JP7142015B2 - 異なって向けられたナノビームを有するメタ表面によって形成された回折格子 - Google Patents

異なって向けられたナノビームを有するメタ表面によって形成された回折格子 Download PDF

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JP7142015B2
JP7142015B2 JP2019540043A JP2019540043A JP7142015B2 JP 7142015 B2 JP7142015 B2 JP 7142015B2 JP 2019540043 A JP2019540043 A JP 2019540043A JP 2019540043 A JP2019540043 A JP 2019540043A JP 7142015 B2 JP7142015 B2 JP 7142015B2
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nanobeams
light
optical system
metasurface
refractive index
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JP2020507113A (ja
Inventor
ディアンミン リン,
マイケル アンソニー クルグ,
ティレール, ピエール サン
マウロ メッリ,
クリストフ ぺロス,
エフゲニー ポリアコフ,
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Magic Leap Inc
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Magic Leap Inc
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1866Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871Transmissive phase gratings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • G02B27/0172Head mounted characterised by optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1809Diffraction gratings with pitch less than or comparable to the wavelength
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1842Gratings for image generation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0013Means for improving the coupling-in of light from the light source into the light guide
    • G02B6/0015Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/0016Grooves, prisms, gratings, scattering particles or rough surfaces
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H1/024Hologram nature or properties
    • G03H1/0244Surface relief holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101Nanooptics
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00Light sources or light beam properties
    • G03H2222/31Polarised light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00Optical components
    • G03H2223/16Optical waveguide, e.g. optical fibre, rod

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Head (AREA)
  • Polarising Elements (AREA)
JP2019540043A 2017-01-27 2018-01-25 異なって向けられたナノビームを有するメタ表面によって形成された回折格子 Active JP7142015B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022014711A JP7416551B2 (ja) 2017-01-27 2022-02-02 異なって向けられたナノビームを有するメタ表面によって形成された回折格子

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762451615P 2017-01-27 2017-01-27
US201762451608P 2017-01-27 2017-01-27
US62/451,608 2017-01-27
US62/451,615 2017-01-27
PCT/US2018/015324 WO2018140651A1 (en) 2017-01-27 2018-01-25 Diffraction gratings formed by metasurfaces having differently oriented nanobeams

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JP2020507113A JP2020507113A (ja) 2020-03-05
JP7142015B2 true JP7142015B2 (ja) 2022-09-26

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JP2019540043A Active JP7142015B2 (ja) 2017-01-27 2018-01-25 異なって向けられたナノビームを有するメタ表面によって形成された回折格子
JP2022014711A Active JP7416551B2 (ja) 2017-01-27 2022-02-02 異なって向けられたナノビームを有するメタ表面によって形成された回折格子
JP2023094685A Active JP7564913B2 (ja) 2017-01-27 2023-06-08 異なって向けられたナノビームを有するメタ表面によって形成された回折格子
JP2024168438A Active JP7772894B2 (ja) 2017-01-27 2024-09-27 異なって向けられたナノビームを有するメタ表面によって形成された回折格子

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JP2023094685A Active JP7564913B2 (ja) 2017-01-27 2023-06-08 異なって向けられたナノビームを有するメタ表面によって形成された回折格子
JP2024168438A Active JP7772894B2 (ja) 2017-01-27 2024-09-27 異なって向けられたナノビームを有するメタ表面によって形成された回折格子

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US (4) US10466394B2 (enExample)
EP (2) EP4206752A1 (enExample)
JP (4) JP7142015B2 (enExample)
KR (3) KR102668813B1 (enExample)
CN (2) CN114200562A (enExample)
AU (2) AU2018212726B2 (enExample)
CA (1) CA3051414A1 (enExample)
IL (3) IL307294A (enExample)
WO (1) WO2018140651A1 (enExample)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10514296B2 (en) 2015-07-29 2019-12-24 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US11867556B2 (en) 2015-07-29 2024-01-09 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US11268854B2 (en) 2015-07-29 2022-03-08 Samsung Electronics Co., Ltd. Spectrometer including metasurface
