JP7045186B2 - 基板の接合方法、透明基板積層体及び基板積層体を備えるデバイス - Google Patents

基板の接合方法、透明基板積層体及び基板積層体を備えるデバイス Download PDF

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JP7045186B2
JP7045186B2 JP2017254137A JP2017254137A JP7045186B2 JP 7045186 B2 JP7045186 B2 JP 7045186B2 JP 2017254137 A JP2017254137 A JP 2017254137A JP 2017254137 A JP2017254137 A JP 2017254137A JP 7045186 B2 JP7045186 B2 JP 7045186B2
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substrate
substrates
bonding
joining
metal oxide
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JP2019119086A5 (show.php
JP2019119086A (ja
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好家 松本
唯知 須賀
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Lan Technical Service Co Ltd
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Lan Technical Service Co Ltd
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Priority to JP2017254137A priority Critical patent/JP7045186B2/ja
Priority to EP18897427.3A priority patent/EP3736134B1/en
Priority to CN201880087846.XA priority patent/CN111655490B/zh
Priority to PCT/JP2018/047204 priority patent/WO2019131490A1/ja
Priority to KR1020207021853A priority patent/KR102690513B1/ko
Priority to US16/958,955 priority patent/US12351511B2/en
Publication of JP2019119086A publication Critical patent/JP2019119086A/ja
Publication of JP2019119086A5 publication Critical patent/JP2019119086A5/ja
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    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
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    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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  • Chemical & Material Sciences (AREA)
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  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Electroluminescent Light Sources (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2017254137A 2017-12-28 2017-12-28 基板の接合方法、透明基板積層体及び基板積層体を備えるデバイス Active JP7045186B2 (ja)

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JP2017254137A JP7045186B2 (ja) 2017-12-28 2017-12-28 基板の接合方法、透明基板積層体及び基板積層体を備えるデバイス
KR1020207021853A KR102690513B1 (ko) 2017-12-28 2018-12-21 기판의 접합 방법, 투명기판 적층체 및 기판 적층체를 구비하는 디바이스
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EP18897427.3A EP3736134B1 (en) 2017-12-28 2018-12-21 Method for bonding substrate
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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7287772B2 (ja) 2018-11-26 2023-06-06 ランテクニカルサービス株式会社 透明基板の接合方法及び積層体
EP4026644A4 (en) * 2019-09-05 2023-09-27 Tohoku University CHEMICAL BONDING METHOD AND BONDED STRUCTURE
GB2599393B (en) * 2020-09-30 2024-12-18 Dyson Technology Ltd Method and apparatus for sputter deposition
JP2022071958A (ja) * 2020-10-29 2022-05-17 コミヤマエレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
CN112897899B (zh) * 2021-01-21 2022-06-14 杭州中科神光科技有限公司 一种玻璃组件键合的方法
CN112919815B (zh) * 2021-01-21 2022-06-03 杭州中科神光科技有限公司 一种玻璃组件键合的方法
US20220336405A1 (en) * 2021-04-15 2022-10-20 Apple Inc. Method of Fine Pitch Hybrid Bonding with Dissimilar CTE Wafers and Resulting Structures
WO2022242879A1 (en) * 2021-05-21 2022-11-24 Applied Materials, Inc. Apparatus and method for manufacturing a composite film
CN118900765A (zh) 2022-03-25 2024-11-05 富士胶片株式会社 层叠体及层叠体的制造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004337927A (ja) 2003-05-15 2004-12-02 Tadatomo Suga 基板接合方法および基板接合装置
JP2008207221A (ja) 2007-02-27 2008-09-11 Takehito Shimazu 常温接合方法
JP2009199902A (ja) 2008-02-21 2009-09-03 Seiko Epson Corp 有機発光装置および電子機器
WO2013154107A1 (ja) 2012-04-10 2013-10-17 ランテクニカルサービス株式会社 高分子フィルムと高分子フィルムとを接合する方法、高分子フィルムと無機材料基板とを接合する方法、高分子フィルム積層体及び高分子フィルムと無機材料基板との積層体
WO2013187500A1 (ja) 2012-06-15 2013-12-19 ランテクニカルサービス株式会社 電子素子の封止方法及び基板接合体
JP2014123514A (ja) 2012-12-21 2014-07-03 Ran Technical Service Kk 電子素子の封止方法及び封止構造
JP2015207615A (ja) 2014-04-18 2015-11-19 日亜化学工業株式会社 半導体発光装置およびその製造方法
JP2017157611A (ja) 2016-02-29 2017-09-07 日亜化学工業株式会社 発光装置及びその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008094063A (ja) * 2006-10-16 2008-04-24 Asahi Kasei Chemicals Corp 金属酸化物積層体
CN105965990B (zh) * 2012-05-29 2018-06-01 旭硝子株式会社 玻璃层叠体和电子器件的制造方法
CN102941712B (zh) * 2012-10-23 2015-07-22 江南大学 一种高分子材料-金属氧化物薄膜复合材料及其制备方法
US9703011B2 (en) * 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
JP6387780B2 (ja) 2013-10-28 2018-09-12 日亜化学工業株式会社 発光装置及びその製造方法
JP6282142B2 (ja) 2014-03-03 2018-02-21 日東電工株式会社 赤外線反射基板およびその製造方法
KR102202977B1 (ko) * 2014-08-22 2021-01-14 동우 화인켐 주식회사 터치 센서의 제조 방법
CN107532281B (zh) * 2015-04-28 2020-01-24 三井金属矿业株式会社 表面处理铜箔及其制造方法、印刷电路板用覆铜层叠板、以及印刷电路板
US10675842B2 (en) * 2016-02-26 2020-06-09 Konica Minolta, Inc. Transparent electrode and organic electronic device including the same

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004337927A (ja) 2003-05-15 2004-12-02 Tadatomo Suga 基板接合方法および基板接合装置
JP2008207221A (ja) 2007-02-27 2008-09-11 Takehito Shimazu 常温接合方法
JP2009199902A (ja) 2008-02-21 2009-09-03 Seiko Epson Corp 有機発光装置および電子機器
WO2013154107A1 (ja) 2012-04-10 2013-10-17 ランテクニカルサービス株式会社 高分子フィルムと高分子フィルムとを接合する方法、高分子フィルムと無機材料基板とを接合する方法、高分子フィルム積層体及び高分子フィルムと無機材料基板との積層体
WO2013187500A1 (ja) 2012-06-15 2013-12-19 ランテクニカルサービス株式会社 電子素子の封止方法及び基板接合体
JP2015111596A (ja) 2012-06-15 2015-06-18 須賀　唯知 電子素子の封止方法及び基板接合体
JP2014123514A (ja) 2012-12-21 2014-07-03 Ran Technical Service Kk 電子素子の封止方法及び封止構造
JP2015207615A (ja) 2014-04-18 2015-11-19 日亜化学工業株式会社 半導体発光装置およびその製造方法
JP2017157611A (ja) 2016-02-29 2017-09-07 日亜化学工業株式会社 発光装置及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Room-temerature Bonding of Oxide Wafers by Ar-beam Sirface Activation，ECS Transactions，Volume 16, Issue 8，米国，The Electrochemical Society，2008年10月03日，p.531-537，https://iopscience.iop.org/article/10.1149/1.2982908/pdf，[2021年7月27日検索]

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