EP3029327B1 - Système constitué d'appareil à vide et d'unité de fonctionnement - Google Patents

Système constitué d'appareil à vide et d'unité de fonctionnement Download PDF

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Publication number
EP3029327B1
EP3029327B1 EP14195823.1A EP14195823A EP3029327B1 EP 3029327 B1 EP3029327 B1 EP 3029327B1 EP 14195823 A EP14195823 A EP 14195823A EP 3029327 B1 EP3029327 B1 EP 3029327B1
Authority
EP
European Patent Office
Prior art keywords
connection
functional unit
vacuum device
accordance
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14195823.1A
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German (de)
English (en)
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EP3029327A1 (fr
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Priority to EP14195823.1A priority Critical patent/EP3029327B1/fr
Publication of EP3029327A1 publication Critical patent/EP3029327A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R29/00—Coupling parts for selective co-operation with a counterpart in different ways to establish different circuits, e.g. for voltage selection, for series-parallel selection, programmable connectors

Definitions

  • the invention relates to a system comprising at least one vacuum device, namely a turbomolecular vacuum pump, and at least one functional unit, wherein a connection is provided by means of which the vacuum device and the functional unit can be electrically and / or informationally connected to one another.
  • Vacuum pumps such as turbomolecular, rotary vane, side channel, diaphragm, screw, rotary piston, single or multi-stage Roots, diffusion, cryogenic, ion getter, scroll and gas pumps as well as combinations of these pumps, are usually used for vacuum generation .
  • Vacuum pumps such as turbomolecular, rotary vane, side channel, diaphragm, screw, rotary piston, single or multi-stage Roots, diffusion, cryogenic, ion getter, scroll and gas pumps as well as combinations of these pumps, are usually used for vacuum generation .
  • the user can often use a certain system only in a certain spatial orientation, since usually not only the spatial configuration of the system itself, but other circumstances are taken into account, such as the positioning of terminals and the course of connecting cables.
  • connection is designed such that the vacuum device and the functional unit are technically operable in a plurality of different relative orientations, wherein the relative orientations with respect to the spatial configuration of connected system and / or with regard to the functionality of the connected system.
  • the functional unit can be adapted to specific requirements, for example, with regard to the construction space or the direction of the cable outlet, whereby a special design for specific application scenarios is less frequently required.
  • a special design for specific application scenarios is less frequently required.
  • the functional unit may comprise, for example, a drive unit, a power supply unit, a control unit for the vacuum unit and / or the drive unit, sensors, a sensor data processing unit, a display or a combination of these components.
  • the vacuum apparatus includes a turbomolecular vacuum pump and may include a vacuum gauge.
  • connection may comprise a plug connection, one or more plug-in elements being provided at least at one connection region of the vacuum device and one or more socket elements being provided on at least one connection region of the functional unit.
  • connection may comprise a plug connection, wherein one or more plug-in elements are provided at least at one connection region of the functional unit and one or more socket elements are provided at at least one connection region of the vacuum device.
  • Different relative orientations of the functional unit with respect to the vacuum device can thus be achieved by simply repositioning the connection. The change of the relative orientation is thus facilitated and accelerated.
  • connection can be wireless. This facilitates a change in the relative orientation and helps to avoid a wrong connection.
  • connection region of the vacuum device is to be brought together with at least one connection region of the functional unit for producing the connection, wherein in each case the connection region is formed on an outer side of the vacuum device or the functional unit.
  • the system according to the invention differs from one EP 1 715 190 A1 known system comprising a vacuum device in the form of a turbomolecular vacuum pump and a trained as a sensor functional unit.
  • connection region of the system according to the invention may be formed on a flat region of the outside.
  • connection can be secured or locked in various ways in order to ensure sufficient mechanical stability and protection, in particular of connecting elements, from mechanical stress.
  • the connector itself may include a locking mechanism such as a bayonet lock coupling ring, which allows the vacuum device and the functional unit to be mechanically securely connected.
  • a locking mechanism such as a bayonet lock coupling ring, which allows the vacuum device and the functional unit to be mechanically securely connected.
  • a separate mechanical connection such as one or more fittings can be provided.
  • the separate connection can be arranged spatially separated from the connection region or very close or the connection region in another region of the parting plane between the vacuum device and the functional unit.
  • connection between the vacuum unit and the functional unit can be centered or positioned in various ways. Both sides of the connection area can be firmly connected to the vacuum device and the functional unit. In this case, the two units are advantageously centered by the connection area and the possibly existing mechanical security provides sufficient space, so that attachment without constraining forces on the connection area is possible.
