TWI791028B - 包括可適形塗層之磨料物品及來自其之拋光系統 - Google Patents

包括可適形塗層之磨料物品及來自其之拋光系統 Download PDF

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Publication number
TWI791028B
TWI791028B TW107123677A TW107123677A TWI791028B TW I791028 B TWI791028 B TW I791028B TW 107123677 A TW107123677 A TW 107123677A TW 107123677 A TW107123677 A TW 107123677A TW I791028 B TWI791028 B TW I791028B
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TW
Taiwan
Prior art keywords
diamond
layer
conformable
abrasive
hydrophobic
Prior art date
Application number
TW107123677A
Other languages
English (en)
Chinese (zh)
Other versions
TW201910055A (zh
Inventor
陳季汎
凱李伯 提摩西 尼爾森
摩西斯 米卡拉 大衛
Original Assignee
美商3M新設資產公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商3M新設資產公司 filed Critical 美商3M新設資產公司
Publication of TW201910055A publication Critical patent/TW201910055A/zh
Application granted granted Critical
Publication of TWI791028B publication Critical patent/TWI791028B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW107123677A 2017-07-11 2018-07-09 包括可適形塗層之磨料物品及來自其之拋光系統 TWI791028B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762530976P 2017-07-11 2017-07-11
US62/530,976 2017-07-11

Publications (2)

Publication Number Publication Date
TW201910055A TW201910055A (zh) 2019-03-16
TWI791028B true TWI791028B (zh) 2023-02-01

Family

ID=65001911

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107123677A TWI791028B (zh) 2017-07-11 2018-07-09 包括可適形塗層之磨料物品及來自其之拋光系統

Country Status (5)

Country Link
US (1) US12043785B2 (enExample)
JP (1) JP7198801B2 (enExample)
CN (1) CN110914016A (enExample)
TW (1) TWI791028B (enExample)
WO (1) WO2019012389A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102712203B1 (ko) * 2019-07-24 2024-10-02 엠.씨.케이 (주) 연마제품 및 이의 제조방법
GB2590511B (en) * 2019-11-20 2023-10-25 Best Engineered Surface Tech Llc Hybrid CMP conditioning head
TWI859404B (zh) * 2020-01-30 2024-10-21 台灣積體電路製造股份有限公司 可攜式清潔裝置
US12370648B2 (en) 2020-01-30 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Surface clean system and method
EP4121249A1 (en) * 2020-03-18 2023-01-25 3M Innovative Properties Company Abrasive article
WO2021262602A1 (en) * 2020-06-26 2021-12-30 Applied Materials, Inc. Conditioner disk for use on soft or 3d printed pads during cmp
TWI772171B (zh) * 2021-09-08 2022-07-21 明志科技大學 化學機械研磨墊修整器的保護膜及保護膜疊層
EP4408615A4 (en) * 2021-09-29 2025-11-12 Entegris Inc BUFFER CONDITIONER WITH POLYMER SUPPORT PLATE
CN117464554A (zh) * 2022-07-20 2024-01-30 格科半导体(上海)有限公司 一种研磨垫修整装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
EP1464444A1 (en) * 2003-03-31 2004-10-06 Fuji Photo Film Co., Ltd. Abrasive pad
US20100330886A1 (en) * 2009-06-02 2010-12-30 Saint-Gobain Abrasives, Inc. Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same
CN102470505A (zh) * 2009-07-16 2012-05-23 圣戈班磨料磨具有限公司 用于修整cmp垫的具有平且一致平面形貌的研磨工具及制造方法
WO2014022465A1 (en) * 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
WO2015153601A1 (en) * 2014-04-03 2015-10-08 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same
TW201538272A (zh) * 2014-01-24 2015-10-16 3M Innovative Properties Co 具有結構化表面之研磨材料
CN105102188A (zh) * 2013-03-12 2015-11-25 国立大学法人九州大学 研磨垫及研磨方法

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US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5352493A (en) 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
RU2124978C1 (ru) 1993-09-13 1999-01-20 Миннесота Майнинг Энд Мэнюфекчуринг Компани Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US5921856A (en) 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US7160178B2 (en) 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
EP1726682A1 (en) 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
KR101024674B1 (ko) 2007-12-28 2011-03-25 신한다이아몬드공업 주식회사 소수성 절삭공구 및 그제조방법
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SG11201407232YA (en) 2012-05-04 2014-12-30 Entegris Inc Cmp conditioner pads with superabrasive grit enhancement
EP2879836B1 (en) * 2012-08-02 2019-11-13 3M Innovative Properties Company Abrasive element with precisely shaped features, abrasive article fabricated therefrom and method of making thereof
WO2015164468A1 (en) 2014-04-24 2015-10-29 3M Innovative Properties Company Fluid control films with hydrophilic surfaces, methods of making same, and processes for cleaning structured surfaces
WO2019012391A1 (en) 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS, AND POLISHING SYSTEM MANUFACTURED THEREFROM
SG11202000246QA (en) 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
EP1464444A1 (en) * 2003-03-31 2004-10-06 Fuji Photo Film Co., Ltd. Abrasive pad
US20100330886A1 (en) * 2009-06-02 2010-12-30 Saint-Gobain Abrasives, Inc. Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same
CN102470505A (zh) * 2009-07-16 2012-05-23 圣戈班磨料磨具有限公司 用于修整cmp垫的具有平且一致平面形貌的研磨工具及制造方法
WO2014022465A1 (en) * 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
CN105102188A (zh) * 2013-03-12 2015-11-25 国立大学法人九州大学 研磨垫及研磨方法
TW201538272A (zh) * 2014-01-24 2015-10-16 3M Innovative Properties Co 具有結構化表面之研磨材料
US20170008143A1 (en) * 2014-01-24 2017-01-12 3M Innovative Properties Company Abrasive material having a structured surface
WO2015153601A1 (en) * 2014-04-03 2015-10-08 3M Innovative Properties Company Polishing pads and systems and methods of making and using the same

Also Published As

Publication number Publication date
JP2020526406A (ja) 2020-08-31
US12043785B2 (en) 2024-07-23
US20200172780A1 (en) 2020-06-04
CN110914016A (zh) 2020-03-24
WO2019012389A1 (en) 2019-01-17
JP7198801B2 (ja) 2023-01-04
TW201910055A (zh) 2019-03-16

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