EP3029327B1 - System comprising vacuum device and functional unit - Google Patents

Description

The invention relates to a system comprising at least one vacuum device, namely a turbomolecular vacuum pump, and at least one functional unit, wherein a connection is provided by means of which the vacuum device and the functional unit can be electrically and / or informationally connected to one another.

Such systems are generally, ie even when the vacuum device is not a turbomolecular pump, used to perform tasks of vacuum technology, in particular the vacuum generation. Vacuum pumps, such as turbomolecular, rotary vane, side channel, diaphragm, screw, rotary piston, single or multi-stage Roots, diffusion, cryogenic, ion getter, scroll and gas pumps as well as combinations of these pumps, are usually used for vacuum generation , When using such a system are often different requirements in terms of space at different locations to consider. The user can often use a certain system only in a certain spatial orientation, since usually not only the spatial configuration of the system itself, but other circumstances are taken into account, such as the positioning of terminals and the course of connecting cables. This is true not only for drive units and optionally in these integrated power supplies, but also for other accessories and functional parts that need to be placed at specific locations of a vacuum device, in particular a vacuum pump. The configuration of a vacuum system must therefore often be made by the manufacturer individually depending on the particular circumstances at the site for lack of flexibility at the site, which is why a large variety of parts and variants must be provided by the manufacturer. Therefore, among other things attempts, in particular, to make the drive units as small as possible, so that installation problems can not even arise. This However, the general need for more and more efficiency and thus the compulsion for larger drive units or power supplies diametrically opposed.

A system that differs from that of claim 1 in that it does not include a vacuum device but an electric motor is out DE 101 07 248 A1 known.

It is the object of the invention to provide a system of vacuum apparatus, namely turbomolecular vacuum pump, and functional unit, which can be flexibly adapted to different requirements, in particular with regard to the installation space.

This object is achieved by a system having the features of claim 1, and in particular by the fact that the connection is designed such that the vacuum device and the functional unit are technically operable in a plurality of different relative orientations, wherein the relative orientations with respect to the spatial configuration of connected system and / or with regard to the functionality of the connected system.

As a result, the functional unit can be adapted to specific requirements, for example, with regard to the construction space or the direction of the cable outlet, whereby a special design for specific application scenarios is less frequently required. By simply changing the relative orientation different customer wishes can be served. It is also possible to change the relative orientation at the place of use by the customer, which is why the system can be used more flexibly under different requirements. The customer therefore rarely requires costly special solutions and the manufacturer of the system must hold fewer different types of functional units and vacuum devices. So it can be used more equal parts, whereby the cost can be reduced.

The functional unit may comprise, for example, a drive unit, a power supply unit, a control unit for the vacuum unit and / or the drive unit, sensors, a sensor data processing unit, a display or a combination of these components. The vacuum apparatus includes a turbomolecular vacuum pump and may include a vacuum gauge.

The connection may comprise a plug connection, one or more plug-in elements being provided at least at one connection region of the vacuum device and one or more socket elements being provided on at least one connection region of the functional unit. Conversely, the connection may comprise a plug connection, wherein one or more plug-in elements are provided at least at one connection region of the functional unit and one or more socket elements are provided at at least one connection region of the vacuum device. Different relative orientations of the functional unit with respect to the vacuum device can thus be achieved by simply repositioning the connection. The change of the relative orientation is thus facilitated and accelerated.

The connection can be wireless. This facilitates a change in the relative orientation and helps to avoid a wrong connection.

According to the invention, at least one connection region of the vacuum device is to be brought together with at least one connection region of the functional unit for producing the connection, wherein in each case the connection region is formed on an outer side of the vacuum device or the functional unit.

As a result, the system according to the invention differs from one EP 1 715 190 A1 known system comprising a vacuum device in the form of a turbomolecular vacuum pump and a trained as a sensor functional unit.

The connection region of the system according to the invention may be formed on a flat region of the outside.

The connection can be secured or locked in various ways in order to ensure sufficient mechanical stability and protection, in particular of connecting elements, from mechanical stress.

The connector itself may include a locking mechanism such as a bayonet lock coupling ring, which allows the vacuum device and the functional unit to be mechanically securely connected.

Also, a separate mechanical connection such as one or more fittings can be provided. The separate connection can be arranged spatially separated from the connection region or very close or the connection region in another region of the parting plane between the vacuum device and the functional unit.