US11231544B2 (en) 2015-11-06 2022-01-25 Magic Leap, Inc. Metasurfaces for redirecting light and methods for fabricating
AU2017260208B2 (en) 2016-05-06 2021-09-23 Magic Leap, Inc. Metasurfaces with asymetric gratings for redirecting light and methods for fabricating
DE102016225344A1 (de) * 2016-12-16 2018-06-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
EP4206752A1 (en) 2017-01-27 2023-07-05 Magic Leap, Inc. Diffraction gratings formed by metasurfaces having differently oriented nanobeams
IL268115B2 (en) 2017-01-27 2024-01-01 Magic Leap Inc Antireflection coatings for metasurfaces
WO2018218063A1 (en) 2017-05-24 2018-11-29 The Trustees Of Columbia University In The City Of New York Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces
KR102718309B1 (ko) 2017-08-31 2024-10-15 메탈렌츠 인코포레이티드 투과성 메타표면 렌즈 통합
EP3735601B1 (en) 2018-01-04 2025-08-27 Magic Leap, Inc. Optical elements based on polymeric structures incorporating inorganic materials
WO2019147828A1 (en) * 2018-01-24 2019-08-01 President And Fellows Of Harvard College Polarization state generation with a metasurface
EP3746817A4 (en) 2018-01-29 2021-10-20 University of Washington FULL COLOR METASURFACES AND IMAGING SYSTEMS AND IMAGING PROCESSES
US11378818B2 (en) 2018-03-01 2022-07-05 Essilor International Lens element
JP7418339B2 (ja) 2018-03-01 2024-01-19 エシロール・アンテルナシオナル レンズ要素
US11846779B2 (en) 2018-03-15 2023-12-19 Meta Platforms Technologies, Llc Display device with varifocal optical assembly
US11327306B2 (en) 2018-03-15 2022-05-10 Facebook Technologies, Llc Angular performance of apochromatic pancharatnam berry phase components using a C-plate
US11187655B2 (en) * 2018-05-16 2021-11-30 Sensera, Inc. Compact gas sensors
EP3799626A4 (en) 2018-07-02 2022-03-30 Metalenz, Inc. Metasurfaces for laser speckle reduction
KR102683759B1 (ko) * 2018-12-18 2024-07-10 삼성전자주식회사 영상을 표시하는 장치, 방법 및 컴퓨터 프로그램
KR102820518B1 (ko) * 2019-01-30 2025-06-13 삼성전자주식회사 회절격자 소자와 이를 포함하는 스크린 및 그 제조방법과 스크린을 포함하는 증강현실 및/또는 가상현실용 디스플레이 장치
JP7498191B2 (ja) 2019-03-12 2024-06-11 マジック リープ, インコーポレイテッド 高屈折率材料を伴う導波管およびその加工方法
CN110011063B (zh) * 2019-04-11 2021-11-02 电子科技大学 基于时间反演产生任意方向贝塞尔波束的方法
US12050327B2 (en) 2019-06-04 2024-07-30 Applied Materials, Inc. Imaging system and method of manufacturing a metalens array
CN114008524A (zh) 2019-06-05 2022-02-01 应用材料公司 用于平坦光学装置的孔
CN110311214B (zh) * 2019-06-10 2021-06-08 西安电子科技大学 基于单层人工表面等离激元的宽带高隔离度双圆极化天线
EP3999884A4 (en) 2019-07-19 2023-08-30 Magic Leap, Inc. Display device having diffraction gratings with reduced polarization sensitivity
WO2021021671A1 (en) 2019-07-26 2021-02-04 Metalenz, Inc. Aperture-metasurface and hybrid refractive-metasurface imaging systems
WO2021034413A1 (en) * 2019-08-21 2021-02-25 Magic Leap, Inc. Flat spectral response gratings using high index materials
JP7420926B2 (ja) * 2019-09-11 2024-01-23 マジック リープ, インコーポレイテッド 低減された偏光感度を有する回折格子を伴うディスプレイデバイス
EP3798716A1 (en) * 2019-09-27 2021-03-31 Schott AG Waveguide device comprising optical elements of selected refractive index
FR3102573B1 (fr) * 2019-10-28 2024-12-13 Centre Nat Rech Scient Elément optique diffractif comprenant une métasurface pour la microscopie TIRF
US11578968B1 (en) 2019-10-31 2023-02-14 President And Fellows Of Harvard College Compact metalens depth sensors
EP4055423A4 (en) * 2019-11-08 2024-01-10 Magic Leap, Inc. METASURFACES WITH LIGHT REORIENTATION STRUCTURES INCLUDING MULTIPLE MATERIALS AND MANUFACTURING METHODS
CN111007585B (zh) * 2019-12-06 2021-04-02 武汉大学 消除零级的超表面正弦光栅及其设计方法
WO2021191150A1 (en) * 2020-03-23 2021-09-30 Interdigital Ce Patent Holdings, Sas Unpolarized light grating in-coupler
US11153556B1 (en) 2020-03-31 2021-10-19 Toyota Motor Engineering & Manufacturing North America, Inc. Volumetric accessing of a volumetric display
