JP7146412B2 - 樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 - Google Patents
樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 Download PDFInfo
- Publication number
- JP7146412B2 JP7146412B2 JP2018029875A JP2018029875A JP7146412B2 JP 7146412 B2 JP7146412 B2 JP 7146412B2 JP 2018029875 A JP2018029875 A JP 2018029875A JP 2018029875 A JP2018029875 A JP 2018029875A JP 7146412 B2 JP7146412 B2 JP 7146412B2
- Authority
- JP
- Japan
- Prior art keywords
- resin film
- film
- roller
- substrate
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229920005989 resin Polymers 0.000 title claims description 89
- 239000011347 resin Substances 0.000 title claims description 89
- 239000007788 liquid Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 146
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000005587 bubbling Effects 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000005187 foaming Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013039 cover film Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 238000010538 cationic polymerization reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/18—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/112—Single lapped joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/112—Single lapped joints
- B29C66/1122—Single lap to lap joints, i.e. overlap joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/05—Particular design of joint configurations
- B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
- B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
- B29C66/114—Single butt joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/01—General aspects dealing with the joint area or with the area to be joined
- B29C66/347—General aspects dealing with the joint area or with the area to be joined using particular temperature distributions or gradients; using particular heat distributions or gradients
- B29C66/3474—General aspects dealing with the joint area or with the area to be joined using particular temperature distributions or gradients; using particular heat distributions or gradients perpendicular to the plane of the joint
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
- B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
- B29C66/45—Joining of substantially the whole surface of the articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/50—General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
- B29C66/51—Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
- B29C66/53—Joining single elements to tubular articles, hollow articles or bars
- B29C66/534—Joining single elements to open ends of tubular or hollow articles or to the ends of bars
- B29C66/5346—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat
- B29C66/53461—Joining single elements to open ends of tubular or hollow articles or to the ends of bars said single elements being substantially flat joining substantially flat covers and/or substantially flat bottoms to open ends of container bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/72—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the structure of the material of the parts to be joined
- B29C66/723—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the structure of the material of the parts to be joined being multi-layered
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/731—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the intensive physical properties of the material of the parts to be joined
- B29C66/7311—Thermal properties
- B29C66/73113—Thermal conductivity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/735—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the extensive physical properties of the parts to be joined
- B29C66/7352—Thickness, e.g. very thin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
- B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
