JP7117869B2 - 分析装置 - Google Patents
分析装置 Download PDFInfo
- Publication number
- JP7117869B2 JP7117869B2 JP2018054842A JP2018054842A JP7117869B2 JP 7117869 B2 JP7117869 B2 JP 7117869B2 JP 2018054842 A JP2018054842 A JP 2018054842A JP 2018054842 A JP2018054842 A JP 2018054842A JP 7117869 B2 JP7117869 B2 JP 7117869B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- layer
- optical
- core layer
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N21/431—Dip refractometers, e.g. using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L33/04—Homopolymers or copolymers of esters
- C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
- C08L33/10—Homopolymers or copolymers of methacrylic acid esters
- C08L33/12—Homopolymers or copolymers of methyl methacrylate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/042—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by using materials which expand, contract, disintegrate, or decompose in contact with a fluid
- G01M3/045—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by using materials which expand, contract, disintegrate, or decompose in contact with a fluid with electrical detection means
- G01M3/047—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by using materials which expand, contract, disintegrate, or decompose in contact with a fluid with electrical detection means with photo-electrical detection means, e.g. using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/43—Refractivity; Phase-affecting properties, e.g. optical path length by measuring critical angle
- G01N21/431—Dip refractometers, e.g. using optical fibres
- G01N2021/432—Dip refractometers, e.g. using optical fibres comprising optical fibres
- G01N2021/433—Dip refractometers, e.g. using optical fibres comprising optical fibres with an unclad part on the fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N2021/7706—Reagent provision
- G01N2021/7736—Reagent provision exposed, cladding free
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
(数2) Γ=P1/(P1+P2)
この様に、本実施例の光センサを用いた分析装置を使用すれば、有機溶剤もしくは塩基性もしくは酸性の洗浄液中の低濃度の油の濃度を長期に渡り測定することが可能になる。
次に、図5(D)に示すように、保護層114がコア層112の近傍にのみ残る様にレジスト120を形成する。
次に、図5(E)に示すように、レジスト120を用いた保護層114のエッチングを行い、最後に図5(F)に示すように、レジスト120を除去すれば本実施例の光センサが完成する。
まず、Si基板310上にSiO2層312およびSOIコア層326を形成する(図13(A))。
次に、SiO2層312およびSOIコア層326をエッチングによりパターニングして、図11(A)および図11(B)に示した様な光導波路を形成する(図13(B))。
次にSi基板310上にシリコンバンプ400を形成する(図13(C))。
最後に、シリコンバンプ400上に、光源402、受光器406およびレンズ404を設置する事により、光導波路で構成された光センサに光源402および受光器406を実装する事ができる。
図14は、SOI基板上に形成したSi(SOI)をコアとする光導波路に化合物半導体で形成した半導体レーザを集積した構成を示す。図14の中央に(G)上面図を示し、上面図中に一点鎖線の各切断線で示した位置での垂直断面図を図中の上下に示している。なお、(G)上面図において、上側InPクラッド層322上に形成した電極324は図示を省略してある。
112 コア層
114 保護材
116 Si基板
118、120 レジスト
121 伝搬していく光の強度分布
122 エバネッセント光
123 洗浄液
124 レンズ、プリズム
132 洗浄液中の油への光吸収が発生する領域
134 光吸収が発生しない領域
141 光センサ
142 光源装置
143 受光装置
144 制御装置
146 光ファイバ
147 電気配線
150 洗浄槽
210 コア層
211 光導波路のコア層の破線で囲んだ部分
212 コア層の曲線部
214、218 テーパ形状のコア層
216 コア層の直線部
220 スロット導波路
310 Si基板
312 SiO2層
314 Si層
316 接着層
318、322 InP層
