JP7164564B2 - 真空システム及び真空システム内の電子モジュールを識別するための方法 - Google Patents

真空システム及び真空システム内の電子モジュールを識別するための方法 Download PDF

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JP7164564B2
JP7164564B2 JP2020089694A JP2020089694A JP7164564B2 JP 7164564 B2 JP7164564 B2 JP 7164564B2 JP 2020089694 A JP2020089694 A JP 2020089694A JP 2020089694 A JP2020089694 A JP 2020089694A JP 7164564 B2 JP7164564 B2 JP 7164564B2
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Japan
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module
addressing
unique
modules
electronic
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JP2020089694A
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Japanese (ja)
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JP2021028823A (ja
Inventor
ヨッヘン・ベットヒャー
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プファイファー・ヴァキューム・ゲーエムベーハー
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • F04B49/065Control using electricity and making use of computers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Programmable Controllers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2020089694A 2019-08-12 2020-05-22 真空システム及び真空システム内の電子モジュールを識別するための方法 Active JP7164564B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP19191304.5A EP3626973B1 (fr) 2019-08-12 2019-08-12 Système à vide et procédé d'identification de modules électroniques dans un tel système à vide
EP19191304.5 2019-08-12

Publications (2)

Publication Number Publication Date
JP2021028823A JP2021028823A (ja) 2021-02-25
JP7164564B2 true JP7164564B2 (ja) 2022-11-01

Family

ID=67614509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020089694A Active JP7164564B2 (ja) 2019-08-12 2020-05-22 真空システム及び真空システム内の電子モジュールを識別するための方法

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Country Link
EP (1) EP3626973B1 (fr)
JP (1) JP7164564B2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023183587A1 (fr) * 2022-03-25 2023-09-28 Modine Manufacturing Company Pompe à contact électrique combiné

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6214936B2 (ja) 2013-06-13 2017-10-18 株式会社ブリヂストン 締金具およびその製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06214936A (ja) * 1993-01-13 1994-08-05 Oki Electric Ind Co Ltd 入出力装置自動判別方法
JP2000076173A (ja) * 1998-09-03 2000-03-14 Nec Corp 情報処理システム及び情報処理システム内id付与方法
JP4274648B2 (ja) * 1999-09-29 2009-06-10 住友重機械工業株式会社 クライオポンプの制御装置
JP2005048764A (ja) * 2003-07-29 2005-02-24 Sumitomo Heavy Ind Ltd 真空ポンプ制御システム
JP4761530B2 (ja) * 2004-11-25 2011-08-31 キヤノン株式会社 制御基板及びそれを備えた画像形成装置、並びに制御基板の管理方法
DE102005045283B4 (de) * 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
DE102006045022A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät und Verfahren zu derem Betrieb
DE102010033545A1 (de) * 2010-08-05 2012-02-09 Valeo Schalter Und Sensoren Gmbh Kontaktierungsvorrichtung mit Schneidklemmen zur Adresskodierung
DE202014005481U1 (de) * 2014-07-04 2014-07-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpvorrichtung mit mindestens einem Pumpenmodul
US9837770B2 (en) * 2014-11-25 2017-12-05 Honeywell International Inc. Fusible link cable harness and systems and methods for addressing fusible link cable harnesses
EP3029327B1 (fr) * 2014-12-02 2018-02-14 Pfeiffer Vacuum Gmbh Système constitué d'appareil à vide et d'unité de fonctionnement

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6214936B2 (ja) 2013-06-13 2017-10-18 株式会社ブリヂストン 締金具およびその製造方法

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Publication number Publication date
JP2021028823A (ja) 2021-02-25
EP3626973B1 (fr) 2022-08-03
EP3626973A1 (fr) 2020-03-25

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