- B29C66/7392—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/80—General aspects of machine operations or constructions and parts thereof
- B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
- B29C66/836—Moving relative to and tangentially to the parts to be joined, e.g. transversely to the displacement of the parts to be joined, e.g. using a X-Y table
- B29C66/8362—Rollers, cylinders or drums moving relative to and tangentially to the parts to be joined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/914—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
- B29C66/9141—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature
- B29C66/91421—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature of the joining tools
- B29C66/91423—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature of the joining tools using joining tools having different temperature zones or using several joining tools with different temperatures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/91—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
- B29C66/919—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges
- B29C66/9192—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams
- B29C66/91921—Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux characterised by specific temperature, heat or thermal flux values or ranges in explicit relation to another variable, e.g. temperature diagrams in explicit relation to another temperature, e.g. to the softening temperature or softening point, to the thermal degradation temperature or to the ambient temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
- B32B37/0023—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality around holes, apertures or channels present in at least one layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0076—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised in that the layers are not bonded on the totality of their surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
- B29C66/929—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools characterized by specific pressure, force, mechanical power or displacement values or ranges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/90—Measuring or controlling the joining process
- B29C66/93—Measuring or controlling the joining process by measuring or controlling the speed
- B29C66/939—Measuring or controlling the joining process by measuring or controlling the speed characterised by specific speed values or ranges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/02—Temperature
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Quality & Reliability (AREA)
- Fluid Mechanics (AREA)
- Geometry (AREA)
- Ink Jet (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Laminated Bodies (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
パターン形状が形成された基板に、支持フィルムに積層支持された樹脂膜をローラーを用いて貼着する方法であって、
ステージの上に基板を載置する工程と、
前記ステージの表面温度を前記樹脂膜の軟化温度以上に設定し、前記ローラーの表面温度を前記樹脂膜の軟化温度未満に設定する設定工程と、
前記ステージの上に載置した前記基板に前記樹脂膜の貼着される面である第1面を向けて該樹脂膜を配置し、前記ローラーを前記支持フィルムの側から前記基板に向けて圧接して走査する貼着工程と、
前記支持フィルムを前記樹脂膜から剥離する剥離工程と、
を含み
前記貼着工程において、前記樹脂膜の前記第1面の温度は該樹脂膜の軟化温度以上となっており、前記第1面の反対側で該支持フィルムに接する第2面の温度は該樹脂膜の軟化温度未満となっていることを特徴とする。
図1は精密微細加工により複数の貫通孔18を形成した基板1に対してベースフィルム27とその表面に塗布したレジストフィルム35からなるドライフィルム40を貼着し、ベースフィルム27を剥離した時の模式図である。ドライフィルムとは、可撓性の支持フィルム(ベースフィルム)の上に液体レジスト等を塗布し固化させたレジストフィルムを積層支持した積層フィルムであり、ベースフィルムはレジストフィルムの貼着後に剥離する。工程を詳細に説明すると、図1(a)に示すように、まず加熱可能なステージ9の上に基板1を載置する。次に図1(b)に示すように、基板1の上にドライフィルム40をその貼着される面(第1面)を向けて配置する。そして、加熱可能な転写ローラー(以下、単に「ローラー」という。)8を有するラミネート装置を用いて加熱・加圧してラミネートする。つまり、加熱したローラー8でドライフィルム40をベースフィルム27側から圧接、走査して貼着する。このとき、ローラー8の表面温度とステージ9の表面温度などを所定の条件を満たすように設定しておく(後述)。次に図1(c)に示すようにベースフィルム27を剥離すると、図1(d)に示すようにレジストフィルム35を貼着させた基板1が得られる。なお、図1では表面から裏面まで貫通孔を形成した基板1を例示しているが、複数のパターン形状は表面側から基板に掘り込まれただけの凹部でもよい。また、図1(b)ではあらかじめ基板1の上にドライフィルム40を載置しておいてローラー8で走査する方法を記載した。しかしこれに限らず、基板1に接しないように上方に張架されたドライフィルム40をローラー8で基板1に圧接しながら走査し貼着する方法でもよい。