CN111399262B (zh) * 2020-04-27 2023-10-31 南京南辉智能光学感控研究院有限公司 一种可调太赫兹透镜及其制备方法和应用
US12461276B2 (en) 2020-05-01 2025-11-04 3M Innovative Properties Company Reflective optical metasurface films
US11726234B2 (en) 2020-05-04 2023-08-15 Visera Technologies Company Limited Optical device
CN111458880B (zh) * 2020-05-09 2022-04-22 三生万物(北京)人工智能技术有限公司 一种波导光场显示装置和头戴式增强现实眼镜
WO2022013780A1 (en) * 2020-07-14 2022-01-20 National Research Council Of Canada Waveguide antenna device
KR102862830B1 (ko) 2020-07-20 2025-09-19 어플라이드 머티어리얼스, 인코포레이티드 광학 디바이스들을 위한 통합 전도성 애퍼쳐들
US20220137410A1 (en) * 2020-11-05 2022-05-05 Facebook Technologies, Llc Phase structure on surface-relief grating-based waveguide display
US12360383B2 (en) 2020-11-24 2025-07-15 Applied Materials, Inc. Planarized crystalline films for diffractive optics
US11468281B2 (en) * 2020-11-27 2022-10-11 Thales Dis France Sa Data carrier with tamper-indication
CN114609803B (zh) * 2020-12-04 2024-07-19 清华大学 一种基于液晶材料的动态超构表面
CN112733343B (zh) * 2020-12-30 2022-04-15 武汉大学 实现可重构水印的超表面彩色纳米印刷器件的设计方法
KR20230133860A (ko) * 2021-02-05 2023-09-19 스냅 인코포레이티드 증강 현실 또는 가상 현실 디스플레이에 표시되는 이미지상에 팬토스코픽 틸트 또는 랩/스윕 틸트 효과를 보상하는 장치 및 방법
EP4293416A4 (en) 2021-02-12 2024-07-31 Sony Group Corporation Image display device and display device
US11782290B2 (en) * 2021-05-21 2023-10-10 Lightspace Group, Inc. Apparatus and method for displaying three-dimensional image
CN113391384B (zh) * 2021-06-04 2022-05-17 武汉大学 基于级联纳米微结构的片上定向整流超表面及其设计方法
WO2023278791A1 (en) * 2021-07-01 2023-01-05 Google Llc Waveguide with anti-reflection properties
US12276792B2 (en) 2021-07-01 2025-04-15 Google Llc Waveguide with anti-reflection properties
US20230118081A1 (en) * 2021-10-15 2023-04-20 Applied Materials, Inc. Multilayer transmission structures for waveguide display
CN113990908A (zh) * 2021-10-28 2022-01-28 京东方科技集团股份有限公司 显示基板、其制作方法及显示装置
US12140754B2 (en) * 2021-12-30 2024-11-12 Goertek Inc. Optical display system and augmented reality electronic device
CN114509838B (zh) * 2022-01-05 2023-11-14 中国科学院苏州纳米技术与纳米仿生研究所 氮化镓基激光器及其内氮化镓纳米超结构的制备方法
US12422677B2 (en) * 2022-02-03 2025-09-23 Microsoft Technology Licensing, Llc Slanted surface relief grating replication by optical proximity recording
CN114721071B (zh) * 2022-03-15 2025-04-29 苏州山河光电科技有限公司 一种超表面光学器件及其制作工艺
CN114815961A (zh) * 2022-03-18 2022-07-29 清华大学 片上光学衍射计算处理器及全光学图像分类设备
EP4502707A4 (en) * 2022-03-31 2025-07-09 Panasonic Ip Man Co Ltd OPTICAL SYSTEM AND IMAGE DISPLAY DEVICE
US11927769B2 (en) 2022-03-31 2024-03-12 Metalenz, Inc. Polarization sorting metasurface microlens array device
CN114966915B (zh) * 2022-05-25 2025-04-01 苏州山河光电科技有限公司 一种对称型超表面光学器件
EP4519202A4 (en) * 2022-06-03 2025-06-04 Magic Leap, Inc. Embossing techniques in nanolithography for optical devices
WO2024019365A1 (ko) * 2022-07-21 2024-01-25 삼성전자 주식회사 메타표면에 기반한 이미지 컴바이너 및 이를 채용한 증강현실 디바이스
CN114935790B (zh) * 2022-07-21 2022-09-27 北京驭光科技发展有限公司 衍射光波导及显示设备
WO2024024129A1 (ja) * 2022-07-26 2024-02-01 ソニーグループ株式会社 光演算装置および光演算処理システム
CN120077316A (zh) * 2022-10-21 2025-05-30 奇跃公司 用于增强现实设备的混合表面浮雕波导结构的方法和系统
KR102808356B1 (ko) * 2022-12-26 2025-05-19 고려대학교 세종산학협력단 풀컬러 레이저 광원 결합을 위한 회절 광학 도파로 소자 및 그의 설계 방법
FI20235940A1 (en) * 2023-08-24 2025-02-25 Dispelix Oy DISPLAY STRUCTURE
FI20236225A1 (en) * 2023-11-02 2025-05-03 Dispelix Oy DISPLAY CONSTRUCTION
US20250244598A1 (en) * 2024-01-26 2025-07-31 Coherent Photonics Llc Polarization Separating and Converting Meta-Optical Structures
US20250318298A1 (en) 2024-04-08 2025-10-09 Visera Technologies Company Ltd. Image sensor

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005018061A (ja) 2003-06-27 2005-01-20 Agilent Technol Inc 反射防止コーティングを施された回折光学素子
JP2006337758A (ja) 2005-06-02 2006-12-14 Fuji Xerox Co Ltd 3次元構造体の製造方法及び3次元構造体製造用基板
JP2007265581A (ja) 2006-03-30 2007-10-11 Fujinon Sano Kk 回折素子
JP2009506347A (ja) 2004-08-31 2009-02-12 ディジタル・オプティックス・コーポレイション モノリシック偏向制御角拡散器および関連方法
WO2012046414A1 (ja) 2010-10-04 2012-04-12 パナソニック株式会社 光取り込みシートおよびロッド、ならびに、それらを用いた受光装置および発光装置
