JP7072140B2 - ポリイミドフィルム - Google Patents
ポリイミドフィルム Download PDFInfo
- Publication number
- JP7072140B2 JP7072140B2 JP2019521278A JP2019521278A JP7072140B2 JP 7072140 B2 JP7072140 B2 JP 7072140B2 JP 2019521278 A JP2019521278 A JP 2019521278A JP 2019521278 A JP2019521278 A JP 2019521278A JP 7072140 B2 JP7072140 B2 JP 7072140B2
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- JP
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- Prior art keywords
- polyimide film
- polyimide
- film
- less
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229920001721 polyimide Polymers 0.000 title claims description 184
- 239000004642 Polyimide Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 54
- 239000011521 glass Substances 0.000 claims description 22
- 230000014759 maintenance of location Effects 0.000 claims description 22
- 238000002834 transmittance Methods 0.000 claims description 18
- 239000010408 film Substances 0.000 description 73
- 239000000243 solution Substances 0.000 description 35
- 239000000203 mixture Substances 0.000 description 33
- 239000007787 solid Substances 0.000 description 30
- 239000010410 layer Substances 0.000 description 29
- 239000002243 precursor Substances 0.000 description 29
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 27
- 238000000034 method Methods 0.000 description 26
- 238000006243 chemical reaction Methods 0.000 description 24
- 239000000126 substance Substances 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 17
- 238000005160 1H NMR spectroscopy Methods 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 16
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 16
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 15
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 14
- 150000004985 diamines Chemical class 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- -1 Carboxyphenyl Chemical group 0.000 description 10
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 10
- 125000003118 aryl group Chemical group 0.000 description 10
- 239000005340 laminated glass Substances 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 9
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 8
- 238000004817 gas chromatography Methods 0.000 description 8
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000000704 physical effect Effects 0.000 description 7
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000000262 chemical ionisation mass spectrometry Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 229920005575 poly(amic acid) Polymers 0.000 description 6
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 239000012299 nitrogen atmosphere Substances 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 238000001953 recrystallisation Methods 0.000 description 5
