JP7089656B2 - ナノワイヤ又はナノシートトランジスタデバイスのトランジスタ遅延を制御する方法 - Google Patents

ナノワイヤ又はナノシートトランジスタデバイスのトランジスタ遅延を制御する方法 Download PDF

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JP7089656B2
JP7089656B2 JP2020548890A JP2020548890A JP7089656B2 JP 7089656 B2 JP7089656 B2 JP 7089656B2 JP 2020548890 A JP2020548890 A JP 2020548890A JP 2020548890 A JP2020548890 A JP 2020548890A JP 7089656 B2 JP7089656 B2 JP 7089656B2
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fin structure
laminated
channel
channel material
laminated fin
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JP2021506141A (ja
JP2021506141A5 (enExample
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スミス，ジェフリー
カル，スバディープ
ジェイ． デヴィリアーズ，アントン
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Tokyo Electron Ltd
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    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0193—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices the components including FinFETs
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JP2020548890A 2017-12-04 2018-12-03 ナノワイヤ又はナノシートトランジスタデバイスのトランジスタ遅延を制御する方法 Active JP7089656B2 (ja)

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US201762594352P 2017-12-04 2017-12-04
US62/594,352 2017-12-04
PCT/US2018/063623 WO2019112954A1 (en) 2017-12-04 2018-12-03 Method for controlling transistor delay of nanowire or nanosheet transistor devices

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JP2021506141A5 JP2021506141A5 (enExample) 2021-04-01
JP7089656B2 true JP7089656B2 (ja) 2022-06-23

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