  • connection region may be suspended softly or made slidable in the connection plane, so that when aligned with a secondary element, such as e.g. a centering approach, centering pins or, for example, one or more fasteners in the region of the connection plane of the connection area with appropriate clearance remains free of constraining forces.
  • a secondary element such as e.g. a centering approach, centering pins or, for example, one or more fasteners in the region of the connection plane of the connection area with appropriate clearance remains free of constraining forces.
  • a subsequent securing of the movable connection areas by further securing means can increase the reliability because, in the event of vibrations occurring during operation, no unwanted relative movements can occur within the framework of the game between the elements and thus no loose contacts.
  • the different relative orientations are realizable at a junction of the system, i.
  • One and the same connection point between the vacuum device and the functional unit serves to realize the different relative orientations.
  • the location at which respective connection areas of the functional unit and the vacuum unit are connected to one another defines such a connection point.
  • the system can only have exactly one connection point at which a technically functioning connection can be produced for each of the different relative orientations.
  • the system can also have several, located at different locations connection points.
  • the vacuum device and the functional unit can be rotated about an axis relative to one another. This makes it easy to connect. In addition, only one connection area on the vacuum device and the functional unit is necessary, which further reduces the cost of the system. However, it is not excluded that the vacuum device and / or the functional unit have more than one connection area.
  • connection can be produced in a plurality of different angular positions between the vacuum device and the functional unit with respect to the axis. The more different angular positions are provided, the more different relative orientations of the functional unit relative to the vacuum device can be realized.
  • connection region of the vacuum device and / or only one connection region of the functional unit is or is involved in the different relative orientations.
  • the vacuum device and / or the functional unit have only one connection region in one embodiment.
  • the vacuum device and / or the functional unit can have more than one connection region.
  • a connection region of the vacuum device can be brought together with different connection regions of the functional unit.
  • a connecting region of the functional unit can be brought together with different connecting regions of the vacuum device.
  • connection regions can be provided on different outer sides. This allows, for example, the same functional unit either - depending on the circumstances at the site - either on one side or below the vacuum device. Also, an arrangement on other sides of the vacuum device is conceivable. As a result, the flexible adaptation of the system to the prevailing spatial conditions at the site further improved.
  • At least one connecting region can be subdivided into different sections on the vacuum device and / or on the functional unit, which differ from one another with regard to the configuration of their connecting elements and / or with regard to the functions assigned to their connecting elements.
  • the connecting elements can thus be designed, for example, in respective sections as a plug-in contact or Bermmrome ist.
  • connection elements of the respective sections may have different functions, such as digital or analog signal or data transmission or an electrical power supply.
  • the assignment of different functions to different sections may facilitate, for example, the internal contacting in the functional unit or in the vacuum device.
  • mutual electromagnetic interference between individual connectors or conductors can be avoided or reduced.
  • connection elements for the information technology connection can be configured, and in a second section, connection elements can be configured for the electrical transmission of a supply or drive energy for a motor of the vacuum device.
  • Each section may comprise a group of connecting elements, in particular plug-in elements or socket elements.
  • the sections of the connection area may be arranged spatially separated from each other. This reduces mutual electromagnetic interference between different sections.
  • a high-voltage power transmission section may be arranged separately from a signal transmission section.
  • interference with sensor signals can thereby be reduced, and sensitive signal processing circuits can be protected against undesired contact with a power supply voltage during the connection process or during operation.
  • the vacuum device and / or the functional unit may be designed to recognize the respective relative orientation. This makes it possible to control or connect the connection depending on the relative orientation.
  • the detection can be done by means of the connection.
  • the detection function is realized in a particularly simple manner, since no additional means for detection are required.
  • the vacuum device and / or the functional unit may be designed to automatically produce the functionality of the connected system as a function of the respective relative orientation. Thereby, the number of necessary connection elements in the connection can be reduced, since the same connection elements can be controlled or wired differently depending on the relative orientation.
  • three connecting elements for three phases of a three-phase drive can be provided. If the relative orientation is changed here, the motor would then possibly rotate in the opposite direction.
  • the phases of the three-phase drive can therefore be automatically switched or controlled in a suitable sequence in this example, so that again a desired phase relationship is achieved at the motor and this rotates in the desired direction.