- 239000000725 suspension Substances 0.000 description 5
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 4
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 description 4
- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 235000019253 formic acid Nutrition 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- KJIFKLIQANRMOU-UHFFFAOYSA-N oxidanium;4-methylbenzenesulfonate Chemical compound O.CC1=CC=C(S(O)(=O)=O)C=C1 KJIFKLIQANRMOU-UHFFFAOYSA-N 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 239000000706 filtrate Substances 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- UIZIZIPEEWDBCL-UHFFFAOYSA-N (4-aminophenyl) 4-[4-(4-aminophenoxy)carbonylphenyl]benzoate Chemical compound C1=CC(N)=CC=C1OC(=O)C1=CC=C(C=2C=CC(=CC=2)C(=O)OC=2C=CC(N)=CC=2)C=C1 UIZIZIPEEWDBCL-UHFFFAOYSA-N 0.000 description 2
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- HYDATEKARGDBKU-UHFFFAOYSA-N 4-[4-[4-(4-aminophenoxy)phenyl]phenoxy]aniline Chemical group C1=CC(N)=CC=C1OC1=CC=C(C=2C=CC(OC=3C=CC(N)=CC=3)=CC=2)C=C1 HYDATEKARGDBKU-UHFFFAOYSA-N 0.000 description 2
- 102100024089 Aldo-keto reductase family 1 member C2 Human genes 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 101000690303 Homo sapiens Aldo-keto reductase family 1 member C2 Proteins 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 125000006267 biphenyl group Chemical group 0.000 description 2
- BBRLKRNNIMVXOD-UHFFFAOYSA-N bis[4-(3-aminophenoxy)phenyl]methanone Chemical compound NC1=CC=CC(OC=2C=CC(=CC=2)C(=O)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 BBRLKRNNIMVXOD-UHFFFAOYSA-N 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 239000012024 dehydrating agents Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000005462 imide group Chemical group 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000010954 inorganic particle Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000011146 organic particle Substances 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000017557 sodium bicarbonate Nutrition 0.000 description 2
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 2
- PYOKUURKVVELLB-UHFFFAOYSA-N trimethyl orthoformate Chemical compound COC(OC)OC PYOKUURKVVELLB-UHFFFAOYSA-N 0.000 description 2
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- NIDNOXCRFUCAKQ-RNGGSSJXSA-N (1r,2r,3s,4s)-bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid Chemical compound C1[C@@H]2C=C[C@H]1[C@H](C(=O)O)[C@@H]2C(O)=O NIDNOXCRFUCAKQ-RNGGSSJXSA-N 0.000 description 1
- JDGFELYPUWNNGR-UHFFFAOYSA-N 1,2,3,3a,4,5,6,6a-octahydropentalene-1,3,4,6-tetracarboxylic acid Chemical compound OC(=O)C1CC(C(O)=O)C2C(C(=O)O)CC(C(O)=O)C21 JDGFELYPUWNNGR-UHFFFAOYSA-N 0.000 description 1