JP2012510637A (ja) 2009-01-21 2012-05-10 レイブンブリック,エルエルシー 光学的メタポラライザ・デバイス
US20140063585A1 (en) 2012-08-31 2014-03-06 John G. Hagoplan Phase-controlled magnetic mirror, mirror system, and methods of using the mirror
US20160025914A1 (en) 2014-07-27 2016-01-28 The Board Of Trustees Of The Leland Stanford Junior University Dielectric Metasurface Optical Elements
WO2016161175A1 (en) 2015-04-02 2016-10-06 University Of Rochester Freeform nanostructured surface for virtual and augmented reality near eye display
US20160306079A1 (en) 2015-04-14 2016-10-20 California Institute Of Technology Multi-wavelength optical dielectric metasurfaces
WO2016205249A1 (en) 2015-06-15 2016-12-22 Magic Leap, Inc. Virtual and augmented reality systems and methods
JP2017500605A (ja) 2013-11-27 2017-01-05 マジック リープ, インコーポレイテッド 仮想現実および拡張現実のシステムおよび方法
WO2017193012A1 (en) 2016-05-06 2017-11-09 Magic Leap, Inc. Metasurfaces with asymetric gratings for redirecting light and methods for fabricating
JP2018536204A (ja) 2015-11-24 2018-12-06 プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ 可視スペクトルの波長のための誘電体メタサーフェス(metasurface)を製造するための原子層堆積プロセス
US20190206136A1 (en) 2018-01-04 2019-07-04 Magic Leap, Inc. Optical elements based on polymeric structures incorporating inorganic materials
JP2020507112A (ja) 2017-01-27 2020-03-05 マジック リープ, インコーポレイテッドMagic Leap,Inc. メタ表面のための反射防止コーティング

Family Cites Families (157)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588370A (en) 1978-05-11 1981-04-23 Standard Telephones Cables Ltd Infra-red transmitting elements
JPS60140204A (ja) 1983-12-28 1985-07-25 Toshiba Corp 光導波路レンズ及びその製造方法
JPS6286307A (ja) 1985-10-11 1987-04-20 Canon Inc グレ−テイングカツプラ
JPS63223602A (ja) * 1987-03-12 1988-09-19 Mitsubishi Electric Corp 回折格子
US4839464A (en) 1987-08-25 1989-06-13 Regents Of The University Of Minnesota Polypeptides with fibronectin activity
US6222525B1 (en) 1992-03-05 2001-04-24 Brad A. Armstrong Image controllers with sheet connected sensors
US5336073A (en) 1992-12-16 1994-08-09 Sumitomo Heavy Industries, Ltd. Injection pressure limiting device for injection molding machine
JPH06347630A (ja) 1993-04-13 1994-12-22 Matsushita Electric Ind Co Ltd 回折素子およびその製造方法ならびに光波長変換素子およびその製造方法
DE4338969C2 (de) 1993-06-18 1996-09-19 Schott Glaswerke Verfahren zur Herstellung anorganischer diffraktiver Elemente und Verwendung derselben
US5670988A (en) 1995-09-05 1997-09-23 Interlink Electronics, Inc. Trigger operated electronic device
JP4164895B2 (ja) 1998-04-08 2008-10-15 松下電器産業株式会社 偏光性回折格子の作成方法
US6728034B1 (en) 1999-06-16 2004-04-27 Matsushita Electric Industrial Co., Ltd. Diffractive optical element that polarizes light and an optical pickup using the same
US6122103A (en) 1999-06-22 2000-09-19 Moxtech Broadband wire grid polarizer for the visible spectrum
US6754006B2 (en) * 2001-10-05 2004-06-22 General Atomics Hybrid metallic-dielectric grating
KR100418910B1 (ko) * 2001-12-21 2004-02-14 엘지전자 주식회사 광자 결정 제조 장치 및 방법
JP4183444B2 (ja) 2002-05-29 2008-11-19 アルプス電気株式会社 光学部材
US20040047039A1 (en) 2002-06-17 2004-03-11 Jian Wang Wide angle optical device and method for making same
WO2004003596A2 (en) * 2002-06-28 2004-01-08 Technion Research And Development Foundation Ltd. Geometrical phase optical elements with space-variant subwavelength gratings
US7794831B2 (en) 2003-07-28 2010-09-14 Vampire Optical Coating, Inc. Anti-reflective coating
US9255955B2 (en) 2003-09-05 2016-02-09 Midtronics, Inc. Method and apparatus for measuring a parameter of a vehicle electrical system
US7315426B2 (en) 2003-12-05 2008-01-01 University Of Pittsburgh Metallic nano-optic lenses and beam shaping devices
USD514570S1 (en) 2004-06-24 2006-02-07 Microsoft Corporation Region of a fingerprint scanning device with an illuminated ring
JP2008511874A (ja) 2004-09-01 2008-04-17 アプティカル リサーチ アソシエイツ 傾斜/偏心レンズ素子を有する小形ヘッド取付け表示装置
WO2006031545A1 (en) 2004-09-09 2006-03-23 Fusion Optix, Inc. Enhanced lcd backlight
US7570424B2 (en) 2004-12-06 2009-08-04 Moxtek, Inc. Multilayer wire-grid polarizer
