JP7100150B2 - 調整可能な大きい垂直磁気異方性を有する磁気トンネル接合 - Google Patents
調整可能な大きい垂直磁気異方性を有する磁気トンネル接合 Download PDFInfo
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- 230000005291 magnetic effect Effects 0.000 title claims description 107
- 239000000463 material Substances 0.000 claims description 107
- 239000012528 membrane Substances 0.000 claims description 58
- 238000003860 storage Methods 0.000 claims description 44
- 229910019236 CoFeB Inorganic materials 0.000 claims description 37
- 230000004888 barrier function Effects 0.000 claims description 32
- 230000000903 blocking effect Effects 0.000 claims description 25
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 16
- 229910052796 boron Inorganic materials 0.000 claims description 16
- 229910003321 CoFe Inorganic materials 0.000 claims description 9
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 6
- 239000002902 ferrimagnetic material Substances 0.000 claims description 6
- 229910001120 nichrome Inorganic materials 0.000 claims description 6
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 494
- 238000000034 method Methods 0.000 description 37
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 36
- 230000008569 process Effects 0.000 description 28
- 239000000758 substrate Substances 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 18
- 239000001301 oxygen Substances 0.000 description 18
- 229910052760 oxygen Inorganic materials 0.000 description 18
- 239000000203 mixture Substances 0.000 description 14
- 238000000059 patterning Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 238000000137 annealing Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 239000000696 magnetic material Substances 0.000 description 9
- 229910001092 metal group alloy Inorganic materials 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000002019 doping agent Substances 0.000 description 8
- 230000005293 ferrimagnetic effect Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 7
- 239000000395 magnesium oxide Substances 0.000 description 7
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910003070 TaOx Inorganic materials 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910002441 CoNi Inorganic materials 0.000 description 4
- 229910018936 CoPd Inorganic materials 0.000 description 4
- 229910018979 CoPt Inorganic materials 0.000 description 4
- 229910004166 TaN Inorganic materials 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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Description
[Co(x)/Pt(y)]m
を含む組成物を有することができ、ここで、xは、約0Åから約10Åの間、例えば、約0.5Åから約7Åの間のCoの厚さを有し、yは、約0Åから約10Åの間、例えば、約0.5Åから約8Åの間のPtの厚さを有し、mは、約3から約10の間の整数であり、ここで、mは、膜積層体内に繰り返し形成されたCo/Pt含有層215aの数を表す。例えば、xが5Å、yが3Å、mが整数2の場合、Co/Pt層は、Co層(5Å)/Pt層(3Å)/Co層(5Å)/Pt層(3Å)で構成される。
[Co(x1)/Ni(y1)]n