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- STLLNIINOOEZHQ-UHFFFAOYSA-N 1-methylhexane-1,2,4-tricarboxylic acid Chemical compound CC(C(CC(CC)C(=O)O)C(=O)O)C(=O)O STLLNIINOOEZHQ-UHFFFAOYSA-N 0.000 description 1
- RPOHXHHHVSGUMN-UHFFFAOYSA-N 1-n,4-n-bis(4-aminophenyl)benzene-1,4-dicarboxamide Chemical compound C1=CC(N)=CC=C1NC(=O)C1=CC=C(C(=O)NC=2C=CC(N)=CC=2)C=C1 RPOHXHHHVSGUMN-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- IDGSXMQBQUGSRF-UHFFFAOYSA-N 2,4-dibutyl-3-methylphenol Chemical compound CCCCC1=CC=C(O)C(CCCC)=C1C IDGSXMQBQUGSRF-UHFFFAOYSA-N 0.000 description 1
- BEBVJSBFUZVWMS-UHFFFAOYSA-N 2-(2-methylpropyl)cyclohexane-1,4-diamine Chemical compound CC(C)CC1CC(N)CCC1N BEBVJSBFUZVWMS-UHFFFAOYSA-N 0.000 description 1
- XZRLKWVRXZRWIW-UHFFFAOYSA-N 2-[2-[1-[2-(2-aminophenoxy)phenyl]propyl]phenoxy]aniline Chemical compound C=1C=CC=C(OC=2C(=CC=CC=2)N)C=1C(CC)C1=CC=CC=C1OC1=CC=CC=C1N XZRLKWVRXZRWIW-UHFFFAOYSA-N 0.000 description 1
- MSTZGVRUOMBULC-UHFFFAOYSA-N 2-amino-4-[2-(3-amino-4-hydroxyphenyl)-1,1,1,3,3,3-hexafluoropropan-2-yl]phenol Chemical compound C1=C(O)C(N)=CC(C(C=2C=C(N)C(O)=CC=2)(C(F)(F)F)C(F)(F)F)=C1 MSTZGVRUOMBULC-UHFFFAOYSA-N 0.000 description 1
- IAEVEDMYEYMTSE-UHFFFAOYSA-N 2-butan-2-ylcyclohexane-1,4-diamine Chemical compound CCC(C)C1CC(N)CCC1N IAEVEDMYEYMTSE-UHFFFAOYSA-N 0.000 description 1
- HIEBSORULQQANM-UHFFFAOYSA-N 2-butylcyclohexane-1,4-diamine Chemical compound CCCCC1CC(N)CCC1N HIEBSORULQQANM-UHFFFAOYSA-N 0.000 description 1
- FMZFBOHWVULQIY-UHFFFAOYSA-N 2-ethylcyclohexane-1,4-diamine Chemical compound CCC1CC(N)CCC1N FMZFBOHWVULQIY-UHFFFAOYSA-N 0.000 description 1
- SFHLLWPKGUSQIK-UHFFFAOYSA-N 2-methylcyclohexane-1,4-diamine Chemical compound CC1CC(N)CCC1N SFHLLWPKGUSQIK-UHFFFAOYSA-N 0.000 description 1
- ALBWHZWLFAHNRI-UHFFFAOYSA-N 2-propan-2-ylcyclohexane-1,4-diamine Chemical compound CC(C)C1CC(N)CCC1N ALBWHZWLFAHNRI-UHFFFAOYSA-N 0.000 description 1
- WNRDZWNCHXTBTQ-UHFFFAOYSA-N 2-propylcyclohexane-1,4-diamine Chemical compound CCCC1CC(N)CCC1N WNRDZWNCHXTBTQ-UHFFFAOYSA-N 0.000 description 1
- RKBNPLYPKZRNEF-UHFFFAOYSA-N 2-tert-butylcyclohexane-1,4-diamine Chemical compound CC(C)(C)C1CC(N)CCC1N RKBNPLYPKZRNEF-UHFFFAOYSA-N 0.000 description 1
- HUWXDEQWWKGHRV-UHFFFAOYSA-N 3,3'-Dichlorobenzidine Chemical group C1=C(Cl)C(N)=CC=C1C1=CC=C(N)C(Cl)=C1 HUWXDEQWWKGHRV-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical group C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- GTALYBOAEVNYOZ-UHFFFAOYSA-N 3-(2,3-dicarboxycyclohexyl)cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1C(C(=O)O)CCCC1C1C(C(O)=O)C(C(O)=O)CCC1 GTALYBOAEVNYOZ-UHFFFAOYSA-N 0.000 description 1