The connection between the vacuum unit and the functional unit can be centered or positioned in various ways. Both sides of the connection area can be firmly connected to the vacuum device and the functional unit. In this case, the two units are advantageously centered by the connection area and the possibly existing mechanical security provides sufficient space, so that attachment without constraining forces on the connection area is possible.

Alternatively or additionally, one side or both sides of the connection region may be suspended softly or made slidable in the connection plane, so that when aligned with a secondary element, such as e.g. a centering approach, centering pins or, for example, one or more fasteners in the region of the connection plane of the connection area with appropriate clearance remains free of constraining forces. A subsequent securing of the movable connection areas by further securing means can increase the reliability because, in the event of vibrations occurring during operation, no unwanted relative movements can occur within the framework of the game between the elements and thus no loose contacts.

In one embodiment, the different relative orientations are realizable at a junction of the system, i. One and the same connection point between the vacuum device and the functional unit serves to realize the different relative orientations. The location at which respective connection areas of the functional unit and the vacuum unit are connected to one another defines such a connection point. The system can only have exactly one connection point at which a technically functioning connection can be produced for each of the different relative orientations. The system can also have several, located at different locations connection points.

To produce different relative orientations at the one connection point, the vacuum device and the functional unit can be rotated about an axis relative to one another. This makes it easy to connect. In addition, only one connection area on the vacuum device and the functional unit is necessary, which further reduces the cost of the system. However, it is not excluded that the vacuum device and / or the functional unit have more than one connection area.

The connection can be produced in a plurality of different angular positions between the vacuum device and the functional unit with respect to the axis. The more different angular positions are provided, the more different relative orientations of the functional unit relative to the vacuum device can be realized.

In one embodiment, only one connection region of the vacuum device and / or only one connection region of the functional unit is or is involved in the different relative orientations.

The vacuum device and / or the functional unit have only one connection region in one embodiment.

As already mentioned, the vacuum device and / or the functional unit can have more than one connection region. To produce different relative orientations, a connection region of the vacuum device can be brought together with different connection regions of the functional unit. Conversely, to produce different relative orientations, a connecting region of the functional unit can be brought together with different connecting regions of the vacuum device.

On the vacuum device and / or on the functional unit, the connection regions can be provided on different outer sides. This allows, for example, the same functional unit either - depending on the circumstances at the site - either on one side or below the vacuum device. Also, an arrangement on other sides of the vacuum device is conceivable. As a result, the flexible adaptation of the system to the prevailing spatial conditions at the site further improved.

At least one connecting region can be subdivided into different sections on the vacuum device and / or on the functional unit, which differ from one another with regard to the configuration of their connecting elements and / or with regard to the functions assigned to their connecting elements. The connecting elements can thus be designed, for example, in respective sections as a plug-in contact or Berührkontaktierung.

The connection elements of the respective sections may have different functions, such as digital or analog signal or data transmission or an electrical power supply. The assignment of different functions to different sections may facilitate, for example, the internal contacting in the functional unit or in the vacuum device. In addition, mutual electromagnetic interference between individual connectors or conductors can be avoided or reduced. In a first section, for example, connection elements for the information technology connection can be configured, and in a second section, connection elements can be configured for the electrical transmission of a supply or drive energy for a motor of the vacuum device.

Each section may comprise a group of connecting elements, in particular plug-in elements or socket elements.

The sections of the connection area may be arranged spatially separated from each other. This reduces mutual electromagnetic interference between different sections. For example, a high-voltage power transmission section may be arranged separately from a signal transmission section. In particular, interference with sensor signals can thereby be reduced, and sensitive signal processing circuits can be protected against undesired contact with a power supply voltage during the connection process or during operation. The vacuum device and / or the functional unit may be designed to recognize the respective relative orientation. This makes it possible to control or connect the connection depending on the relative orientation.

The detection can be done by means of the connection. As a result, the detection function is realized in a particularly simple manner, since no additional means for detection are required.

