JP7051834B2 - 多軸相対位置決めステージ - Google Patents

多軸相対位置決めステージ Download PDF

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Publication number
JP7051834B2
JP7051834B2 JP2019517816A JP2019517816A JP7051834B2 JP 7051834 B2 JP7051834 B2 JP 7051834B2 JP 2019517816 A JP2019517816 A JP 2019517816A JP 2019517816 A JP2019517816 A JP 2019517816A JP 7051834 B2 JP7051834 B2 JP 7051834B2
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JP
Japan
Prior art keywords
top plate
actuator
actuators
base plate
plate
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JP2019517816A
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English (en)
Japanese (ja)
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JP2019536989A5 (enExample
JP2019536989A (ja
Inventor
ロバート ワイリー
ブレット クラーク
ジェーソン トロイヤー
ジョン ローワー
アダム ジェンキンス
クライド トラウトマン
ジョニー イッサ
Original Assignee
３エスエーイー テクノロジーズ インク
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Publication of JP2019536989A publication Critical patent/JP2019536989A/ja
Publication of JP2019536989A5 publication Critical patent/JP2019536989A5/ja
Priority to JP2022057127A priority Critical patent/JP7362821B2/ja
Application granted granted Critical
Publication of JP7051834B2 publication Critical patent/JP7051834B2/ja
Priority to JP2023172710A priority patent/JP2023175917A/ja
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2555—Alignment or adjustment devices for aligning prior to splicing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/14—Programme-controlled manipulators characterised by positioning means for manipulator elements fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/041—Allowing quick release of the apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
    • F16M11/12—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting in more than one direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • F16M11/24—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other
    • F16M11/26—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other by telescoping, with or without folding
    • F16M11/32—Undercarriages for supports with three or more telescoping legs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2553—Splicing machines, e.g. optical fibre fusion splicer
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Manipulator (AREA)
  • Machine Tool Units (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2019517816A 2016-09-30 2017-09-29 多軸相対位置決めステージ Active JP7051834B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022057127A JP7362821B2 (ja) 2016-09-30 2022-03-30 位置決め装置
JP2023172710A JP2023175917A (ja) 2016-09-30 2023-10-04 位置決め方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662402674P 2016-09-30 2016-09-30
US62/402,674 2016-09-30
PCT/US2017/054272 WO2018064462A1 (en) 2016-09-30 2017-09-29 Multi-axis relative positioning stage

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022057127A Division JP7362821B2 (ja) 2016-09-30 2022-03-30 位置決め装置

Publications (3)

Publication Number Publication Date
JP2019536989A JP2019536989A (ja) 2019-12-19
JP2019536989A5 JP2019536989A5 (enExample) 2020-11-12
JP7051834B2 true JP7051834B2 (ja) 2022-04-11

Family

ID=61758017

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2019517816A Active JP7051834B2 (ja) 2016-09-30 2017-09-29 多軸相対位置決めステージ
JP2022057127A Active JP7362821B2 (ja) 2016-09-30 2022-03-30 位置決め装置
JP2023172710A Pending JP2023175917A (ja) 2016-09-30 2023-10-04 位置決め方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2022057127A Active JP7362821B2 (ja) 2016-09-30 2022-03-30 位置決め装置
JP2023172710A Pending JP2023175917A (ja) 2016-09-30 2023-10-04 位置決め方法

Country Status (6)

Country Link
US (5) US10429587B2 (enExample)
EP (1) EP3519141A4 (enExample)
JP (3) JP7051834B2 (enExample)
CN (2) CN110191784B (enExample)
CA (1) CA3077402A1 (enExample)
WO (1) WO2018064462A1 (enExample)

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JP7051834B2 (ja) * 2016-09-30 2022-04-11 ３エスエーイー テクノロジーズ インク 多軸相対位置決めステージ
US11681100B2 (en) 2016-09-30 2023-06-20 3Sae Technologies, Inc. Multi-axis positioner
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US10685771B1 (en) * 2019-03-08 2020-06-16 Light Steering Technologies, Llc Magnetic joint and optical mount using the same
CA3132805C (en) 2019-03-08 2022-05-03 Light Steering Technologies, Llc Magnetic joint and optical mount using the same
CN111273402B (zh) * 2020-04-13 2022-03-18 南京信息职业技术学院 一种光纤熔接机用推送装置及其使用方法
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