JP7126856B2 - 基板把持装置、基板搬送装置及び基板搬送方法 - Google Patents

基板把持装置、基板搬送装置及び基板搬送方法 Download PDF

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JP7126856B2
JP7126856B2 JP2018090647A JP2018090647A JP7126856B2 JP 7126856 B2 JP7126856 B2 JP 7126856B2 JP 2018090647 A JP2018090647 A JP 2018090647A JP 2018090647 A JP2018090647 A JP 2018090647A JP 7126856 B2 JP7126856 B2 JP 7126856B2
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substrate
gripping
claws
claw
deformation
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JP2019197799A (ja
JP2019197799A5 (https=
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正明 古矢
秀樹 森
正孝 横井
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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JP2018090647A 2018-05-09 2018-05-09 基板把持装置、基板搬送装置及び基板搬送方法 Active JP7126856B2 (ja)

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7287332B2 (ja) * 2020-04-06 2023-06-06 信越半導体株式会社 ロボットハンド
JP7442389B2 (ja) * 2020-05-22 2024-03-04 東京エレクトロン株式会社 基板搬送装置及び基板把持判定方法
JP7697261B2 (ja) 2021-05-12 2025-06-24 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
KR102590869B1 (ko) * 2022-08-05 2023-10-19 제너셈(주) 플립 칩 본딩을 위한 웨이퍼 로딩 장치
WO2024201817A1 (ja) 2023-03-29 2024-10-03 ダイキンファインテック株式会社 基板処理装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237407A (ja) 2005-02-25 2006-09-07 Semes Co Ltd 基板移送装置
JP2008302437A (ja) 2007-06-05 2008-12-18 Nidec Sankyo Corp 産業用ロボット
JP2011119348A (ja) 2009-12-01 2011-06-16 Kawasaki Heavy Ind Ltd エッジグリップ装置、及びそれを備えるロボット。
JP2012074485A (ja) 2010-09-28 2012-04-12 Tokyo Electron Ltd 基板処理装置及び基板搬送方法並びにその方法を実施するためのプログラムを記憶する記憶媒体
JP2015026752A (ja) 2013-07-29 2015-02-05 株式会社日立ハイテクマニファクチャ＆サービス 搬送システム
JP2017112291A (ja) 2015-12-18 2017-06-22 株式会社荏原製作所 基板搬送用移載機及び基板移載方法
JP2017183666A (ja) 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09107014A (ja) * 1995-10-11 1997-04-22 Hitachi Ltd 基板保持装置および基板保持方法
JP3634539B2 (ja) * 1997-02-28 2005-03-30 キヤノン株式会社 マスク保持装置、露光装置、デバイス製造方法、及びマスク構造体
JPH11165866A (ja) * 1997-12-02 1999-06-22 Shin Meiwa Ind Co Ltd ウエハ搬送用ハンド

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237407A (ja) 2005-02-25 2006-09-07 Semes Co Ltd 基板移送装置
JP2008302437A (ja) 2007-06-05 2008-12-18 Nidec Sankyo Corp 産業用ロボット
JP2011119348A (ja) 2009-12-01 2011-06-16 Kawasaki Heavy Ind Ltd エッジグリップ装置、及びそれを備えるロボット。
JP2012074485A (ja) 2010-09-28 2012-04-12 Tokyo Electron Ltd 基板処理装置及び基板搬送方法並びにその方法を実施するためのプログラムを記憶する記憶媒体
JP2015026752A (ja) 2013-07-29 2015-02-05 株式会社日立ハイテクマニファクチャ＆サービス 搬送システム
JP2017112291A (ja) 2015-12-18 2017-06-22 株式会社荏原製作所 基板搬送用移載機及び基板移載方法
JP2017183666A (ja) 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法

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