CN110208574B - 传感器器件、力检测装置以及机器人 - Google Patents

传感器器件、力检测装置以及机器人 Download PDF

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Publication number
CN110208574B
CN110208574B CN201910140516.9A CN201910140516A CN110208574B CN 110208574 B CN110208574 B CN 110208574B CN 201910140516 A CN201910140516 A CN 201910140516A CN 110208574 B CN110208574 B CN 110208574B
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China
Prior art keywords
circuit
force detection
sensor device
charge
force
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CN201910140516.9A
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English (en)
Chinese (zh)
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CN110208574A (zh
Inventor
小松洋
河合宏纪
竖山光普
宫坂英男
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Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN110208574A publication Critical patent/CN110208574A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/028—Piezoresistive or piezoelectric sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
CN201910140516.9A 2018-02-28 2019-02-26 传感器器件、力检测装置以及机器人 Active CN110208574B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-035892 2018-02-28
JP2018035892A JP7052417B2 (ja) 2018-02-28 2018-02-28 センサーデバイス、力検出装置およびロボット

Publications (2)

Publication Number Publication Date
CN110208574A CN110208574A (zh) 2019-09-06
CN110208574B true CN110208574B (zh) 2023-04-14

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CN201910140516.9A Active CN110208574B (zh) 2018-02-28 2019-02-26 传感器器件、力检测装置以及机器人

Country Status (3)

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US (1) US10899022B2 (enExample)
JP (1) JP7052417B2 (enExample)
CN (1) CN110208574B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7127534B2 (ja) * 2018-12-26 2022-08-30 セイコーエプソン株式会社 力検出装置およびロボット
JP7721951B2 (ja) * 2021-04-21 2025-08-13 セイコーエプソン株式会社 力検出装置およびロボットシステム

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053141A (ja) * 2007-08-29 2009-03-12 Yokohama Rubber Co Ltd:The 加速度センサモジュール
CN102798732A (zh) * 2011-05-24 2012-11-28 精工爱普生株式会社 加速度传感器以及加速度检测装置
CN103994845A (zh) * 2013-02-19 2014-08-20 精工爱普生株式会社 力检测装置、机械手、以及移动体
JP2014163870A (ja) * 2013-02-27 2014-09-08 Seiko Epson Corp 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および移動体
CN104614118A (zh) * 2013-11-05 2015-05-13 精工爱普生株式会社 力检测装置、机器人以及电子部件输送装置
CN107003129A (zh) * 2014-12-01 2017-08-01 索尼公司 传感器装置、陀螺仪传感器和电子设备

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US5969462A (en) * 1998-06-18 1999-10-19 Cts Corporation Extensional mode piezoelectric crystal resonator with split electrodes and transformer driving circuit
JP2000314744A (ja) 1999-05-06 2000-11-14 Matsushita Electric Ind Co Ltd 積層圧電型加速度センサ
JP4697004B2 (ja) * 2006-03-29 2011-06-08 株式会社日立製作所 力学量測定装置
EP2096418B1 (en) * 2008-02-26 2016-04-13 Kyocera Corporation Sensor module, wheel with sensor and tire/wheel assembly
JP5742415B2 (ja) * 2011-04-14 2015-07-01 セイコーエプソン株式会社 センサーデバイス、力検出装置およびロボット
JP6051678B2 (ja) 2012-08-22 2016-12-27 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
JP2015087292A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 センサー素子、力検出装置、ロボット、電子部品搬送装置、電子部品検査装置および部品加工装置
US9705069B2 (en) * 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus
JP6252241B2 (ja) * 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
JP2015184008A (ja) * 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置および電子部品検査装置
HK1251743A1 (zh) * 2015-09-30 2019-02-01 Google Llc 导电壳体的多路使用的系统、装置和方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053141A (ja) * 2007-08-29 2009-03-12 Yokohama Rubber Co Ltd:The 加速度センサモジュール
CN102798732A (zh) * 2011-05-24 2012-11-28 精工爱普生株式会社 加速度传感器以及加速度检测装置
CN103994845A (zh) * 2013-02-19 2014-08-20 精工爱普生株式会社 力检测装置、机械手、以及移动体
JP2014163870A (ja) * 2013-02-27 2014-09-08 Seiko Epson Corp 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および移動体
CN104614118A (zh) * 2013-11-05 2015-05-13 精工爱普生株式会社 力检测装置、机器人以及电子部件输送装置
CN107003129A (zh) * 2014-12-01 2017-08-01 索尼公司 传感器装置、陀螺仪传感器和电子设备

Also Published As

Publication number Publication date
US20190263008A1 (en) 2019-08-29
US10899022B2 (en) 2021-01-26
CN110208574A (zh) 2019-09-06
JP2019152458A (ja) 2019-09-12
JP7052417B2 (ja) 2022-04-12

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