320 MQW/SCH層
324 電極
326 SOIコア層
340 空気
400 シリコンバンプ
402 光源
404 レンズ
406 受光器
Claims (3)
- 光ファイバのクラッド層を所定の光路長だけコア層が露出するように削除して、露出したコア層の全表面に、有機溶剤もしくは塩基もしくは酸に対する耐性がクラッド層より高い材質の保護材を付加した光センサ部と、
前記光センサ部を有する光ファイバの片端から光を入射する光源装置と、
前記光センサ部を有する光ファイバのもう一方の他端から出射する透過光を受光する受光装置と、
前記光源装置と、前記受光装置とを制御して、前記光源装置から発した光強度と前記受光装置で受光した光強度の比より前記光センサ部における光の透過率を計測する制御装置と、を備え、
前記制御装置は、被検査物質を溶解する溶液中に前記光センサ部が浸漬している状態で、前記光源装置から発した光強度と前記受光装置で受光した光強度の比より、前記光センサ部における、前記被検査物質により吸収される特定の波長の光の透過率を計測して、前記被検査物質の濃度を出力する
ことを特徴とする分析装置。 - 前記光ファイバのクラッド層を削除してコア層を露出させる所定の光路長が、5cmから10cmの間であることを特徴とする請求項1に記載の分析装置。
- 露出したコア層の表面に付加する有機溶剤もしくは塩基もしくは酸に対する耐性がクラッド層より高い材質の保護材が、SiNもしくはPMMA(Polymethyl methacrylate)であることを特徴とする請求項1に記載の分析装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018054842A JP7117869B2 (ja) | 2018-03-22 | 2018-03-22 | 分析装置 |
US16/258,763 US11036013B2 (en) | 2018-03-22 | 2019-01-28 | Optical sensor and analyzer using the same |
JP2022123040A JP2022153599A (ja) | 2018-03-22 | 2022-08-02 | 光センサおよびそれを用いた分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018054842A JP7117869B2 (ja) | 2018-03-22 | 2018-03-22 | 分析装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022123040A Division JP2022153599A (ja) | 2018-03-22 | 2022-08-02 | 光センサおよびそれを用いた分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019168278A JP2019168278A (ja) | 2019-10-03 |
JP7117869B2 true JP7117869B2 (ja) | 2022-08-15 |
Family
ID=67985025
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018054842A Active JP7117869B2 (ja) | 2018-03-22 | 2018-03-22 | 分析装置 |
JP2022123040A Pending JP2022153599A (ja) | 2018-03-22 | 2022-08-02 | 光センサおよびそれを用いた分析装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022123040A Pending JP2022153599A (ja) | 2018-03-22 | 2022-08-02 | 光センサおよびそれを用いた分析装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US11036013B2 (ja) |
JP (2) | JP7117869B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11313796B2 (en) | 2017-03-06 | 2022-04-26 | Asahi Kasei Microdevices Corporation | Optical waveguide and optical concentration measuring apparatus comprising a support with a shifted connecting portion |
US10928318B2 (en) | 2018-08-31 | 2021-02-23 | Asahi Kasei Microdevices Corporation | Optical waveguide and optical concentration measuring apparatus |
TWI837016B (zh) * | 2023-06-08 | 2024-03-21 | 國立成功大學 | 有機/無機複合結構、其製造方法及感測裝置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001099780A (ja) | 1999-09-29 | 2001-04-13 | Hitachi Cable Ltd | 光ファイバを用いた溶液の濃度測定装置 |
JP2008076195A (ja) | 2006-09-20 | 2008-04-03 | Univ Of Yamanashi | 酢酸濃度検出センサ |
JP2010223734A (ja) | 2009-03-23 | 2010-10-07 | Aisan Ind Co Ltd | アルコール濃度検出センサ |
JP2015102455A (ja) | 2013-11-26 | 2015-06-04 | シチズンホールディングス株式会社 | センサ装置および測定方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5005005A (en) * | 1986-03-10 | 1991-04-02 | Brossia Charles E | Fiber optic probe system |
JPH05322747A (ja) * | 1992-03-16 | 1993-12-07 | Nippon Telegr & Teleph Corp <Ntt> | 全反射吸収測定装置 |
US5585634A (en) * | 1994-09-29 | 1996-12-17 | Foster-Miller, Inc. | Attenuated total reflectance sensing |
