JP7086532B2 - Manufacturing method of electronic device and breathable sheet used for it - Google Patents

Manufacturing method of electronic device and breathable sheet used for it Download PDF

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JP7086532B2
JP7086532B2 JP2017107572A JP2017107572A JP7086532B2 JP 7086532 B2 JP7086532 B2 JP 7086532B2 JP 2017107572 A JP2017107572 A JP 2017107572A JP 2017107572 A JP2017107572 A JP 2017107572A JP 7086532 B2 JP7086532 B2 JP 7086532B2
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breathable
opening
base material
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woven fabric
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健吾 野口
典子 道畑
隆 多羅尾
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Japan Vilene Co Ltd
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本発明は、プリンテッドエレクトロニクスで真空吸着装置の吸着ステージに吸引固定された基材の表面へ印刷を施す際に、前記吸着ステージと前記基材との間に介在使用する、通気性シートを用いた電子デバイスの製造技術に関する。 The present invention uses a breathable sheet that is used as an interposition between the suction stage and the base material when printing is applied to the surface of the base material that is suction-fixed to the suction stage of the vacuum suction device by printed electronics. Regarding the manufacturing technology of electronic devices.

電気機器の小型化に伴い、小型で軽量な、或いは厚さの薄い、集積回路や配線材または電子基板などの電子部品(以降、包括的に電子部品と称することがある)の開発が進められている。このような要請に応える技術として、近年、プリンテッドエレクトロニクスが注目を浴びている。プリンテッドエレクトロニクスとは、導電性成分或いは絶縁素材などを配合した各種インク(以降、プリンテッドエレクトロニクスに使用される各種インクを単にインクと称することがある)を、フィルム(以下、非通気性基材と称する)などの基材表面に印刷し、この基材に種々の電子部品を作り込む技術分野である。プリンテッドエレクトロニクスを用いることで、例えば、フィルムや布帛(不織布、編物、織物)などの軽くて薄い基材や、柔軟性を有する基材の表面に電子部品を作り込み、小型・軽量化されたフレキシブルな電気機器を提供することができる。 With the miniaturization of electrical equipment, the development of small, lightweight, or thin electronic components such as integrated circuits, wiring materials, and electronic boards (hereinafter collectively referred to as electronic components) has been promoted. ing. In recent years, printed electronics have been attracting attention as a technology to meet such demands. Printed electronics is a film (hereinafter, non-breathable base material) made of various inks containing conductive components or insulating materials (hereinafter, various inks used in printed electronics may be simply referred to as inks). It is a technical field of printing on the surface of a base material such as (referred to as) and making various electronic components on this base material. By using printed electronics, for example, electronic components are made on the surface of light and thin base materials such as films and fabrics (nonwoven fabrics, knits, woven fabrics) and flexible base materials, making them smaller and lighter. Flexible electrical equipment can be provided.

このプリンテッドエレクトロニクスでは、電子部品を実装した後にフレキシブル性を持たせるため、基板にフィルムを用いることが多い。実装された電子部品は動作する際に発熱するため、当該部品を実装する領域に開口を設けて、電子部品の放熱を促す、或いは屈曲性を発揮させる構成が採られている。また、銅配線と電子部品を実装する際の位置合せを行うために、開口部にフライングリードと呼ばれる配線を設ける技術が知られている。本明細書では、基材となるフィルムなどの素材に開けられた開口を開口部と称し、係る開口部の有無に関わらず非通気性基材と称して説明する。 In this printed electronics, a film is often used for the substrate in order to give flexibility after mounting the electronic component. Since the mounted electronic component generates heat during operation, an opening is provided in the area where the component is mounted to promote heat dissipation of the electronic component or to exhibit flexibility. Further, there is known a technique of providing a wiring called a flying lead in an opening in order to perform alignment when mounting a copper wiring and an electronic component. In the present specification, an opening opened in a material such as a film as a base material is referred to as an opening, and is referred to as a non-breathable base material regardless of the presence or absence of such an opening.

このような開口部を設けた非通気性基材は、1本のテープ上に連続的に電子部品を実装するTAB(Tape Automated Bonding;テープ オートメーティッド ボンディング)技術として知られている。このTAB技術では、電子部品を実装する前に、一般にキャリアテープとも呼ばれる非通気性基材に後工程で実装する電子部品との接続配線が予め印刷形成される。この配線形成にはプリンテッドエレクトロニクス技術を利用し、導電性インクを所定のパターンで非通気性基材に印刷する。配線パターンは開口部に実装される電子部品との配置関係で種々に設計され、非通気性基材の一方の表面にのみ設けられる場合に限らず、他の非通気性基材に設けた電子部品との電気的な接続を図る多層配線実現のため、当該基材の表面から開口部を画成する壁面に渡る配線パターンとし、基材の他方の面側で接続可能な構造とするなど、複雑な実装技術も知られている。 A non-breathable substrate provided with such an opening is known as a TAB (Tape Automated Bonding) technique in which electronic components are continuously mounted on a single tape. In this TAB technique, before mounting an electronic component, a connection wiring with an electronic component to be mounted in a post-process is pre-printed on a non-breathable base material, which is also generally called a carrier tape. Printed electronics technology is used to form this wiring, and conductive ink is printed on a non-breathable substrate in a predetermined pattern. The wiring pattern is variously designed in relation to the arrangement with the electronic components mounted in the opening, and is not limited to the case where it is provided only on one surface of the non-breathable base material, but the electrons provided on the other non-breathable base material. In order to realize multi-layer wiring for electrical connection with parts, a wiring pattern that extends from the surface of the base material to the wall surface that defines the opening, and a structure that can be connected on the other side of the base material, etc. Complex mounting techniques are also known.

