JP7053366B2 - 検査装置及び検査方法 - Google Patents

検査装置及び検査方法 Download PDF

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Publication number
JP7053366B2
JP7053366B2 JP2018091086A JP2018091086A JP7053366B2 JP 7053366 B2 JP7053366 B2 JP 7053366B2 JP 2018091086 A JP2018091086 A JP 2018091086A JP 2018091086 A JP2018091086 A JP 2018091086A JP 7053366 B2 JP7053366 B2 JP 7053366B2
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Japan
Prior art keywords
inspection
inspection object
image
defect
learning
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JP2018091086A
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English (en)
Japanese (ja)
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JP2019196985A (ja
Inventor
知行 内村
健太郎 織田
智哉 坂井
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Ebara Corp
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Ebara Corp
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Priority to JP2018091086A priority Critical patent/JP7053366B2/ja
Priority to PCT/JP2019/018467 priority patent/WO2019216362A1/ja
Priority to CN201980030680.2A priority patent/CN112088304A/zh
Publication of JP2019196985A publication Critical patent/JP2019196985A/ja
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Publication of JP7053366B2 publication Critical patent/JP7053366B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2018091086A 2018-05-10 2018-05-10 検査装置及び検査方法 Active JP7053366B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018091086A JP7053366B2 (ja) 2018-05-10 2018-05-10 検査装置及び検査方法
PCT/JP2019/018467 WO2019216362A1 (ja) 2018-05-10 2019-05-09 検査装置及び検査方法
CN201980030680.2A CN112088304A (zh) 2018-05-10 2019-05-09 检查装置及检查方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018091086A JP7053366B2 (ja) 2018-05-10 2018-05-10 検査装置及び検査方法

Publications (2)

Publication Number Publication Date
JP2019196985A JP2019196985A (ja) 2019-11-14
JP7053366B2 true JP7053366B2 (ja) 2022-04-12

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Family Applications (1)

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JP2018091086A Active JP7053366B2 (ja) 2018-05-10 2018-05-10 検査装置及び検査方法

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JP (1) JP7053366B2 (zh)
CN (1) CN112088304A (zh)
WO (1) WO2019216362A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115210035B (zh) * 2020-03-05 2024-06-25 松下知识产权经营株式会社 焊道外观检查装置、焊道外观检查方法、程序和焊道外观检查系统
JP7555042B2 (ja) 2020-03-05 2024-09-24 パナソニックＩｐマネジメント株式会社 ビード外観検査装置、ビード外観検査方法、プログラムおよびビード外観検査システム
JPWO2021177361A1 (zh) * 2020-03-05 2021-09-10
KR102237374B1 (ko) * 2020-09-09 2021-04-07 정구봉 3d 프린팅을 이용한 부품 및 부품 검사 지그 제조 방법 및 시스템
KR102512873B1 (ko) * 2020-11-06 2023-03-23 한국생산기술연구원 인공 지능을 이용한 모아레 간섭계 측정 시스템 및 모아레 간섭계 측정 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6191850B1 (en) 1999-10-15 2001-02-20 Cognex Corporation System and method for inspecting an object using structured illumination
JP5164696B2 (ja) 2008-07-01 2013-03-21 昭和電工株式会社 アルミニウム合金製引抜材

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01219505A (ja) * 1988-02-26 1989-09-01 Toyota Motor Corp 塗膜平滑度自動検査装置
JP2795013B2 (ja) * 1991-12-11 1998-09-10 日産自動車株式会社 塗装面評価装置
JP3201217B2 (ja) * 1995-04-17 2001-08-20 日産自動車株式会社 表面欠陥検査装置
JPH1023203A (ja) * 1996-07-01 1998-01-23 Ricoh Co Ltd 紙分類装置
JP3493979B2 (ja) * 1997-10-20 2004-02-03 日産自動車株式会社 被検査面の欠陥検査方法およびその装置
JP3732757B2 (ja) * 2001-06-08 2006-01-11 株式会社東芝 画像認識方法および画像認識装置
JP5818341B2 (ja) * 2010-12-13 2015-11-18 国立大学法人 和歌山大学 形状計測装置および形状計測方法
JP6507653B2 (ja) * 2015-01-13 2019-05-08 オムロン株式会社 検査装置及び検査装置の制御方法
JP6795993B2 (ja) * 2016-02-18 2020-12-02 株式会社ミツトヨ 形状測定システム、形状測定装置及び形状測定方法
JP6333871B2 (ja) * 2016-02-25 2018-05-30 ファナック株式会社 入力画像から検出した対象物を表示する画像処理装置
JP6832650B2 (ja) * 2016-08-18 2021-02-24 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法
US10586318B2 (en) * 2016-10-07 2020-03-10 Raytheon Company Automated model-based inspection system for screening electronic components

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6191850B1 (en) 1999-10-15 2001-02-20 Cognex Corporation System and method for inspecting an object using structured illumination
JP5164696B2 (ja) 2008-07-01 2013-03-21 昭和電工株式会社 アルミニウム合金製引抜材

Also Published As

Publication number Publication date
CN112088304A (zh) 2020-12-15
WO2019216362A1 (ja) 2019-11-14
JP2019196985A (ja) 2019-11-14

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