JP2865000B2 (ja) * | 1994-10-27 | 1999-03-08 | 日本電気株式会社 | 出力導波路集積半導体レーザとその製造方法 |
JPH1164654A (ja) * | 1997-08-15 | 1999-03-05 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路 |
US5995686A (en) * | 1997-12-16 | 1999-11-30 | Hamburger; Robert N. | Fiber-optic sensor device and method |
JP2000097850A (ja) | 1998-09-22 | 2000-04-07 | Mitsubishi Heavy Ind Ltd | 液体センサ装置 |
JP3059171B1 (ja) * | 1999-09-14 | 2000-07-04 | 株式会社東芝 | 光ファイバ出力半導体装置 |
US7027475B1 (en) * | 2000-04-11 | 2006-04-11 | Nuvonyx, Inc. | Tailored index single mode optical amplifiers and devices and systems including same |
JP3631221B2 (ja) * | 2002-05-17 | 2005-03-23 | 核燃料サイクル開発機構 | ファイバ分光検出器及びその製造方法 |
JP4018603B2 (ja) * | 2003-08-08 | 2007-12-05 | 日本電信電話株式会社 | 光導波路型センサ |
JP4237665B2 (ja) * | 2004-04-07 | 2009-03-11 | 日本電信電話株式会社 | 光導波路型センサ及びその製造方法 |
JP4777623B2 (ja) * | 2004-08-04 | 2011-09-21 | 日本電信電話株式会社 | 生体センサ及び測定方法 |
EP1884764A4 (en) * | 2005-05-26 | 2011-03-23 | Mitsubishi Electric Corp | FIBER OPTIC SENSOR |
JP4977377B2 (ja) * | 2006-02-22 | 2012-07-18 | 日本オプネクスト株式会社 | 半導体発光装置 |
JP5082414B2 (ja) * | 2006-12-06 | 2012-11-28 | 株式会社日立製作所 | 光半導体装置および光導波路装置 |
JP5370690B2 (ja) * | 2008-07-25 | 2013-12-18 | 日本電気株式会社 | 導波路接続構造 |
US8463083B2 (en) * | 2009-01-30 | 2013-06-11 | Claudio Oliveira Egalon | Side illuminated multi point multi parameter optical fiber sensor |
WO2011044317A2 (en) * | 2009-10-07 | 2011-04-14 | Aidi Corporation | Athermal silicon photonics array waveguide grating (awg) employing different core geometries in the array waveguides |
KR101090430B1 (ko) * | 2009-10-09 | 2011-12-06 | 성균관대학교산학협력단 | 탄소나노구조체 층을 포함하는 광섬유, 광섬유 화학 센서, 및 광섬유 코어에 탄소나노구조체 층을 형성하는 방법 |
JP5187344B2 (ja) * | 2010-04-28 | 2013-04-24 | 株式会社デンソー | 光導波路型センサ |
FR2998677B1 (fr) * | 2012-11-27 | 2016-01-29 | Commissariat Energie Atomique | Guide d'onde optique a nano-canal et capteur optofluidique utilisant un tel guide d'onde optique |
JP2015102459A (ja) * | 2013-11-26 | 2015-06-04 | シチズンホールディングス株式会社 | センサ装置および測定方法 |
FR3019653B1 (fr) * | 2014-04-08 | 2016-05-13 | Commissariat Energie Atomique | Dispositif de detection a resonateur acoustique differentiel de type helmholtz |
WO2016026803A1 (en) * | 2014-08-19 | 2016-02-25 | Abb Technology Ag | Hydrogen sensor having a protection layer |
JP2016048358A (ja) * | 2014-08-28 | 2016-04-07 | 株式会社豊田中央研究所 | 光導波路 |
CN107949788B (zh) * | 2015-05-18 | 2021-05-04 | Abb瑞士股份有限公司 | 用于确定氢的光学感测系统 |
JP2017054113A (ja) * | 2015-09-09 | 2017-03-16 | 日東電工株式会社 | 光導波路およびそれを用いた位置センサならびに光回路基板 |
WO2017043570A1 (ja) * | 2015-09-09 | 2017-03-16 | 日東電工株式会社 | 光導波路およびそれを用いた位置センサならびに光回路基板 |
CN108699345A (zh) * | 2015-10-14 | 2018-10-23 | Uwm研究基金会有限公司 | 用于水性环境中金属离子的实时感测的传感器染料 |
-
2018
- 2018-03-22 JP JP2018054842A patent/JP7117869B2/ja active Active
-
2019
- 2019-01-28 US US16/258,763 patent/US11036013B2/en active Active
-
2022
- 2022-08-02 JP JP2022123040A patent/JP2022153599A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001099780A (ja) | 1999-09-29 | 2001-04-13 | Hitachi Cable Ltd | 光ファイバを用いた溶液の濃度測定装置 |
