JP7158745B2 - 基板を除去する方法 - Google Patents
基板を除去する方法 Download PDFInfo
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- JP7158745B2 JP7158745B2 JP2019560276A JP2019560276A JP7158745B2 JP 7158745 B2 JP7158745 B2 JP 7158745B2 JP 2019560276 A JP2019560276 A JP 2019560276A JP 2019560276 A JP2019560276 A JP 2019560276A JP 7158745 B2 JP7158745 B2 JP 7158745B2
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- nitride semiconductor
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2304/00—Special growth methods for semiconductor lasers
- H01S2304/12—Pendeo epitaxial lateral overgrowth [ELOG], e.g. for growing GaN based blue laser diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0201—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth
- H01S5/0203—Etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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Description
本願は、以下の係属中の共有に係る出願の米国特許法119(e)に基づく利益を主張する:米国仮特許出願第62/502,205号(2017年5月5日出願、Takeshi Kamikawa,Srinivas Gandrothula,Hongjian Li and Daniel A. Cohenによる、名称「METHOD OF REMOVING A SUBSTRATE」、代理人事件番号30794.653-US-P1 (UC 2017-621-1))。上記出願は、参照により本明細書に引用される。
本発明は、例えば、以下を提供する。
(項目1)
基板を除去する方法であって、前記方法は、
III族窒化物系基板の上または上方に成長制限マスクを形成することと、
前記成長制限マスクを使用して、前記III族窒化物系基板の上または上方に1つ以上のIII族窒化物系半導体層を成長させることにより、1つ以上の島状半導体層を作成することと、
前記島状半導体層を支持基板に接合することと、
前記支持基板を使用して、前記島状半導体層から前記III族窒化物系基板を除去することと
を含む、方法。
(項目2)
前記島状半導体層から前記III族窒化物系基板を除去することは、エッチングすることによって前記成長制限マスクの少なくとも一部を溶解し、前記島状半導体層から前記III族窒化物系基板を除去することを含む、項目1に記載の方法。
(項目3)
前記島状半導体層から前記III族窒化物系基板を除去することは、前記支持基板を使用して、前記III族窒化物系基板から前記島状半導体層をはがすことを含む、項目1に記載の方法。
(項目4)
前記III族窒化物系基板は、支持基板に接合される、項目1に記載の方法。
(項目5)
前記III族窒化物系基板は、前記III族窒化物系基板が前記島状半導体層から除去された後、再生利用される、項目1に記載の方法。
(項目6)
前記成長制限マスクは、パターン化されている、項目1に記載の方法。
(項目7)
前記成長制限マスクは、複数のストライプと、開放エリアとから成る、項目6に記載の方法。
(項目8)
前記III族窒化物系半導体層のうちの1つ以上のものの成長は、前記成長制限マスクの開放エリアに平行な方向に広がる、項目7に記載の方法。
(項目9)
前記III族窒化物系半導体層のうちの1つ以上のものは、エピタキシャル側方過成長(ELO)によって成長させられる、項目1に記載の方法。
(項目10)
前記エピタキシャル側方過成長は、前記III族窒化物系半導体層のうちの1つ以上のものが合体する前に、停止させられる、項目9に記載の方法。
(項目11)
前記III族窒化物系半導体層の少なくとも一部は、前記成長制限マスクの少なくとも一部を露出するために、エッチングすることによって除去される、項目1に記載の方法。
(項目12)
前記成長制限マスクの少なくとも一部は、前記III族窒化物系基板の少なくとも一部を露出するために、エッチングすることによって除去される、項目1に記載の方法。
(項目13)
前記成長制限マスクの少なくとも一部は、前記成長制限マスクの開放エリアの上方の前記III族窒化物系半導体層の少なくとも一部をエッチングすることによって除去される、項目1に記載の方法。
(項目14)
前記III族窒化物系半導体層から層が屈曲している領域を除去することをさらに含む、項目1に記載の方法。
(項目15)
項目1に記載の方法によって製作される素子。
(概要)
(用語の定義)
(GaN系基板)
(GaN系半導体層)
(成長制限マスク)
(ELO GaN系層)
(開放エリアのエッチング)
(エッチング領域)
(層が屈曲している領域)
(島状半導体層)
(エッチング領域)
(支持基板)
(基板の除去)
(第1および第2の支持基板)
(N電極)
(ファセット)
(チップ分割)
(プロセスステップ)
(利点および恩恵)
本発明は、いくつかの利点および恩恵を提供する。
(修正および代替)
(結論)
Claims (16)
- III族窒化物系半導体素子を製造する方法であって、
基板と、前記基板上又は上方に位置し複数の開放エリアを有するマスクと、前記複数の開放エリアのうちの1つから前記マスク上にわたって形成され、隣り合うIII族窒化物系半導体層と間隔を空けて形成された複数のIII族窒化物系半導体層と、を備えたIII族窒化物系半導体層形成基板を準備する工程と、
前記複数のIII族窒化物系半導体層のうち前記開放エリア上又は上方の部分を除去する工程と、
前記基板を前記複数のIII族窒化物系半導体層から除去する工程と、
を含む、III族窒化物系半導体素子を製造する方法。 - 前記基板を前記複数のIII族窒化物系半導体層から除去する工程を経た後の前記複数の開放エリアのうちの1つから形成された前記III族窒化物系半導体層は、分割されていることを特徴とする請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記基板を前記複数のIII族窒化物系半導体層から除去する工程を経た後の前記複数の開放エリアのうちの1つから形成された前記III族窒化物系半導体層は、層が屈曲している領域を有することを特徴とする請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記複数のIII族窒化物系半導体層の各々から素子が形成される、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記マスクは複数のストライプを含み、前記複数の開放エリアの各々は前記複数のストライプのうちの各2つの間に配置される、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記複数のIII族窒化物系半導体層は、エピタキシャル側方過成長(ELO)によって成長する、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記エピタキシャル側方過成長は、前記複数のIII族窒化物系半導体層が合体する前に停止させられる、請求項6に記載のIII族窒化物系半導体素子を製造する方法。
- 前記基板を除去する工程は、前記基板から前記複数のIII族窒化物系半導体層を完全に分離することを含む、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記基板は、III族窒化物系基板である、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記複数のIII族窒化物系半導体層から、層が屈曲している領域を除去することをさらに含む、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記基板を除去する工程において、支持基板が前記基板の除去に使用される、請求項4に記載のIII族窒化物系半導体素子を製造する方法。
- 前記支持基板は、前記素子の形成のために分割される、請求項11に記載のIII族窒化物系半導体素子を製造する方法。
- 前記基板を除去する工程の後、前記基板は再利用される、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記複数のIII族窒化物系半導体層のうち前記開放エリア上又は上方の部分を除去する工程は、前記マスクのうち前記部分に近い部分をエッチングすることを含む、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- 前記複数のIII族窒化物系半導体層と前記マスクとの界面は平面である、請求項1に記載のIII族窒化物系半導体素子を製造する方法。
- III族窒化物系半導体層を有する半導体素子であって、
前記III族窒化物系半導体層は、一端に層が屈曲している領域を有し、他端にエッチングにより除去された領域を有する、半導体素子。
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WO2020150511A1 (en) * | 2019-01-16 | 2020-07-23 | The Regents Of The University Of California | Method for removal of devices using a trench |
US20220181210A1 (en) * | 2019-03-12 | 2022-06-09 | The Regents Of The University Of California | Method for removing a bar of one or more devices using supporting plates |
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KR20230028782A (ko) * | 2020-06-19 | 2023-03-02 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | 반도체 디바이스를 실현하기 위한 이송 프로세스 |
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