  • connection area there is more than one connection area or if the functional unit in turn has a connection area, multiple combinations of vacuum device and several functional units are also possible. In this case, in turn, different types of the compounds shown can be produced, so that the various functional units advantageously cooperate in a suitable manner.
  • a vacuum device can be connected to a drive unit, wherein in addition a power supply unit is either connected directly to the vacuum unit or to the drive unit, so that the tasks "vacuum generation”, “driving” and “voltage conversion” are modularly covered by the various components and using the Connection areas are possible.
  • Fig. 1 shows a system of vacuum device 10 and functional unit 12. Between the vacuum device 10 and the functional unit 12, a connection 14 is provided.
  • the vacuum device 10 is a turbomolecular vacuum pump
  • the functional unit 12 is a turbo-molecular vacuum pump drive device.
  • the connection 14 provides an electrical connection to the power supply and - depending on the design or additional functionality of the drive unit 12 - also provide an information technology connection, ie allow communication between the vacuum pump 10 and drive unit 12, for example by the transmission of signals and the Transmission of data in one direction or in both directions.
  • connection 14 is designed such that the functional unit 12 can be changed by rotation about the axis A in its relative arrangement with respect to the vacuum device 10, wherein furthermore an electrical and / or information technology connection of the functional unit 12 to the vacuum device 10 is ensured.
  • Mechanical pivotal mounting may be provided, but is not mandatory, i. A change in the relative orientation can also be achieved simply by first disconnecting the connection 14 by removing the drive unit 12 and restoring it by reconnecting it in a direction rotated relative to the original state.
  • the functional unit 12 in FIG Fig. 1 has a cable outlet 34, for example for electrical power to the system.
  • the cable outlet 34 By changing the relative orientation of the functional unit 12, the cable outlet 34 at a other place, so no longer on the right side, order. Since cable and cable outlets require considerable space, can react flexibly in this embodiment to external requirements in terms of space. Also, cable lengths that are necessary in another relative orientation may be lower, saving costs, minimizing electromagnetic interference, and preventing tripping hazards due to cables in the field.
  • Fig. 2 shows an embodiment of a compound 14 according to the invention (eg according to FIG Fig. 1 ) serving connection region 15 with connecting elements 32.
  • the representation may correspond to a connection region of the vacuum device and / or a connection region of the functional unit.
  • the connecting elements 32 are divided into different sections, namely a supply section 30 and two signal sections 28.
  • the connecting elements 32 of the signal sections 28 are configured to transmit information digitally or analogously.
  • the signal sections 28 may also include one or more low voltage electrical energy connectors 32, such as 3.3 volts, 12 volts, or 24 volts.
  • the connecting elements 32 may be electromagnetically shielded from another section and / or from each other.
  • connection elements 32 of the supply section 30 are designed for supplying electrical energy at a supply voltage, such as, for example, 400 volts. This is indicated by the representation of the connecting elements 32 in the supply section 30 with a larger cross-section, since higher currents are to be expected in the supply section.
  • the supply section 30 has three connecting elements 32, which may be designed, for example, for the transmission of three phases of a three-phase drive for an electric motor.
  • connection area 15 of Fig. 2 and thus the connection that can be produced with this - in this case and also always subsequently with reference to the plane of the drawing - is designed to be axisymmetric with respect to axis B.
  • the connection area 15 is Also carried out such that it continues to function technically after a rotation of the functional unit 12 or the vacuum device 10 by the angle 180 ° here about the axis A, which is perpendicular to the image plane and passes through the center of the connection 14.
  • the connection region 15 is thus - again here and also always subsequently based on the plane of the drawing - also rotationally symmetrical with respect to the intersection of the axis A with the plane of the drawing.
  • connecting elements 32 adapted to the relative orientation.
  • opposing connecting elements 32 may be electrically connected to one another on at least one side, that is to say in the connection region 15 of the vacuum device 10 or the functional unit 12.
  • connection element 32 arranged on the bottom left in the image lies opposite the connecting element 32 arranged on the top right in the image, both of which are located in a respective signal section 28.
  • the connecting element 32 shown below on the left can be imaged by a rotation about the axis A by 180 ° onto the connecting element 32, which is shown at the top right (point symmetry).
  • the term opposite thus does not refer to the in Fig. 2 visible axis B and the axis symmetry of the compound 14, but on the point symmetry with respect to the axis A. This definition of the term “opposite” will also be used in the further description application.
  • each connecting element 32 is associated with an opposing connecting element 32.
  • the in the center, that is arranged on the axis A, connecting element 32 is assigned to itself.
  • the compound 14 of Fig. 2 allows two different relative arrangements of connection areas of the vacuum device and the functional unit. These two arrangements are different by the angle ⁇ of 180 °. As a result, two relative orientations between the functional unit and the vacuum unit, which are different from one another by 180 °, are made possible.
  • the connecting elements 32 in the embodiment of Fig. 2 may for example be designed as plug-in elements, as socket elements, as touch or sliding contacts or as optical transmission elements.