US7961393B2 (en) 2004-12-06 2011-06-14 Moxtek, Inc. Selectively absorptive wire-grid polarizer
JP2006162981A (ja) 2004-12-07 2006-06-22 Fujitsu Ltd 光スイッチ装置および光学部材ユニット
JP2006163291A (ja) 2004-12-10 2006-06-22 Canon Inc 光学素子及びその製造方法
US7206107B2 (en) 2004-12-13 2007-04-17 Nokia Corporation Method and system for beam expansion in a display device
US20060154044A1 (en) 2005-01-07 2006-07-13 Pentax Corporation Anti-reflection coating and optical element having such anti-reflection coating for image sensors
GB2439231B (en) 2005-03-10 2011-03-02 Konica Minolta Holdings Inc Resin film substrate for organic electroluminescence and organic electroluminescence device
US7573640B2 (en) 2005-04-04 2009-08-11 Mirage Innovations Ltd. Multi-plane optical apparatus
US20090087794A1 (en) 2005-05-02 2009-04-02 Oki Electric Industry Co., Ltd. Method for manufacturing diffractive optical element
JP4720984B2 (ja) 2005-05-18 2011-07-13 日産化学工業株式会社 段差を有する基板上に被覆膜を形成する方法
JP5023324B2 (ja) * 2005-06-27 2012-09-12 国立大学法人東北大学 カラーフィルタ装置及びその製造方法
ATE400062T1 (de) * 2005-06-30 2008-07-15 Suisse Electronique Microtech Farbbildaufnahmesensor
JP2007033558A (ja) 2005-07-22 2007-02-08 Nippon Zeon Co Ltd グリッド偏光子及びその製法
GB2430760A (en) 2005-09-29 2007-04-04 Bookham Technology Plc Chirped Bragg grating structure
US20070081123A1 (en) 2005-10-07 2007-04-12 Lewis Scott W Digital eyewear
US8696113B2 (en) 2005-10-07 2014-04-15 Percept Technologies Inc. Enhanced optical and perceptual digital eyewear
US11428937B2 (en) 2005-10-07 2022-08-30 Percept Technologies Enhanced optical and perceptual digital eyewear
KR100697614B1 (ko) 2006-01-31 2007-03-22 주식회사 엘지에스 회절격자 및 그 제조 방법
JP2007219106A (ja) 2006-02-16 2007-08-30 Konica Minolta Holdings Inc 光束径拡大光学素子、映像表示装置およびヘッドマウントディスプレイ
JP2007279458A (ja) * 2006-04-07 2007-10-25 Miraial Kk サブ波長格子光学素子
US7821691B2 (en) 2006-07-28 2010-10-26 CSEM Centre Suisse d'Electronique et de Microtechnique SA—Recherche et Développement Zero-order diffractive filter
KR100818272B1 (ko) 2006-08-21 2008-04-01 삼성전자주식회사 색분산이 개선된 홀로그래픽 도광판
US7905650B2 (en) 2006-08-25 2011-03-15 3M Innovative Properties Company Backlight suitable for display devices
CN101177237A (zh) 2006-11-07 2008-05-14 财团法人工业技术研究院 纳米阵列及其形成方法
EP2088123A1 (en) 2006-11-10 2009-08-12 Sumitomo Electric Industries, Ltd. Si-O CONTAINING HYDROGENATED CARBON FILM, OPTICAL DEVICE INCLUDING THE SAME, AND METHOD FOR MANUFACTURING THE Si-O CONTAINING HYDROGENATED FILM AND THE OPTICAL DEVICE
US7991257B1 (en) 2007-05-16 2011-08-02 Fusion Optix, Inc. Method of manufacturing an optical composite
US10452026B2 (en) * 2007-08-11 2019-10-22 Massachusetts Institute Of Technology Transparent flat-panel holographic display
KR100918381B1 (ko) 2007-12-17 2009-09-22 한국전자통신연구원 광통신을 위한 회절격자 커플러를 포함하는 반도체집적회로 및 그 형성 방법
JP2009169213A (ja) 2008-01-18 2009-07-30 Seiko Epson Corp ワイヤーグリッド偏光素子の製造方法及び液晶装置の製造方法
JP2009169214A (ja) 2008-01-18 2009-07-30 Seiko Epson Corp カラーフィルター用インクセット、カラーフィルター、画像表示装置、および、電子機器
JP5272434B2 (ja) 2008-02-18 2013-08-28 凸版印刷株式会社 表示体
JP2009288718A (ja) 2008-05-30 2009-12-10 Kyoto Institute Of Technology 共振グレーティングカップラ
US9116302B2 (en) 2008-06-19 2015-08-25 Ravenbrick Llc Optical metapolarizer device
JPWO2010016559A1 (ja) 2008-08-07 2012-01-26 旭硝子株式会社 回折格子、収差補正素子および光ヘッド装置
US7929815B2 (en) 2008-08-27 2011-04-19 International Business Machines Corporation Optical coupling device
US9082673B2 (en) 2009-10-05 2015-07-14 Zena Technologies, Inc. Passivated upstanding nanostructures and methods of making the same
WO2010057219A1 (en) 2008-11-17 2010-05-20 Luminit Llc Holographic substrate-guided wave-based see-through display
JP5145516B2 (ja) 2008-12-10 2013-02-20 綜研化学株式会社 波長分波光学素子およびカプラー
CN101556356B (zh) 2009-04-17 2011-10-19 北京大学 一种光栅耦合器及其在偏振和波长分束上的应用
KR101556356B1 (ko) 2009-06-23 2015-10-02 주성엔지니어링(주) 가스 분사 장치 및 이를 구비하는 박막 제조 장치
JP4491555B1 (ja) 2009-06-29 2010-06-30 ナルックス株式会社 光学素子及びその製造方法
US11320571B2 (en) 2012-11-16 2022-05-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view with uniform light extraction
