JP7023152B2 - Heating device - Google Patents

Description

The techniques disclosed herein relate to heating devices.

A heating device (also referred to as a "susceptor") that heats an object (for example, a semiconductor wafer) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding the object (for example, a semiconductor wafer) is known. The heating device is used as a part of a semiconductor manufacturing device such as a film forming apparatus (CVD film forming apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.).

Generally, the heating device includes a holder and a support. The holding body has a surface (hereinafter referred to as "holding surface") substantially orthogonal to a predetermined direction (hereinafter referred to as "first direction") and a surface opposite to the holding surface (hereinafter referred to as "back surface"). It is a plate-shaped member having and. Further, the support is a tubular member that is joined to the back surface of the holding body and has a through hole extending in the first direction. A resistance heating element is arranged inside the holder, and a power receiving electrode (electrode pad) electrically connected to the resistance heating element is arranged on the back surface of the holder. Further, an electrode terminal is housed in a through hole formed in the support, and the electrode terminal is joined to a power receiving electrode arranged on the back surface of the holder via a metal brazing material. When a voltage is applied to the resistance heating element via the electrode terminal and the power receiving electrode, the resistance heating element generates heat, and the object (for example, a semiconductor wafer) held on the holding surface of the holding body is, for example, 400 to 650 ° C. It is heated to the extent.

Conventionally, as a configuration of a heating device, a through hole having an inner diameter substantially the same as the outer diameter of the electrode terminal is provided at the tip portion of the support on the side facing the holding body, and a part of the electrode terminal is provided in the through hole. Contained configurations are known (see, eg, Patent Document 1).

Japanese Unexamined Patent Publication No. 2014-165416

In the heating device, since the electrode terminal is joined to the power receiving electrode, when a load in a direction orthogonal to the first direction (hereinafter referred to as "second direction") acts on the electrode terminal, the electrode terminal and the electrode terminal are subjected to a load. Stress in the second direction (shear stress) is concentrated on the joint with the power receiving electrode, and the joint may be damaged due to this stress concentration.

Further, a through hole having an inner diameter substantially the same as the outer diameter of the electrode terminal is provided at the tip portion of the support described above on the side facing the holding body, and a part of the electrode terminal is housed in the through hole for heating. In the configuration of the device, the relative movement of the support in the electrode terminal to the holder in the through hole is restricted, so that the load in the second direction is applied to the electrode terminal. Even if it acts, the stress in the second direction is also dispersed at the contact point between the electrode terminal and the through hole, and the stress in the second direction is suppressed from being concentrated at the joint between the electrode terminal and the power receiving electrode. It is possible to prevent the joint from being damaged. However, in such a heating device configuration, the inner diameter of each through hole is set in order to suppress the movement of the electrode terminal housed in each through hole formed in the tip portion of the support in the second direction. Since it is necessary to make it smaller (substantially the same as the outer diameter of the electrode terminal), the volume of the tip of the support becomes large and the contact area between the support and the holder becomes large, and the holder to the support becomes large. Since the amount of heat transferred to (the amount of heat drawn) becomes large, it is not preferable in terms of heating efficiency.

As described above, in the conventional heating device, while suppressing an increase in the amount of heat transfer (amount of heat drawing) from the holder to the support, it is possible to suppress damage to the joint portion between the electrode terminal and the power receiving electrode. There is a problem that it is difficult.

This specification discloses a technique capable of solving the above-mentioned problems.

The techniques disclosed herein can be realized, for example, in the following forms.

(1) The heating device disclosed in the present specification is composed of an insulator, and has a substantially planar first surface substantially orthogonal to the first direction and a second surface opposite to the first surface. A tubular shape that is composed of a plate-shaped holding body having a surface thereof, an insulator, and is joined to the second surface of the holding body to form a first through hole extending in the first direction. At a position where the support, the resistance heating element arranged inside the holder, and the first through hole of the support on the second surface of the holder overlap with the first through hole in the first direction. A power receiving electrode arranged and electrically connected to the resistance heating element, and an electrode having at least a part thereof arranged in the first through hole of the support and bonded to the power receiving electrode via a metal brazing material. A terminal and an insulating tube, of which at least a portion thereof is arranged in the first through hole of the support, extending in the first direction to accommodate and accommodate a specific portion which is at least a portion of the electrode terminal. , An insulating tube formed with a second through hole having an inner diameter substantially the same as the maximum outer diameter of the specific portion, and heats an object held on the first surface of the holder. In the heating device, the second surface of the holding body is engaged with the tip end portion of the insulating tube on the side facing the holding body in the second direction orthogonal to the first direction. A step portion is formed. In this heating device, a step portion is formed on the second surface of the holding body, which is engaged with the tip end portion of the insulating tube on the side facing the holding body in the second direction. The presence of this step portion can regulate the relative movement of the insulating tube (particularly, the tip of the insulating tube on the side facing the holding body) to the holding body in the second direction. Further, the insulating tube is formed with a second through hole that accommodates a specific portion of the electrode terminal and has an inner diameter substantially the same as the maximum outer diameter of the specific portion. Therefore, when the relative movement of the insulating tube with respect to the holding body in the second direction is restricted by the presence of the stepped portion, the electrode terminal with respect to the holding body (particularly, the tip portion of the electrode terminal on the side facing the holding body) becomes the first. Relative movement in two directions is restricted. In other words, the relative movement of the electrode terminal in the second direction with respect to the power receiving electrode formed on the second surface of the holder is restricted. Therefore, according to this heating device, even if a load in the second direction acts on the electrode terminals, stress in the second direction is also applied to the engagement portion between the insulating tube accommodating the electrode terminals and the stepped portion. It is dispersed, and it is possible to suppress the concentration of stress in the second direction on the joint portion between the electrode terminal and the power receiving electrode, and it is possible to prevent the joint portion between the electrode terminal and the power receiving electrode from being damaged. Further, in this heating device, since the volume of the tip portion of the support facing the holding body does not increase, the amount of heat transfer (heat drawing amount) from the holding body to the support occurs. It can be suppressed. Therefore, according to this heating device, while suppressing an increase in the amount of heat transfer (amount of heat drawing) from the holder to the support, it is possible to suppress damage to the joint portion between the electrode terminal and the power receiving electrode. Can be done.

(2) In the heating device, a cap member supported by the support so that relative movement to the support in the second direction is restricted, and extends in the first direction. A cap member having a third through hole having an inner diameter substantially the same as the outer diameter of the insulating tube is provided, and a part of the insulating tube is housed in the third through hole of the cap member. It may be configured as such. In this heating device, the cap member is supported by the support so that the relative movement with respect to the support in the second direction is restricted, and the support is joined to the holder. It can be said that the relative movement in the second direction with respect to the holder is restricted. Further, a part of the insulating tube is housed in the third through hole formed in the cap member. Therefore, in this heating device, the presence of the cap member can effectively regulate the relative movement of the insulating tube in the second direction with respect to the holding body, and as a result, the holding body (and the second holding body). It is possible to effectively regulate the relative movement of the electrode terminal in the second direction with respect to the power receiving electrode formed on the surface. Therefore, according to this heating device, even if a load in the second direction acts on the electrode terminal, the stress in the second direction is concentrated on the joint portion between the electrode terminal and the power receiving electrode due to the load. This can be effectively suppressed, and damage to the joint portion between the electrode terminal and the power receiving electrode can be effectively suppressed.

(3) In the heating device, the cap member is arranged in the first through hole of the support, and the outer peripheral portion of the cap member has at least a concave portion on the cap side and a convex portion on the cap side. One of them is formed, and in the inner peripheral portion of the first through hole of the support, a support side convex portion that fits with the cap side concave portion and a support side concave portion that fits with the cap side convex portion are formed. And, at least one of them may be formed. In this heating device, the relative rotation of the cap member with respect to the support is restricted by fitting the concave portion or the convex portion formed on the cap member with the convex portion or the concave portion formed on the first through hole of the support. As a result, the relative rotation of the insulating tube housed in the third through hole of the cap member with respect to the support is restricted. Since the support is joined to the holder, it can be said that the insulating tube housed in the third through hole of the cap member is restricted from rotating relative to the holder. Therefore, in this heating device, the relative rotation of the insulating tube with respect to the holding body is restricted by the presence of the cap member, and stress in the second direction is generated at the joint portion between the electrode terminal and the power receiving electrode as the insulating tube rotates. It can be suppressed. Therefore, according to this heating device, it is possible to effectively suppress the concentration of stress in the second direction on the joint portion between the electrode terminal and the power receiving electrode, and it is effective to prevent the joint portion from being damaged. It can be suppressed.

(4) In the heating device, the step portion formed on the second surface of the holding body is a part of a recess, and the recess is the holding body in the insulating tube in the second direction. The configuration may be characterized in that it is engaged with both the outer peripheral surface and the inner peripheral surface of the tip portion on the side facing the surface. According to the present heating device, a step portion that is engaged with the tip portion of the insulating tube on the side facing the holding body in the second direction is configured as a part of the recess, and the recess is the second recess. In the direction, it is engaged with both the outer peripheral surface and the inner peripheral surface of the tip portion of the insulating tube on the side facing the holding body. Therefore, in this heating device, the relative movement of the insulating tube with respect to the holder in the second direction can be effectively regulated. Therefore, according to this heating device, it is possible to effectively suppress the concentration of stress in the second direction on the joint portion between the electrode terminal and the power receiving electrode, and it is effective to prevent the joint portion from being damaged. It can be suppressed.

The technique disclosed in the present specification can be realized in various forms, for example, a heating device, a semiconductor manufacturing device, a manufacturing method thereof, and the like.

It is a perspective view which shows schematic appearance structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which enlarges and shows the cross-sectional structure of the heating apparatus 100 in the X1 part of FIG. It is explanatory drawing which enlarges and shows the cross-sectional structure of the heating apparatus 100 in the X2 part of FIG. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100a in 2nd Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100b in 3rd Embodiment.

A. First Embodiment:
A-1. Configuration of heating device 100:
FIG. 1 is a perspective view schematically showing an external configuration of the heating device 100 according to the first embodiment, and FIGS. 2 to 6 are explanatory views schematically showing a cross-sectional configuration of the heating device 100 according to the first embodiment. Is. FIG. 2 shows the XZ cross-sectional configuration of the heating device 100 at the positions II-II of FIGS. 3 to 6, and FIG. 3 shows the XY cross-section of the heating device 100 at the positions III-III of FIG. The configuration is shown, FIG. 4 shows the XY cross-sectional configuration of the heating device 100 at the IV-IV position of FIG. 2, and FIG. 5 shows the heating device at the VV position of FIG. The XY cross-sectional configuration of 100 is shown, and FIG. 6 shows the XY cross-sectional configuration of the heating device 100 at the position of VI-VI in FIG. Further, FIG. 7 is an explanatory view showing an enlarged cross-sectional configuration of the heating device 100 in the X1 portion of FIG. 2, and FIG. 8 is an enlarged explanatory view showing the cross-sectional configuration of the heating device 100 in the X2 portion of FIG. It is a figure. Each figure shows XYZ axes that are orthogonal to each other to identify the direction. In the present specification, for convenience, the Z-axis positive direction is referred to as an upward direction, and the Z-axis negative direction is referred to as a downward direction, but the heating device 100 is actually installed in a direction different from such an orientation. You may. The same applies to FIGS. 9 and later. Further, in the present specification, the direction orthogonal to the Z-axis direction is also referred to as a plane direction. The plane direction corresponds to the second direction in the claims.

The heating device 100 is a device that heats an object (for example, a semiconductor wafer W) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding the object, and is also called a susceptor. The heating device 100 is used as a part of a semiconductor manufacturing device such as a film forming apparatus (CVD film forming apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.). As shown in FIGS. 1 and 2, the heating device 100 includes a holder 10 and a support 20.

The holding body 10 has a surface (hereinafter referred to as “holding surface”) S1 substantially orthogonal to the Z-axis direction (vertical direction) and a surface opposite to the holding surface S1 (hereinafter referred to as “back surface S2”). It is a substantially disk-shaped member, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. In the present specification, the main component means the component having the highest content ratio (weight ratio). The diameter of the holding body 10 is, for example, about 100 mm or more and 500 mm or less, and the thickness of the holding body 10 (dimensions in the Z-axis direction) is, for example, about 3 mm or more and 20 mm or less. The Z-axis direction (vertical direction) corresponds to the first direction in the claims, the holding surface S1 of the holding body 10 corresponds to the first surface in the claims, and the back surface S2 of the holding body 10. Corresponds to the second surface in the claims.

The support 20 is a substantially circular tubular member extending in the substantially Z direction, and is composed of, for example, an insulator such as ceramics containing AlN or _Al2O3 as a main component _, like the holder 10. As shown in FIG. 2, the support 20 is formed with a through hole 22 extending in the Z-axis direction from the upper surface S3 to the lower surface S4 of the support 20. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 22 is substantially circular (see FIG. 4 and the like). The through hole 22 formed in the support 20 has a substantially constant inner diameter over substantially the entire Z-axis direction, but as shown in FIG. 8, constitutes an enlarged diameter portion 23 having an enlarged inner diameter at the lower end portion. There is. The outer diameter of the support 20 is, for example, about 30 mm or more and 90 mm or less, and the height (dimensions in the Z-axis direction) of the support 20 is, for example, about 100 mm or more and 300 mm or less. The through hole 22 formed in the support 20 corresponds to the first through hole in the claims.

As shown in FIGS. 2 and 7, the holding body 10 and the supporting body 20 are arranged so that the back surface S2 of the holding body 10 and the upper surface S3 of the supporting body 20 face each other in the Z-axis direction. The support 20 is joined to the vicinity of the center of the back surface S2 of the holding body 10 via a joining portion 30 formed of a known joining material.

As shown in FIGS. 2 and 3, two resistance heating elements 50 as heaters for heating the holding body 10 are arranged inside the holding body 10. Each resistance heating element 50 is made of a conductive material such as tungsten or molybdenum. In the present embodiment, each resistance heating element 50 constitutes a linear pattern extending substantially concentrically in a semicircular shape in the Z-axis direction.

Further, as shown in FIG. 7, a plurality of (four in the present embodiment) th-orders are located on the back surface S2 of the holding body 10 so as to overlap the through holes 22 formed in the support 20 in the Z-axis direction. The recess 11 of 1 is formed. In the present embodiment, the shape of each first recess 11 in the Z-axis direction is substantially circular. A power receiving electrode (electrode pad) 54 for supplying power to the resistance heating element 50 is provided in each of the first recesses 11. That is, in the present embodiment, a plurality of (four in the present embodiment) power receiving electrodes 54 are provided at positions overlapping the through holes 22 formed in the support 20 in the Z-axis direction in the back surface S2 of the holding body 10. Have been placed. In the present embodiment, the shape of each power receiving electrode 54 in the Z-axis direction is substantially circular.

As shown in FIGS. 2 and 3, one end of each resistance heating element 50 is arranged near the center of the holding body 10 in the Z-axis direction, and the holding body is attached to the one end. The upper end of the via conductor 52 arranged near the center of 10 is connected. Further, as shown in FIGS. 2 and 7, the lower end of the via conductor 52 connected to the one end of each resistance heating element 50 is connected to the power receiving electrode 54 arranged on the back surface S2 of the holding body 10. Has been done. Further, the other end of each resistance heating element 50 is arranged near the outer peripheral portion of the holding body 10, and the other end is not shown, but the via conductor 52 and the driver arranged on the holding body 10 are arranged. It is connected to a power receiving electrode 54 arranged on the back surface S2 of the holding body 10 via an electrode (not shown). As a result, each resistance heating element 50 is in a state of being electrically connected to the power receiving electrode 54 via the via conductor 52 and the like.

As shown in FIG. 2, a plurality of (four in this embodiment) electrode terminal units 70 are housed in the through hole 22 formed in the support 20. Each electrode terminal unit 70 is composed of a first columnar member 71, a second columnar member 72, and a metal stranded wire 73. The electrode terminal unit 70 corresponds to an electrode terminal within the scope of claims.

The first columnar member 71 constituting the electrode terminal unit 70 is a substantially columnar conductive member arranged on the holding body 10 side (that is, the upper side) with respect to the metal stranded wire 73, and is formed of, for example, nickel. ing. As shown in FIG. 7, the diameter of the end portion (that is, the upper end portion) of the first columnar member 71 on the holding body 10 side is smaller than the diameter of the other portion (for example, 5 mm or more and 8 mm or less). The upper end of the first columnar member 71 is joined to the power receiving electrode 54 via a metal brazing material 56 (for example, a gold brazing material). Further, as shown in FIG. 2, the other (lower) end of the first columnar member 71 is joined to the metal stranded wire 73 by, for example, caulking.

The second columnar member 72 constituting the electrode terminal unit 70 is a substantially columnar conductive member arranged on the side (that is, the lower side) away from the holding body 10 with respect to the metal stranded wire 73, for example. It is made of nickel. As shown in FIG. 2, the end portion (that is, the upper end portion) of the second columnar member 72 on the holding body 10 side is joined to the metal stranded wire 73 by, for example, caulking. Also, as shown in FIGS. 2 and 8, the other (lower) end of the second columnar member 72 projects downward from the through hole 22 of the support 20. The diameter of the lower end portion of the second columnar member 72 is smaller than the diameter of the other portion (for example, 5 mm or more and 8 mm or less). Further, a male screw 79 is formed in the middle of the lower end portion of the second columnar member 72.

The metal stranded wire 73 constituting the electrode terminal unit 70 is a stranded wire having a certain degree of flexibility, and is formed of, for example, nickel. The diameter of the metal stranded wire 73 is, for example, 1 mm or more and 3 mm or less. During the use of the heating device 100, the temperature of the holding body 10 rises due to the heat generated by the resistance heating element 50, so that the first columnar member between the holding body 10 and the support 20 and relatively close to the holding body 10 A thermal expansion difference may occur between the 71 and the second columnar member 72, which is relatively far from the holding body 10. When such a difference in thermal expansion occurs, stress is generated in the electrode terminal unit 70. Since the metal stranded wire 73 constituting the electrode terminal unit 70 has a certain degree of flexibility, the stress generated in the electrode terminal unit 70 can be absorbed and relaxed.

The lower end of the second columnar member 72 constituting the electrode terminal unit 70 is connected to a power supply (not shown) directly or via a connector (not shown). When a voltage is applied from the power source to each resistance heating element 50 via each electrode terminal unit 70, each power receiving electrode 54, each via conductor 52, etc., each resistance heating element 50 generates heat, and the holding surface S1 of the holding body 10 The object held on the object (for example, the semiconductor wafer W) is heated to a predetermined temperature (for example, about 400 to 650 ° C.).

As shown in FIGS. 2, 4 and 5, a plurality of (four in this embodiment) insulating pipes 40 are housed in the through holes 22 formed in the support 20. Each insulating tube 40 is a substantially circular tubular member extending in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. As shown in FIGS. 7 and 8, each insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 42 is substantially circular. The through hole 42 formed in the insulating tube 40 corresponds to the second through hole in the claims.

As shown in FIG. 7, a plurality of (four) second recesses 12 are formed on the back surface S2 of the holding body 10. Each second recess 12 is a substantially annular groove (slit) that surrounds the first recess 11 (that is, surrounds the power receiving electrode 54). The shape of each second recess 12 corresponds to the shape of the insulating tube 40, and each second recess 12 has a tip end portion (that is, an upper end portion) of the insulating tube 40 on the side facing the holding body 10. Is inserted. The groove width of the second recess 12 is substantially the same as the wall thickness of the upper end portion of the insulating tube 40. Therefore, each second recess 12 is engaged with both the outer peripheral surface OS and the inner peripheral surface IS at the upper end portion of the insulating tube 40 inserted into the second recess 12. Since the insulating tube 40 and the second recess 12 have such a configuration, the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 is oriented in the plane direction (direction orthogonal to the Z-axis direction). Relative movement is regulated. It can be said that the second recess 12 (a part of the second recess 12) formed in the back surface S2 of the holding body 10 is a stepped portion that is engaged with the upper end portion of the insulating tube 40 in the surface direction. .. Further, in the present specification, when the two dimensions (for example, the groove width of the second recess 12 and the wall thickness of the insulating tube 40 described above) are substantially the same, the absolute value of the difference between the two dimensions is determined. It means that it is 30% or less of the larger value of the two dimensions. When the two dimensions are substantially the same, it is more preferable that the absolute value of the difference between the two dimensions is 20% or less of the larger value of the two dimensions, and the absolute value of the difference between the two dimensions is absolute. It is more preferred that the value is 10% or less of the larger of the two dimensions. Further, in the present specification, the fact that two members are engaged is not limited to the mode in which the two members are in contact with each other, and the minimum value of the distance between the two members is 2 mm or less. Means. When two members are engaged, the minimum value of the distance between the two members is more preferably 1.5 mm or less, and the minimum value of the distance between the two members is 1 mm. The following is more preferable.

As shown in FIGS. 2, 7, and 8, the electrode terminal unit 70 is housed in the through hole 42 formed in each insulating tube 40. More specifically, a part of the electrode terminal unit 70 (hereinafter referred to as "first portion P1") is housed in the through hole 42 formed in each insulating tube 40. In the present embodiment, the first portion P1 of the electrode terminal unit 70 is a portion of the electrode terminal unit 70 excluding the lower end portion of the second columnar member 72. As shown in FIG. 7, the inner diameter R1 of the through hole 42 formed in the insulating tube 40 is substantially the same as the maximum outer diameter R2 of the first portion P1 in the electrode terminal unit 70. Therefore, the relative movement of the electrode terminal unit 70 with respect to the insulating tube 40 in the plane direction (direction orthogonal to the Z-axis direction) is restricted. The first portion P1 of the electrode terminal unit 70 corresponds to a specific portion within the scope of the claims.

Further, as shown in FIGS. 2, 5 and 8, the cap member (hereinafter, described later) is located at the position of the enlarged diameter portion 23 (that is, the position near the lower end) in the through hole 22 formed in the support 20. A "upper cap member 80") is housed to distinguish it from other cap members. The upper cap member 80 is a plate-shaped member that is substantially circular in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. The upper cap member 80 is also called a retainer. The upper cap member 80 corresponds to a cap member within the scope of the claims.

As shown in FIG. 8, the outer diameter of the upper cap member 80 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support 20. Therefore, the upper cap member 80 is in a state of being supported by the support 20 so that the relative movement in the plane direction with respect to the support 20 is restricted. In addition, for example, the outer peripheral surface of the upper cap member 80 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined by an inorganic adhesive. Further, in the present embodiment, in the Z-axis direction, the upper surface of the outer peripheral portion of the upper cap member 80 is related to the step (the boundary between the enlarged diameter portion 23 and the other portion) of the through hole 22 formed in the support 20. As a result, the movement of the upper cap member 80 to the upper side is restricted.

Further, as shown in FIG. 5, two convex portions 84 projecting in the surface direction (diameter direction) are formed on the outer peripheral surface of the upper cap member 80. The two convex portions 84 formed on the upper cap member 80 are fitted with the two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23) formed in the support 20. is doing. As a result, the relative rotation (rotation about the Z axis) of the upper cap member 80 with respect to the support 20 is regulated. The convex portion 84 formed on the upper cap member 80 corresponds to the cap side convex portion in the claims, and the concave portion 24 formed in the through hole 22 of the support 20 is a support side concave portion in the claims. Equivalent to.

Further, as shown in FIGS. 5 and 8, a plurality of (four) through holes 82 extending in the Z-axis direction are formed in the upper cap member 80. The shape of the cross section of each through hole 82 orthogonal to the Z-axis direction is substantially circular. The lower end of the insulating tube 40 is housed in the through hole 82 formed in the upper cap member 80. As shown in FIG. 8, the inner diameter R4 of the through hole 82 formed in the upper cap member 80 is substantially the same as the outer diameter R3 of the lower end portion of the insulating tube 40. Therefore, the relative movement of the insulating pipe 40 (particularly, the lower end portion of the insulating pipe 40) with respect to the upper cap member 80 in the plane direction (direction orthogonal to the Z-axis direction) is restricted, and as a result, the upper cap member 80 is supported. The relative movement of the insulating tube 40 in the plane direction with respect to the support 20 is restricted. The through hole 82 formed in the upper cap member 80 corresponds to the third through hole in the claims.

As shown in FIGS. 2, 6 and 8, the position of the enlarged diameter portion 23 (that is, the position near the lower end) in the through hole 22 formed in the support 20 and below the upper cap member 80. At the position on the side, a cap member (hereinafter, referred to as "lower cap member 90" to distinguish it from the above-mentioned upper cap member 80) is accommodated. The lower cap member 90 is a plate-shaped member that is substantially circular in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. .. The lower cap member 90 is also called a retainer.

As shown in FIG. 8, the outer diameter of the lower cap member 90 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support 20. Therefore, the lower cap member 90 is in a state of being supported by the support 20 so that the relative movement in the plane direction with respect to the support 20 is restricted. The outer peripheral surface of the lower cap member 90 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined to each other by, for example, an inorganic adhesive. Further, in the present embodiment, the upper surface of the lower cap member 90 is in contact with the lower surface of the upper cap member 80 in the Z-axis direction, whereby the movement of the lower cap member 90 to the upper side is restricted. There is.

Further, as shown in FIG. 6, two convex portions 94 protruding in the surface direction (diameter direction) are formed on the outer peripheral surface of the lower cap member 90. The two convex portions 94 formed on the lower cap member 90 are the above-mentioned two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23) formed in the support 20. Is fitted with. As a result, the relative rotation (rotation about the Z axis) of the lower cap member 90 with respect to the support 20 is regulated.

Further, as shown in FIGS. 6 and 8, a plurality of (four) through holes 92 extending in the Z-axis direction are formed in the lower cap member 90. The shape of the cross section of each through hole 92 orthogonal to the Z-axis direction is non-circular. More specifically, as shown in the partially enlarged view in FIG. 6, the shape of the cross section orthogonal to the Z-axis direction of each through hole 92 is a substantially D-shaped shape (that is, a circle with the center point of the circle). The shape of the larger part when divided into two parts by a straight line that does not pass through). A part of the electrode terminal unit 70 (hereinafter referred to as “second portion P2”) is housed in the through hole 92 formed in the lower cap member 90. In the present embodiment, the second portion P2 of the electrode terminal unit 70 is the above-mentioned first portion P1 (a portion housed in the through hole 42 formed in the insulating tube 40) of the electrode terminal unit 70. It is the part adjacent to the lower side. That is, the second portion P2 of the electrode terminal unit 70 is a part of the portion of the second columnar member 72 whose diameter has been reduced. The cross-sectional shape of the second portion P2 of the electrode terminal unit 70 orthogonal to the Z-axis direction is substantially the same as the cross-sectional shape of the through hole 92 formed in the lower cap member 90. That is, the cross-sectional shape of the second portion P2 in the electrode terminal unit 70 is non-circular, and more specifically, it is substantially D-shaped. Since the lower cap member 90 and the second portion P2 of the electrode terminal unit 70 have such a configuration, the second portion P2 of the electrode terminal unit 70 is in the Z-axis direction with respect to the lower cap member 90. Relative rotation (rotation around the Z axis) is restricted around an axis parallel to.

As shown in FIGS. 2 and 8, a male screw 79 is formed in a part of the electrode terminal unit 70 on the lower end side (hereinafter referred to as “third portion P3”), and the third portion P3 has a male screw 79 formed therein. The nut 68 is screwed. The upper surface of the nut 68 is in contact with the lower surface of the lower cap member 90. In this way, the electrode terminal unit 70 is fixed to the lower cap member 90 so that the movement of the electrode terminal unit 70 in the Z-axis direction with respect to the lower cap member 90 is restricted by screwing.

A-2. Manufacturing method of heating device 100:
The manufacturing method of the heating device 100 of the present embodiment is as follows, for example. First, the holding body 10 and the supporting body 20 are manufactured.

The method for producing the holding body 10 is, for example, as follows. First, an organic such as toluene is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide _{( Y2O3} ) powder, 20 parts by weight of an acrylic binder, and an appropriate amount of a dispersant and a plasticizer. A solvent is added and mixed with a ball mill to prepare a slurry for a green sheet. This slurry for green sheets is formed into a sheet by a casting device and then dried to prepare a plurality of green sheets.

Further, a metallized paste is prepared by adding a conductive powder such as tungsten or molybdenum to a mixture of an organic solvent such as aluminum nitride powder, an acrylic binder and terpineol and kneading the mixture. By printing this metallized paste using, for example, a screen printing device, an unsintered conductor layer that later becomes a resistance heating element 50, a power receiving electrode 54, or the like is formed on a specific green sheet. Further, by printing with the via holes provided in advance on the green sheet, an unsintered conductor portion that will later become the via conductor 52 is formed.

Next, a plurality of these green sheets (for example, 20 sheets) are thermocompression bonded, and if necessary, the outer periphery is cut to produce a green sheet laminate. This green sheet laminated body is cut by machining to produce a substantially disk-shaped molded body, the molded body is degreased, and the degreased body is further fired to produce a fired body. The surface of this fired body is polished. The holding body 10 is manufactured by the above steps.

Further, a method for manufacturing the support 20, for example, is as follows. First, an organic solvent such as methanol is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide powder, 3 parts by weight of PVA binder, and an appropriate amount of a dispersant and a plasticizer, and a ball mill is used. Mix to obtain a slurry. This slurry is granulated with a spray dryer to prepare a raw material powder. Next, the raw material powder is filled in the rubber mold in which the core corresponding to the through hole 22 is arranged, and cold hydrostatic pressure pressing is performed to obtain a molded product. The obtained molded body is degreased, and the degreased body is further fired. The support 20 is manufactured by the above steps.

Next, the holding body 10 and the supporting body 20 are joined. After lapping the back surface S2 of the holding body 10 and the upper surface S3 of the support 20 as necessary, for example, rare earths, organic solvents, etc. are applied to at least one of the back surface S2 of the holding body 10 and the upper surface S3 of the support 20. Is uniformly applied to a known bonding agent which has been mixed and made into a paste, and then degreased. Next, the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 are overlapped with each other, and normal pressure firing is performed while applying a load to join the holding body 10 and the support body 20.

After joining the holding body 10 and the supporting body 20, the insulating tube 40 is inserted into each through hole 22 of the supporting body 20. At this time, by fitting the tip of the insulating tube 40 into the second recess 12 formed in the back surface S2 of the holding body 10, the movement of the insulating tube 40 in the surface direction is restricted (that is, that is). (Positioned in the plane direction). In this state, the electrode terminal unit 70 (first portion P1) is inserted into the through hole 42 formed in each insulating tube 40, and then the upper cap member 80 is installed. At this time, the lower end portion of the insulating tube 40 is inserted into each through hole 82 formed in the upper cap member 80. Next, the lower cap member 90 is installed. At this time, the electrode terminal unit 70 (second portion P2) is inserted into each through hole 92 formed in the lower cap member 90. After that, the upper end portion of the electrode terminal unit 70 (specifically, the first columnar member 71) is brazed to the power receiving electrode 54 with, for example, a gold brazing material.

Then, if necessary, the upper cap member 80 and the lower cap member 90 are adhered to the support 20 with an inorganic adhesive. Finally, the nut 68 is screwed into the male screw 79 formed on the electrode terminal unit 70 (third portion P3). By the above manufacturing method, the heating device 100 having the above-described configuration is manufactured.

A-3. Effect of the first embodiment:
As described above, the heating device 100 of the present embodiment includes the holding body 10 and the supporting body 20. The holding body 10 is a plate-shaped member having a substantially planar holding surface S1 substantially orthogonal to the Z-axis direction and a back surface S2 on the opposite side of the holding surface S1. The support 20 is a tubular member that is joined to the back surface S2 of the holding body 10 and has a through hole 22 extending in the Z-axis direction. Further, a resistance heating element 50 is arranged inside the holding body 10. A power receiving electrode 54 electrically connected to the resistance heating element 50 is arranged at a position overlapping the through hole 22 of the support 20 on the back surface S2 of the holding body 10 in the Z-axis direction. Further, the heating device 100 of the present embodiment includes an electrode terminal unit 70 and an insulating tube 40 whose at least a part is arranged in the through hole 22 of the support 20. The electrode terminal unit 70 is joined to the power receiving electrode 54 via a metal brazing material 56. Further, the insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction. The through hole 42 of the insulating tube 40 accommodates the first portion P1 which is at least a part of the electrode terminal unit 70, and has an inner diameter R1 substantially the same as the maximum outer diameter R2 of the first portion P1. Further, in the heating device 100 of the present embodiment, the tip end portion (upper end portion) of the insulating tube 40 on the side facing the holding body 10 in the direction orthogonal to the Z-axis direction (plane direction) with respect to the back surface S2 of the holding body 10. A second recess 12 including a step portion engaged with is formed. Since the heating device 100 of the present embodiment has such a configuration, as described below, while suppressing an increase in the amount of heat transfer (amount of heat drawing) from the holding body 10 to the support 20 while suppressing an increase in the amount of heat transfer (amount of heat drawing). It has the effect of suppressing damage to the joint portion between the electrode terminal unit 70 and the power receiving electrode 54.

In the heating device 100, since the electrode terminal unit 70 is joined to the power receiving electrode 54 via the metal brazing material 56, for example, a connector for assembling the heating device 100 after brazing or for using the heating device 100. When a load in the surface direction acts on the electrode terminal unit 70 at the time of connection, stress in the surface direction (shear stress) is concentrated on the joint portion between the electrode terminal unit 70 and the power receiving electrode 54, and this stress concentration is concentrated. As a cause, the joint may be damaged.

However, in the heating device 100 of the present embodiment, the back surface S2 of the holding body 10 includes a stepped portion that is engaged with the tip end portion (upper end portion) of the insulating tube 40 on the side facing the holding body 10 in the surface direction. A second recess 12 is formed. The presence of the second recess 12 restricts the relative movement of the insulating tube 40 (particularly, the tip end portion (upper end portion) of the insulating tube 40 on the side facing the holding body 10) with respect to the holding body 10 in the plane direction. Can be done. Further, the insulating tube 40 is formed with a through hole 42 that accommodates the first portion P1 of the electrode terminal unit 70 and has an inner diameter R1 that is substantially the same as the maximum outer diameter R2 of the first portion P1. There is. Therefore, when the relative movement of the insulating tube 40 with respect to the holding body 10 in the surface direction is restricted by the presence of the second recess 12, the electrode terminal unit 70 with respect to the holding body 10 (particularly, the holding body 10 in the electrode terminal unit 70). Relative movement of the tip (upper end) on the opposite side in the plane direction is restricted. In other words, the relative movement of the electrode terminal unit 70 in the plane direction with respect to the power receiving electrode 54 formed on the back surface S2 of the holding body 10 is restricted. Therefore, according to the heating device 100 of the present embodiment, even if a load in the surface direction acts on the electrode terminal unit 70, the insulating tube 40 accommodating the electrode terminal unit 70 and the second recess 12 are engaged with each other. The stress in the surface direction is also dispersed at the location, and it is possible to suppress the concentration of the stress in the surface direction at the junction between the electrode terminal unit 70 and the power receiving electrode 54, and the junction between the electrode terminal unit 70 and the power receiving electrode 54 can be suppressed. It is possible to prevent the portion from being damaged.

In particular, in the heating device 100 of the present embodiment, the stepped portion engaged with the tip end portion (upper end portion) of the insulating tube 40 on the side facing the holding body 10 in the surface direction is a part of the second recess 12. The second recess 12 is configured to engage both the outer peripheral surface OS and the inner peripheral surface IS of the tip end portion of the insulating tube 40 facing the holding body 10 in the surface direction. Therefore, in the heating device 100 of the present embodiment, the relative movement of the insulating tube 40 with respect to the holding body 10 in the surface direction can be effectively regulated. Therefore, according to the heating device 100 of the present embodiment, it is possible to effectively suppress the concentration of stress in the surface direction on the joint portion between the electrode terminal unit 70 and the power receiving electrode 54, and the joint portion is damaged. Can be effectively suppressed.

As described in Japanese Patent Application Laid-Open No. 2014-165416, a plurality of through holes having an inner diameter substantially the same as the outer diameter of the electrode terminal are provided at the tip portion of the support on the side facing the holder. In the configuration of the conventional heating device in which a part of the electrode terminal is housed in each through hole, the relative movement in the plane direction with respect to the holding body is restricted in the part housed in the through hole of the support at the electrode terminal. Therefore, even if a load in the surface direction acts on the electrode terminal, the stress in the surface direction is distributed to the contact point between the electrode terminal and the through hole, and the joint portion between the electrode terminal and the power receiving electrode is in the visual direction. Concentration of stress can be suppressed, and damage to the joint can be suppressed. However, in this configuration, the inner diameter of each through hole is reduced (outside the electrode terminal) in order to suppress the movement of the electrode terminal housed in each through hole formed in the tip portion of the support in the plane direction. Since it is necessary to make it substantially the same as the diameter), the volume of the tip of the support becomes large, the contact area between the support and the holder becomes large, and the amount of heat transfer from the holder to the support (the amount of heat transferred from the holder to the support). Since the amount of heat drawn) becomes large, it is not preferable in terms of heating efficiency. In the heating device 100 of the present embodiment, since each electrode terminal unit 70 is housed in the through hole 42 of the insulating tube 40 instead of the through hole of the support 20, the side facing the holding body 10 in the support 20 It is possible to suppress an increase in the volume of the tip portion (an increase in the contact area between the support 20 and the holding body 10). Therefore, according to the heating device 100 of the present embodiment, the electrode terminal unit 70 and the power receiving electrode 54 are suppressed while suppressing an increase in the amount of heat transfer (amount of heat drawn) from the holding body 10 to the support 20. It is possible to prevent the joint portion from being damaged.

Further, in the heating device 100 of the present embodiment, the movement of the insulating tube 40 in the surface direction is restricted by the presence of the second recess 12 formed in the back surface S2 of the holding body 10 (that is, in the surface direction). As a result, the positioning of the electrode terminal unit 70 housed in the through hole 42 of the insulating tube 40 in the surface direction can be easily and accurately realized.

Further, the heating device 100 of the present embodiment further includes an upper cap member 80 supported by the support 20 so that relative movement in the plane direction with respect to the support 20 is restricted. The upper cap member 80 is formed with a through hole 82 extending in the Z-axis direction and having an inner diameter R4 substantially the same as the outer diameter R3 of the insulating tube 40. A part (lower end portion) of the insulating pipe 40 is housed in the through hole 82 of the upper cap member 80. As described above, in the heating device 100 of the present embodiment, the upper cap member 80 is supported by the support 20 so that the relative movement in the plane direction with respect to the support 20 is restricted, and the support 20 is a holding body. Since it is joined to 10, it can be said that the upper cap member 80 is restricted from moving relative to the holding body 10 in the plane direction. Further, a part (lower end portion) of the insulating pipe 40 is housed in the through hole 82 formed in the upper cap member 80. Therefore, in the heating device 100 of the present embodiment, the presence of the upper cap member 80 can effectively regulate the relative movement of the insulating tube 40 with respect to the holding body 10 in the plane direction, and as a result, the holding body 10 ( And the relative movement of the electrode terminal unit 70 in the surface direction with respect to the power receiving electrode 54) formed on the back surface S2 of the holding body 10 can be effectively regulated. Therefore, according to the heating device 100 of the present embodiment, even if a load in the surface direction acts on the electrode terminal unit 70, the surface of the joint portion between the electrode terminal unit 70 and the power receiving electrode 54 is caused by the load. Concentration of stress in the direction can be effectively suppressed, and damage to the joint portion between the electrode terminal unit 70 and the power receiving electrode 54 can be effectively suppressed.

Further, in the heating device 100 of the present embodiment, the upper cap member 80 is arranged in the through hole 22 of the support 20. A convex portion 84 is formed on the outer peripheral portion of the upper cap member 80, and a concave portion 24 that fits with the convex portion 84 of the upper cap member 80 is formed on the inner peripheral portion of the through hole 22 of the support body 20. ing. As described above, in the heating device 100 of the present embodiment, the convex portion 84 formed in the upper cap member 80 and the concave portion 24 formed in the through hole 22 of the support 20 are fitted to each other with respect to the support 20. The relative rotation of the upper cap member 80 (rotation about the Z axis) is restricted, and as a result, the relative rotation of the insulating tube 40 housed in the through hole 82 of the upper cap member 80 with respect to the support 20 is restricted. Has been done. Since the support 20 is joined to the holding body 10, it can be said that the insulating tube 40 housed in the through hole 82 of the upper cap member 80 is restricted from rotating relative to the holding body 10. Therefore, in the heating device 100 of the present embodiment, the relative rotation of the insulating tube 40 with respect to the holding body 10 is restricted by the presence of the upper cap member 80, and the electrode terminal unit 70 and the power receiving electrode 54 are rotated as the insulating tube 40 rotates. It is possible to suppress the generation of stress in the surface direction at the joint portion. Therefore, according to the heating device 100 of the present embodiment, it is possible to effectively suppress the concentration of stress in the surface direction on the joint portion between the electrode terminal unit 70 and the power receiving electrode 54, and the joint portion is damaged. Can be effectively suppressed.

B. Second embodiment:
FIG. 9 is an explanatory diagram schematically showing a cross-sectional configuration of the heating device 100a according to the second embodiment. FIG. 9 shows the XZ cross-sectional configuration of the heating device 100a of the second embodiment at the same position as that of FIG. 7 (position of the X1 portion in FIG. 2). In the following, among the configurations of the heating device 100a of the second embodiment, the same configurations as those of the heating device 100 of the first embodiment described above will be appropriately described by adding the same reference numerals.

As shown in FIG. 9, the heating device 100a of the second embodiment mainly differs from the heating device 100 of the first embodiment in the configuration of the back surface S2 of the holding body 10. Specifically, in the heating device 100a of the second embodiment, the configuration of each second recess 12a formed on the back surface S2 of the holding body 10 is the configuration of the second recess 12 in the heating device 100 of the first embodiment. Different from the configuration. That is, in the heating device 100a of the second embodiment, each of the second recesses 12a is shallower than the first recess 11 and is continuous with the first recess 11. As a result, each of the second recesses 12a is integrated with the first recess 11 to form a recess having two levels of depth (a deep portion (first recess 11) and the periphery of the portion). It constitutes a concave portion composed of a shallow portion (second concave portion 12a) that surrounds the portion.

Similar to the first embodiment, the power receiving electrode 54 is arranged in the first recess 11. Further, the tip end portion (that is, the upper end portion) of the insulating tube 40 on the side facing the holding body 10 is inserted into the second recess 12a. The second recess 12a is engaged with the outer peripheral surface OS at the upper end of the insulating tube 40 inserted into the second recess 12a (however, it is engaged with the inner peripheral surface IS of the insulating tube 40). do not have). Since the insulating tube 40 and the second recess 12a have such a configuration, the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 is oriented in the plane direction (direction orthogonal to the Z-axis direction). Relative movement is regulated. It can be said that the second recess 12a (a part of the second recess 12a) formed on the back surface S2 of the holding body 10 is a stepped portion that is engaged with the upper end portion of the insulating tube 40 in the surface direction. ..

As described above, in the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, the tip of the back surface S2 of the holding body 10 on the side facing the holding body 10 in the insulating tube 40 in the surface direction. Since the second recess 12a including the stepped portion engaged with the portion (upper end portion) is formed, the insulating tube 40 with respect to the holding body 10 (particularly, the tip of the insulating tube 40 on the side facing the holding body 10). It is possible to regulate the relative movement of the portion (upper end portion) in the plane direction. Therefore, according to the heating device 100a of the second embodiment, the electrode terminal unit 70 is accommodated even if a load in the surface direction acts on the electrode terminal unit 70, as in the heating device 100 of the first embodiment. The stress in the surface direction is also dispersed at the engagement portion between the insulating tube 40 and the second recess 12a, and it is possible to suppress the concentration of the stress in the surface direction at the joint portion between the electrode terminal unit 70 and the power receiving electrode 54. It is possible to prevent the joint portion between the electrode terminal unit 70 and the power receiving electrode 54 from being damaged.

C. Third embodiment:
FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of the heating device 100b according to the third embodiment. FIG. 10 shows the XZ cross-sectional configuration of the heating device 100b of the third embodiment at the same position as that of FIG. 7 (position of the X1 portion in FIG. 2). In the following, among the configurations of the heating device 100b of the third embodiment, the same configurations as those of the heating device 100 of the first embodiment described above will be appropriately described by adding the same reference numerals.

As shown in FIG. 10, the heating device 100b of the third embodiment mainly has a different configuration of the back surface S2 of the holding body 10 from the heating device 100 of the first embodiment. Specifically, in the heating device 100 of the first embodiment, the first recess 11 is formed in the back surface S2 of the holding body 10, but in the heating device 100b of the third embodiment, the back surface S2 of the holding body 10 is formed. The first recess 11 is not formed in. In the heating device 100b of the third embodiment, similarly to the heating device 100 of the first embodiment, a plurality of (four) second recesses 12 are formed on the back surface S2 of the holding body 10, and each of them is formed. The second recess 12 is a substantially annular groove (slit) that surrounds the power receiving electrode 54 formed on the back surface S2 of the holding body 10. The tip end portion (that is, the upper end portion) of the insulating tube 40 on the side facing the holding body 10 is inserted into each second recessed portion 12, and each second recessed portion 12 is inserted into the second recessed portion 12. Both the outer peripheral surface OS and the inner peripheral surface IS at the upper end of the inserted insulating tube 40 are engaged with each other. Since the insulating tube 40 and the second recess 12 have such a configuration, the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 is oriented in the plane direction (direction orthogonal to the Z-axis direction). Relative movement is regulated. It can be said that the second recess 12 (a part of the second recess 12) formed in the back surface S2 of the holding body 10 is a stepped portion that is engaged with the upper end portion of the insulating tube 40 in the surface direction. ..

As described above, in the heating device 100b of the third embodiment, similarly to the heating device 100 of the first embodiment, the tip of the back surface S2 of the holding body 10 on the side facing the holding body 10 in the insulating tube 40 in the surface direction. Since the second recess 12 including the stepped portion engaged with the portion (upper end portion) is formed, the tip of the insulating tube 40 with respect to the holding body 10 (particularly, the tip of the insulating tube 40 on the side facing the holding body 10). It is possible to regulate the relative movement of the portion (upper end portion) in the plane direction. Therefore, according to the heating device 100b of the third embodiment, the electrode terminal unit 70 is accommodated even if a load in the surface direction acts on the electrode terminal unit 70, as in the heating device 100 of the first embodiment. The stress in the surface direction is also distributed to the engagement portion between the insulating tube 40 and the second recess 12, and it is possible to suppress the concentration of the stress in the surface direction at the joint portion between the electrode terminal unit 70 and the power receiving electrode 54. It is possible to prevent the joint portion between the electrode terminal unit 70 and the power receiving electrode 54 from being damaged.

D. Modification example:
The technique disclosed in the present specification is not limited to the above-described embodiment, and can be transformed into various forms without departing from the gist thereof, and for example, the following modifications are also possible.

The configuration of the heating device 100 in the above embodiment is merely an example and can be variously modified. For example, in the above embodiment, is the second recess 12 as a step portion that is engaged with the insulating tube 40 in the surface direction engaged with both the outer peripheral surface OS and the inner peripheral surface IS of the insulating tube 40? (FIGS. 7 and 10), although only the outer peripheral surface OS of the insulating tube 40 is engaged (FIG. 9), the second recess 12 as a step portion is engaged only with the inner peripheral surface IS of the insulating tube 40. It may be correct. Further, the stepped portion does not necessarily have to be configured as a concave portion, but may be configured as a convex portion or a stepped portion.

Further, in the above embodiment, the electrode terminal unit 70 is composed of three members, that is, a first columnar member 71, a second columnar member 72, and a metal stranded wire 73. It may be composed of one or two members, or may be composed of four or more members.

Further, in the above embodiment, the lower end portion of the electrode terminal unit 70 projects outward from the through hole 22 of the support 20 and the through hole 42 of the insulating tube 40, but the entire electrode terminal unit 70 is the entire support 20. It may be accommodated in the through hole 22 of the above and the through hole 42 of the insulating tube 40.

Further, in the above embodiment, the upper cap member 80 and the lower cap member 90 are housed in the through hole 22 of the support 20, but at least one of the upper cap member 80 and the lower cap member 90 is. It may be arranged outside the through hole 22 instead of inside the through hole 22 of the support 20. Even with such a configuration, the upper cap member 80 and / or the lower cap member 90 may be attached to another portion of the support 20 (for example, the lower surface S4 of the support 20) by using an adhesive, a joining member, or the like. It is possible to fix it to.

Further, in the above embodiment, the convex portion 84 is formed on the outer peripheral surface of the upper cap member 80, and the convex portion 84 is fitted with the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. However, on the contrary, even if a concave portion is formed on the outer peripheral surface of the upper cap member 80 and the concave portion fits with the convex portion formed on the inner peripheral surface of the through hole 22 of the support 20. good. In this case, the concave portion formed in the upper cap member 80 corresponds to the cap side concave portion in the claims, and the convex portion formed in the through hole 22 of the support 20 is the support side in the claims. Corresponds to the convex part. Similarly, in the above embodiment, the convex portion 94 is formed on the outer peripheral surface of the lower cap member 90, and the convex portion 94 is the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. Although it is fitted, on the contrary, a concave portion is formed on the outer peripheral surface of the lower cap member 90, and the concave portion is fitted with a convex portion formed on the inner peripheral surface of the through hole 22 of the support 20. You may do so. The number of convex portions or concave portions formed on each member can be arbitrarily changed. Further, it is not always necessary that each member has these protrusions or recesses.

Further, in the above embodiment, the heating device 100 includes the upper cap member 80 and the lower cap member 90, but the heating device 100 includes at least one of the upper cap member 80 and the lower cap member 90. It may not be. Further, in the above embodiment, the electrode terminal unit 70 is fixed to the lower cap member 90 so as to be restricted from moving in the Z-axis direction with respect to the lower cap member 90 by screwing, but the electrode terminal unit 70 is fixed. Is not limited to screwing, and may be fixed by other means (for example, means using a fixing member). Further, the electrode terminal unit 70 does not necessarily have to be fixed to the lower cap member 90.

Further, the shape and the number of each member constituting the heating device 100 of the above embodiment are merely examples and can be variously deformed. For example, in the above embodiment, the heating device 100 is provided with four combinations of the electrode terminal unit 70, the insulating tube 40 accommodating the electrode terminal unit 70, and the power receiving electrode 54 joined to the electrode terminal unit 70. However, the number of the combinations provided in the heating device 100 can be arbitrarily set. In the above embodiment, all of the combinations have the same configuration, but if at least one of the combinations has the configuration of the above embodiment, the remaining combinations have other configurations. May be good.

Further, the heating device 100 of the above embodiment may further include a temperature measuring body such as a thermocouple or a platinum resistor, and other constituent members such as a high frequency electrode.

Further, the forming material of each member constituting the heating device 100 in the above embodiment is merely an example, and each member may be formed of another material. For example, in the above embodiment, the holding body 10 and the support 20 may be made of ceramics containing aluminum nitride or alumina as a main component, may be made of other ceramics, or may be an insulating material other than ceramics. It may be made of.

Further, the method for manufacturing the heating device 100 in the above embodiment is merely an example, and various modifications can be made.

10: Holding body 11: First concave portion 12: Second concave portion 20: Support 22: Through hole 23: Enlarged portion 24: Recessed portion 30: Joint portion 40: Insulated pipe 42: Through hole 50: Resistance heating element 52 : Via conductor 54: Power receiving electrode 56: Metal brazing material 68: Nut 70: Electrode terminal unit 71: First columnar member 72: Second columnar member 73: Metal stranded wire 79: Male screw 80: Upper cap member 82: Through hole 84: Convex part 90: Lower cap member 92: Through hole 94: Convex part 100: Heating device IS: Inner peripheral surface OS: Outer peripheral surface P1: First part P2: Second part P3: Third Part S1: Holding surface S2: Back surface S3: Top surface S4: Bottom surface

Claims (4)

A plate-shaped retainer composed of an insulator and having a substantially planar first surface substantially orthogonal to the first direction and a second surface opposite to the first surface.
A tubular support made of an insulator, joined to the second surface of the retainer, and formed with a first through hole extending in the first direction.
A resistance heating element arranged inside the holder and
In the first directional view, a power receiving electrode arranged at a position overlapping the first through hole of the support on the second surface of the holder and electrically connected to the resistance heating element.
An electrode terminal having at least a part thereof arranged in the first through hole of the support and bonded to the power receiving electrode via a metal brazing material.
An insulating tube having at least a portion thereof arranged in the first through hole of the support, extending in the first direction, accommodating a specific portion which is at least a part of the electrode terminal, and the specification. An insulating tube formed with a second through hole having an inner diameter substantially the same as the maximum outer diameter of the portion,
In a heating device for heating an object held on the first surface of the holder.
On the second surface of the holding body, a step portion is formed in the second direction orthogonal to the first direction, which is engaged with the tip end portion of the insulating tube on the side facing the holding body. Has been,
A heating device characterized by that. In the heating device according to claim 1, further
A cap member supported by the support so that its relative movement with respect to the support in the second direction is restricted, extends in the first direction, and is substantially the same as the outer diameter of the insulating tube. A cap member having a third through hole having an inner diameter of
A part of the insulating tube is housed in the third through hole of the cap member.
A heating device characterized by that. In the heating device according to claim 2,
The cap member is arranged in the first through hole of the support.
At least one of a cap-side concave portion and a cap-side convex portion is formed on the outer peripheral portion of the cap member.
At least one of a support-side convex portion that fits with the cap-side concave portion and a support-side concave portion that fits with the cap-side convex portion is formed in the inner peripheral portion of the first through hole of the support. Has been,
A heating device characterized by that. The heating device according to any one of claims 1 to 3.
The step portion formed on the second surface of the holding body is a part of the recess.
The recess is engaged with both the outer peripheral surface and the inner peripheral surface of the tip portion of the insulating tube on the side facing the holding body in the second direction.
A heating device characterized by that.

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