  • the connecting elements 32 of the Fig. 2 For example, they may be implemented as part of a rectangular plug or a rectangular socket.
  • connection region 15 of a connection which comprises a round plug with connecting elements 32.
  • the connection region 15 may be that of the vacuum device and / or the functional unit.
  • the axes B have an angular distance ⁇ of 120 ° with each other.
  • the connection 14 is designed such that three different arrangements of connection regions of the vacuum device and the functional unit with respect to each other and thus three different relative orientations between the vacuum device and the functional unit can be realized. For this purpose, only one of the connection areas must be inserted rotated by the angle ⁇ of 120 ° about the axis A.
  • the axis A is perpendicular to the image plane and passes through the intersection of the axes B, ie through the center of the connecting region 15th
  • each connecting element 32 is assigned a connecting element 32 and, after a further rotation by 120 °, a further connecting element 32.
  • the mutually associated connecting elements 32 may be electrically connected to one another on one side, that is to say in one of the connecting regions (in the vacuum device or in the functional unit), or depending on the relative orientation between vacuum device 10 and functional unit 12 can be connected or controlled.
  • the connecting elements 32 are in Fig. 3 in different sections, namely in a signal section 28 and in a supply section 30, arranged.
  • the signal section 28 represents a concentric ring section surrounding the supply section 30.
  • the connection elements 32 are arranged in concentric circles in the respective sections.
  • the connecting portion 30 has connecting elements 32 for the electrical power supply of the vacuum device by the functional unit.
  • the connection elements 32 of the signal section 28 are designed to transmit information or energy at low voltages.
  • the frame of the circular connector as in other embodiments, may be formed as a return conductor or as a protective conductor and / or as a shield for the connecting elements 32.
  • Fig. 4 shows an embodiment of a connecting portion 15, which is designed as a round plug connection and six different relative orientations between a vacuum device 10 and a functional unit 12 allows.
  • the different relative orientations can be achieved by turning, for example, the functional unit 12 about the axis A, which in turn is perpendicular to the image plane through the connecting center, by an angle ⁇ .
  • the twisting includes a plug connection and a previous removal or unplugging and re-plugging.
  • the angle ⁇ is 60 ° or an integer multiple thereof.
  • the connection 14 is made axially symmetrical with respect to the axes B.
  • the axes B form a common point of intersection with the axis A arranged perpendicular to the image plane.
  • a connecting element 32 is associated with a further connecting element 32 at each rotation of a connecting region by 60 ° about the axis A.
  • six connecting elements 32 can be imaged on one another by a rotation about the axis A.
  • Fig. 5 shows a vacuum device 10, here again a turbomolecular vacuum pump, with a plurality of connecting regions on the vacuum device 10.
  • a functional unit 12, here again a drive unit, has a connection region which forms one of thus several possible connections 14 with one of the connection regions of the vacuum device 10, namely at three different connection points.
  • the functional unit 12 is arranged laterally on the vacuum device 10. Dashed lines indicate further possible relative orientations of the functional unit 12 relative to the vacuum device 10.
  • connection region of the functional unit 12 can therefore in each case produce a connection 14 together with one of the further connection regions of the vacuum device 10 in order to produce a different relative orientation of the functional unit 12 with respect to the vacuum device 10.
  • Each of the connecting portions of the vacuum device 10 and the functional unit 12 may be, for example, according to Fig. 2, 3, 4 . 7 and 8th be educated.
  • Fig. 5 Thus, further, not indicated by dashed lines relative orientations of the functional unit 12 with respect to the vacuum device 10 can be achieved by twisting at one of the connection points.
  • six different relative orientations of the functional unit 12 with respect to the vacuum device 10 can be produced.
  • Fig. 6 shows another system of turbomolecular vacuum pump 10 as a vacuum device and drive unit 12 as a functional unit with a connection 14 at exactly one connection point.
  • the connecting regions of the vacuum device and the functional unit are arranged at 45.degree. Obliquely to two adjacent, mutually perpendicular sides of the vacuum pump 10, that by a rotation through 180.degree.
  • a connecting axis A, the corresponding angularly formed functional unit 12 either below the Vacuum device 10 or laterally on the vacuum device 10 can be arranged.
  • the connection 14 thus allows at least a rotation of the cooperating connection regions relative to one another by 180 °, for example according to the embodiment according to FIG Fig.
  • the vacuum device 10 and the functional unit 12 each have only one connection region for producing the connection 14.
  • the vacuum device 10 or the functional unit 12 can, however, also other connection areas, for example, according to the embodiment of Fig. 5 exhibit.
  • Fig. 6 By tilting the connecting regions, the arrangement of the functional unit 12 in highly different relative orientations with respect to the vacuum device 10 is allowed. The system can thus be carried out particularly flexibly with respect to installation space requirements with only a few connection areas and few permitted rotations about the connection axis.
  • Fig. 7 there is shown a pair of plug and socket for forming a connection according to the invention.
  • the plug has plug-in elements 16 and the socket has socket elements 18.