特開2000-244112号公報(以下、特許文献1)には、開口部が設けられた非通気性基材を用いた、印刷フレキシブル配線板の製造技術が開示されている。この文献技術では、スルーホール(開口部)が形成されたフレキシブル配線板(非通気性基材)を、その下面に多孔性の吸着紙および所定厚さの多孔質材を挟み、この下面全体に空間をあけて印刷用のテーブル上に載置する。次いで、このテーブルの全域に一様に設けられた吸引孔から下方に吸引し、上記多孔質材の下面側を減圧状態とすることによって、非通気性基材を固定する。この状態で、フレキシブル配線板の上面からスルーホール内に導電性ペーストを印刷によって埋める工程が開示されている。この印刷技術では、予め孔設したスルーホール内を導電性ペーストで実質的に埋め戻すことによって、フレキシブル配線板の表裏に設けた配線同士を接続する。この際、フレキシブル配線板を吸着固定しているため、スルーホール内部にも吸引力が働き、導電性ペーストが多孔質材側に過剰に引き寄せられる。従って、当該特許文献1の技術では、フレキシブル配線板と、テーブル表面を構成する多孔質材との間に上述した吸着紙を介在させ、導電性ペーストがテーブル側の吸引口に対する汚染防止を提案している。尚、この特許文献1に開示された従前技術として、スルーホールの下部に該当する位置に「逃げ孔」を有するスペーサを配設し、この「逃げ孔」には吸引口からの吸引力が作用しない構成を例示している。この従前技術との比較で、特許文献1の技術では「逃げ孔」と「スルーホール」との位置合わせの煩雑さ解消が期待される(特許文献1の[0004]及び[図4]参照)。 Japanese Unexamined Patent Publication No. 2000-244112 (hereinafter, Patent Document 1) discloses a technique for manufacturing a printed flexible wiring board using a non-breathable base material provided with an opening. In this literature technology, a flexible wiring board (non-breathable base material) having through holes (openings) formed is sandwiched between a porous adsorption paper and a porous material of a predetermined thickness on the lower surface thereof, and the entire lower surface thereof is covered. Place it on a printing table with a space. Next, the non-breathable base material is fixed by sucking downward from the suction holes uniformly provided in the entire area of the table and reducing the pressure on the lower surface side of the porous material. In this state, a step of filling the through hole with the conductive paste from the upper surface of the flexible wiring board by printing is disclosed. In this printing technique, the wiring provided on the front and back of the flexible wiring board is connected to each other by substantially backfilling the inside of the through hole formed in advance with the conductive paste. At this time, since the flexible wiring board is adsorbed and fixed, an attractive force acts also inside the through hole, and the conductive paste is excessively attracted to the porous material side. Therefore, in the technique of Patent Document 1, it is proposed that the above-mentioned adsorption paper is interposed between the flexible wiring board and the porous material constituting the table surface, and the conductive paste prevents contamination of the suction port on the table side. ing. As a prior art disclosed in Patent Document 1, a spacer having a "relief hole" is arranged at a position corresponding to the lower part of the through hole, and a suction force from the suction port acts on the "relief hole". Illustrates a configuration that does not. In comparison with this conventional technique, the technique of Patent Document 1 is expected to eliminate the complexity of positioning the "relief hole" and the "through hole" (see [0004] and [FIG. 4] of Patent Document 1). ..

上述した文献技術では、非通気性基材の表裏に渡る比較的小さな開口部を導通用に設けた場合の印刷技術を例示し、当該基材の吸引固定に際して印刷する領域の位置合わせ精度を高める必要が低い技術として提案されている。これに対して、特開平7-45668号公報(特許文献2)では、比較的開口面積の大きな矩形のデバイスホールと、当該デバイスホールの周囲に比較的開口面積の小さな台形のアウターリードホールを複数設けた非通気性基材に適用して好適な印刷技術が提案されている。この公報技術では、デバイスホール等の所定の開口部にリード(配線)を設けたTABテープをステージ上に支持し、スキージ圧をスクリーンマスクからTABテープに加えてレジスト塗布する際、当該TABテープの開口部位置に対応する印刷ステージ(特許文献1におけるテーブル相当。以下、包括的に吸着ステージと称する)上に、デバイスホールに突き出し、しかもアウターリードホールを横切るように形成されたリードを支持する凸部が設けられ、スキージ圧が加わっても開口部上のリードが変形しない構成となっている。 The above-mentioned literature technique exemplifies a printing technique in which a relatively small opening extending over the front and back of a non-breathable base material is provided for conduction, and improves the alignment accuracy of the area to be printed when suctioning and fixing the base material. It has been proposed as a less necessary technique. On the other hand, in Japanese Patent Application Laid-Open No. 7-45668 (Patent Document 2), a rectangular device hole having a relatively large opening area and a plurality of trapezoidal outer lead holes having a relatively small opening area are provided around the device hole. A suitable printing technique has been proposed by applying it to the provided non-breathable substrate. In this publication technique, a TAB tape having a lead (wiring) provided in a predetermined opening such as a device hole is supported on a stage, and when a squeegee pressure is applied to the TAB tape from a screen mask and resist is applied, the TAB tape is applied. Convex on a printing stage (corresponding to the table in Patent Document 1; hereinafter collectively referred to as a suction stage) corresponding to the opening position, protruding into a device hole and supporting a lead formed so as to cross the outer lead hole. A portion is provided so that the lead on the opening does not deform even when squeegee pressure is applied.