第1実施形態と同様に、精密微細加工した基板1をステージ9の上に載置し(図1(a))、基板1の上にドライフィルム40を貼着する(図1(b))。第2の実施形態では、ステージ9の表面温度、ローラー8の表面温度が共にレジストフィルム35の軟化温度より高い45℃に設定する。ただし、ローラー(移動)速度を高速化することで、界面Yへの熱伝達を抑制する。ローラー速度は例えば5mm/s以上の速度が好ましい(実施例2を参照)。ローラー8の表面は熱伝導率の低い材料、例えば0.3W/m・K以下の材料が好ましく、例えばシリコーンゴム、ブチルゴム、ニトリルゴム、ウレタンゴムが挙げられる。これにより、界面Yへの熱伝導を減らすことができ、結果的にレジストフィルム35の第2面の温度はレジストフィルム35の軟化温度よりも低くなる。
精密微細加工した基板1に対してレジストフィルム35を貼着する場合に、使用するベースフィルム27についても熱伝導率が低い材料を使用することが好ましい。具体的には、ベースフィルム27の熱伝導率は、0.3W/m・K以下であることが好ましい。例えばPET、ポリイミド、炭化水素系フィルムを使用することができる。またベースフィルムの厚みは厚くする、例えば50~500μmの範囲が適している。その結果、ローラー8の表面温度が軟化温度以上であっても、界面Yへの熱伝導が少ないため、結果的にレジストフィルム35の第2面の温度はレジストフィルム35の軟化温度よりも低くなる。
(実施例1)
上記の樹脂膜の貼着方法を用いて、図5に示す液体吐出ヘッドを作製した。以下にその液体吐出ヘッドの具体的な製造工程について図6を参照して説明する。なお、図6は図5のA-A’断面で示した製造方法の工程図である。
実施例1と同様に吐出エネルギー発生素子12が設けられた基板11に対し、Si深堀エッチングにより、共通液室13及びインク供給口16を形成しさらに吐出口形成部材20を形成した。その後、基板11の裏面に第3の感光性樹脂層26をラミネートする工程において、ステージ表面温度45℃、ローラー表面温度45℃ローラー圧力0.2MPa,ローラー速度10mm/sで貼着した。この条件で作製された液体吐出ヘッドは、ローラー表面温度は45℃と第3の感光性樹脂層26の軟化温度より高かったが、同じ温度条件での実施例1のローラー速度より速くすることにより、基板との密着性だけでなく平坦性も同時に確保することができた。
実施例1と同様に吐出エネルギー発生素子12が設けられた基板11に対し、Si深堀エッチングにより、共通液室13及びインク供給口16を形成し、さらに吐出口形成部材20を形成した。その後、基板11の裏面に第3の感光性樹脂層26をラミネートする工程において、表1に示すようなステージ表面温度、ローラー表面温度の組み合わせでローラー圧力0.2MPa,ローラー速度5mm/sでラミネートした。ローラー表面温度が45℃以上、又はステージ表面温度が35℃以下の条件で作製された液体吐出ヘッドは、基板との密着性が悪いか、平坦性が悪化していた。
2、12 吐出エネルギー発生素子
3、13 共通液室
5、15 吐出口
6、16 インク供給口
7、17 流路部材
8 (転写)ローラー
9 ステージ
10 発泡室
18 貫通孔
20 吐出口形成部材
23、25、27 ベースフィルム(支持フィルム)
22 第1の感光性樹脂
24 第2の感光性樹脂
26 第3の感光性樹脂(流路部材)
28、29、30 未露光部
31、33、37 マスク
32、34、36 露光光
35 レジストフィルム(樹脂膜)
40、41、42 ドライフィルム
Claims (8)
- パターン形状が形成された基板に、支持フィルムに積層支持された樹脂膜をローラーを用いて貼着する方法であって、
ステージの上に基板を載置する工程と、
前記ステージの表面温度を前記樹脂膜の軟化温度以上に設定し、前記ローラーの表面温度を前記樹脂膜の軟化温度未満に設定する設定工程と、
前記ステージの上に載置した前記基板に前記樹脂膜の貼着される面である第1面を向けて該樹脂膜を配置し、前記ローラーを前記支持フィルムの側から前記基板に向けて圧接して走査する貼着工程と、
前記支持フィルムを前記樹脂膜から剥離する剥離工程と、
を含み
前記貼着工程において、前記樹脂膜の前記第1面の温度は該樹脂膜の軟化温度以上となっており、前記第1面の反対側で該支持フィルムに接する第2面の温度は該樹脂膜の軟化温度未満となっていることを特徴とする樹脂膜の貼着方法。 - 前記貼着工程では、前記ローラーを走査する前に前記ローラーを加熱することで前記ローラーの表面温度を前記樹脂膜の軟化温度よりも高くし、その後、前記ローラーを5mm/s以上の速度で走査する請求項1に記載の樹脂膜の貼着方法。
- 前記設定工程は、前記樹脂膜の軟化温度が35℃~45℃の場合、前記ローラーの表面温度が30℃~40℃、前記ステージの表面温度が40℃~50℃に設定する請求項1又は2に記載の樹脂膜の貼着方法。
- 前記ローラーの表面が熱伝導率が0.3W/m・K以下の材料で構成される請求項1から3のいずれか一項に記載の樹脂膜の貼着方法。
- 前記支持フィルムは、厚さが50~500μmであり、熱伝導率が0.3W/m・K以下である請求項1から4のいずれか一項に記載の樹脂膜の貼着方法。
- 前記支持フィルムはドライフィルムのベースフィルムであり、前記樹脂膜は該ベースフィルムに積層支持されたレジストフィルムであり、前記ローラーは該ベースフィルムと当接し、該レジストフィルムの貼着後に該ベースフィルムを剥離する工程をさらに有する請求項1から5のいずれか一項に記載の樹脂膜の貼着方法。
- 液体を吐出するための複数のエネルギー発生素子と、該液体を供給するための表面から裏面に貫通した複数の共通液室を備えた基板を有する液体吐出ヘッドの製造方法であって、
請求項1から6のいずれか一項に記載の樹脂膜の貼着方法を含み、
前記樹脂膜は該基板に貼着される流路部材であることを特徴とする液体吐出ヘッドの製造方法。 - 液体を吐出するための複数のエネルギー発生素子を有する基板と複数の吐出口を有する吐出口形成部材を備える液体吐出ヘッドの製造方法であって、
請求項1から6のいずれか一項に記載の樹脂膜の貼着方法を含み、
前記樹脂膜は前記基板に貼着される前記吐出口形成部材であることを特徴とする液体吐出ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018029875A JP7146412B2 (ja) | 2018-02-22 | 2018-02-22 | 樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 |
US16/273,362 US20190255831A1 (en) | 2018-02-22 | 2019-02-12 | Method of attaching resin film and method of manufacturing liquid ejection head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018029875A JP7146412B2 (ja) | 2018-02-22 | 2018-02-22 | 樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019142153A JP2019142153A (ja) | 2019-08-29 |
JP7146412B2 true JP7146412B2 (ja) | 2022-10-04 |
Family
ID=67616614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018029875A Active JP7146412B2 (ja) | 2018-02-22 | 2018-02-22 | 樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20190255831A1 (ja) |
JP (1) | JP7146412B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7263091B2 (ja) * | 2019-04-17 | 2023-04-24 | キヤノン株式会社 | 構造体の製造方法 |
JP6977089B2 (ja) * | 2020-03-25 | 2021-12-08 | キヤノン株式会社 | 構造体の製造方法及び液体吐出ヘッドの製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008000963A (ja) | 2006-06-21 | 2008-01-10 | Tokyo Ohka Kogyo Co Ltd | 精密微細空間の形成方法、精密微細空間を有する部材の製造方法および感光性積層フィルム |
JP2016043516A (ja) | 2014-08-20 | 2016-04-04 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2017030302A (ja) | 2015-08-05 | 2017-02-09 | キヤノン株式会社 | 構造物の製造方法、および液体吐出ヘッドの製造方法 |