JP2008076195A (ja) | 2006-09-20 | 2008-04-03 | Univ Of Yamanashi | 酢酸濃度検出センサ |
JP2010223734A (ja) | 2009-03-23 | 2010-10-07 | Aisan Ind Co Ltd | アルコール濃度検出センサ |
JP2015102455A (ja) | 2013-11-26 | 2015-06-04 | シチズンホールディングス株式会社 | センサ装置および測定方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2022153599A (ja) | 2022-10-12 |
US11036013B2 (en) | 2021-06-15 |
US20190293516A1 (en) | 2019-09-26 |
JP2019168278A (ja) | 2019-10-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2022153599A (ja) | 光センサおよびそれを用いた分析装置 | |
US8988669B2 (en) | Power monitor for optical fiber using background scattering | |
JP4937231B2 (ja) | 微量種の分光測定のための光ファイバ共振器における拡張されたエバネッセントフィールド露出の方法と装置 | |
US9891167B2 (en) | Optical analyte sensor | |
US6975388B2 (en) | Optical-fiber refractometer | |
JP2804073B2 (ja) | 物質の屈折率を測定する装置及び方法 | |
US7697796B2 (en) | Plasmon-polariton refractive-index fiber bio-sensor with fiber Bragg grating | |
JP4511857B2 (ja) | フォトニック結晶を応用したセンサおよび検出対象物質の検出方法 | |
Schubert et al. | Refractive-index measurements using an integrated Mach-Zehnder interferometer | |
JP5540398B2 (ja) | 光導波路型バイオセンサーおよびそれを備えたバイオセンサーシステム | |
KR101299135B1 (ko) | 할로우 코어를 갖는 광섬유를 이용한 반사형 프로브 타입의 기체 검출 장치 및 기체 검출 방법 | |
US7283220B2 (en) | Methods and apparatuses for measuring the refractive index and other optical properties of liquids, gels, and solids | |
US9470631B2 (en) | SPR sensor cell and SPR sensor | |
JP2002350335A (ja) | 屈折率センサー、センサーシステムおよび光ファイバ | |
CN210923475U (zh) | 一种基于光纤spr传感器的血清白蛋白检测系统 | |
JP2008170327A (ja) | 屈折率検出装置、および、液位検出装置 | |
US9535214B2 (en) | Method of inputting light into optical waveguide | |
US7087887B1 (en) | Optical multiphase flow sensor | |
JP3631221B2 (ja) | ファイバ分光検出器及びその製造方法 | |
KR20210045365A (ko) | 간섭계 광섬유 센서, 광섬유 프로브, 및 화학 물질의 검출 방법 | |
US11821839B1 (en) | Passive characterization of high power optical fiber average power and LP01 and LP11 modes by detecting MIE scattered light | |
JP2005121565A (ja) | 光センサヘッド | |
US20220244168A1 (en) | Photothermal gas detector including an integrated on-chip optical waveguide | |
Homola et al. | Advances in development of miniature fiber optic surface plasmon resonance sensors | |
Farries et al. | Detection of low chemical concentrations by cavity ring-down in an evanescently coupled fused optical fibre taper |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200316 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210105 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201228 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210803 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210913 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220215 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220404 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220705 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220802 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7117869 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |