010-12-21 모간 어드밴스드 세라믹스, 인코포레이티드 비평면 ｃｖｄ 다이아몬드 코팅된 ｃｍｐ ｐａｄ 컨디셔너 및 제조 방법
CN110328616A (zh) 2012-05-04 2019-10-15 恩特格里斯公司 具有超硬磨料增强的化学机械平坦化修整器衬垫
JP2015530265A (ja) 2012-08-02 2015-10-15 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法
SG11201500802TA (en) 2012-08-02 2015-04-29 3M Innovative Properties Co Abrasive articles with precisely shaped features and method of making thereof
EP3126093B1 (en) 2014-04-03 2022-08-17 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same
JP6611734B2 (ja) 2014-04-24 2019-11-27 スリーエム イノベイティブ プロパティズ カンパニー 親水性表面を有する流体制御フィルム、その作製方法、及び構造化表面を洗浄する方法
SG11202000246QA (en) 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom
WO2019012391A1 (en) 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS, AND POLISHING SYSTEM MANUFACTURED THEREFROM

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US20100330886A1 (en) * 2009-06-02 2010-12-30 Saint-Gobain Abrasives, Inc. Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same
CN102470505A (zh) * 2009-07-16 2012-05-23 圣戈班磨料磨具有限公司 用于修整cmp垫的具有平且一致平面形貌的研磨工具及制造方法
CN105102188A (zh) * 2013-03-12 2015-11-25 国立大学法人九州大学 研磨垫及研磨方法
US20170008143A1 (en) * 2014-01-24 2017-01-12 3M Innovative Properties Company Abrasive material having a structured surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117464554A (zh) * 2022-07-20 2024-01-30 格科半导体(上海)有限公司 一种研磨垫修整装置

Also Published As

Publication number Publication date
US12043785B2 (en) 2024-07-23
WO2019012389A1 (en) 2019-01-17
TW201910055A (zh) 2019-03-16
JP2020526406A (ja) 2020-08-31
US20200172780A1 (en) 2020-06-04
JP7198801B2 (ja) 2023-01-04
TWI791028B (zh) 2023-02-01

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