US20110166045A1 (en) 2009-12-01 2011-07-07 Anuj Dhawan Wafer scale plasmonics-active metallic nanostructures and methods of fabricating same
US8786852B2 (en) 2009-12-02 2014-07-22 Lawrence Livermore National Security, Llc Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto
US8194302B2 (en) * 2009-12-15 2012-06-05 Hewlett-Packard Development Company, L.P. Active chiral photonic metamaterial
US8917447B2 (en) 2010-01-13 2014-12-23 3M Innovative Properties Company Microreplicated film for attachment to autostereoscopic display components
JP5424154B2 (ja) 2010-04-28 2014-02-26 公立大学法人大阪府立大学 光学部品
WO2011140544A2 (en) 2010-05-07 2011-11-10 President And Fellows Of Harvard College Integrated nanobeam cavity array spectrometer
JP2012016253A (ja) 2010-07-05 2012-01-19 Panasonic Electric Works Co Ltd エネルギ管理システム
KR101432115B1 (ko) * 2010-07-15 2014-08-21 한국전자통신연구원 메타 물질 및 그의 제조방법
JP2012027221A (ja) 2010-07-23 2012-02-09 Asahi Kasei Corp ワイヤーグリッド偏光子
US8467643B2 (en) 2010-08-13 2013-06-18 Toyota Motor Engineering & Mfg. North America, Inc. Optical device using double-groove grating
US8798414B2 (en) 2010-09-29 2014-08-05 President And Fellows Of Harvard College High quality factor photonic crystal nanobeam cavity and method of designing and making same
US9304319B2 (en) 2010-11-18 2016-04-05 Microsoft Technology Licensing, Llc Automatic focus improvement for augmented reality displays
NZ706893A (en) 2010-12-24 2017-02-24 Magic Leap Inc An ergonomic head mounted display device and optical system
US10156722B2 (en) 2010-12-24 2018-12-18 Magic Leap, Inc. Methods and systems for displaying stereoscopy with a freeform optical system with addressable focus for virtual and augmented reality
CN102540306B (zh) 2010-12-31 2015-03-25 北京京东方光电科技有限公司 光栅片、液晶显示装置及光栅片、液晶面板的制造方法
JP2012159802A (ja) 2011-02-02 2012-08-23 Ricoh Co Ltd 光学素子、光ピックアップ、光情報処理装置、光減衰器、偏光変換素子、プロジェクタ光学系、アイソレータ及び光学機器
CN103620478B (zh) 2011-04-18 2017-08-25 Bae系统公共有限公司 投影显示器
JP2012230246A (ja) 2011-04-26 2012-11-22 Asahi Glass Co Ltd 光学ローパスフィルタ及び撮像装置
AU2012253797B2 (en) 2011-05-06 2017-06-22 Magic Leap, Inc. Massive simultaneous remote digital presence world
WO2012162880A1 (zh) 2011-05-31 2012-12-06 苏州苏大维格光电科技股份有限公司 一种反射式彩色滤光片
EP2530499A1 (en) * 2011-06-01 2012-12-05 Université Jean-Monnet Planar grating polarization transformer
WO2013033591A1 (en) 2011-08-31 2013-03-07 President And Fellows Of Harvard College Amplitude, phase and polarization plate for photonics
KR101871803B1 (ko) * 2011-09-06 2018-06-29 한국전자통신연구원 유기발광다이오드 및 그의 제조방법
WO2013049861A1 (en) 2011-09-29 2013-04-04 Magic Leap, Inc. Tactile glove for human-computer interaction
CN103091747B (zh) 2011-10-28 2015-11-25 清华大学 一种光栅的制备方法
CN104011788B (zh) 2011-10-28 2016-11-16 奇跃公司 用于增强和虚拟现实的系统和方法
EP2783352B1 (en) 2011-11-23 2019-03-27 Magic Leap, Inc. Three dimensional virtual and augmented reality display system
KR102022719B1 (ko) 2012-04-05 2019-11-05 매직 립, 인코포레이티드 능동 포비에이션 능력을 갖는 와이드-fov(field of view) 이미지 디바이스들
US9419249B2 (en) 2012-04-13 2016-08-16 Asahi Kasei E-Materials Corporation Light extraction product for semiconductor light emitting device and light emitting device
JP6342888B2 (ja) 2012-04-27 2018-06-13 レイア、インコーポレイテッドLeia Inc. 表示画面で使用される指向性画素
WO2013184556A1 (en) 2012-06-05 2013-12-12 President And Fellows Of Harvard College Ultra-thin optical coatings and devices and methods of using ultra-thin optical coatings
JP6238974B2 (ja) 2012-06-11 2017-11-29 マジック リープ, インコーポレイテッドMagic Leap,Inc. 導波路リフレクタアレイプロジェクタを用いる複数の深度平面3次元ディスプレイ
US9671566B2 (en) 2012-06-11 2017-06-06 Magic Leap, Inc. Planar waveguide apparatus with diffraction element(s) and system employing same
CN104718479B (zh) 2012-07-25 2018-11-20 瑞士Csem电子显微技术研发中心 一种光耦合波导的优化方法
DE102012015900A1 (de) 2012-08-10 2014-03-06 Giesecke & Devrient Gmbh Sicherheitselement mit farbeffekterzeugendem Gitter
IN2015DN01063A (enExample) 2012-08-13 2015-06-26 Bayer Materialscience Ag
