JP2005246843A - Device for sticking film to substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automatically stick a PET film on a glass substrate before laser patterning. <P>SOLUTION: A device has a carrier 40 including a film roll 12, a film press roller 32 for sticking the film 14 on the glass substrate 10, and an upper suction plate 34 for holding the tip of the film fed from the film roll from the side opposite to the substrate, means (42, 44, and 46) for moving the carrier in the longitudinal direction of the film, a means (48) for moving the carrier vertically, a lower suction plate 24A which is arranged in the vicinity of the front end of the substrate and holds the tip of the film from the substrate side, and film suction areas 24A-24F which are arranged around the substrate and suck/fix the surroundings of the film. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a film sticking apparatus on a substrate, and in particular, in pattern processing by a laser of a printed wiring board, it is wound into a roll suitable for use when sticking a PET film to a glass substrate before laser processing. The present invention relates to a film sticking apparatus for sticking a film to a substrate while feeding the film.

  A printed wiring board used in an electronic device such as a computer has a predetermined pattern of wiring such as copper formed on one or both sides of an insulating substrate such as glass.

  In this type of printed wiring board, conventionally, a wiring pattern has been formed by etching. Recently, so-called laser patterning, in which a pattern is drawn with a laser beam, is also being put into practical use.

  In any case, in the manufacturing process of such a printed wiring board, it is necessary to paste a translucent resin (for example, PET) film on the substrate before etching or laser processing. Since pasting is difficult, an automatic pasting device is required.

  Incidentally, in the production of a resin-coated metal laminate material, Patent Document 1 discloses a method in which a thermoplastic resin film is directly attached to both surfaces of a strip-shaped metal substrate that is continuously conveyed in a line using a warm laminate roll. Although described in Patent Document 2, none of them is suitable for use when a film is pasted on a single semiconductor substrate.

Japanese Patent Laid-Open No. 10-138315 Japanese Patent Laid-Open No. 10-138316

  The present invention has been made to solve the above-described conventional problems, and an object thereof is to provide a film sticking apparatus suitable for sticking a film to a single substrate.

  The present invention is a film sticking device to a substrate for affixing a film wound in a roll shape onto a substrate, the film roll, a film pressing roller for closely attaching the film to the substrate, and the film roll. A carrier including first film holding means for holding the leading edge of the film from the side opposite to the substrate, means for moving the carrier in the longitudinal direction of the film, means for moving the carrier up and down, and a vicinity of the front end of the substrate The second film holding means for holding the tip of the film from the substrate side, and the film suction means for sucking and fixing the periphery of the film disposed around the substrate, It solves the problem.

  Further, a part of the film adsorbing means also serves as the second film holding means, and the configuration is simplified.

  Further, the carrier is provided with means for removing wrinkles of the film fed from the film roll so that the film is not wrinkled.

  Further, the carrier is provided with means for cutting the rear end of the film after being in close contact with the substrate, so that the film after being attached is automatically cut.

  According to the present invention, for example, a film wound in a roll shape can be automatically attached to a substrate before laser processing while being fed out.

  Hereinafter, an embodiment of the present invention applied to an apparatus for automatically attaching a PET film to a glass substrate before laser processing will be described in detail with reference to the drawings.

  This embodiment is configured as shown in FIG. 1 (front view), FIG. 2 (side view), and FIG. 3 (plan view).

  In the figure, 12 is a film roll on which a PET film (hereinafter simply referred to as a film) 14 having a width of 120 to 2050 mm and a thickness of 30 to 100 μm, for example, is wound. As shown in FIG. Attached to the glass substrate 10 in a state of protruding from about 10 to about 20 to 70 mm.

  Reference numeral 20 denotes a suction table equipped with, for example, a suction blower. As shown in FIG. 5, for example, a triple rectangular substrate suction area 22A, 22B, 22C and a corner suction area 22D cause an outer substrate from the inner substrate suction area 22A. By sequentially adsorbing toward the adsorption area 22C and the corner adsorption area 22D, the glass substrate 10 disposed thereon is adsorbed and fixed.

  24A to 24F are film adsorption areas provided with, for example, a suction blower provided outside the substrate adsorption area 22B. For example, by sequentially adsorbing from the right area 24A to the left area 24F in the figure, While extending the wrinkles of the film 14, the entire circumference of the film is adsorbed.

  30 is a rubber leveling guide roller, for example, made of rubber for removing wrinkles of the film 14 as shown in FIG. 6 while keeping the feeding height of the film 14 fed from the film roll 12 constant. For example, a rubber film pressing roller 34 for adjusting the pressing force by adjusting a spring (not shown) for bringing the film 14 into close contact with the glass substrate 10 and releasing the air is provided from the film roll 12. The upper suction plate 36, which is a first film holding unit that sucks the entire width of the tip of the fed film 14 from the upper side opposite to the substrate, for example, by a suction blower, is attached to the glass substrate 10. 7 is a film cutter in which a cutter relief groove 37 shown in an enlarged view in FIG. A cutter driving unit for driving the film cutter 36 in the film width direction.

