JP7052417B2 - センサーデバイス、力検出装置およびロボット - Google Patents

センサーデバイス、力検出装置およびロボット Download PDF

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Publication number
JP7052417B2
JP7052417B2 JP2018035892A JP2018035892A JP7052417B2 JP 7052417 B2 JP7052417 B2 JP 7052417B2 JP 2018035892 A JP2018035892 A JP 2018035892A JP 2018035892 A JP2018035892 A JP 2018035892A JP 7052417 B2 JP7052417 B2 JP 7052417B2
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Japan
Prior art keywords
circuit
charge
force
force detecting
sensor device
Prior art date
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Application number
JP2018035892A
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English (en)
Japanese (ja)
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JP2019152458A5 (enExample
JP2019152458A (ja
Inventor
洋 小松
宏紀 河合
光普 竪山
英男 宮坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2018035892A priority Critical patent/JP7052417B2/ja
Priority to CN201910140516.9A priority patent/CN110208574B/zh
Priority to US16/286,805 priority patent/US10899022B2/en
Publication of JP2019152458A publication Critical patent/JP2019152458A/ja
Publication of JP2019152458A5 publication Critical patent/JP2019152458A5/ja
Application granted granted Critical
Publication of JP7052417B2 publication Critical patent/JP7052417B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/028—Piezoresistive or piezoelectric sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP2018035892A 2018-02-28 2018-02-28 センサーデバイス、力検出装置およびロボット Active JP7052417B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018035892A JP7052417B2 (ja) 2018-02-28 2018-02-28 センサーデバイス、力検出装置およびロボット
CN201910140516.9A CN110208574B (zh) 2018-02-28 2019-02-26 传感器器件、力检测装置以及机器人
US16/286,805 US10899022B2 (en) 2018-02-28 2019-02-27 Sensor device having a force detection element sandwiched by two sensor signal processing circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018035892A JP7052417B2 (ja) 2018-02-28 2018-02-28 センサーデバイス、力検出装置およびロボット

Publications (3)

Publication Number Publication Date
JP2019152458A JP2019152458A (ja) 2019-09-12
JP2019152458A5 JP2019152458A5 (enExample) 2021-04-01
JP7052417B2 true JP7052417B2 (ja) 2022-04-12

Family

ID=67684210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018035892A Active JP7052417B2 (ja) 2018-02-28 2018-02-28 センサーデバイス、力検出装置およびロボット

Country Status (3)

Country Link
US (1) US10899022B2 (enExample)
JP (1) JP7052417B2 (enExample)
CN (1) CN110208574B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7127534B2 (ja) * 2018-12-26 2022-08-30 セイコーエプソン株式会社 力検出装置およびロボット
JP7721951B2 (ja) * 2021-04-21 2025-08-13 セイコーエプソン株式会社 力検出装置およびロボットシステム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263781A (ja) 2006-03-29 2007-10-11 Hitachi Ltd 力学量測定装置
JP2015087292A (ja) 2013-10-31 2015-05-07 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP2015184008A (ja) 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置および電子部品検査装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969462A (en) * 1998-06-18 1999-10-19 Cts Corporation Extensional mode piezoelectric crystal resonator with split electrodes and transformer driving circuit
JP2000314744A (ja) 1999-05-06 2000-11-14 Matsushita Electric Ind Co Ltd 積層圧電型加速度センサ
JP2009053141A (ja) * 2007-08-29 2009-03-12 Yokohama Rubber Co Ltd:The 加速度センサモジュール
EP2096418B1 (en) * 2008-02-26 2016-04-13 Kyocera Corporation Sensor module, wheel with sensor and tire/wheel assembly
JP5742415B2 (ja) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 センサーデバイス、力検出装置およびロボット
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
JP6051678B2 (ja) * 2012-08-22 2016-12-27 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
US9381647B2 (en) * 2013-02-19 2016-07-05 Seiko Epson Corporation Force detection device, robot, and moving object
JP6102341B2 (ja) * 2013-02-27 2017-03-29 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および移動体
US9705069B2 (en) * 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus
CN110057484B (zh) * 2013-11-05 2021-05-04 精工爱普生株式会社 力检测装置、机器人以及电子部件输送装置
JP6252241B2 (ja) * 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
CN107003129B (zh) * 2014-12-01 2021-04-02 索尼公司 传感器装置、陀螺仪传感器和电子设备
CN108353100B (zh) * 2015-09-30 2021-05-14 谷歌有限责任公司 导电壳体的多路使用的系统、装置和方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263781A (ja) 2006-03-29 2007-10-11 Hitachi Ltd 力学量測定装置
JP2015087292A (ja) 2013-10-31 2015-05-07 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
JP2015184008A (ja) 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置および電子部品検査装置

Also Published As

Publication number Publication date
CN110208574A (zh) 2019-09-06
US10899022B2 (en) 2021-01-26
US20190263008A1 (en) 2019-08-29
JP2019152458A (ja) 2019-09-12
CN110208574B (zh) 2023-04-14

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