一方、本出願人らは、このプリンテッドエレクトロニクスに関連する技術として、開口部が形成されていない非通気性基材に形成する画像の鮮明度を向上させるため、国際公開番号WO2016/021239A1公報(以下、特許文献3)を提案している。この公報に提案される通気性シートは、少なくとも1層の不織布層と、少なくとも1層の支持層とを含んで構成され、他の通気性部材を更に含んで積層構成し得る。ここで、吸着ステージに設けられた複数の吸引口に接する支持層には直接吸引作用を受けることから、織物又は編物のように形態変化の少ないメッシュ状素材が用いられ、好適にはSUS製の平織りメッシュを用いる。また、プリンテッドエレクトロニクスに従前用いられていた燒結金属や多孔質セラミックスを直接吸着ステージに載置する場合、これら従前の素材表面の凹凸が非通気性基材の印刷面における平滑性に影響し、鮮明な画像を形成することが難しかった。従って特許文献3の技術では、非通気性基材の表面に形成される画像を鮮明とするため、支持層に非通気性基材を載置する不織布層を積層配置し、吸引固定された非通気性基材の表面を平滑に保つ構成としている。この提案技術では、開口部を設けていない非通気性基材に対する微細なインクパターンの明瞭化を図ることができる。 On the other hand, as a technique related to this printed electronics, the applicants have published International Publication No. WO2016 / 021239A1 (International Publication No. WO2016 / 021239A1) in order to improve the sharpness of an image formed on a non-breathable substrate having no opening. Hereinafter, Patent Document 3) is proposed. The breathable sheet proposed in this publication is configured to include at least one non-woven fabric layer and at least one support layer, and may be laminated to further include other breathable members. Here, since the support layer in contact with the plurality of suction ports provided in the suction stage is directly subjected to the suction action, a mesh-like material having little morphological change such as a woven fabric or a knitted fabric is used, preferably made of SUS. Use a plain weave mesh. In addition, when the sintered metal or porous ceramics previously used in printed electronics are directly placed on the adsorption stage, the unevenness of the surface of the conventional material affects the smoothness of the printed surface of the non-breathable substrate. It was difficult to form a clear image. Therefore, in the technique of Patent Document 3, in order to make the image formed on the surface of the non-breathable base material clear, a non-woven fabric layer on which the non-breathable base material is placed is laminated and arranged on the support layer, and the non-woven fabric is suction-fixed. The structure keeps the surface of the breathable base material smooth. With this proposed technique, it is possible to clarify a fine ink pattern on a non-breathable substrate having no opening.

特開2000-244112号公報([特許請求の範囲]、[0004]、[0008]、[0019]~[0033]、[図1]~[図3]など)Japanese Unexamined Patent Publication No. 2000-244112 ([Claims], [0004], [0008], [0019] to [0033], [FIG. 1] to [FIG. 3], etc.) 特開平7-45668号公報([特許請求の範囲]、[0013]、[0016]、[図1]~[図3])JP-A-7-45668 ([Claims], [0013], [0016], [Fig. 1] to [Fig. 3]) WO2016/021239A1公報([特許請求の範囲][0003]、[0019]~[0025]、[図1]などWO2016 / 0121239A1 ([Claims] [0003], [0019] to [0025], [Fig. 1], etc.

背景技術で参照した各文献技術に開示されるように、例えば特許文献2では、複数種の開口部を設けた非通気性基材に、リードを形成した面とは異なる面側から電子デバイスを実装するTAB法を取り扱っている。また、特許文献3の技術は、開口部を孔設していない非通気性基材の表面に微細な配線パターンを印刷し、当該面に電子デバイスを載置接続するCOF(Chip On Film;チップ オン フィルム)技術などに利用することが期待できる。このように、吸着ステージに被加工物を吸着固定した多種多様な電子デバイスの製造技術の中、プリンテッドエレクトロニクスでは、日々、微細化が進んでおり、インクパターン精度を保持する上で非通気性基材の吸着固定状態にも厳密さが要求されている。このため、開口部を介した導電性インクなどの印刷材料による吸着ステージ側への「汚染」を例えば特許文献1のような吸着紙で完全に防ぐことは困難である。尚、本明細書では、電子デバイスに印刷パターンを介して転写されたインクの形状をインクパターンと称するが、係る技術では、非通気性基材の吸着固定から印刷までの間、当該基材に設けた開口部によって吸着力が散逸し、印刷によるスキージ押圧部分で非通気性基材に位置ずれを生じ、特許文献3に提案するような微細なインクパターンを明瞭に形成することは極めて難しいという問題も生じる。さらに、特許文献2に提案される開口部形状に応じた「凸部」を利用する技術は、高精度な金属加工を要する高価な吸着ステージに直接凸部を設けるため、被印刷物である非通気性基材の開口部形態ごとに準備する必要が有り、吸着ステージの脱着工程も含め、電子デバイスの製造コスト上昇並びに歩留まり低下を来すという問題点もあった。 As disclosed in each literature technique referred to in the background art, for example, in Patent Document 2, an electronic device is mounted on a non-breathable substrate provided with a plurality of types of openings from a surface different from the surface on which leads are formed. We are dealing with the TAB method to be implemented. Further, the technique of Patent Document 3 is a COF (Chip On Film; chip) in which a fine wiring pattern is printed on the surface of a non-breathable base material having no holes and an electronic device is placed and connected to the surface. It can be expected to be used for on-film technology. In this way, among the manufacturing technologies for a wide variety of electronic devices in which the workpiece is adsorbed and fixed to the adsorption stage, printed electronics are becoming finer day by day and are non-breathable in order to maintain ink pattern accuracy. Strictness is also required for the adsorption and fixation state of the base material. Therefore, it is difficult to completely prevent "contamination" on the adsorption stage side by a printing material such as conductive ink through the opening with an adsorption paper such as Patent Document 1. In the present specification, the shape of the ink transferred to the electronic device via the printing pattern is referred to as an ink pattern. It is said that it is extremely difficult to clearly form a fine ink pattern as proposed in Patent Document 3 because the suction force is dissipated by the provided opening and the non-breathable base material is displaced at the squeegee pressing portion by printing. Problems also arise. Further, the technique proposed in Patent Document 2 that utilizes the "convex portion" according to the shape of the opening is a non-ventilated material to be printed because the convex portion is directly provided on an expensive suction stage that requires high-precision metal processing. It is necessary to prepare for each opening form of the sex substrate, and there is also a problem that the manufacturing cost of the electronic device is increased and the yield is decreased, including the desorption step of the adsorption stage.

本発明は上述した従来の問題点に鑑みなされたものであり、開口部を有する非通気性基材に電子デバイスを実装するための工程の簡略化を図り、係る工程での吸着ステージに対する「汚染」を解消し、かつ微細なインクパターンを明瞭に形成することで、低コストであり、かつ歩留まり向上を図り得る技術を提供することを目的としている。 The present invention has been made in view of the above-mentioned conventional problems, and simplifies the process for mounting an electronic device on a non-breathable substrate having an opening, and "contamination" of the adsorption stage in the process. The purpose is to provide a technique that can improve the yield at low cost by solving the problem and clearly forming a fine ink pattern.

この目的の達成を図るため、本発明に係る電子デバイスの製造方法によれば、
平坦な吸着ステージ上に、この吸着ステージに接するメッシュ状素材からなる支持層、及び不織布層が積層された通気性シートを載置し、この不織布層の表面に非通気性基材を吸着固定した状態で、この非通気性基材に印刷を施す電子デバイスの製造方法であって、
上述の非通気性基材には開口部が形成されており、前記不織布層の所定領域表面には前述した開口部に対応し、通気性シートの表面に突出しないように、不織布層内に埋め込み形成した非通気性の目止め部を設け、この目止め部と上述した開口部とが同位置で前述した非通気性基材を吸引固定して印刷を施すことを特徴としている。
In order to achieve this object, according to the method for manufacturing an electronic device according to the present invention,
A support layer made of a mesh-like material in contact with the adsorption stage and a breathable sheet on which a non-woven fabric layer was laminated were placed on a flat adsorption stage, and a non-breathable substrate was adsorbed and fixed on the surface of the non-woven fabric layer. A method for manufacturing an electronic device that prints on this non-woven fabric in a state.
An opening is formed in the non-breathable substrate, and the surface of the predetermined region of the non-woven fabric layer corresponds to the above-mentioned opening and is embedded in the non-woven fabric layer so as not to protrude from the surface of the breathable sheet. It is characterized in that the formed non-breathable sealing portion is provided, and the above-mentioned non-breathable base material is suction-fixed and printed at the same position between the sealing portion and the above-mentioned opening.

また、上述した本発明の製造技術に適用して好適な本発明の通気性シートの構成によれば、非通気性基材に接するための不織布層と、吸着ステージに接するため、メッシュ状素材からなる支持層とが積層されてなる通気性シートであって、
非通気性基材に設けられた開口部の形状に応じた上述した不織布層の所定領域に、通気性シートの表面に突出しないように、不織布層内に埋め込み形成した非通気性の目止め部を設けたことを特徴としている。


Further, according to the configuration of the breathable sheet of the present invention suitable for the manufacturing technique of the present invention described above, the non-woven fabric layer for contacting the non-breathable substrate and the mesh-like material for contacting the adsorption stage are used. It is a breathable sheet in which a support layer is laminated.
A non-breathable sealing portion formed by embedding in the non-woven fabric layer so as not to protrude from the surface of the breathable sheet in the predetermined region of the above-mentioned nonwoven fabric layer according to the shape of the opening provided in the non-breathable substrate. It is characterized by the provision of.


本発明に係る技術を適用することで、吸着ステージ(或いは非通気性基材の)全面にわたって吸引固定の均質化を図ることができ、印刷インクによる吸着ステージの汚染を解消し、かつ明瞭なインクパターンを得ることができ、効率的な電子デバイスの製造を実現することができる。 By applying the technique according to the present invention, it is possible to homogenize the suction fixing over the entire surface of the adsorption stage (or the non-breathable base material), eliminate the contamination of the adsorption stage by the printing ink, and make the ink clear. Patterns can be obtained and efficient manufacturing of electronic devices can be realized.

本発明に係る通気性シートの好適形態を説明するため、その平面並びに断面を模式的に示す説明図。An explanatory view schematically showing a plane and a cross section thereof in order to explain a suitable form of the breathable sheet according to the present invention. 本発明に係る製造方法の好適形態を説明するため、図1と同様に吸着ステージ上に各構成成分を吸引固定した平面並びに断面を模式的に示す説明図。In order to explain a suitable embodiment of the manufacturing method according to the present invention, an explanatory view schematically showing a plane and a cross section in which each component is suction-fixed on an adsorption stage as in FIG. 本発明の実施例による効果を説明するため、非通気性基材に印刷したインクパターンを光学顕微鏡で観察撮影した図面代用写真。In order to explain the effect of the embodiment of the present invention, a drawing substitute photograph obtained by observing and taking an ink pattern printed on a non-breathable substrate with an optical microscope. 比較例により印刷実施した結果を図3と同様に示す図面代用写真。A drawing substitute photograph showing the results of printing according to a comparative example in the same manner as in FIG.

以下、図面を参照して本発明の技術に関する好適な実施形態を説明する。尚、以下の説明では、本発明の理解を容易とするため、特定の形状、数値的条件、及び配置関係を例示して説明するが、本発明に係る技術は、これら特定の条件にのみ限定されるものではなく、この発明の目的の範囲内で任意好適に設計の変更または変形を行うことができる。さらに、以下で参照する図面には、同一の機能を有する構成成分には同一の符号とハッチングとを付すと共に、一部構成成分の符号並びにハッチングは省略する。 Hereinafter, preferred embodiments of the technique of the present invention will be described with reference to the drawings. In the following description, in order to facilitate understanding of the present invention, specific shapes, numerical conditions, and arrangement relationships will be illustrated and described, but the technique according to the present invention is limited to these specific conditions. However, any suitable design change or modification can be made within the scope of the object of the present invention. Further, in the drawings referred to below, components having the same function are designated by the same reference numerals and hatching, and the reference numerals and hatching of some constituent components are omitted.

まず始めに、本発明の製造方法に用いて好適な通気性シートの構成について図1を参照して説明する。図1は、本発明の好適形態である矩形の通気性シートについて、非通気性基材を吸着固定する面を上部に示し、上部に一点鎖線I-Iで示す位置の断面を下部に示す模式的な説明図である。まず、通気性シート11には、図示していない非通気性基材と接して吸着固定するための不織布層13と、不図示の吸着ステージに接するため、メッシュ状素材からなる支持層15とが積層されている。この通気性シートの概略構成は、前述した特許文献3に準じた構成とするのが好ましい。具体的には、同文献に記載されるとおり、70メッシュ以上400メッシュ以下のステンレス鋼(SUS)製平織りメッシュなどを支持層15に用い、ポリオレフィン系樹脂、アクリル系樹脂を始めとする種々の繊維形成性の合成樹脂を溶融紡糸法、乾式紡糸法、湿式紡糸法、直接紡糸法(メルトブロー法、スパンボンド法、静電紡糸法など)などにより細繊維化して不織布層13を調製する。これら2つの層間接合は、市販されているスチレンブタジエンゴム、ポリビニルアルコール、ナイロンホットメルトなどを主成分とするスプレー状接着剤により、通気性を損なわないように積層一体化するのが好ましい。 First, the configuration of a breathable sheet suitable for use in the production method of the present invention will be described with reference to FIG. FIG. 1 is a schematic view of a rectangular breathable sheet, which is a preferred embodiment of the present invention, in which the surface for adsorbing and fixing the non-breathable substrate is shown at the upper part, and the cross section at the position indicated by the alternate long and short dash line I-I is shown at the lower part. It is an explanatory diagram. First, the breathable sheet 11 has a non-woven fabric layer 13 for contacting and fixing with a non-breathable base material (not shown) and a support layer 15 made of a mesh-like material for contacting with a suction stage (not shown). It is laminated. The schematic configuration of this breathable sheet is preferably a configuration according to the above-mentioned Patent Document 3. Specifically, as described in the same document, a plain woven mesh made of stainless steel (SUS) of 70 mesh or more and 400 mesh or less is used for the support layer 15, and various fibers such as polyolefin resin and acrylic resin are used. The non-woven fabric layer 13 is prepared by forming the formable synthetic resin into fine fibers by a melt spinning method, a dry spinning method, a wet spinning method, a direct spinning method (melt blow method, spunbond method, electrostatic spinning method, etc.) or the like. It is preferable that these two interlayer bonds are laminated and integrated with a commercially available spray-like adhesive containing styrene-butadiene rubber, polyvinyl alcohol, nylon hot melt or the like as a main component so as not to impair the air permeability.

次いで、上述した通気性シートの不織布層13の所定領域には、例えばナイロン、その他の熱可塑性樹脂からなるホットメルトフィルム、アクリルなどの樹脂からなるバインダーによる目止め処理、不織布層が熱可塑性樹脂で構成されている場合には熱融着による目止め、または周知のレジストなどをスプレー、コーティング、転写、印刷などの周知の手法によって所定形状で不織布層に形成するなどの手段によって、非通気性の目止め部17を設ける。この所定領域並びに所定形状とは、非通気性基材に設けられた開口部の形状に応じた形状並びに配置条件を表している。目止め部を形成するにあたっては、予め、開口部を有する非通気性基材を通気性シートに積層した状態で、吸引ステージ上に固定し、上述の樹脂を印刷して、所定領域のみに非通気性の目止め部を設けるのが最適である。また、必要に応じ、印刷された材料樹脂を加熱によって不織布層の構成繊維に定着させるなどの付加的な目止め処理を経て、周知の手段により目止め部を形成することができる。図1では、矩形の目止め部17を4箇所に形成した場合を例示しているが、この形状並びに配置関係は、被印刷物である非通気性基材に設けられた開口部に対応するものである。この目止め部17が不織布層13の主面から突出する高さは、非通気性基材の厚さと同等以下であるのが好ましい。また、図1の下部断面図では、不織布層13と目止め部17との界面を点線で示しているが、目止め部17は電子デバイスの作製工程での取り扱いによって容易に脱落しないように、互いの素材が強固に一体化した非通気性の領域とするのが良い。 Next, in the predetermined area of the nonwoven fabric layer 13 of the breathable sheet described above, for example, a hot melt film made of nylon or another thermoplastic resin, a sealing treatment with a binder made of a resin such as acrylic, and the nonwoven fabric layer being made of a thermoplastic resin. If it is configured, it is non-breathable by means such as sealing by heat fusion, or forming a well-known resist or the like into a non-woven fabric layer in a predetermined shape by a well-known method such as spraying, coating, transfer, or printing. A sealing portion 17 is provided. The predetermined region and the predetermined shape represent the shape and the arrangement condition according to the shape of the opening provided in the non-breathable base material. In forming the sealing portion, the non-breathable base material having an opening is laminated on the breathable sheet in advance, fixed on the suction stage, and the above-mentioned resin is printed on the non-breathable base material only in a predetermined area. It is best to provide a breathable seal. Further, if necessary, the sealing portion can be formed by a well-known means through an additional sealing treatment such as fixing the printed material resin to the constituent fibers of the nonwoven fabric layer by heating. FIG. 1 exemplifies a case where rectangular sealing portions 17 are formed at four locations, but the shape and arrangement relation correspond to openings provided in a non-breathable base material which is a printed matter. Is. The height at which the sealing portion 17 protrudes from the main surface of the nonwoven fabric layer 13 is preferably equal to or less than the thickness of the non-breathable substrate. Further, in the lower sectional view of FIG. 1, the interface between the nonwoven fabric layer 13 and the sealing portion 17 is shown by a dotted line, but the sealing portion 17 is prevented from easily falling off due to handling in the manufacturing process of the electronic device. It is better to make it a non-breathable area where the materials are firmly integrated with each other.

次いで、本発明の製造方法の好適例を図2により説明する。図2は図1と同様にして、吸引口19が孔設された吸着ステージ21に上述の通気性シート11を載置し、当該シート11に設けられた目止め部17と開口部が形成された非通気性基材23とが実質的に嵌合する位置で当該基材23を吸引固定した状態を模式的に示す説明図である。尚、開口部と目止め部17とは同位置に存在するため、開口部の符号を省略してある。また、吸着ステージ21に吸引力を供給するための真空吸着装置は図示を省略する。この図から理解できるように、非通気性基材23に設けられた開口部には目止め部17が嵌合されているため、当該基材23の全面は実質的に非通気性に保たれ、しかも全印刷面時に平滑な吸着固定が実現できる。従って、この状態で図示していない印刷手段(インク材、スクリーン、スキージ)を非通気性基材の全面に適用した場合であっても、吸引口19に対してインク材の汚染は生じることがなく、しかも明瞭なパターンの印刷が可能である。 Next, a preferred example of the production method of the present invention will be described with reference to FIG. In FIG. 2, in the same manner as in FIG. 1, the above-mentioned breathable sheet 11 is placed on the suction stage 21 in which the suction port 19 is provided, and the sealing portion 17 and the opening provided in the sheet 11 are formed. It is explanatory drawing which shows typically the state in which the base material 23 is sucked and fixed at the position where the non-breathable base material 23 is substantially fitted. Since the opening and the sealing portion 17 are present at the same position, the reference numeral of the opening is omitted. Further, the vacuum suction device for supplying the suction force to the suction stage 21 is not shown. As can be understood from this figure, since the sealing portion 17 is fitted in the opening provided in the non-breathable base material 23, the entire surface of the base material 23 is substantially kept non-breathable. Moreover, smooth suction fixing can be realized on all printed surfaces. Therefore, even when a printing means (ink material, screen, squeegee) (not shown) is applied to the entire surface of the non-breathable base material in this state, the ink material may be contaminated on the suction port 19. It is possible to print a clear pattern without any problems.