  • the connecting elements 32 are thus designed here as plug-in elements 16 and female members 18.
  • the socket and the socket elements 18 and the plug and the plug-in elements 16 are designed to produce a connection 14 in three different relative orientations.
  • the relative orientations differ by the angle ⁇ of 120 ° about the axis A perpendicular to the image plane.
  • the plug here comprises fewer plug-in elements 16 than the socket bushing elements 18 comprises.
  • the female members 18 are so electrically connected or connectable to their female members 18 associated with rotation about the axis A that the male connector technically functions in a plurality of three different relative orientations here.
  • plug-in elements 16 have been saved, whereby the plug can be made cheaper.
  • the bush can be less Socket elements 18 have as the plug has plug elements 16. In this case, free spaces in the form of recesses are provided for the plug-in elements on the socket side.
  • FIG. 8 An embodiment of a connection 14 with plug-in elements 16 and sleeve elements 18 shown in dashed lines is shown.
  • the cooperating male members 16 and female members 18 are arranged grouped in different sections.
  • a supply section 30 five socket elements 18 and only three plug-in elements 16 are arranged.
  • two socket sections 18 are arranged in two signal sections 28, but plug-in elements 16 are arranged only in one of the signal sections 28.
  • the plug-in elements 16 are part of a connection region of a functional unit 12 and the socket elements 18 are part of a connection region of a vacuum device 10.
  • the connecting portion of the vacuum device 10 is axially symmetric with respect to the axis B executed.
  • Plug elements 16 are arranged in the connecting region of the functional unit 12 only on one side of the axis B.
  • the female members 18 are also arranged point-symmetrically with respect to the connecting center and the axis A, which is perpendicular to the plane of extension of the connector and through the connecting center.
  • each plug-in element 16 cooperates with an opposite socket element 18 for producing an electrical connection.
  • the plug-in element 16 arranged in the connection center continues to interact with the same socket element 18 as before.
  • jack elements For some jack elements is in Fig. 8 the respective electrical connection with the opposite socket member 18 indicated by lines 20, 22, 24 and 26.
  • the female element is on the top right with the female element electrically connected at the bottom left.
  • the vacuum device 10 "sees" the same function for each of opposing female elements 18 of a pair. In principle, no recognition of the relative orientation of the functional unit 12 relative to the vacuum device 10 by one of the two components is necessary in this embodiment. Nevertheless, it can be provided for further improvement of the system.
  • connection region can be fixedly connected to the functional unit or the vacuum device.
  • connection regions can also be designed to be rotatable or displaceable relative to the respective component.
  • a functional unit embodied as a drive unit and a vacuum unit designed as a turbomolecular vacuum pump can be plugged into one another in more than one relative orientation.
  • This allows the drive unit, in which the necessary fastening means can be mounted according to the respective orientations, mounted differently. This can be operated by simply changing the components of different customer requirements. Also, a change of orientation by the customer on site becomes possible.
  • the connector can be designed so symmetrical that all contacts are arranged so that each possible angle step different connections come about, however, can be assigned to the correct functions by detecting the plug alignment or electrical contact in one of the connection areas.
  • one or more temperature sensors can be provided, which can be arranged for example in the outer regions of a plug and are arranged with their contacts such that the same technical connections, but different channel assignments are given at each rotation step.
  • the assignment of measuring channels to measuring points can - as explained above in the drive phases - done by appropriate detection of the orientation of the connector.
  • connection For the detection of relative orientation of the connection, for example, separate plug contacts can be used, which allow depending on the rotation step, a digital coding and / or feedback by a defined characteristic resistor.
  • the connection may also include one or more data bus contacts.
  • connecting elements can be arranged distributed such that certain distances, for example prescribed spark gaps between high and low current elements, can be maintained between the connecting elements.
  • the different relative orientations of vacuum device and functional unit can be used, for example, for a choice of direction for cable outlets of the functional unit by the customer.
  • an oblique arrangement of the connector can be different relative to the vacuum pump after rotation, the position of the drive unit.
  • a drive unit can therefore be converted by simply moving from the side of a vacuum pump to below the vacuum pump.
  • An oblique arrangement of a Plug connection can also be used in conjunction with angle plugs for a free choice of cable outlets.
  • mating or opposing interconnect elements 32 may be internally directly electrically connected.
  • Fig. 8 are correspondingly opposite bushing elements 18 hardwired in the connection region of the vacuum device 10.
  • a larger number of connecting elements 32 is generally necessary.
  • An adaptation of the wiring by software and a detection of the relative orientation can be omitted.
  • the connection elements 32 can be connected depending on the relative orientation.
  • connecting elements 32 can be saved, in which case a recognition of the existing relative orientation by hardware or software is provided.
  • the relative orientation can be recognized, for example, by an additional sensor or only by the electrical activity of the other connection partner.