The vacuum device and / or the functional unit may be designed to automatically produce the functionality of the connected system as a function of the respective relative orientation. Thereby, the number of necessary connection elements in the connection can be reduced, since the same connection elements can be controlled or wired differently depending on the relative orientation. For example, for driving a motor of the vacuum device, three connecting elements for three phases of a three-phase drive can be provided. If the relative orientation is changed here, the motor would then possibly rotate in the opposite direction. The phases of the three-phase drive can therefore be automatically switched or controlled in a suitable sequence in this example, so that again a desired phase relationship is achieved at the motor and this rotates in the desired direction.

If there is more than one connection area or if the functional unit in turn has a connection area, multiple combinations of vacuum device and several functional units are also possible. In this case, in turn, different types of the compounds shown can be produced, so that the various functional units advantageously cooperate in a suitable manner.

By way of example, a vacuum device can be connected to a drive unit, wherein in addition a power supply unit is either connected directly to the vacuum unit or to the drive unit, so that the tasks "vacuum generation", "driving" and "voltage conversion" are modularly covered by the various components and using the Connection areas are possible.

Further embodiments of the invention are indicated in the dependent claims, the description and the drawings.

Fig. 1

ein System aus Vakuumgerät und Funktionseinheit,

Fig. 2

eine Ausführungsform einer erfindungsgemäßen Verbindung,

Fig. 3

eine weitere Ausführungsform einer erfindungsgemäßen Verbindung,

Fig. 4

eine weitere Ausführungsform einer erfindungsgemäßen Verbindung,

Fig. 5

eine Ausführungsform eines erfindungsgemäßen Systems mit mehreren Verbindungstellen und mit mehr als einem Verbindungsbereich an dem Vakuumgerät,

Fig. 6

ein erfindungsgemäßes System mit genau einer Verbindungsstelle,

Fig. 7

eine Ausführungsform von zur Verbindung vorgesehenen Verbindungselementen,

Fig. 8

eine Ausführungsform einer erfindungsgemäßen Verbindung.

The invention will now be described by way of example only with reference to the schematic drawing, in which:

Fig. 1

a system of vacuum equipment and functional unit,

Fig. 2

an embodiment of a compound according to the invention,

Fig. 3

a further embodiment of a compound according to the invention,

Fig. 4

a further embodiment of a compound according to the invention,

Fig. 5

an embodiment of a system according to the invention with a plurality of connection points and with more than one connection region on the vacuum device,

Fig. 6

an inventive system with exactly one connection point,

Fig. 7

an embodiment of connecting elements provided for the connection,

Fig. 8

an embodiment of a compound according to the invention.

Fig. 1 shows a system of vacuum device 10 and functional unit 12. Between the vacuum device 10 and the functional unit 12, a connection 14 is provided. The vacuum device 10 is a turbomolecular vacuum pump, while the functional unit 12 is a turbo-molecular vacuum pump drive device. The connection 14 provides an electrical connection to the power supply and - depending on the design or additional functionality of the drive unit 12 - also provide an information technology connection, ie allow communication between the vacuum pump 10 and drive unit 12, for example by the transmission of signals and the Transmission of data in one direction or in both directions.

The connection 14 is designed such that the functional unit 12 can be changed by rotation about the axis A in its relative arrangement with respect to the vacuum device 10, wherein furthermore an electrical and / or information technology connection of the functional unit 12 to the vacuum device 10 is ensured. Mechanical pivotal mounting may be provided, but is not mandatory, i. A change in the relative orientation can also be achieved simply by first disconnecting the connection 14 by removing the drive unit 12 and restoring it by reconnecting it in a direction rotated relative to the original state.

The functional unit 12 in FIG Fig. 1 has a cable outlet 34, for example for electrical power to the system. By changing the relative orientation of the functional unit 12, the cable outlet 34 at a other place, so no longer on the right side, order. Since cable and cable outlets require considerable space, can react flexibly in this embodiment to external requirements in terms of space. Also, cable lengths that are necessary in another relative orientation may be lower, saving costs, minimizing electromagnetic interference, and preventing tripping hazards due to cables in the field.

Fig. 2 shows an embodiment of a compound 14 according to the invention (eg according to FIG Fig. 1 ) serving connection region 15 with connecting elements 32. The representation may correspond to a connection region of the vacuum device and / or a connection region of the functional unit. The connecting elements 32 are divided into different sections, namely a supply section 30 and two signal sections 28. The connecting elements 32 of the signal sections 28 are configured to transmit information digitally or analogously. For example, the signal sections 28 may also include one or more low voltage electrical energy connectors 32, such as 3.3 volts, 12 volts, or 24 volts. The connecting elements 32 may be electromagnetically shielded from another section and / or from each other. The connection elements 32 of the supply section 30 are designed for supplying electrical energy at a supply voltage, such as, for example, 400 volts. This is indicated by the representation of the connecting elements 32 in the supply section 30 with a larger cross-section, since higher currents are to be expected in the supply section. The supply section 30 has three connecting elements 32, which may be designed, for example, for the transmission of three phases of a three-phase drive for an electric motor.

The connection area 15 of Fig. 2 and thus the connection that can be produced with this - in this case and also always subsequently with reference to the plane of the drawing - is designed to be axisymmetric with respect to axis B. However, the connection area 15 is Also carried out such that it continues to function technically after a rotation of the functional unit 12 or the vacuum device 10 by the angle 180 ° here about the axis A, which is perpendicular to the image plane and passes through the center of the connection 14. The connection region 15 is thus - again here and also always subsequently based on the plane of the drawing - also rotationally symmetrical with respect to the intersection of the axis A with the plane of the drawing. This can be effected, for example, by a connection of the connecting elements 32 adapted to the relative orientation. Alternatively, for example, opposing connecting elements 32 may be electrically connected to one another on at least one side, that is to say in the connection region 15 of the vacuum device 10 or the functional unit 12.

The term opposite here is to be understood in the sense of point symmetry, here refers to the axis A, which in Fig. 2 passes through the middle of the three connecting elements 32 of the supply section 30. In this sense, the connection element 32 arranged on the bottom left in the image lies opposite the connecting element 32 arranged on the top right in the image, both of which are located in a respective signal section 28. In other words, the connecting element 32 shown below on the left can be imaged by a rotation about the axis A by 180 ° onto the connecting element 32, which is shown at the top right (point symmetry). The term opposite thus does not refer to the in Fig. 2 visible axis B and the axis symmetry of the compound 14, but on the point symmetry with respect to the axis A. This definition of the term "opposite" will also be used in the further description application.

In Fig. 2 Consequently, each connecting element 32 is associated with an opposing connecting element 32. The in the center, that is arranged on the axis A, connecting element 32 is assigned to itself. The compound 14 of Fig. 2 allows two different relative arrangements of connection areas of the vacuum device and the functional unit. These two arrangements are different by the angle α of 180 °. As a result, two relative orientations between the functional unit and the vacuum unit, which are different from one another by 180 °, are made possible.

The connecting elements 32 in the embodiment of Fig. 2 , but also in the other embodiments, may for example be designed as plug-in elements, as socket elements, as touch or sliding contacts or as optical transmission elements. The connecting elements 32 of the Fig. 2 For example, they may be implemented as part of a rectangular plug or a rectangular socket.

In Fig. 3 a further embodiment of a connection region 15 of a connection is shown, which comprises a round plug with connecting elements 32. The connection region 15 may be that of the vacuum device and / or the functional unit. The axes B have an angular distance α of 120 ° with each other. The connection 14 is designed such that three different arrangements of connection regions of the vacuum device and the functional unit with respect to each other and thus three different relative orientations between the vacuum device and the functional unit can be realized. For this purpose, only one of the connection areas must be inserted rotated by the angle α of 120 ° about the axis A. The axis A is perpendicular to the image plane and passes through the intersection of the axes B, ie through the center of the connecting region 15th

In Fig. 3 Thus, after a rotation of one of the connecting regions by 120 ° about the axis A, each connecting element 32 is assigned a connecting element 32 and, after a further rotation by 120 °, a further connecting element 32. The mutually associated connecting elements 32 may be electrically connected to one another on one side, that is to say in one of the connecting regions (in the vacuum device or in the functional unit), or depending on the relative orientation between vacuum device 10 and functional unit 12 can be connected or controlled.

The connecting elements 32 are in Fig. 3 in different sections, namely in a signal section 28 and in a supply section 30, arranged. The signal section 28 represents a concentric ring section surrounding the supply section 30. The connection elements 32 are arranged in concentric circles in the respective sections. The connecting portion 30 has connecting elements 32 for the electrical power supply of the vacuum device by the functional unit. The connection elements 32 of the signal section 28 are designed to transmit information or energy at low voltages. The frame of the circular connector, as in other embodiments, may be formed as a return conductor or as a protective conductor and / or as a shield for the connecting elements 32.

Fig. 4 shows an embodiment of a connecting portion 15, which is designed as a round plug connection and six different relative orientations between a vacuum device 10 and a functional unit 12 allows. The different relative orientations can be achieved by turning, for example, the functional unit 12 about the axis A, which in turn is perpendicular to the image plane through the connecting center, by an angle α. The twisting includes a plug connection and a previous removal or unplugging and re-plugging. The angle α is 60 ° or an integer multiple thereof. The connection 14 is made axially symmetrical with respect to the axes B. The axes B form a common point of intersection with the axis A arranged perpendicular to the image plane. A connecting element 32 is associated with a further connecting element 32 at each rotation of a connecting region by 60 ° about the axis A. In other words, in each case six connecting elements 32 can be imaged on one another by a rotation about the axis A. Fig. 5 shows a vacuum device 10, here again a turbomolecular vacuum pump, with a plurality of connecting regions on the vacuum device 10. A functional unit 12, here again a drive unit, has a connection region which forms one of thus several possible connections 14 with one of the connection regions of the vacuum device 10, namely at three different connection points. The functional unit 12 is arranged laterally on the vacuum device 10. Dashed lines indicate further possible relative orientations of the functional unit 12 relative to the vacuum device 10. The connection region of the functional unit 12 can therefore in each case produce a connection 14 together with one of the further connection regions of the vacuum device 10 in order to produce a different relative orientation of the functional unit 12 with respect to the vacuum device 10. Each of the connecting portions of the vacuum device 10 and the functional unit 12 may be, for example, according to Fig. 2, 3, 4 . 7 and 8th be educated. In Fig. 5 Thus, further, not indicated by dashed lines relative orientations of the functional unit 12 with respect to the vacuum device 10 can be achieved by twisting at one of the connection points. Are the three connection portions of the vacuum device 10, for example, according to the embodiment of Fig. 2 executed, six different relative orientations of the functional unit 12 with respect to the vacuum device 10 can be produced.

Fig. 6 shows another system of turbomolecular vacuum pump 10 as a vacuum device and drive unit 12 as a functional unit with a connection 14 at exactly one connection point. In dashed lines, another possible relative orientation of the functional unit 12 is indicated. The connecting regions of the vacuum device and the functional unit are arranged at 45.degree. Obliquely to two adjacent, mutually perpendicular sides of the vacuum pump 10, that by a rotation through 180.degree. A connecting axis A, the corresponding angularly formed functional unit 12 either below the Vacuum device 10 or laterally on the vacuum device 10 can be arranged. The connection 14 thus allows at least a rotation of the cooperating connection regions relative to one another by 180 °, for example according to the embodiment according to FIG Fig. 2 , The vacuum device 10 and the functional unit 12 each have only one connection region for producing the connection 14. The vacuum device 10 or the functional unit 12 can, however, also other connection areas, for example, according to the embodiment of Fig. 5 exhibit. In Fig. 6 By tilting the connecting regions, the arrangement of the functional unit 12 in highly different relative orientations with respect to the vacuum device 10 is allowed. The system can thus be carried out particularly flexibly with respect to installation space requirements with only a few connection areas and few permitted rotations about the connection axis.

In Fig. 7 there is shown a pair of plug and socket for forming a connection according to the invention. The plug has plug-in elements 16 and the socket has socket elements 18. The connecting elements 32 are thus designed here as plug-in elements 16 and female members 18. The socket and the socket elements 18 and the plug and the plug-in elements 16 are designed to produce a connection 14 in three different relative orientations. The relative orientations differ by the angle α of 120 ° about the axis A perpendicular to the image plane.

The plug here comprises fewer plug-in elements 16 than the socket bushing elements 18 comprises. However, the female members 18 are so electrically connected or connectable to their female members 18 associated with rotation about the axis A that the male connector technically functions in a plurality of three different relative orientations here. In this embodiment, plug-in elements 16 have been saved, whereby the plug can be made cheaper. Conversely, the bush can be less Socket elements 18 have as the plug has plug elements 16. In this case, free spaces in the form of recesses are provided for the plug-in elements on the socket side.