JP2017209951A (ja) | 2016-05-27 | 2017-11-30 | キヤノン株式会社 | 構造体の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746879A (en) * | 1994-04-13 | 1998-05-05 | Plascore, Inc. | Apparatus for making honeycomb from substrates and node strips |
WO2007094396A1 (ja) * | 2006-02-16 | 2007-08-23 | Tokyo Ohka Kogyo Co., Ltd. | 感光性樹脂組成物およびこれを用いたパターン形成方法 |
US8187408B2 (en) * | 2006-06-21 | 2012-05-29 | Tokyo Ohka Kogyo Co., Ltd. | Method of forming precision microspace, process for manufacturing member with precision microspace, and photosensitive laminated film |
AU2013233704C1 (en) * | 2012-03-16 | 2016-07-14 | Jx Nippon Oil & Energy Corporation | Manufacturing method and manufacturing device for optical substrate having concavo-convex pattern using film-shaped mold, and manufacturing method for device provided with optical substrate |
WO2017067604A1 (en) * | 2015-10-23 | 2017-04-27 | Hewlett-Packard Indigo B.V. | Laminates |
-
2018
- 2018-02-22 JP JP2018029875A patent/JP7146412B2/ja active Active
-
2019
- 2019-02-12 US US16/273,362 patent/US20190255831A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008000963A (ja) | 2006-06-21 | 2008-01-10 | Tokyo Ohka Kogyo Co Ltd | 精密微細空間の形成方法、精密微細空間を有する部材の製造方法および感光性積層フィルム |
JP2016043516A (ja) | 2014-08-20 | 2016-04-04 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2017030302A (ja) | 2015-08-05 | 2017-02-09 | キヤノン株式会社 | 構造物の製造方法、および液体吐出ヘッドの製造方法 |
JP2017209951A (ja) | 2016-05-27 | 2017-11-30 | キヤノン株式会社 | 構造体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20190255831A1 (en) | 2019-08-22 |
JP2019142153A (ja) | 2019-08-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5686224A (en) | Ink jet print head having channel structures integrally formed therein | |
US20080231739A1 (en) | Solid-state imaging device and method for manufacturing the same | |
JP4594755B2 (ja) | インクジェットプリントヘッドを作製する方法 | |
US20090186293A1 (en) | Dry film protoresist for a micro-fluid ejection head and method therefor | |
JP7146412B2 (ja) | 樹脂膜の貼着方法及び液体吐出ヘッドの製造方法 | |
JP6598497B2 (ja) | 液体吐出ヘッド及びその製造方法 | |
US8156650B2 (en) | Method of manufacturing a nozzle plate | |
US9809027B2 (en) | Method of manufacturing structure and method of manufacturing liquid ejection head | |
US10279589B2 (en) | Method for manufacturing structure | |
TW200304874A (en) | Method for manufacturing an ink jet head | |
JP2016043516A (ja) | 液体吐出ヘッドの製造方法 | |
JP6478741B2 (ja) | 液体吐出ヘッドの製造方法 | |
JP7013274B2 (ja) | 液体吐出ヘッドの製造方法 | |
US10618286B2 (en) | Manufacturing method for structure and manufacturing method for liquid ejecting head | |
US11155093B2 (en) | Method of producing structure, protective substrate, and method of producing protective substrate | |
TW200901338A (en) | Method of bonding MEMS integrated circuits | |
US20070039676A1 (en) | Lamination of dry film to micro-fluid ejection head substrates | |
JP2018069649A (ja) | 樹脂層の形成方法と液体吐出ヘッドの製造方法 | |
JP6929657B2 (ja) | 液体吐出ヘッドの製造方法 | |
US9862189B2 (en) | Method for manufacturing liquid ejection head | |
US20220032623A1 (en) | Thin film manufacturing method and method of manufacturing substrate | |
JP6570349B2 (ja) | 液体吐出ヘッドの製造方法 | |
US20230055886A1 (en) | Flow path member and liquid discharge head | |
US20130152390A1 (en) | Process for producing a liquid ejection head | |
JP2021091192A (ja) | 構造物の製造方法および液体吐出ヘッドの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210210 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211116 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220113 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220222 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220531 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220726 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220823 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220921 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7146412 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |