JP7037967B2 - 微小機械センサモジュールを備える構成要素 - Google Patents

微小機械センサモジュールを備える構成要素 Download PDF

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Publication number
JP7037967B2
JP7037967B2 JP2018047641A JP2018047641A JP7037967B2 JP 7037967 B2 JP7037967 B2 JP 7037967B2 JP 2018047641 A JP2018047641 A JP 2018047641A JP 2018047641 A JP2018047641 A JP 2018047641A JP 7037967 B2 JP7037967 B2 JP 7037967B2
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Japan
Prior art keywords
sensor
stress
sensor module
support
measurement pattern
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JP2018047641A
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English (en)
Japanese (ja)
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JP2018200301A5 (enExample
JP2018200301A (ja
Inventor
ウーヴェ・ハンセン
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
JP2018047641A 2017-03-16 2018-03-15 微小機械センサモジュールを備える構成要素 Expired - Fee Related JP7037967B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017204402.0 2017-03-16
DE102017204402.0A DE102017204402A1 (de) 2017-03-16 2017-03-16 Bauelement mit mikromechanischem Sensormodul

Publications (3)

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JP2018200301A JP2018200301A (ja) 2018-12-20
JP2018200301A5 JP2018200301A5 (enExample) 2022-01-12
JP7037967B2 true JP7037967B2 (ja) 2022-03-17

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JP2018047641A Expired - Fee Related JP7037967B2 (ja) 2017-03-16 2018-03-15 微小機械センサモジュールを備える構成要素

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Country Link
US (1) US10788387B2 (enExample)
JP (1) JP7037967B2 (enExample)
DE (1) DE102017204402A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024543021A (ja) * 2021-11-02 2024-11-19 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング Ｍｅｍｓ装置の動的パラメータを特定する方法および装置、ならびにｍｅｍｓ装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020212591A1 (de) 2020-10-06 2022-04-07 Robert Bosch Gesellschaft mit beschränkter Haftung Schaltungsanordnung, Steuergerät mit einer Schaltungsanordnung und Verfahren zum Betreiben einer Schaltungsanordnung
CN112484902B (zh) * 2020-12-15 2021-08-24 吉林大学 一种电容式压力传感器及温漂解决方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050120807A1 (en) 2003-12-08 2005-06-09 Wingett Paul T. Method and apparatus for detecting the strain levels imposed on a circuit board
WO2005069707A1 (ja) 2004-01-16 2005-07-28 Ibiden Co., Ltd. 多層プリント配線板およびプリント配線板用試験体
US20050252311A1 (en) 2004-05-11 2005-11-17 Sun Microsystems, Inc. Integrated strain gages for board strain characterization
WO2008023465A1 (fr) 2006-08-25 2008-02-28 Kyocera Corporation Dispositif de mécanisme de machine microélectronique et son procédé de fabrication
US20130152696A1 (en) 2011-12-19 2013-06-20 Infineon Technologies Ag Micromechanical semiconductor sensing device
US20170030784A1 (en) 2015-07-29 2017-02-02 Apple Inc. Printed Circuits With Embedded Strain Gauges

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US5195046A (en) * 1989-01-10 1993-03-16 Gerardi Joseph J Method and apparatus for structural integrity monitoring
US20090303076A1 (en) * 2008-06-04 2009-12-10 Seagate Technology Llc Wireless and battery-less monitoring unit
US20120043999A1 (en) * 2008-07-01 2012-02-23 Quevy Emmanuel P Mems stabilized oscillator
US9080932B2 (en) * 2013-05-13 2015-07-14 Apple Inc. Electronic device with printed circuit board stress monitoring
US9888561B2 (en) * 2015-07-21 2018-02-06 Apple Inc. Packaged electrical components with supplemental conductive structures
US10353503B2 (en) * 2015-10-29 2019-07-16 Texas Instruments Incorporated Integrated force sensing element
US10562761B2 (en) * 2015-11-18 2020-02-18 Kathirgamasundaram Sooriakumar Waterproof microphone and associated packing techniques
US10549982B2 (en) * 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
EP3261366B1 (en) * 2016-06-21 2021-09-22 Sciosense B.V. Microphone and pressure sensor package and method of producing the microphone and pressure sensor package
WO2019178355A1 (en) * 2018-03-16 2019-09-19 Vesper Technologies, Inc. Transducer system with configurable acoustic overload point
US20190354238A1 (en) * 2018-05-21 2019-11-21 UltraSense Systems, Inc. Ultrasonic touch detection and decision
US11095990B2 (en) * 2018-06-19 2021-08-17 Knowles Electronics, Llc Microphone assembly with reduced noise

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050120807A1 (en) 2003-12-08 2005-06-09 Wingett Paul T. Method and apparatus for detecting the strain levels imposed on a circuit board
WO2005069707A1 (ja) 2004-01-16 2005-07-28 Ibiden Co., Ltd. 多層プリント配線板およびプリント配線板用試験体
US20050252311A1 (en) 2004-05-11 2005-11-17 Sun Microsystems, Inc. Integrated strain gages for board strain characterization
WO2008023465A1 (fr) 2006-08-25 2008-02-28 Kyocera Corporation Dispositif de mécanisme de machine microélectronique et son procédé de fabrication
US20130152696A1 (en) 2011-12-19 2013-06-20 Infineon Technologies Ag Micromechanical semiconductor sensing device
US20170030784A1 (en) 2015-07-29 2017-02-02 Apple Inc. Printed Circuits With Embedded Strain Gauges

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024543021A (ja) * 2021-11-02 2024-11-19 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング Ｍｅｍｓ装置の動的パラメータを特定する方法および装置、ならびにｍｅｍｓ装置
JP7689248B2 (ja) 2021-11-02 2025-06-05 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング Ｍｅｍｓ装置の動的パラメータを特定する方法および装置、ならびにｍｅｍｓ装置

Also Published As

Publication number Publication date
DE102017204402A1 (de) 2018-09-20
US20180266909A1 (en) 2018-09-20
US10788387B2 (en) 2020-09-29
JP2018200301A (ja) 2018-12-20

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