以上、本発明の実施形態について、具体的な構成を挙げて説明したが、本発明の技術はこれら特定条件にのみ限定されるものではない。例えば、目止め部17として略正方形の形状を例示しているが、非通気性基板に設けられた開口部の形状に応じて長方形などの矩形、円形、楕円形、三角形及びその他の多角形とすることもできる。また、目止め部17の寸法は、開口部よりも小さく設計することで位置合わせが容易となる。この際の開口部と目止め部との隙間が吸引口の直径と同等とすることで、この隙間は実質的にインクパターンには影響を及ぼさない。さらに、図示を省略するが、目止め部が通気性シートの表面に突出しないように、バインダーやホットメルトフィルムなどを不織布層内に埋め込み形成することもできる。この場合には、非通気性基材との位置合わせに余裕を持たせることが可能である。加えて、前述の特許文献2に開示されるようなスプロケットホールを有する非通気性基材に対応するため、本発明の通気性シートの端縁に、周知の技術によって突起を設け、位置合わせの簡略化を図っても良い。 Although the embodiments of the present invention have been described above with specific configurations, the technique of the present invention is not limited to these specific conditions. For example, the shape of a substantially square is exemplified as the sealing portion 17, but it may be a rectangle such as a rectangle, a circle, an ellipse, a triangle, or another polygon depending on the shape of the opening provided in the non-breathable substrate. You can also do it. Further, the size of the sealing portion 17 is designed to be smaller than that of the opening, so that the alignment can be facilitated. At this time, the gap between the opening and the sealing portion is made equal to the diameter of the suction port, so that the gap does not substantially affect the ink pattern. Further, although not shown, a binder, a hot melt film, or the like can be embedded in the non-woven fabric layer so that the sealing portion does not protrude from the surface of the breathable sheet. In this case, it is possible to allow a margin for alignment with the non-breathable base material. In addition, in order to cope with a non-breathable substrate having a sprocket hole as disclosed in Patent Document 2 described above, a protrusion is provided on the edge of the breathable sheet of the present invention by a well-known technique for alignment. You may try to simplify it.

以下、本発明の好適実施例と比較例とを例示し、実際に印刷を実施した評価結果について説明する。まず、実施例に係る通気性シートの構成例について説明する。実施例の基本構成は前述した特許文献3に準じて作製した。即ち、市販のSUS製平織りからなる100メッシュ(線径0.1mm,目開き間隔0.15mm)の支持体15に、繊維径400nmのポリアクリロニトリル繊維から成る目付17g/mの不織布にアクリルバインダーを被着した不織布層13(総目付25g/m)を積層圧着し、170mm角の通気性シートを調製した。この後、図2に示す非通気性基材23の形状に応じて20mm角の正方形が4カ所に形成されるように、銀を含む印刷ペースト『LS-460H-1-Ultra-Fine-Ag-Paste』((株)アサヒ化学研究所製,商品名)を印刷形成し、目止め部17とした。また、比較例には、目止め部を設けていないことを除いては同一の構成のものを準備した。 Hereinafter, preferred examples and comparative examples of the present invention will be illustrated, and the evaluation results of actual printing will be described. First, a configuration example of the breathable sheet according to the embodiment will be described. The basic configuration of the example was produced according to the above-mentioned Patent Document 3. That is, a 100-mesh (wire diameter 0.1 mm, opening interval 0.15 mm) support 15 made of commercially available SUS plain weave, a non-woven fabric having a mesh size of 17 g / m 2 made of polyacrylonitrile fiber having a fiber diameter of 400 nm, and an acrylic binder. The non-woven fabric layer 13 (25 g / m 2 with a total mesh size) coated with the above was laminated and pressure-bonded to prepare a 170 mm square breathable sheet. After that, the printing paste "LS-460H-1-Ultra-Fine-Ag-" containing silver is formed so that 20 mm square squares are formed in four places according to the shape of the non-breathable base material 23 shown in FIG. "Paste" (manufactured by Asahi Chemical Laboratory Co., Ltd., trade name) was printed and formed to form a sealing portion 17. Further, in the comparative example, those having the same configuration were prepared except that the sealing portion was not provided.

次いで、印刷試験の条件について説明する。この実施例では、吸着ステージと印刷機との機能を有する市販の印刷機『WHTラボ』((株)ミノグループ製、商品名)を用い、非通気性基材23として市販のポリエチレンテレフタレートフィルム(厚さ12μm)を用いた。上述の各通気性シートをテープにより吸着ステージに固定し、続いて、実施例の通気性シートについては目止め部17とフィルムの開口部とを位置合わせして吸引固定を行った。この際、印刷に用いた印刷パターンは、0.3mm×1mmの矩形を0.2mmの間隔で複数画成したものを使用し、前述の印刷ペーストで印刷を行った。その印刷評価結果は、前述した図2に2点鎖線で示す開口部に隣接する部分を光学顕微鏡で観察した。結果を、実施例については図3、並びに比較例については図4に示す。 Next, the conditions of the printing test will be described. In this embodiment, a commercially available printing machine "WHT Lab" (manufactured by Mino Group Co., Ltd., trade name) having a function of an adsorption stage and a printing machine is used, and a commercially available polyethylene terephthalate film (commercially available as a non-breathable base material 23) is used. A thickness of 12 μm) was used. Each of the above-mentioned breathable sheets was fixed to the suction stage with tape, and subsequently, for the breathable sheet of the example, the sealing portion 17 and the opening of the film were aligned and fixed by suction. At this time, as the printing pattern used for printing, a plurality of 0.3 mm × 1 mm rectangles were formed at intervals of 0.2 mm, and printing was performed using the above-mentioned print paste. As for the print evaluation result, the portion adjacent to the opening shown by the two-dot chain line in FIG. 2 described above was observed with an optical microscope. The results are shown in FIG. 3 for Examples and FIG. 4 for Comparative Examples.