Claims (15)

  1. Système constitué par au moins un appareil à vide (10), à savoir une pompe à vide turbomoléculaire, au moins une unité fonctionnelle (12), en particulier un appareil d'entraînement, pour l'appareil à vide (10), et une liaison (14) permettant de relier l'appareil à vide (10) et l'unité fonctionnelle (12) sur le plan électrique et/ou informatique,
    dans lequel
    la liaison (14) est telle que l'appareil à vide (10) et l'unité fonctionnelle (14) sont aptes à être reliées de manière à fonctionner techniquement dans une pluralité de différentes orientations relatives,
    les orientations relatives se distinguent entre elles à l'égard de la configuration dans l'espace du système relié et/ou à l'égard de la fonctionnalité du système relié, et
    pour établir la liaison (14), au moins une zone de liaison (15) de l'appareil à vide (10) est à assembler avec au moins une zone de liaison (15) de l'unité fonctionnelle (12), la zone de liaison respective (15) étant réalisée sur un côté extérieur de l'appareil à vide (10) ou de l'unité fonctionnelle (12).
  2. Système selon la revendication 1,
    caractérisé en ce que
    la liaison (14) comprend une liaison à enfichage et un ou plusieurs éléments mâles (16) sont prévus au moins sur une zone de liaison (15) de l'appareil à vide (10), et un ou plusieurs éléments femelles (18) sont prévus au moins sur une zone de liaison (15) de l'unité fonctionnelle (12), ou inversement.
  3. Système selon la revendication 1 ou 2,
    caractérisé en ce que
    la liaison (14) est dépourvue de câble.
  4. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    la zone de liaison respective est réalisée sur une zone plane du côté extérieur.
  5. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    les différentes orientations relatives peuvent être réalisées à un emplacement de liaison, le système comprenant précisément un ou plusieurs emplacements de liaison.
  6. Système selon la revendication 5,
    caractérisé en ce que
    pour réaliser les différentes orientations relatives audit un emplacement de liaison, l'appareil à vide (10) et l'unité fonctionnelle (12) sont à tourner l'un par rapport à l'autre autour d'un axe (A).
  7. Système selon la revendication 6,
    caractérisé en ce que
    la liaison (14) peut être établie dans une multitude de différents positions angulaires entre l'appareil à vide (10) et l'unité fonctionnelle (12) par rapport à l'axe (A).
  8. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    une seule zone de liaison (15) de l'appareil à vide (10) et/ou une seule zone de liaison (15) de l'unité fonctionnelle (12) participe dans les différentes orientations relatives.
  9. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    l'appareil à vide (10) et/ou l'unité fonctionnelle (12) comprend précisément une seule zone de liaison (15).
  10. Système selon l'une des revendications 1 à 8,
    caractérisé en ce que
    l'appareil à vide (10) et/ou l'unité fonctionnelle (12) comprend plus d'une zone de liaison (15), et pour établir différentes orientations relatives, une zone de liaison (15) de l'appareil à vide est à assembler avec différentes zones de liaison (15) de l'unité fonctionnelle (12), ou inversement.
  11. Système selon la revendication 10,
    caractérisé en ce que
    sur l'appareil à vide (10) et/ou sur l'unité fonctionnelle (12), les zones de liaison (15) sont prévues sur différents côtés extérieurs.
  12. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    sur l'appareil à vide (10) et/ou sur l'unité fonctionnelle (12), au moins une zone de liaison (15) est subdivisée en différentes portions (28, 30) qui se distinguent entre elles à l'égard de la configuration de leurs éléments de liaison (32) et/ou à l'égard des fonctions associées à leurs éléments de liaison (32),
    et en particulier chaque portion (28, 30) comprend un groupe d'éléments de liaison (32), en particulier d'éléments mâles (16) ou d'éléments femelles (18).
  13. Système selon la revendication 12,
    caractérisé en ce que
    les portions (28, 30) de la zone de liaison (15) sont agencées de façon séparée dans l'espace l'une de l'autre.
  14. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    l'appareil à vide (10) et/ou l'unité fonctionnelle (12) sont réalisés pour identifier l'orientation relative respective, l'identification ayant lieu en particulier à l'aide de la liaison (14).
  15. Système selon l'une des revendications précédentes,
    caractérisé en ce que
    l'appareil à vide (10) et/ou l'unité fonctionnelle (12) sont réalisés pour établir automatiquement la fonctionnalité du système relié en fonction de l'orientation relative respective.
EP14195823.1A 2014-12-02 2014-12-02 Système constitué d'appareil à vide et d'unité de fonctionnement Active EP3029327B1 (fr)