を含む組成物を有することができ、ここで、x1は、約0Åから約10Åの間、例えば、約1Åから約8Åの間のCoの厚さを有し、y1は、約0Åから約10Åの間、例えば、約1Åから約8Åの間のNiの厚さを有し、nは、約1から約10の間の整数であり、ここで、nは、膜積層体内に繰り返し形成されたCo/Ni含有層215a’の数を表す。
[Co(x2)/Pt(y2)]p
を含む組成物を有することができ、ここで、x2は、約0Åから約10Åの間、例えば、約0.5Åから約7Åの間のCoの厚さを有し、y2は、約0Åから約10Åの間、例えば、約0.5Åから約8Åの間のPtの厚さを有し、pは、約0から約5の間の整数であり、ここで、pは、膜積層体内に繰り返し形成されたCo/Pt含有層225aの数を表す。
Claims (20)
- バッファ層と、
前記バッファ層の上に配置されたシード層と、
前記シード層の上に配置された第1のピン止め層と、
前記第1のピン止め層の上に配置された合成フェリ磁性体(SyF)結合層と、
前記SyF結合層の上に配置された第2のピン止め層と、
前記第2のピン止め層の上に配置された構造ブロッキング層と、
前記構造ブロッキング層の上に配置された磁気参照層と、
前記磁気参照層の上に配置されたトンネル障壁層と、
前記トンネル障壁層の上に配置された磁気記憶層と、
前記磁気記憶層の上に配置されたキャッピング層であって、Fe含有酸化物材料層を含むキャッピング層と、
を含む磁気トンネル接合膜積層体。 - 前記キャッピング層が、Ir含有層、Ru含有層、およびそれらの組み合わせのうちの1つ以上を、さらに含む、請求項1に記載の膜積層体。
- 前記Fe含有酸化物材料層が、CoFe酸化物材料、CoFeB酸化物材料、NiFe酸化物材料、FeB酸化物材料、およびそれらの組み合わせからなる群から選択される材料である、請求項1に記載の膜積層体。
- 前記SyF結合層が、Ir含有層を含む、請求項1に記載の膜積層体。
- 前記バッファ層が、CoFeB含有層を含む、請求項1に記載の膜積層体。
- 前記シード層が、
(a)NiCr含有層、または
(b)Pt含有層、Ir含有層、およびRu含有層のうちの1つ以上
を含む、請求項1に記載の膜積層体。 - 前記シード層が、NiCr含有層を含み、
前記バッファ層が、TaN含有層およびTa含有層のうちの1つ以上をさらに含み、前記バッファ層のCoFeB含有層が、前記バッファ層の前記TaN含有層および前記バッファ層の前記Ta含有層のうちの1つ以上の上に配置されている、請求項6に記載の膜積層体。 - 前記シード層が、Pt含有層、Ir含有層、およびRu含有層のうちの1つ以上を含み、
前記バッファ層が、TaN含有層およびTa含有層のうちの1つ以上をさらに含み、前記バッファ層のCoFeB含有層が、前記バッファ層の前記TaN含有層および前記バッファ層の前記Ta含有層のうちの1つ以上の下に配置されている、請求項6に記載の膜積層体。 - CoFeB含有層を含むバッファ層と、
前記バッファ層の上に配置されたシード層と、
前記シード層の上に配置された第1のピン止め層と、
前記第1のピン止め層の上に配置された合成フェリ磁性体(SyF)結合層であって、Ir含有層を含むSyF結合層と、
前記SyF結合層の上に配置された第2のピン止め層と、
前記第2のピン止め層の上に配置された構造ブロッキング層と、
前記構造ブロッキング層の上に配置された磁気参照層と、
前記磁気参照層の上に配置されたトンネル障壁層と、
前記トンネル障壁層の上に配置された磁気記憶層と、
前記磁気記憶層の上に配置されたキャッピング層であって、Fe含有酸化物材料層を含むキャッピング層と、
前記キャッピング層の上に配置されたハードマスクと、
を含む磁気トンネル接合膜積層体。 - 前記Fe含有酸化物材料層が、前記磁気記憶層上に前記磁気記憶層と接触して配置されている、請求項9に記載の膜積層体。
- 前記Fe含有酸化物材料層が、CoFe酸化物材料、CoFeB酸化物材料、NiFe酸化物材料、FeB酸化物材料、およびそれらの組み合わせからなる群から選択される材料である、請求項10に記載の膜積層体。
- Ir含有層、Ru含有層、またはそれらの組み合わせが、前記Fe含有酸化物材料層上に前記Fe含有酸化物材料層と接触して配置されている、請求項9に記載の膜積層体。
- バッファ層と、
前記バッファ層上に前記バッファ層と接触して配置されたシード層と、
前記シード層上に前記シード層と接触して配置された第1のピン止め層と、
前記第1のピン止め層上に前記第1のピン止め層と接触して配置された合成フェリ磁性体(SyF)結合層と、
前記SyF結合層上に前記SyF結合層と接触して配置された第2のピン止め層と、
前記第2のピン止め層上に前記第2のピン止め層と接触して配置された構造ブロッキング層と、
前記構造ブロッキング層上に前記構造ブロッキング層と接触して配置された磁気参照層と、
前記磁気参照層上に前記磁気参照層と接触して配置されたトンネル障壁層と、
前記トンネル障壁層上に前記トンネル障壁層と接触して配置された磁気記憶層と、
前記磁気記憶層上に前記磁気記憶層と接触して配置されたキャッピング層であって、Fe含有酸化物材料層を含むキャッピング層と、
前記キャッピング層上に前記キャッピング層と接触して配置されたハードマスクと、
を含む磁気トンネル接合膜積層体。 - 前記Fe含有酸化物材料層が、CoFe酸化物材料、CoFeB酸化物材料、NiFe酸化物材料、FeB酸化物材料、およびそれらの組み合わせからなる群から選択される材料である、請求項13に記載の膜積層体。
- Ir含有層、Ru含有層、またはそれらの組み合わせが、前記Fe含有酸化物材料層上に前記Fe含有酸化物材料層と接触して配置されている、請求項13に記載の膜積層体。
- 前記Fe含有酸化物材料層が、前記磁気記憶層上に前記磁気記憶層と接触して配置されている、請求項3に記載の膜積層体。
- 前記キャッピング層が、Ta含有層を、さらに含む、請求項3に記載の膜積層体。
- 前記キャッピング層が、
前記Fe含有酸化物材料層上に前記Fe含有酸化物材料層と接触して配置されたIr含有層、Ru含有層、またはそれらの組み合わせを含む、請求項17に記載の膜積層体。 - 前記Fe含有酸化物材料層が、2Åから10Åの間の厚さを有する、請求項1に記載の膜積層体。
- 前記バッファ層中のホウ素のwt%が、20wt%から40wt%の間である、請求項5に記載の膜積層体。
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