まず図3から理解できるように、実施例にかかる通気性シートでは、矩形パターンを構成する線条が非通気性基材の開口部に相当する縁まで明瞭に印刷できた。これに対して、図4に示す比較例の通気性シートの結果では、明瞭な線条を形成することができず、線幅が不均一となった。この理由としては、実施例では吸着力が均一であるため、スキージが押圧する部分では印刷パターンと非通気性基材とが密着した後、スキージが印刷パターンを押圧しなくなると直ちに密着状態が解消される。これに対して比較例では、吸引力の散逸によって非通気性基材の吸着ステージ(並びに通気性シート)への密着力を弱めるため、スキージによる押圧解除後、非通気性基材が印刷パターンに密着し持ち上がる状態が暫く続く。その後に遅れて剥離することで、非通気性基材が印刷パターンに引きずられ、インクパターンにずれが生じる。これと同時に、スキージによる押圧解除後、印刷パターンからの剥離に遅れを生じ、必要以上の厚さを以って非通気性基材にインクが転写され、不明瞭になったものと考えられる。以上のことから、非通気性基材に形成された開口部に応じた目止め部を備える本発明の構成によって、良好なインクパターンを形成し得ることが確認された。 First, as can be understood from FIG. 3, in the breathable sheet according to the embodiment, the lines constituting the rectangular pattern could be clearly printed up to the edge corresponding to the opening of the non-breathable base material. On the other hand, in the result of the breathable sheet of the comparative example shown in FIG. 4, clear streaks could not be formed and the line width became non-uniform. The reason for this is that since the adsorption force is uniform in the examples, the printed pattern and the non-breathable substrate are in close contact with each other at the portion pressed by the squeegee, and then the close contact state is immediately eliminated when the squeegee no longer presses the printed pattern. Will be done. On the other hand, in the comparative example, in order to weaken the adhesion of the non-breathable base material to the adsorption stage (and the breathable sheet) by the dissipation of the suction force, the non-breathable base material becomes the printed pattern after the pressing by the squeegee is released. The state of close contact and lifting continues for a while. Subsequent peeling with a delay causes the non-breathable substrate to be dragged by the printed pattern, causing the ink pattern to shift. At the same time, it is probable that after the pressing by the squeegee was released, the peeling from the print pattern was delayed, and the ink was transferred to the non-breathable substrate with a thickness larger than necessary, which made it unclear. From the above, it was confirmed that a good ink pattern can be formed by the configuration of the present invention including the sealing portion corresponding to the opening formed in the non-breathable base material.

11:通気性シート、13:不織布層、15:支持層、17:目止め部、
19:吸引口、21:吸着ステージ、23:非通気性基材、A:評価結果の撮影位置。
11: Breathable sheet, 13: Non-woven fabric layer, 15: Support layer, 17: Sealing part,
19: Suction port, 21: Suction stage, 23: Non-breathable substrate, A: Shooting position of evaluation result.

Claims (2)

平坦な吸着ステージ上に、該吸着ステージに接するメッシュ状素材からなる支持層、及び不織布層が積層された通気性シートを載置し、該不織布層の表面に非通気性基材を吸着固定した状態で、該非通気性基材に印刷を施す電子デバイスの製造方法であって、
前記非通気性基材には開口部が形成されており、前記不織布層の所定領域表面には前記開口部に対応し、通気性シートの表面に突出しないように、不織布層内に埋め込み形成した非通気性の目止め部を設け、該目止め部と前記開口部とが同位置で前記非通気性基材を吸引固定して印刷を施すことを特徴とする電子デバイスの製造方法。
A support layer made of a mesh-like material in contact with the adsorption stage and a breathable sheet on which a non-woven fabric layer was laminated were placed on a flat adsorption stage, and a non-breathable substrate was adsorbed and fixed on the surface of the nonwoven fabric layer. A method for manufacturing an electronic device that prints on the non-woven fabric in a state.
An opening is formed in the non-breathable base material, and the non-woven fabric layer is embedded in the non-woven fabric layer so as to correspond to the opening on the surface of a predetermined region and not to protrude from the surface of the breathable sheet. A method for manufacturing an electronic device, characterized in that a non-breathable sealing portion is provided, and the non-breathable base material is suction-fixed and printed at the same position between the sealing portion and the opening.
非通気性基材に接するための不織布層と、吸着ステージに接するため、メッシュ状素材からなる支持層とが積層されてなる通気性シートであって、
非通気性基材に設けられた開口部の形状に応じた前記不織布層の所定領域に、通気性シートの表面に突出しないように、不織布層内に埋め込み形成した非通気性の目止め部を設けたことを特徴とする通気性シート。
A breathable sheet in which a non-woven fabric layer for contacting a non-breathable substrate and a support layer made of a mesh-like material for contacting an adsorption stage are laminated.
A non-breathable sealing portion formed by embedding in the non-woven fabric layer so as not to protrude from the surface of the breathable sheet is provided in a predetermined area of the nonwoven fabric layer according to the shape of the opening provided in the non-breathable substrate. A breathable sheet characterized by being provided.
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