- FMXFZZAJHRLHGP-UHFFFAOYSA-N 3-(2,3-dicarboxyphenyl)sulfonylphthalic acid Chemical compound OC(=O)C1=CC=CC(S(=O)(=O)C=2C(=C(C(O)=O)C=CC=2)C(O)=O)=C1C(O)=O FMXFZZAJHRLHGP-UHFFFAOYSA-N 0.000 description 1
- JUZVXGMLUGCXEQ-UHFFFAOYSA-N 3-(3,4-dicarboxycyclohexyl)cyclohexane-1,2-dicarboxylic acid Chemical compound C1C(C(O)=O)C(C(=O)O)CCC1C1C(C(O)=O)C(C(O)=O)CCC1 JUZVXGMLUGCXEQ-UHFFFAOYSA-N 0.000 description 1
- NBAUUNCGSMAPFM-UHFFFAOYSA-N 3-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=CC(C(O)=O)=C1C(O)=O NBAUUNCGSMAPFM-UHFFFAOYSA-N 0.000 description 1
- LXJLFVRAWOOQDR-UHFFFAOYSA-N 3-(3-aminophenoxy)aniline Chemical compound NC1=CC=CC(OC=2C=C(N)C=CC=2)=C1 LXJLFVRAWOOQDR-UHFFFAOYSA-N 0.000 description 1
- NDXGRHCEHPFUSU-UHFFFAOYSA-N 3-(3-aminophenyl)aniline Chemical group NC1=CC=CC(C=2C=C(N)C=CC=2)=C1 NDXGRHCEHPFUSU-UHFFFAOYSA-N 0.000 description 1
- ZBMISJGHVWNWTE-UHFFFAOYSA-N 3-(4-aminophenoxy)aniline Chemical compound C1=CC(N)=CC=C1OC1=CC=CC(N)=C1 ZBMISJGHVWNWTE-UHFFFAOYSA-N 0.000 description 1
- DKKYOQYISDAQER-UHFFFAOYSA-N 3-[3-(3-aminophenoxy)phenoxy]aniline Chemical compound NC1=CC=CC(OC=2C=C(OC=3C=C(N)C=CC=3)C=CC=2)=C1 DKKYOQYISDAQER-UHFFFAOYSA-N 0.000 description 1
- UCQABCHSIIXVOY-UHFFFAOYSA-N 3-[4-[4-(3-aminophenoxy)phenyl]phenoxy]aniline Chemical group NC1=CC=CC(OC=2C=CC(=CC=2)C=2C=CC(OC=3C=C(N)C=CC=3)=CC=2)=C1 UCQABCHSIIXVOY-UHFFFAOYSA-N 0.000 description 1
- ICNFHJVPAJKPHW-UHFFFAOYSA-N 4,4'-Thiodianiline Chemical compound C1=CC(N)=CC=C1SC1=CC=C(N)C=C1 ICNFHJVPAJKPHW-UHFFFAOYSA-N 0.000 description 1
- YARZEPAVWOMMHZ-UHFFFAOYSA-N 4-(3,4-dicarboxy-4-phenylcyclohexa-1,5-dien-1-yl)phthalic acid Chemical compound OC(=O)C1C=C(C=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=CC1(C(O)=O)C1=CC=CC=C1 YARZEPAVWOMMHZ-UHFFFAOYSA-N 0.000 description 1
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 description 1
- BKQWDTFZUNGWNV-UHFFFAOYSA-N 4-(3,4-dicarboxycyclohexyl)cyclohexane-1,2-dicarboxylic acid Chemical compound C1C(C(O)=O)C(C(=O)O)CCC1C1CC(C(O)=O)C(C(O)=O)CC1 BKQWDTFZUNGWNV-UHFFFAOYSA-N 0.000 description 1
- HLUQDUQCLMLYLO-UHFFFAOYSA-N 4-(3,4-dicarboxycyclohexyl)sulfanylcyclohexane-1,2-dicarboxylic acid Chemical compound C1C(C(O)=O)C(C(=O)O)CCC1SC1CC(C(O)=O)C(C(O)=O)CC1 HLUQDUQCLMLYLO-UHFFFAOYSA-N 0.000 description 1
- GTXJSEDZUCKPLC-UHFFFAOYSA-N 4-(3,4-dicarboxycyclohexyl)sulfonylcyclohexane-1,2-dicarboxylic acid Chemical compound C1C(C(O)=O)C(C(=O)O)CCC1S(=O)(=O)C1CC(C(O)=O)C(C(O)=O)CC1 GTXJSEDZUCKPLC-UHFFFAOYSA-N 0.000 description 1
- AIVVXPSKEVWKMY-UHFFFAOYSA-N 4-(3,4-dicarboxyphenoxy)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1OC1=CC=C(C(O)=O)C(C(O)=O)=C1 AIVVXPSKEVWKMY-UHFFFAOYSA-N 0.000 description 1
