JP7195427B2 - 改良されたウエハー状センサ - Google Patents
改良されたウエハー状センサ Download PDFInfo
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- JP7195427B2 JP7195427B2 JP2021526319A JP2021526319A JP7195427B2 JP 7195427 B2 JP7195427 B2 JP 7195427B2 JP 2021526319 A JP2021526319 A JP 2021526319A JP 2021526319 A JP2021526319 A JP 2021526319A JP 7195427 B2 JP7195427 B2 JP 7195427B2
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- 239000004065 semiconductor Substances 0.000 claims description 27
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- 238000000034 method Methods 0.000 claims description 19
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- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
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- 239000002245 particle Substances 0.000 description 6
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
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- 230000001681 protective effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
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- B32B17/10733—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the resin layer, i.e. interlayer containing epoxy
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- B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
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- B32B17/10807—Making laminated safety glass or glazing; Apparatus therefor
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
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- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Condensed Matter Physics & Semiconductors (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
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Description
Claims (19)
- ウエハー状半導体センサであって、
化学的硬化ガラスの複数の層で形成されたウエハー状基部、ここで、前記ウエハー状基部はその中に窪んだポケットを画定している、及び
前記ウエハー状基部の前記窪んだポケットに接合され且つセンサを含む電子モジュール、
を備えている、
上記ウエハー状半導体センサ。 - 前記複数の層は、前記化学的硬化ガラスが改善された真空吸着を提供するように、十分に平坦に形成される、請求項1に記載のウエハー状半導体センサ。
- 前記化学的硬化ガラスの複数の層の間に配置された材料の層をさらに備えている、請求項1に記載のウエハー状半導体センサ。
- 前記材料の層は、不透明コーティング部を含んでいる、請求項3に記載のウエハー状半導体センサ。
- 前記材料の層は、飛散防止フィルムを含んでいる、請求項3に記載のウエハー状半導体センサ。
- 前記化学的硬化ガラスは、無線(RF)妨害を低減する材料で形成される、請求項1に記載のウエハー状半導体センサ。
- ウエハー状基板であって、
化学的硬化ガラスで形成された環状上側層、
化学的硬化ガラスで形成された下側層、
を備え、
前記環状上側層は、前記下側層に化学的に接合されている、
上記ウエハー状基板。 - 前記環状上側層は、電子モジュールを配置するように構成された領域を画定する内周を有している、請求項7に記載のウエハー状基板。
- 前記環状上側層は、0.4mmの厚さを有する、請求項7に記載のウエハー状基板。
- 前記下側層は0.4mmの厚さを有する、請求項7に記載のウエハー状基板。
- 前記環状上側層と前記下側層との間に挟まれた不透明コーティング部をさらに備えている、請求項7に記載のウエハー状基板。
- 前記環状上側層と前記下側層との間に挟まれた飛散防止層をさらに備えている、請求項7に記載のウエハー状基板。
- 前記環状上側層の外周がSEMIノッチを有している、請求項7に記載のウエハー状基板。
- 前記下側層の外周がSEMIノッチを有している、請求項7に記載のウエハー状基板。
- 0.4mmの厚さを有する窪み部をさらに含んでいる、請求項7に記載のウエハー状基板。
- 前記環状上側層は、エポキシにより前記下側層に化学的に接合されている、請求項7に記載のウエハー状基板。
- ウエハー状センサの製造する方法であって、
化学的硬化基部ガラス層を準備すること、
化学的硬化環状上側ガラス層を準備すること、
窪んだポケットを有する化学的硬化ウエハー状基板を提供するように、前記化学的硬化基部ガラス層を前記化学的硬化環状上側ガラス層に接合すること、及び
前記窪んだポケット内に電子機器ハウジングを取り付けること、
を包含する
上記方法。 - 飛散防止層を、前記化学的硬化基部ガラス層及び前記化学的硬化環状上側ガラス層の少なくとも一方に付加すること、をさらに包含する、請求項17に記載の方法。
- 不透明コーティング部を、前記化学的硬化基部ガラス層及び前記化学的硬化環状上側ガラス層の少なくとも一方に塗布すること、をさらに包含する、請求項17に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862767251P | 2018-11-14 | 2018-11-14 | |
US62/767,251 | 2018-11-14 | ||
US16/678,278 US20200152494A1 (en) | 2018-11-14 | 2019-11-08 | Wafer-like sensor |
US16/678,278 | 2019-11-08 | ||
PCT/US2019/060905 WO2020102187A1 (en) | 2018-11-14 | 2019-11-12 | Improved wafer-like sensor |
Publications (2)
Publication Number | Publication Date |
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JP2022508112A JP2022508112A (ja) | 2022-01-19 |
JP7195427B2 true JP7195427B2 (ja) | 2022-12-23 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021526319A Active JP7195427B2 (ja) | 2018-11-14 | 2019-11-12 | 改良されたウエハー状センサ |
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US (1) | US20200152494A1 (ja) |
EP (1) | EP3881350A4 (ja) |
JP (1) | JP7195427B2 (ja) |
KR (1) | KR102616976B1 (ja) |
CN (1) | CN113016057B (ja) |
IL (1) | IL283082B1 (ja) |
SG (1) | SG11202104665XA (ja) |
TW (1) | TWI753321B (ja) |
WO (1) | WO2020102187A1 (ja) |
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US11373890B2 (en) * | 2018-12-17 | 2022-06-28 | Applied Materials, Inc. | Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing |
US11651982B2 (en) * | 2019-10-11 | 2023-05-16 | Winbond Electronics Corp. | Drying block structure and storage device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003247896A (ja) | 2002-02-26 | 2003-09-05 | Hayashi Denko Kk | 熱電対ウエハセンサ |
JP2011151399A (ja) | 2002-12-03 | 2011-08-04 | Kla-Tencor Corp | 統合化されたプロセス条件検知用ウェハおよびデータ解析システム |
JP2014017323A (ja) | 2012-07-06 | 2014-01-30 | Tokyo Electron Ltd | 計測用基板、基板処理装置及び基板処理装置の運転方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04318955A (ja) * | 1991-04-17 | 1992-11-10 | Asahi Glass Co Ltd | ダミーウェハー用ガラス基板 |
JP2534193Y2 (ja) * | 1991-06-28 | 1997-04-30 | 住友金属工業株式会社 | 温度測定装置 |
JP3250285B2 (ja) * | 1992-11-26 | 2002-01-28 | セイコーエプソン株式会社 | 情報計測手段を備えた被処理基板 |
JPH0945751A (ja) * | 1995-07-27 | 1997-02-14 | Sony Corp | プラズマ装置用ダミーウエハ |
JP3249911B2 (ja) * | 1996-01-08 | 2002-01-28 | 東京エレクトロン株式会社 | 温度測定装置、処理装置及び処理方法 |
JPH11307606A (ja) * | 1998-04-20 | 1999-11-05 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置の評価方法および評価装置 |
US7135852B2 (en) * | 2002-12-03 | 2006-11-14 | Sensarray Corporation | Integrated process condition sensing wafer and data analysis system |
KR20060123646A (ko) * | 2004-03-09 | 2006-12-01 | 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 | 무선 기판형 센서 |
JP5128080B2 (ja) * | 2006-03-29 | 2013-01-23 | 東京エレクトロン株式会社 | 基板処理装置の制御装置およびその制御方法 |
US7540188B2 (en) * | 2006-05-01 | 2009-06-02 | Lynn Karl Wiese | Process condition measuring device with shielding |
EP1860418A1 (en) * | 2006-05-23 | 2007-11-28 | Sensirion AG | A method for fabricating a pressure sensor using SOI wafers |
TWI480935B (zh) * | 2008-12-24 | 2015-04-11 | Nanchang O Film Optoelectronics Technology Ltd | 將玻璃黏著在影像感測器封裝體中之技術 |
US8859103B2 (en) * | 2010-11-05 | 2014-10-14 | Joseph Eugene Canale | Glass wafers for semiconductor fabrication processes and methods of making same |
US9134186B2 (en) * | 2011-02-03 | 2015-09-15 | Kla-Tencor Corporation | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces |
GB2487962B (en) * | 2011-02-11 | 2016-10-12 | M-Solv Ltd | Method for making a two-layer capacitive touch sensor panel |
US9317158B2 (en) * | 2011-03-08 | 2016-04-19 | Synaptics Incorporated | Baseline management for input devices |
EP2617690B1 (en) * | 2012-01-19 | 2017-11-22 | Corning Incorporated | Method of decorating chemically strengthened glass |
US9159687B2 (en) * | 2012-07-31 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Solder bump for ball grid array |
US20160082705A1 (en) * | 2013-04-22 | 2016-03-24 | Corning Incorporated | Laminated glass structures having high glass to polymer interlayer adhesion |
WO2014194077A2 (en) * | 2013-05-30 | 2014-12-04 | Kla-Tencor Corporation | Method and system for measuring heat flux |
DE102013019003A1 (de) * | 2013-11-13 | 2015-05-13 | Taiwan Glass Ind. Corp. | Alkali-Alumino-Silikatglas |
CN105293901A (zh) * | 2014-07-01 | 2016-02-03 | 科立视材料科技有限公司 | 化学强化碱铝硅酸盐玻璃用玻璃组合物及其制造方法 |
DE102015213075A1 (de) * | 2015-07-13 | 2017-01-19 | Schott Ag | Asymmetrisch aufgebaute, auf beiden Oberflächenseiten chemisch vorgespannte Dünnglasscheibe, Verfahren zu deren Herstellung sowie deren Verwendung |
CN108292662B (zh) * | 2015-12-03 | 2023-06-16 | 索尼半导体解决方案公司 | 半导体芯片和电子装置 |
EP3222964B1 (en) * | 2016-03-25 | 2020-01-15 | Fogale Nanotech | Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer |
US10460966B2 (en) * | 2016-06-15 | 2019-10-29 | Kla-Tencor Corporation | Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications |
KR102592054B1 (ko) * | 2016-12-23 | 2023-10-23 | 삼성전자주식회사 | 글래스 하우징을 포함하는 전자 장치 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003247896A (ja) | 2002-02-26 | 2003-09-05 | Hayashi Denko Kk | 熱電対ウエハセンサ |
JP2011151399A (ja) | 2002-12-03 | 2011-08-04 | Kla-Tencor Corp | 統合化されたプロセス条件検知用ウェハおよびデータ解析システム |
JP2014017323A (ja) | 2012-07-06 | 2014-01-30 | Tokyo Electron Ltd | 計測用基板、基板処理装置及び基板処理装置の運転方法 |
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KR102616976B1 (ko) | 2023-12-21 |
US20200152494A1 (en) | 2020-05-14 |
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KR20210066925A (ko) | 2021-06-07 |
CN113016057A (zh) | 2021-06-22 |
SG11202104665XA (en) | 2021-06-29 |
IL283082B1 (en) | 2024-05-01 |
CN113016057B (zh) | 2024-05-17 |
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WO2020102187A1 (en) | 2020-05-22 |
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