JP7182814B2 - ホモ集積の赤外線フォトニックチップ及びその製造方法 - Google Patents
ホモ集積の赤外線フォトニックチップ及びその製造方法 Download PDFInfo
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- 239000000463 material Substances 0.000 claims description 76
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 37
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000005253 cladding Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
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Description
前記デバイス構造は、前記基板層に垂直な方向に順次積み重ねられた下部接触層、量子井戸層及び上部接触層を含み、前記基板層、前記下部接触層、前記量子井戸層及び前記上部接触層の材料は、いずれもIII-V族材料であり、
前記導波路構造は、III-V族材料により製造された導波路層を含み、前記導波路層と前記下部接触層は同じ層に配置されているホモ集積の赤外線フォトニックチップを提供する。
前記デバイス構造は、前記上台面の表面で前記基板層から前記デバイス構造を指す方向に順次積み重ねられた量子井戸層と、p-InPスペーサー層と、エッチングストップ層と、p-InPクラッド層と、p-PQギャップ・バッファ層と、p-InGaAs層と、を含んでいる。
III-V族材料により製造された基板層を提供するステップと、
前記基板層の表面にデバイス構造及び導波路構造を形成するステップと、を含み、前記デバイス構造は、前記基板層に垂直な方向に順次積み重ねられた下部接触層、量子井戸層及び上部接触層を含み、前記下部接触層、前記量子井戸層及び前記上部接触層の材料がいずれもIII-V族材料であり、前記導波路構造は、III-V族材料により製造された導波路層を含み、前記導波路層と前記下部接触層は同じ層に配置される。
バッファ層を形成するために、第1のIII-V族材料を前記基板層の表面に堆積するステップをさらに含む。
前記バッファ層の表面に第2のIII-V族材料、量子井戸材料、第3のIII-V族材料を順次堆積させて積層構造を形成するステップと、
前記積層構造をエッチングして前記デバイス構造及び前記導波路構造を形成するステップと、を含み、前記デバイス構造は、一部の前記第2のIII-V族材料からなる前記下部接触層、前記量子井戸材料からなる量子井戸層、及び前記第3のIII-V族材料からなる上部接触層を含み、前記導波路構造は、一部の前記第2のIII-V族材料からなる前記導波路層を含む。
前記積層構造でデバイス領域及び導波路領域を定義するステップと、
前記積層構造をエッチングして階段状の第2のIII-V族材料層を形成するステップと、を含み、
前記第2のIII-V族材料層は、下台面及び前記下台面に凸設けられた上台面を含み、前記量子井戸層と前記上部接触層は前記上台面に順次積み重ねられ、前記上台面と前記デバイス領域に位置している下台面が前記下部接触層を構成し、前記下台面が前記導波路領域まで延在して前記導波路層を形成する。
前記積層構造でデバイス領域及び導波路領域を定義するステップと、
前記積層構造をエッチングして階段状の第2のIII-V族材料層を形成するステップと、を含み、
前記第2のIII-V族材料層は、下台面及び前記下台面に凸設けられた上台面を含み、前記量子井戸層23と前記上部接触層13は前記上台面に順次積み重ねられ、前記上台面と前記デバイス領域に位置している下台面が前記下部接触層22を構成し、前記下台面が前記導波路領域まで延在して前記導波路層10を形成する。
Claims (4)
- 基板層及びいずれも前記基板層の表面に位置しているデバイス構造と導波路構造を備え、
前記デバイス構造は、前記基板層に垂直な方向に順次積み重ねられた下部接触層、量子井戸層及び上部接触層を含み、前記基板層、前記下部接触層、前記量子井戸層及び前記上部接触層の材料は、いずれもIII-V族材料であり、
前記導波路構造は、III-V族材料により製造された導波路層を含み、前記導波路層と前記下部接触層は同じ層に配置されており、
前記基板層の表面に位置し、III-V族材料により製造されたバッファ層をさらに備え、前記下部接触層及び前記導波路層は、いずれも前記バッファ層の表面に位置しており、
前記下部接触層は、階段状を呈しており、階段状の前記下部接触層は、下台面及び前記下台面の表面に凸設された上台面を含み、前記量子井戸層と前記上部接触層は前記上台面に順次積み重ねられ、前記導波路層と前記下部接触層は同じ材料であり、
前記基板層は、InP基板層であり、前記下部接触層及び前記導波路層は、いずれもn-InP層であり、前記上部接触層は、p-InGaAs層であり、
前記デバイス構造は、前記上台面の表面で前記基板層から前記デバイス構造を指す方向に順次積み重ねられた前記量子井戸層と、p-InPスペーサー層と、エッチングストップ層と、p-InPクラッド層と、p-PQギャップ・バッファ層と、p-InGaAs層と、を含んでおり、
前記下部接触層の前記上台面は、前記下台面の端部より内側において、前記下台面の上面において垂直に立ち上がって形成されており、前記量子井戸層と前記上部接触層は、前記上台面と垂直構造を形成するように積み重ねられている
ことを特徴とするホモ集積の赤外線フォトニックチップ。 - 前記基板層の表面に、2つの前記デバイス構造と、2つの前記デバイス構造の間に位置している導波路分離溝とを有し、前記導波路構造は、前記導波路分離溝の底部に位置しており、2つの前記デバイス構造の間で光信号を伝送するために使用されることを特徴とする請求項1に記載のホモ集積の赤外線フォトニックチップ。
- ホモ集積の赤外線フォトニックチップの製造方法において、
III-V族材料により製造された基板層を提供するステップと、
前記基板層の表面にデバイス構造及び導波路構造を形成するステップと、を含み、前記デバイス構造は、前記基板層に垂直な方向に順次積み重ねられた下部接触層、量子井戸層及び上部接触層を含み、前記下部接触層、前記量子井戸層及び前記上部接触層の材料がいずれもIII-V族材料であり、前記導波路構造は、III-V族材料により製造された導波路層を含み、前記導波路層と前記下部接触層は同じ層に配置されており、
前記基板層の表面にデバイス構造及び導波路構造を形成するステップの前に、
バッファ層を形成するために、第1のIII-V族材料を前記基板層の表面に堆積するステップをさらに含み、
前記基板層の表面にデバイス構造及び導波路構造を形成するステップは、具体的に、
前記バッファ層の表面に第2のIII-V族材料、量子井戸材料、第3のIII-V族材料を順次堆積させて積層構造を形成するステップと、
前記積層構造をエッチングして前記デバイス構造及び前記導波路構造を形成するステップと、を含み、前記デバイス構造は、一部の前記第2のIII-V族材料からなる前記下部接触層、前記量子井戸材料からなる量子井戸層、及び前記第3のIII-V族材料からなる上部接触層を含み、前記導波路構造は、一部の前記第2のIII-V族材料からなる前記導波路層を含み、
前記積層構造をエッチングすることは、具体的に、
前記積層構造でデバイス領域及び導波路領域を定義するステップと、
前記積層構造をエッチングして階段状の第2のIII-V族材料層を形成するステップと、を含み、
前記第2のIII-V族材料層は、下台面及び前記下台面に凸設けられた上台面を含み、前記量子井戸層と前記上部接触層は前記上台面に順次積み重ねられ、前記上台面と前記デバイス領域に位置している前記下台面が前記下部接触層を構成し、前記下台面が前記導波路領域まで延在して前記導波路層を形成し、
前記下部接触層の前記上台面は、前記下台面の端部より内側において、前記下台面の上面において垂直に立ち上がって形成されており、前記量子井戸層と前記上部接触層は、前記上台面と垂直構造を形成するように積み重ねられている
ことを特徴とするホモ集積の赤外線フォトニックチップの製造方法。 - 前記基板層の表面に、2つの前記デバイス構造及び2つの前記デバイス構造の間に位置している導波路分離溝を有し、前記導波路構造は、前記導波路分離溝の底部に位置しており、2つの前記デバイス構造の間で光信号を伝送するために使用されることを特徴とする請求項3に記載のホモ集積の赤外線フォトニックチップの製造方法。
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