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Images
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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Description
1. ポリイミドを含むフィルムであって、
フィルム厚みが10μmで測定した場合の、
400℃で4時間保持した時の重量保持率が99.0%以上であり、
YI(黄色度)が10以下であり、且つ、
100~350℃の間の線熱膨張係数が55ppm/K以下であることを特徴とするポリイミドフィルム。
2. フィルム厚みが10μmで測定した場合の、430℃で1時間保持した時の重量保持率が99.0%以上であることを特徴とする前記項1に記載のポリイミドフィルム。
3. フィルム厚みが10μmで測定した場合の、100~380℃の間の線熱膨張係数が65ppm/K以下であることを特徴とする前記項1または2に記載のポリイミドフィルム。
4. フィルム厚みが10μmで測定した場合の、ヘイズが2%以下であることを特徴とする前記項1~3のいずれかに記載のポリイミドフィルム。
5. フィルム厚みが10μmで測定した場合の、厚み方向位相差(Rth)が1000nm以下であることを特徴とする前記項1~4のいずれかに記載のポリイミドフィルム。
6. フィルム厚みが10μmで測定した場合の、波長308nmの光透過率が0.1%以下であることを特徴とする前記項1~5のいずれかに記載のポリイミドフィルム。
7. 前記項1~6のいずれかに記載のポリイミドフィルムがガラス基材上に形成されていることを特徴とする積層体。
8. 前記項1~6のいずれかに記載のポリイミドフィルムを備えることを特徴とするディスプレイ用、タッチパネル用、または太陽電池用の基板。
(1)ポリイミド前駆体溶液、またはポリイミド前駆体溶液に必要に応じてイミド化触媒、脱水剤、離型助剤、無機微粒子などを選択して加えたポリイミド前駆体溶液組成物をフィルム状に支持体上に流延し、加熱乾燥して自己支持性フィルムを得た後、加熱により脱水環化、脱溶媒することによりポリイミドフィルムを得る方法;
(2)ポリイミド前駆体溶液に環化触媒および脱水剤を加え、さらに必要に応じて無機微粒子などを選択して加えたポリイミド前駆体溶液組成物をフィルム状に支持体上に流延し、化学的に脱水環化させて、必要に応じて加熱乾燥して自己支持性フィルムを得た後、これを加熱により脱溶媒、イミド化することによりポリイミドフィルムを得る方法;
(3)ポリイミドが有機溶媒に可溶の場合、離型助剤、無機微粒子などを選択して加えたポリイミド溶液組成物をフィルム状に支持体上に流延し、加熱乾燥などにより一部または全部の溶媒を除去した後、最高加熱温度に加熱することによりポリイミドフィルムを得る方法;
(4)ポリイミドが有機溶媒に可溶の場合、離型助剤、無機微粒子などを選択して加えたポリイミド溶液組成物をフィルム状に支持体上に流延し、加熱により溶媒を除去しながら最高加熱温度に加熱することによりポリイミドフィルムを得る方法、
が挙げられる。
有機溶媒に非可溶性のポリイミドは、耐溶媒性、耐化学薬品性が求められる用途において好ましい場合がある。有機溶媒非可溶性のポリイミドフィルムの製造は、一般にポリイミド前駆体溶液またはポリイミド前駆体溶液組成物を経由する方法、即ち上記(1)および(2)の方法が用いられる。
[YI]
紫外可視分光光度計/V-650DS(日本分光製)を用いて、ASTEM E313の規格に準拠して、膜厚10μm、5cm角サイズのポリイミドフィルムのYIを測定した。光源はD65、視野角は2°とした。
紫外可視分光光度計/V-650DS(日本分光製)を用いて、膜厚10μm、5cm角サイズのポリイミドフィルムの波長400nmにおける光透過率、波長308nmにおける光透過率、全光透過率(波長380nm~780nmにおける平均透過率)を測定した。
濁度計/NDH2000(日本電色工業製)を用いて、JIS K7136の規格に準拠して、膜厚10μm、5cm角サイズのポリイミドフィルムのヘイズを測定した。
膜厚10μmのポリイミドフィルムを、約6mm角サイズに切り取って試験片とし、TAインスツルメント社製 熱重量測定装置(Q5000IR)を用い、切り取ったサンプルを数枚重ねてサンプル重量を4mgとして、窒素気流中、200℃で30分間保持した後、昇温速度100℃/分で200℃から400℃まで昇温し、4時間保持した。400℃到達時の重量を100%として、4時間後の重量保持率を求めた。
膜厚10μmのポリイミドフィルムを、約6mm角サイズに切り取って試験片とし、TAインスツルメント社製 熱重量測定装置(Q5000IR)を用い、切り取ったサンプルを数枚重ねてサンプル重量を4mgとして、窒素気流中、200℃で30分間保持した後、昇温速度100℃/分で200℃から430℃まで昇温し、1時間保持した。430℃到達時の重量を100%として、1時間後の重量保持率を求めた。
膜厚10μmのポリイミドフィルムを幅4mmの短冊状に切り取って試験片とし、TMA/SS6100(エスアイアイ・ナノテクノロジー株式会社製)を用い、チャック間距離15mm、引張荷重2g、昇温速度20℃/分で500℃まで昇温した。得られたTMA曲線から、100℃から所定の温度(350℃~430℃)までの線熱膨張係数を求めた。
膜厚10μm、5cm角サイズのポリイミドフィルムを試験片とし、王子計測器社製 位相差測定装置(KOBRA-WR)を用い、入射角を40°としてフィルムの位相差測定を行った。得られた位相差より、膜厚10μmのフィルムの厚み方向の位相差を求めた。
DABAN: 4,4’-ジアミノベンズアニリド〔純度:99.90%(GC分析)〕
TFMB: 2,2’-ビス(トリフルオロメチル)ベンジジン〔純度:99.83%(GC分析)〕
4,4’-ODA: 4,4’-オキシジアニリン〔純度:99.9%(GC分析)〕
BAPB: 4,4’-ビス(4-アミノフェノキシ)ビフェニル