EP2700987B1 (en) * 2012-08-24 2017-04-26 Lumentum Operations LLC Variable Optical Retarder
US8885997B2 (en) 2012-08-31 2014-11-11 Microsoft Corporation NED polarization system for wavelength pass-through
US9740006B2 (en) 2012-09-11 2017-08-22 Magic Leap, Inc. Ergonomic head mounted display device and optical system
FI125270B (en) 2012-09-20 2015-08-14 Teknologian Tutkimuskeskus Vtt Oy Optical device with diffractive grating
EP2946236B1 (en) 2013-01-15 2021-06-16 Magic Leap, Inc. Ultra-high resolution scanning fiber display
JP6197295B2 (ja) 2013-01-22 2017-09-20 セイコーエプソン株式会社 光学デバイス及び画像表示装置
KR102270699B1 (ko) 2013-03-11 2021-06-28 매직 립, 인코포레이티드 증강 및 가상 현실을 위한 시스템 및 방법
US20140272295A1 (en) 2013-03-14 2014-09-18 Sdc Technologies, Inc. Anti-fog nanotextured surfaces and articles containing the same
US20140264998A1 (en) * 2013-03-14 2014-09-18 Q1 Nanosystems Corporation Methods for manufacturing three-dimensional metamaterial devices with photovoltaic bristles
CN113918018B (zh) 2013-03-15 2025-01-17 奇跃公司 显示系统和方法
JP5867439B2 (ja) 2013-03-29 2016-02-24 ウシオ電機株式会社 グリッド偏光素子及び光配向装置
JP6245495B2 (ja) 2013-05-23 2017-12-13 オリンパス株式会社 光検出器
US10262462B2 (en) 2014-04-18 2019-04-16 Magic Leap, Inc. Systems and methods for augmented and virtual reality
US9874749B2 (en) * 2013-11-27 2018-01-23 Magic Leap, Inc. Virtual and augmented reality systems and methods
US20150040978A1 (en) * 2013-08-07 2015-02-12 Purdue Research Foundation Solar-cell efficiency enhancement using metasurfaces
US9799853B2 (en) 2013-08-12 2017-10-24 3M Innovative Properties Company Emissive article with light extraction film
JP6171740B2 (ja) 2013-09-02 2017-08-02 セイコーエプソン株式会社 光学デバイス及び画像表示装置
US9887459B2 (en) * 2013-09-27 2018-02-06 Raytheon Bbn Technologies Corp. Reconfigurable aperture for microwave transmission and detection
JP6479785B2 (ja) 2013-10-16 2019-03-06 マジック リープ, インコーポレイテッドMagic Leap,Inc. 調節可能な瞳孔間距離を有する仮想または拡張現実ヘッドセット
US9857591B2 (en) 2014-05-30 2018-01-02 Magic Leap, Inc. Methods and system for creating focal planes in virtual and augmented reality
JP6322975B2 (ja) 2013-11-29 2018-05-16 セイコーエプソン株式会社 光学デバイスおよび電子機器
US9880328B2 (en) 2013-12-12 2018-01-30 Corning Incorporated Transparent diffusers for lightguides and luminaires
WO2015093752A1 (ko) 2013-12-16 2015-06-25 (주)엠아이케이테크 영구자석형 전자기 제동 실린더
JP6475640B2 (ja) * 2014-01-07 2019-02-27 技術研究組合光電子融合基盤技術研究所 グレーティングカプラ及びその製造方法
JP6295276B2 (ja) 2014-01-10 2018-03-14 Jxtgエネルギー株式会社 光学基板、光学基板の製造に用いられるモールド、及び光学基板を含む発光素子
EP3100098B8 (en) 2014-01-31 2022-10-05 Magic Leap, Inc. Multi-focal display system and method
JP6509883B2 (ja) 2014-01-31 2019-05-08 マジック リープ, インコーポレイテッドMagic Leap,Inc. 多焦点表示システムおよび方法
US9482796B2 (en) * 2014-02-04 2016-11-01 California Institute Of Technology Controllable planar optical focusing system
JP6534114B2 (ja) 2014-02-12 2019-06-26 国立大学法人三重大学 光学装置の製造方法及び光学装置
US10203762B2 (en) 2014-03-11 2019-02-12 Magic Leap, Inc. Methods and systems for creating virtual and augmented reality
JP6287487B2 (ja) 2014-03-31 2018-03-07 セイコーエプソン株式会社 光学デバイス、画像投影装置及び電子機器
JPWO2015166852A1 (ja) 2014-05-02 2017-04-20 日本碍子株式会社 光学素子およびその製造方法
WO2016018488A2 (en) 2014-05-09 2016-02-04 Eyefluence, Inc. Systems and methods for discerning eye signals and continuous biometric identification
USD759657S1 (en) 2014-05-19 2016-06-21 Microsoft Corporation Connector with illumination region
EP3149539B1 (en) 2014-05-30 2025-04-30 Magic Leap, Inc. Virtual or augmented reality apparatus
USD752529S1 (en) 2014-06-09 2016-03-29 Comcast Cable Communications, Llc Electronic housing with illuminated region
JP6357892B2 (ja) * 2014-06-09 2018-07-18 凸版印刷株式会社 光学素子
TWI514097B (zh) 2014-06-13 2015-12-21 Univ Nat Taiwan 可由偏振調控重建影像的多光學維度超穎全像片
US10013407B2 (en) 2014-07-01 2018-07-03 Designation Station, LLC Automated processing of transcripts, transcript designations, and/or video clip load files
RU2603238C2 (ru) 2014-07-15 2016-11-27 Самсунг Электроникс Ко., Лтд. Световодная структура, голографическое оптическое устройство и система формирования изображений
US20160025626A1 (en) 2014-07-23 2016-01-28 California Institute Of Technology Silicon photonic crystal nanobeam cavity without surface cladding and integrated with micro-heater for sensing applications
CN105374918B (zh) 2014-08-26 2018-05-01 清华大学 发光装置以及采用该发光装置的显示装置
EP3195048B1 (en) 2014-09-15 2021-11-03 California Institute of Technology Simultaneous polarization and wavefront control using a planar device
CN104659179A (zh) 2015-03-10 2015-05-27 江苏新广联半导体有限公司 用于GaN基LED的抗反射透明电极结构及其制备方法
WO2016168173A1 (en) * 2015-04-14 2016-10-20 California Institute Of Technology Multi-wavelength optical dielectric metasurfaces
USD758367S1 (en) 2015-05-14 2016-06-07 Magic Leap, Inc. Virtual reality headset
BR112018003586A2 (en) 2015-08-31 2018-09-25 Koninklijke Philips N.V. actuator and / or sensor device
US11231544B2 (en) 2015-11-06 2022-01-25 Magic Leap, Inc. Metasurfaces for redirecting light and methods for fabricating
USD805734S1 (en) 2016-03-04 2017-12-26 Nike, Inc. Shirt
USD794288S1 (en) 2016-03-11 2017-08-15 Nike, Inc. Shoe with illuminable sole light sequence
US10725290B2 (en) * 2016-04-29 2020-07-28 The Board Of Trustees Of The Leland Stanford Junior University Device components formed of geometric structures
TWI649259B (zh) 2016-12-05 2019-02-01 中央研究院 寬頻超穎光學裝置
EP4206752A1 (en) 2017-01-27 2023-07-05 Magic Leap, Inc. Diffraction gratings formed by metasurfaces having differently oriented nanobeams
CN111656289B (zh) 2017-12-21 2025-12-02 视瑞尔技术公司 显示装置及用于追踪虚拟可见区域的方法
JP2025086307A (ja) 2023-11-27 2025-06-06 株式会社カネカ 固体撮像素子パッケージおよび固体撮像素子パッケージ製造方法

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005018061A (ja) 2003-06-27 2005-01-20 Agilent Technol Inc 反射防止コーティングを施された回折光学素子
JP2009506347A (ja) 2004-08-31 2009-02-12 ディジタル・オプティックス・コーポレイション モノリシック偏向制御角拡散器および関連方法
JP2006337758A (ja) 2005-06-02 2006-12-14 Fuji Xerox Co Ltd 3次元構造体の製造方法及び3次元構造体製造用基板
JP2007265581A (ja) 2006-03-30 2007-10-11 Fujinon Sano Kk 回折素子
JP2012510637A (ja) 2009-01-21 2012-05-10 レイブンブリック,エルエルシー 光学的メタポラライザ・デバイス
WO2012046414A1 (ja) 2010-10-04 2012-04-12 パナソニック株式会社 光取り込みシートおよびロッド、ならびに、それらを用いた受光装置および発光装置
US20140063585A1 (en) 2012-08-31 2014-03-06 John G. Hagoplan Phase-controlled magnetic mirror, mirror system, and methods of using the mirror
JP2017500605A (ja) 2013-11-27 2017-01-05 マジック リープ, インコーポレイテッド 仮想現実および拡張現実のシステムおよび方法
US20160025914A1 (en) 2014-07-27 2016-01-28 The Board Of Trustees Of The Leland Stanford Junior University Dielectric Metasurface Optical Elements
WO2016161175A1 (en) 2015-04-02 2016-10-06 University Of Rochester Freeform nanostructured surface for virtual and augmented reality near eye display
US20160306079A1 (en) 2015-04-14 2016-10-20 California Institute Of Technology Multi-wavelength optical dielectric metasurfaces
WO2016205249A1 (en) 2015-06-15 2016-12-22 Magic Leap, Inc. Virtual and augmented reality systems and methods
JP2018536204A (ja) 2015-11-24 2018-12-06 プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ 可視スペクトルの波長のための誘電体メタサーフェス(metasurface)を製造するための原子層堆積プロセス
WO2017193012A1 (en) 2016-05-06 2017-11-09 Magic Leap, Inc. Metasurfaces with asymetric gratings for redirecting light and methods for fabricating
JP2020507112A (ja) 2017-01-27 2020-03-05 マジック リープ, インコーポレイテッドMagic Leap,Inc. メタ表面のための反射防止コーティング
US20190206136A1 (en) 2018-01-04 2019-07-04 Magic Leap, Inc. Optical elements based on polymeric structures incorporating inorganic materials
JP2021509726A (ja) 2018-01-04 2021-04-01 マジック リープ, インコーポレイテッドMagic Leap,Inc. 無機材料を組み込むポリマー構造に基づく光学要素

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Erez Hasman, et al.,"Polarization dependent focusing lens by use of quantized Pancharatnam-Berry phase diffractive optics",APPLIED PHYSICS LETTERS,2003年01月20日,VOL.82, NO.3,p.328-330,https://doi.org/10.1063/1.1539300
Yang Zhao, et al.,"Manipulating light polarization with ultrathin plasmonic metasurfaces",PHYSICAL REVIEW B,2011年11月16日,VOL.84,p.205428-1 - 205428-6,DOI: 10.1103/PhysRevB.84.205428

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