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EP14195823.1A EP3029327B1 (fr) 2014-12-02 2014-12-02 Système constitué d'appareil à vide et d'unité de fonctionnement

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Publication number Priority date Publication date Assignee Title
JP6912196B2 (ja) * 2016-12-28 2021-08-04 エドワーズ株式会社 真空ポンプ及び該真空ポンプに適用されるコネクタ、制御装置
JP7077984B2 (ja) * 2019-02-13 2022-05-31 株式会社オートネットワーク技術研究所 コネクタ装置
EP3626973B1 (fr) * 2019-08-12 2022-08-03 Pfeiffer Vacuum Gmbh Système à vide et procédé d'identification de modules électroniques dans un tel système à vide
EP3611806B1 (fr) * 2019-12-09 2022-02-09 Pfeiffer Vacuum Gmbh Adaptateur et système à vide

Citations (1)

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Publication number Priority date Publication date Assignee Title
DE10107248A1 (de) * 2000-11-03 2002-07-11 Wilo Gmbh In vier Positionen aufsteckbare Motorelektronik

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Publication number Priority date Publication date Assignee Title
CA2296953A1 (fr) * 1999-01-28 2000-07-28 Berg Technology, Inc. Connecteur electrique pouvant etre connecte selon diverses orientations
DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
JP2006344503A (ja) * 2005-06-09 2006-12-21 Boc Edwards Kk 端子構造及び真空ポンプ
WO2014107157A1 (fr) * 2013-01-04 2014-07-10 Evado Filip Holding Ltd. Port de connexion pour un dispositif électronique

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Publication number Priority date Publication date Assignee Title
DE10107248A1 (de) * 2000-11-03 2002-07-11 Wilo Gmbh In vier Positionen aufsteckbare Motorelektronik

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