In Fig. 8 An embodiment of a connection 14 with plug-in elements 16 and sleeve elements 18 shown in dashed lines is shown. The cooperating male members 16 and female members 18 are arranged grouped in different sections. In a supply section 30 five socket elements 18 and only three plug-in elements 16 are arranged. In each case two socket sections 18 are arranged in two signal sections 28, but plug-in elements 16 are arranged only in one of the signal sections 28. By way of example, the plug-in elements 16 are part of a connection region of a functional unit 12 and the socket elements 18 are part of a connection region of a vacuum device 10.

The connecting portion of the vacuum device 10 is axially symmetric with respect to the axis B executed. Plug elements 16 are arranged in the connecting region of the functional unit 12 only on one side of the axis B. The female members 18 are also arranged point-symmetrically with respect to the connecting center and the axis A, which is perpendicular to the plane of extension of the connector and through the connecting center. After a rotation of the connection region of the functional unit 12 with respect to the connection center or the axis A, each plug-in element 16 cooperates with an opposite socket element 18 for producing an electrical connection. The plug-in element 16 arranged in the connection center continues to interact with the same socket element 18 as before.

For some jack elements is in Fig. 8 the respective electrical connection with the opposite socket member 18 indicated by lines 20, 22, 24 and 26. For example, the female element is on the top right with the female element electrically connected at the bottom left. Thus, in each of the two relative orientations possible here, the vacuum device 10 "sees" the same function for each of opposing female elements 18 of a pair. In principle, no recognition of the relative orientation of the functional unit 12 relative to the vacuum device 10 by one of the two components is necessary in this embodiment. Nevertheless, it can be provided for further improvement of the system.

In general and in principle also for each of the embodiments shown, a respective connection region can be fixedly connected to the functional unit or the vacuum device. However, the connection regions can also be designed to be rotatable or displaceable relative to the respective component.

By a compound of the invention, for example, one of the in the Fig. 2, 3, 4 . 7 and 8th 2, a functional unit embodied as a drive unit and a vacuum unit designed as a turbomolecular vacuum pump can be plugged into one another in more than one relative orientation. This allows the drive unit, in which the necessary fastening means can be mounted according to the respective orientations, mounted differently. This can be operated by simply changing the components of different customer requirements. Also, a change of orientation by the customer on site becomes possible. For this purpose, the connector can be designed so symmetrical that all contacts are arranged so that each possible angle step different connections come about, however, can be assigned to the correct functions by detecting the plug alignment or electrical contact in one of the connection areas.

Usually, for example, three drive phases are provided for an electric motor. However, these do not have to be clearly assigned to corresponding output stages be. An exchange of drive phases changes, depending on the case, the direction of rotation of a rotor of the motor. This can be compensated for example by a corresponding recognition of the relative orientation and corrective wiring by the drive software.

In the vacuum device, for example, one or more temperature sensors can be provided, which can be arranged for example in the outer regions of a plug and are arranged with their contacts such that the same technical connections, but different channel assignments are given at each rotation step. The assignment of measuring channels to measuring points can - as explained above in the drive phases - done by appropriate detection of the orientation of the connector.

For the detection of relative orientation of the connection, for example, separate plug contacts can be used, which allow depending on the rotation step, a digital coding and / or feedback by a defined characteristic resistor. The connection may also include one or more data bus contacts. Also, connecting elements can be arranged distributed such that certain distances, for example prescribed spark gaps between high and low current elements, can be maintained between the connecting elements.

The different relative orientations of vacuum device and functional unit can be used, for example, for a choice of direction for cable outlets of the functional unit by the customer. For example, by an oblique arrangement of the connector can be different relative to the vacuum pump after rotation, the position of the drive unit. A drive unit can therefore be converted by simply moving from the side of a vacuum pump to below the vacuum pump. An oblique arrangement of a Plug connection can also be used in conjunction with angle plugs for a free choice of cable outlets.

To ensure correct channel assignment in the vacuum device or in the functional unit, two possibilities have been presented in principle. First, mating or opposing interconnect elements 32 may be internally directly electrically connected. In Fig. 8 are correspondingly opposite bushing elements 18 hardwired in the connection region of the vacuum device 10. In this first possibility, a larger number of connecting elements 32 is generally necessary. An adaptation of the wiring by software and a detection of the relative orientation can be omitted. Second, the connection elements 32 can be connected depending on the relative orientation. As a result, connecting elements 32 can be saved, in which case a recognition of the existing relative orientation by hardware or software is provided. The relative orientation can be recognized, for example, by an additional sensor or only by the electrical activity of the other connection partner.