  The film roll 12, the leveling guide roller 30, the film pressing roller 32, the film cutter 36 and the cutter driving unit 38 are mounted on a carrier 40. The carrier 40 can be moved in the left-right direction in FIG. 1 through the timing belt 44 by the rotation of the carrier transport motor 42 and is moved in the up-down direction in FIG. 1 by the air cylinder 48. It can be moved up and down.

  50 is an XY stage, and 52 is a base plate.

  In the present embodiment, since the film suction area 24A at the right end in FIG. 5 also serves as a lower suction plate that is a second film holding means for holding the film tip from the same lower side as the substrate, The configuration is simple. Note that a lower suction plate independent of the film suction area 24A may be provided. The holding method is not limited to adsorption by a suction blower.

  Hereinafter, the operation of the sticking device will be described with reference to FIG.

  First, in step 100, the glass substrate 10 is mounted on the suction table 20 from the left side of FIG.

  Next, at step 110, as an initial setup, the film 14 is manually unwound from the film roll 12 and sucked onto the upper suction plate 34 on the carrier 40 and moved to the non-operation side (left side in FIG. 1) as indicated by an arrow B. .

  After the carrier 40 reaches the non-operation side, in step 120, the carrier 40 is lowered as indicated by an arrow C, and the leading end of the film 14 is transferred from the upper suction plate 34 to the lower suction plate 24A.

  After the front end of the film 14 is adsorbed to the lower adsorption plate 24A, the carrier 40 is moved to the operation side (right side in FIG. 1) as shown by an arrow D in step 130, and as shown in FIG. The film 14 is pressed against the glass substrate 10 with the pressing roller 32, and the film is pasted while releasing air.

  After pasting the entire surface, in step 140, the periphery of the film 14 is sucked and fixed in the film suction areas 24A to 24F of the suction table 20.

  Next, in step 150, the rear end of the film 14 is again sucked and held by the upper suction plate 34, the film cutter 36 is lowered in step 160, and moved in the film width direction by the cutter driving unit 38, and the rear end of the film 14 is moved. Disconnect.

  After cutting, the film cutter 36 is raised again with the carrier 40 as indicated by arrow E in step 170.

  Thus, the film 14 is stuck on the surface of the glass substrate 10.

  In actual processing, as shown in FIG. 9, a film is applied in the direction of arrow D in region A, laser patterning is performed in region B, and then in region C, a film is applied in the direction of arrow F different from the film application direction. The substrate is peeled off, a new substrate is mounted again in the area A, and steps 110 to 170 in FIG. 8 are repeated.

  In the embodiment, the leveling guide roller 30 is used to remove the wrinkles of the film fed from the roll as shown in FIG. 6, but a static eliminator 31 as shown in FIG. 10 is provided. You can also. In addition, it is also possible to remove both wrinkles of a film by using both together or by another method. In the figure, 33 is a pressing force adjusting spring of the film pressing roller 32.

  In the above-described embodiment, the carrier 40 moves on the linear guide 46 using the timing belt 44 and moves up and down using the air cylinder 48. However, the carrier 40 moves and moves up and down. The configuration of is not limited to this.

  The present invention is particularly suitable for use when attaching a PET film to a glass substrate as a treatment prior to laser processing. In addition, the application object of this invention is not limited to this, It is applicable when sticking a film generally on a general single substrate.

Front view of an embodiment of the present invention Same side view Same top view The top view which similarly shows the glass substrate where the film was stuck A plan view showing the same suction table The top view which shows the wrinkle which occurs in the film Similarly, the main part enlarged front view Flow chart showing the sticking procedure in this embodiment A plan view showing the whole process of laser patterning The front view which shows the modification of the mechanism for wrinkle removal similarly arrange | positioned at the carrier

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Glass substrate 12 ... Film roll 14 ... PET film 20 ... Adsorption table 22A-22C ... Substrate adsorption area 22D ... Corner adsorption area 24A-24F ... Film adsorption area 24A ... Lower adsorption plate 30 ... Leveling guide roller 31 ... Static eliminator 32 ... Film pressing roller 33 ... Pushing force adjusting spring 34 ... Upper suction plate 36 ... Film cutter 37 ... Cutter escape groove 38 ... Cutter drive unit 40 ... Carrier 42 ... Carrier conveying motor 44 ... Timing belt 46 ... Straight (LM) ) Guide 48 ... Air cylinder

Claims (4)

A device for attaching a film to a substrate for affixing to a substrate while paying out a film wound in a roll,
A film roll, a film pressing roller for bringing the film into close contact with the substrate, and a carrier including first film holding means for holding the tip of the film fed out from the film roll from the opposite side of the substrate;
Means for moving the carrier in the longitudinal direction of the film;
Means for raising and lowering the carrier;
A second film holding means arranged in the vicinity of the front end of the substrate for holding the tip of the film from the substrate side;
A film adsorbing means for adsorbing and fixing the periphery of the film disposed around the substrate;
An apparatus for attaching a film to a substrate, comprising:   The apparatus for attaching a film to a substrate according to claim 1, wherein a part of the film adsorbing means also serves as the second film holding means.   The apparatus for attaching a film to a substrate according to claim 1, wherein the carrier is provided with means for removing wrinkles of the film fed from the film roll.   The apparatus for attaching a film to a substrate according to claim 1, wherein the carrier is provided with means for cutting the rear end of the film after being in close contact with the substrate.

Images