PPD: p-フェニレンジアミン〔純度:99.9%(GC分析)〕
[テトラカルボン酸成分]
TNDA: テトラデカヒドロ-1H,3H-4,12:5,11:6,10-トリメタノアントラ[2,3-c:6,7-c’]ジフラン-1,3,7,9-テトラオン
EMDAxx: (3aR,4R,5S,5aS,8aR,9R,10S,10aS)-デカヒドロ-1H,3H-4,10-エタノ-5,9-メタノナフト[2,3-c:6,7-c’]ジフラン-1,3,6,8-テトラオン
PMDA-HS: 1R,2S,4S,5R-シクロヘキサンテトラカルボン酸二無水物〔純度:99.9%(GC分析)〕
6FDA: 4,4’-(2,2-ヘキサフルオロイソプロピレン)ジフタル酸二無水物〔純度:99.77%(H-NMR分析)〕
s-BPDA: 3,3’,4,4’-ビフェニルテトラカルボン酸二無水物〔純度:99.9%(H-NMR分析)〕
NMP: N-メチル-2-ピロリドン
DMAc: N,N-ジメチルアセトアミド
CI-MS(m/z); 219(M+1)
CI-MS(m/z); 379(M+1)
CI-MS(m/z); 314(M+1)
CI-MS(m/z); 407(M+1)
CI-MS(m/z); 409(M+1)
CI-MS(m/z); 317(M+1)
窒素ガスで置換した反応容器中にDABAN 0.787g(3.46ミリモル)とBAPB 0.319g(0.87ミリモル)を入れ、NMPを、仕込みモノマー総質量(ジアミン成分とカルボン酸成分の総和)が 22質量%となる量の9.620gを加え、室温で1時間攪拌した。この溶液にTNDA 1.607g(4.36ミリモル)を徐々に加えた。室温で48時間撹拌し、均一で粘稠なポリイミド前駆体溶液を得た。
窒素ガスで置換した反応容器中にDABAN 0.761g(3.35ミリモル)とBAPB 0.529g(1.44ミリモル)を入れ、DMAcを、仕込みモノマー総質量(ジアミン成分とカルボン酸成分の総和)が 25質量%となる量の8.409gを加え、室温で1時間攪拌した。この溶液にEMDAxx 1.513g(4.78ミリモル)を徐々に加えた。室温で48時間撹拌し、均一で粘稠なポリイミド前駆体溶液を得た。
窒素ガスで置換した反応容器中に4,4’-ODA 8.000g(39.95ミリモル)を入れ、DMAcを、仕込みモノマー総質量(ジアミン成分とカルボン酸成分の総和)が 22質量%となる量の60.117gを加え、室温で1時間攪拌した。この溶液にPMDA-HS 8.956g(39.95ミリモル)を徐々に加えた。室温で48時間撹拌し、均一で粘稠なポリイミド前駆体溶液を得た。
窒素ガスで置換した反応容器中にTFMB 2.000g(6.25ミリモル)を入れ、DMAcを、仕込みモノマー総質量(ジアミン成分とカルボン酸成分の総和)が 21質量%となる量の16.904gを加え、室温で1時間攪拌した。この溶液に6FDA 1.942g(4.37ミリモル)とs-BPDA 0.551g(1.87ミリモル)を徐々に加えた。室温で48時間撹拌し、均一で粘稠なポリイミド前駆体溶液を得た。
窒素ガスで置換した反応容器中にPPD 26.88g(0.249モル)を入れ、NMPを、仕込みモノマー総質量(ジアミン成分とカルボン酸成分の総和)が 20質量%となる量の400gを加え、室温で1時間攪拌した。この溶液にs-BPDA 73.13g(0.249モル)を徐々に加えた。室温で48時間撹拌し、均一で粘稠なポリイミド前駆体溶液を得た。
Claims (7)
- ポリイミドを含むフィルムであって、
フィルム厚みが10μmで測定した場合の、
400℃で4時間保持した時の重量保持率が99.0%以上であり、
YI(黄色度)が10以下であり、且つ、
100~350℃の間の線熱膨張係数が55ppm/K以下であり、且つ
波長308nmの光透過率が0.1%以下であることを特徴とするポリイミドフィルム。 - フィルム厚みが10μmで測定した場合の、430℃で1時間保持した時の重量保持率が99.0%以上であることを特徴とする請求項1に記載のポリイミドフィルム。
- フィルム厚みが10μmで測定した場合の、100~380℃の間の線熱膨張係数が65ppm/K以下であることを特徴とする請求項1または2に記載のポリイミドフィルム。
- フィルム厚みが10μmで測定した場合の、ヘイズが2%以下であることを特徴とする請求項1~3のいずれかに記載のポリイミドフィルム。
- フィルム厚みが10μmで測定した場合の、厚み方向位相差(Rth)が1000nm以下であることを特徴とする請求項1~4のいずれかに記載のポリイミドフィルム。
- 請求項1~5のいずれかに記載のポリイミドフィルムがガラス基材上に形成されていることを特徴とする積層体。
- 請求項1~5のいずれかに記載のポリイミドフィルムを備えることを特徴とするディスプレイ用、タッチパネル用、または太陽電池用の基板。
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WO2021193978A1 (ja) | 2020-03-27 | 2021-09-30 | 宇部興産株式会社 | ポリイミド前駆体組成物およびポリイミドフィルム/基材積層体 |
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TWI669325B (zh) | 2019-08-21 |
KR102143307B1 (ko) | 2020-08-10 |
US20200133048A1 (en) | 2020-04-30 |
JPWO2018221607A1 (ja) | 2020-04-02 |
KR20190061090A (ko) | 2019-06-04 |
WO2018221607A1 (ja) | 2018-12-06 |
CN109996839B (zh) | 2021-04-16 |
TW201902990A (zh) | 2019-01-16 |
CN109996839A (zh) | 2019-07-09 |
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