LIST OF REFERENCE NUMBERS

10

vacuum device

12

functional unit

14

connection

15

connecting area

16

plug-in element

18

female member

20

management

22

management

24

management

26

management

28

signal section

30

supply section

32

connecting member

34

cable outlet

A

axis

B

axis

α

angle

Claims (15)

1. A system comprising at least one vacuum device (10), namely a turbomolecular pump; at least one functional unit (12), in particular a drive device, for the vacuum device (10);
   and a connection (14) by means of which the vacuum device (10) and the functional unit (12) are connectable to one another electrically and/or in an information technological manner,
   wherein the connection (14) is configured such that the vacuum device (10) and the functional unit (14) are connectable in a plurality of different relative orientations in a technically functional manner;
   wherein the relative orientations differ from one another with respect to the spatial configuration of the connected system and/or with respect to the functionality of the connected system; and
   wherein at least one connection region (15) of the vacuum device (10) has to be united with at least one connection region (15) of the functional unit (12) to establish the connection (14), with the respective connection region (15) being formed at an outer side of the vacuum device (10) or of the functional unit (12).
2. A system in accordance with claim 1,
   characterized in that
   the connection (14) comprises a plug-in connection, with one or more plug-in elements (16) being provided at at least one connection region (15) of the vacuum device (10) and with one or more socket elements (18) being provided at at least one connection region (15) of the functional unit (12), or vice versa.
3. A system in accordance with claim 1 or claim 2,
   characterized in that
   the connection (14) is cable-free.
4. A system in accordance with any one of the preceding claims,
   characterized in that
   the respective connection region is formed at a planar region of the outer side.
5. A system in accordance with any one of the preceding claims,
   characterized in that
   the different relative orientations can be implemented at a connection point of the system, with the system having exactly one connection point or a plurality of connection points.
6. A system in accordance with claim 5,
   characterized in that
   the vacuum device (10) and the functional unit (12) are to be rotated relative to one another about an axis (A) to establish the different relative orientations at the one connection point.
7. A system in accordance with claim 6,
   characterized in that
   the connection (14) can be established in a plurality of different angular positions between the vacuum device (10) and the functional unit (12) with respect to the axis (A).
8. A system in accordance with any one of the preceding claims,
   characterized in that
   only one connection region (15) of the vacuum device (10) and/or only one connection region (15) of the functional unit (12) is/are engaged at the different relative orientations.
9. A system in accordance with any one of the preceding claims,
   characterized in that
   the vacuum device (10) and/or the functional unit (12) only has/have exactly one connection region (15).
10. A system in accordance with any one of the claims 1 to 8,
    characterized in that
    the vacuum device (10) and/or the functional unit (12) has/have more than one connection region (15) and a connection region (15) of the vacuum device has to be united with different connection regions (15) of the functional unit, or vice versa, to establish different relative orientations.
11. A system in accordance with claim 10,
    characterized in that
    the connection regions (15) are provided at different outer sides at the vacuum device (10) and/or at the functional unit (12).
12. A system in accordance with any one of the preceding claims,
    characterized in that
    at least one connection region (15) is divided into different sections (28, 30) at the vacuum device (10) and/or at the functional unit (12), said sections differing from one another with respect to the configuration of their connection elements (32) and/or with respect to the functions associated with their connection elements (32),
    with each section (28, 30) in particular comprising a group of connection elements (32), in particular plug-in elements (16) or socket elements (18).
13. A system in accordance with claim 12,
    characterized in that
    the sections (28, 30) of the connection region (15) are arranged spatially separate from one another.
14. A system in accordance with any one of the preceding claims,
    characterized in that
    the vacuum device (10) and/or the functional unit (12) is/are configured to recognize the respective relative orientation,
    with the recognition in particular taking place by means of the connection (14).
15. A system in accordance with any one of the preceding claims,
    characterized in that
    the vacuum device (10) and/or the functional unit (12) is/are configured to automatically establish the functionality of the connected system in dependence on the respective relative orientation.

Images