JP2019175882A - Heater - Google Patents

Abstract

To inhibit a junction between an electrode terminal and a power receiving electrode from being damaged while suppressing an increase in the amount of heat transfer from a holding body to a support.SOLUTION: A heater includes: a holding body having a substantially planar first surface substantially orthogonal to a first direction and a second surface on the side opposite to the first surface; a tubular support; a resistance heating element arranged inside the holding body; a power receiving electrode electrically connected to the resistance heating element; an electrode terminal joined to a power receiving electrode through a metal brazing material; and an insulating tube in which a through hole housing the electrode terminal therein is formed. On the second surface of the holding body, a stepped part is formed, engaged with the tip on the side opposite to the holding body in the insulating tube in the second direction orthogonal to the first direction.SELECTED DRAWING: Figure 7

Description

  The technology disclosed in this specification relates to a heating device.

  2. Description of the Related Art A heating device (also referred to as “susceptor”) that heats a target (for example, a semiconductor wafer) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding an object is known. The heating apparatus is used as a part of a semiconductor manufacturing apparatus such as a film forming apparatus (CVD film forming apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.).

  Generally, a heating device includes a holding body and a support body. The holding body has a surface (hereinafter referred to as “holding surface”) substantially orthogonal to a predetermined direction (hereinafter referred to as “first direction”) and a surface opposite to the holding surface (hereinafter referred to as “back surface”). It is a plate-shaped member which has. The support is a tubular member joined to the back surface of the holding body and having a through hole extending in the first direction. A resistance heating element is arranged inside the holding body, and a power receiving electrode (electrode pad) electrically connected to the resistance heating element is arranged on the back surface of the holding body. An electrode terminal is accommodated in the through hole formed in the support, and the electrode terminal is joined to a power receiving electrode disposed on the back surface of the holding body through a metal brazing material. When a voltage is applied to the resistance heating element via the electrode terminal and the power receiving electrode, the resistance heating element generates heat, and an object (for example, a semiconductor wafer) held on the holding surface of the holding body is, for example, 400 to 650 ° C. Heated to a degree.

  Conventionally, as a configuration of the heating device, a through hole having an inner diameter substantially the same as the outer diameter of the electrode terminal is provided at a tip portion of the support opposite to the holding body, and a part of the electrode terminal is provided in the through hole. A housed configuration is known (see, for example, Patent Document 1).

JP 2014-165416 A

  In the heating device, since the electrode terminal is joined to the power receiving electrode, when a load in a direction perpendicular to the first direction (hereinafter referred to as “second direction”) acts on the electrode terminal, Stress (shear stress) in the second direction is concentrated at the joint with the power receiving electrode, and the joint may be damaged due to this stress concentration.

  In addition, a through hole having an inner diameter substantially the same as the outer diameter of the electrode terminal is provided at the tip portion of the support body facing the holding body, and heating in which a part of the electrode terminal is accommodated in the through hole. In the configuration of the device, since the relative movement in the second direction with respect to the holding body is restricted in the portion of the electrode terminal accommodated in the through hole of the support, the load in the second direction is applied to the electrode terminal. Even if it acts, the stress in the second direction is also dispersed at the contact portion between the electrode terminal and the through-hole, and the stress in the second direction is prevented from being concentrated at the joint between the electrode terminal and the power receiving electrode. It is possible to prevent the joint from being damaged. However, in such a configuration of the heating device, in order to suppress the movement of the electrode terminal accommodated in each through-hole formed in the distal end portion of the support body in the second direction, the inner diameter of each through-hole is reduced. Since it is necessary to make it smaller (substantially the same as the outer diameter of the electrode terminal), the volume of the tip of the support increases and the contact area between the support and the support increases. Since the amount of heat transferred to (the amount of heat drawn) increases, it is not preferable in terms of heating efficiency.

  As described above, in the conventional heating device, it is possible to suppress damage to the joint portion between the electrode terminal and the power receiving electrode while suppressing an increase in the amount of heat transferred from the holder to the support (amount of heat extraction). There is a problem that is difficult.

  In this specification, the technique which can solve the subject mentioned above is disclosed.

  The technology disclosed in the present specification can be realized as, for example, the following forms.

(1) A heating device disclosed in the present specification is configured by an insulator, and includes a substantially planar first surface that is substantially orthogonal to the first direction, and a second surface that is opposite to the first surface. A plate-shaped holding body having an insulating surface, and an insulating body, joined to the second surface of the holding body, and having a first through hole extending in the first direction A support, a resistance heating element arranged inside the holding body, and a position overlapping the first through hole of the support on the second surface of the holding body in the first direction view. A power receiving electrode disposed and electrically connected to the resistance heating element, and an electrode at least partially disposed in the first through hole of the support and joined to the power receiving electrode via a metal brazing material A terminal and an insulating tube at least partially disposed within the first through-hole of the support A second through hole is formed that extends in the first direction, accommodates a specific portion that is at least a portion of the electrode terminal, and has an inner diameter substantially the same as the maximum outer diameter of the specific portion. And a heating device that heats an object held on the first surface of the holding body, wherein the second surface of the holding body is orthogonal to the first direction. In the second direction, a stepped portion is formed which is engaged with a tip portion of the insulating tube on the side facing the holding body. In the present heating device, a stepped portion is formed on the second surface of the holding body, which is engaged with the tip of the insulating tube on the side facing the holding body in the second direction. Due to the presence of the stepped portion, the relative movement of the insulating tube relative to the holding body (particularly, the tip portion of the insulating tube on the side facing the holding body) in the second direction can be restricted. The insulating tube is formed with a second through-hole that accommodates a specific portion of the electrode terminal and has an inner diameter substantially the same as the maximum outer diameter of the specific portion. Therefore, when the relative movement in the second direction of the insulating tube with respect to the holding body is restricted due to the presence of the stepped portion, the electrode terminal (particularly, the tip of the electrode terminal on the side facing the holding body) with respect to the holding body The relative movement in the direction 2 is restricted. In other words, the relative movement of the electrode terminal in the second direction with respect to the power receiving electrode formed on the second surface of the holding body is restricted. Therefore, according to this heating apparatus, even if a load in the second direction acts on the electrode terminal, stress in the second direction is also applied to the engagement portion between the insulating tube that accommodates the electrode terminal and the stepped portion. It is possible to suppress the concentration of the stress in the second direction at the joint between the electrode terminal and the power receiving electrode and to prevent the joint between the electrode terminal and the power receiving electrode from being damaged. In addition, in this heating device, the volume of the tip portion of the support that faces the holding body does not increase, so that the amount of heat transferred from the holding body to the support (the amount of heat extraction) increases. Can be suppressed. Therefore, according to the present heating device, it is possible to suppress damage to the joint portion between the electrode terminal and the power receiving electrode while suppressing an increase in the amount of heat transfer from the holder to the support (amount of heat extraction). Can do.

(2) In the heating device, further, a cap member supported by the support so as to be restricted from relative movement in the second direction with respect to the support, and extending in the first direction. A cap member having a third through hole having an inner diameter substantially the same as the outer diameter of the insulating tube, wherein a portion of the insulating tube is accommodated in the third through hole of the cap member. It is good also as composition which has. In the present heating device, the cap member is supported by the support so that relative movement in the second direction with respect to the support is restricted, and the support is joined to the holding body. It can be said that relative movement in the second direction with respect to the holding body is restricted. In addition, a part of the insulating tube is accommodated in the third through hole formed in the cap member. Therefore, in the present heating device, the relative movement of the insulating tube in the second direction with respect to the holding body can be effectively restricted by the presence of the cap member, and as a result, the holding body (and the second of the holding body) The relative movement of the electrode terminal in the second direction with respect to the power receiving electrode formed on the surface can be effectively restricted. Therefore, according to the present heating device, even if a load in the second direction acts on the electrode terminal, stress in the second direction is concentrated on the joint between the electrode terminal and the power receiving electrode due to the load. Can be effectively suppressed, and damage to the joint between the electrode terminal and the power receiving electrode can be effectively suppressed.

(3) In the heating device, the cap member is disposed in the first through hole of the support, and an outer peripheral portion of the cap member includes at least a cap-side concave portion and a cap-side convex portion. One side is formed, and on the inner peripheral portion of the first through hole of the support body, a support-side convex portion that fits with the cap-side concave portion, and a support-side concave portion that fits with the cap-side convex portion And at least one of them may be formed. In this heating device, the concave portion or the convex portion formed in the cap member and the convex portion or the concave portion formed in the first through hole of the support body are fitted to each other, so that the relative rotation of the cap member with respect to the support body is restricted. As a result, relative rotation of the insulating tube accommodated in the third through hole of the cap member with respect to the support is restricted. Since the support body is joined to the holding body, it can be said that the relative rotation of the insulating tube accommodated in the third through hole of the cap member with respect to the holding body is restricted. Therefore, in the present heating device, the relative rotation of the insulating tube relative to the holding body is restricted due to the presence of the cap member, and stress in the second direction is generated at the joint between the electrode terminal and the power receiving electrode as the insulating tube rotates. This can be suppressed. Therefore, according to the present heating device, it is possible to effectively suppress the stress in the second direction from concentrating on the joint portion between the electrode terminal and the power receiving electrode, and to effectively break the joint portion. Can be suppressed.

(4) In the heating apparatus, the step portion formed on the second surface of the holding body is a part of a concave portion, and the concave portion is the holding body in the insulating tube in the second direction. It is good also as a structure characterized by engaging with both the outer peripheral surface and inner peripheral surface of the front-end | tip part on the side which opposes. According to the present heating device, the stepped portion engaged with the distal end portion of the insulating tube facing the holding body in the second direction is configured as a part of the recessed portion, and the recessed portion In the direction, the insulating tube is engaged with both the outer peripheral surface and the inner peripheral surface of the tip portion on the side facing the holding body. Therefore, in this heating device, the relative movement of the insulating tube in the second direction with respect to the holding body can be effectively restricted. Therefore, according to the present heating device, it is possible to effectively suppress the stress in the second direction from concentrating on the joint portion between the electrode terminal and the power receiving electrode, and to effectively break the joint portion. Can be suppressed.

  The technology disclosed in this specification can be realized in various forms, for example, in the form of a heating apparatus, a semiconductor manufacturing apparatus, a manufacturing method thereof, and the like.

It is a perspective view which shows roughly the external appearance structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which expands and shows the cross-sectional structure of the heating apparatus 100 in the X1 part of FIG. It is explanatory drawing which expands and shows the cross-sectional structure of the heating apparatus 100 in the X2 part of FIG. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100a in 2nd Embodiment. It is explanatory drawing which shows roughly the cross-sectional structure of the heating apparatus 100b in 3rd Embodiment.

A. First embodiment:
A-1. Configuration of the heating device 100:
FIG. 1 is a perspective view schematically showing an external configuration of a heating device 100 according to the first embodiment, and FIGS. 2 to 6 are explanatory views schematically showing a cross-sectional configuration of the heating device 100 according to the first embodiment. It is. 2 shows an XZ cross-sectional configuration of the heating device 100 at a position II-II in FIGS. 3 to 6, and FIG. 3 shows an XY cross section of the heating device 100 at a position III-III in FIG. 4 shows the XY cross-sectional configuration of the heating device 100 at the position IV-IV in FIG. 2, and FIG. 5 shows the heating device at the position V-V in FIG. 100 shows an XY cross-sectional configuration of 100, and FIG. 6 shows an XY cross-sectional configuration of the heating device 100 at the position VI-VI in FIG. 7 is an explanatory diagram showing an enlarged cross-sectional configuration of the heating device 100 in the X1 portion of FIG. 2, and FIG. 8 is an explanatory diagram showing an enlarged sectional configuration of the heating device 100 in the X2 portion of FIG. FIG. In each figure, XYZ axes orthogonal to each other for specifying the direction are shown. In this specification, for convenience, the positive direction of the Z-axis is referred to as the upward direction, and the negative direction of the Z-axis is referred to as the downward direction. However, the heating device 100 is actually installed in a direction different from such a direction. May be. The same applies to FIG. 9 and subsequent figures. In this specification, a direction perpendicular to the Z-axis direction is also referred to as a plane direction. The surface direction corresponds to the second direction in the claims.

  The heating device 100 is a device that heats the object (for example, the semiconductor wafer W) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding the object (for example, the semiconductor wafer W), and is also called a susceptor. The heating apparatus 100 is used as a part of a semiconductor manufacturing apparatus such as a film forming apparatus (such as a CVD film forming apparatus or a sputtering film forming apparatus) or an etching apparatus (such as a plasma etching apparatus). As shown in FIGS. 1 and 2, the heating device 100 includes a holding body 10 and a support body 20.

The holding body 10 has a surface (hereinafter referred to as “holding surface”) S1 substantially orthogonal to the Z-axis direction (vertical direction) and a surface opposite to the holding surface S1 (hereinafter referred to as “back surface S2”). It is a substantially disk-shaped member, and is made of an insulator such as ceramics mainly composed of AlN (aluminum nitride) or Al ₂ O ₃ (alumina). In the present specification, the main component means a component having the largest content ratio (weight ratio). The diameter of the holding body 10 is, for example, about 100 mm or more and 500 mm or less, and the thickness (dimension in the Z-axis direction) of the holding body 10 is, for example, about 3 mm or more and 20 mm or less. The Z-axis direction (vertical direction) corresponds to the first direction in the claims, the holding surface S1 of the holding body 10 corresponds to the first surface in the claims, and the back surface S2 of the holding body 10 Corresponds to the second surface in the claims.

The support body 20 is a substantially tubular member extending in the substantially Z direction, and, like the holding body 10, is constituted by an insulator such as ceramics mainly composed of AlN or Al ₂ O ₃ . As shown in FIG. 2, the support 20 is formed with a through hole 22 extending in the Z-axis direction from the upper surface S3 to the lower surface S4 of the support 20. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 22 is substantially circular (see FIG. 4 and the like). The through-hole 22 formed in the support 20 has a substantially constant inner diameter over substantially the entire Z-axis direction, and as shown in FIG. Yes. The outer diameter of the support 20 is, for example, about 30 mm or more and 90 mm or less, and the height (dimension in the Z-axis direction) of the support 20 is, for example, about 100 mm or more and 300 mm or less. The through hole 22 formed in the support 20 corresponds to the first through hole in the claims.

  As shown in FIGS. 2 and 7, the holding body 10 and the support body 20 are arranged such that the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 face each other in the Z-axis direction. The support body 20 is joined to the vicinity of the center portion of the back surface S2 of the holding body 10 via a joint portion 30 formed of a known joining material.

  As shown in FIGS. 2 and 3, two resistance heating elements 50 as heaters for heating the holding body 10 are arranged inside the holding body 10. Each resistance heating element 50 is made of, for example, a conductive material such as tungsten or molybdenum. In the present embodiment, each resistance heating element 50 forms a linear pattern extending in a substantially concentric semicircular shape when viewed in the Z-axis direction.

  Further, as shown in FIG. 7, a plurality (four in this embodiment) of the back surface S <b> 2 of the holding body 10 overlap with the through holes 22 formed in the support body 20 when viewed in the Z-axis direction. 1 recess 11 is formed. In the present embodiment, the shape of each first recess 11 when viewed in the Z-axis direction is substantially circular. In each first recess 11, a power receiving electrode (electrode pad) 54 for supplying power to the resistance heating element 50 is provided. In other words, in the present embodiment, a plurality of (four in the present embodiment) power receiving electrodes 54 are disposed at positions overlapping the through holes 22 formed in the support 20 in the back surface S2 of the holding body 10 as viewed in the Z-axis direction. Has been placed. In the present embodiment, the shape of each power receiving electrode 54 when viewed in the Z-axis direction is substantially circular.

  As shown in FIGS. 2 and 3, one end of each resistance heating element 50 is disposed near the center of the holding body 10 as viewed in the Z-axis direction. 10 is connected to the upper end portion of the via conductor 52 disposed in the vicinity of the center portion. 2 and 7, the lower end portion of the via conductor 52 connected to the one end portion of each resistance heating element 50 is connected to the power receiving electrode 54 disposed on the back surface S2 of the holding body 10. Has been. Further, the other end of each resistance heating element 50 is disposed in the vicinity of the outer peripheral portion of the holding body 10, and the other end is not shown, but via conductors 52 and drivers arranged in the holding body 10. It is connected to the power receiving electrode 54 disposed on the back surface S2 of the holding body 10 via an electrode (not shown). As a result, each resistance heating element 50 is in a state of being electrically connected to the power receiving electrode 54 via the via conductor 52 or the like.

  As shown in FIG. 2, a plurality of (four in this embodiment) electrode terminal units 70 are accommodated in the through holes 22 formed in the support 20. Each electrode terminal unit 70 includes a first columnar member 71, a second columnar member 72, and a metal strand 73. The electrode terminal unit 70 corresponds to the electrode terminal in the claims.

  The first columnar member 71 constituting the electrode terminal unit 70 is a substantially cylindrical conductive member disposed on the holding body 10 side (that is, the upper side) with respect to the metal strand 73, and is formed of nickel, for example. ing. As illustrated in FIG. 7, the diameter of the end portion (that is, the upper end portion) of the first columnar member 71 on the holding body 10 side is smaller than the diameter of other portions (for example, 5 mm or more and 8 mm or less). The upper end portion of the first columnar member 71 is joined to the power receiving electrode 54 via a metal brazing material 56 (for example, a gold brazing material). As shown in FIG. 2, the other (lower) end portion of the first columnar member 71 is joined to the metal strand 73 by caulking, for example.

  The second columnar member 72 constituting the electrode terminal unit 70 is a substantially cylindrical conductive member disposed on the side away from the holding body 10 (that is, the lower side) with respect to the metal strand 73, for example, It is made of nickel. As shown in FIG. 2, the end portion (that is, the upper end portion) of the second columnar member 72 on the holding body 10 side is joined to the metal stranded wire 73 by caulking, for example. As shown in FIGS. 2 and 8, the other (lower) end of the second columnar member 72 protrudes downward from the through hole 22 of the support 20. The diameter of the lower end portion of the second columnar member 72 is thinner than the diameter of other portions (for example, 5 mm or more and 8 mm or less). A male screw 79 is formed in the middle of the lower end portion of the second columnar member 72.

  The metal strand 73 which comprises the electrode terminal unit 70 is a strand with a certain amount of flexibility, for example, is formed with nickel. The diameter of the metal strand 73 is 1 mm or more and 3 mm or less, for example. During use of the heating device 100, the temperature of the holding body 10 becomes high due to the heat generated by the resistance heating element 50, so the first columnar member that is relatively close to the holding body 10 or between the holding body 10 and the support body 10. A difference in thermal expansion may occur between 71 and the second columnar member 72 that is relatively far from the holding body 10. When such a difference in thermal expansion occurs, stress is generated in the electrode terminal unit 70. Since the metal strand 73 which comprises the electrode terminal unit 70 has a certain amount of flexibility, the stress which arises in the electrode terminal unit 70 can be absorbed and relieved.

  The lower end portion of the second columnar member 72 constituting the electrode terminal unit 70 is connected to a power source (not shown) directly or via a connector (not shown). When a voltage is applied from the power source to each resistance heating element 50 via each electrode terminal unit 70, each power receiving electrode 54, each via conductor 52, etc., each resistance heating element 50 generates heat and the holding surface S1 of the holding body 10 is heated. The target object (for example, semiconductor wafer W) held on it is heated to a predetermined temperature (for example, about 400 to 650 ° C.).

As shown in FIGS. 2, 4, and 5, a plurality of (four in the present embodiment) insulating tubes 40 are accommodated in the through holes 22 formed in the support 20. Each insulating tube 40 is a substantially circular tubular member extending in the Z-axis direction, and is made of an insulator such as ceramics mainly composed of AlN (aluminum nitride) or Al ₂ O ₃ (alumina). As shown in FIGS. 7 and 8, each insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 42 is substantially circular. The through hole 42 formed in the insulating tube 40 corresponds to the second through hole in the claims.

  As shown in FIG. 7, a plurality of (four) second recesses 12 are formed on the back surface S <b> 2 of the holder 10. Each second recess 12 is a substantially annular groove (slit) that surrounds the first recess 11 (that is, surrounds the power receiving electrode 54). The shape of each second concave portion 12 corresponds to the shape of the insulating tube 40, and each second concave portion 12 has a distal end portion (that is, an upper end portion) on the side facing the holding body 10 in the insulating tube 40. Has been inserted. The groove width of the second recess 12 is substantially the same as the thickness of the upper end portion of the insulating tube 40. Therefore, each second recess 12 is engaged with both the outer peripheral surface OS and the inner peripheral surface IS at the upper end portion of the insulating tube 40 inserted into the second recess 12. Since the insulating tube 40 and the second recess 12 have such a configuration, the surface of the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 in the surface direction (a direction perpendicular to the Z-axis direction). Relative movement is restricted. In addition, it can be said that the 2nd recessed part 12 (a part of 2nd recessed part 12) formed in back surface S2 of the holding body 10 is a level | step-difference part engaged with the upper end part of the insulating tube 40 in a surface direction. . Further, in the present specification, two dimensions (for example, the groove width of the second recess 12 and the thickness of the insulating tube 40 described above) are substantially the same, the absolute value of the difference between the two dimensions is It means 30% or less of the larger value of the two dimensions. When the two dimensions are substantially the same, the absolute value of the difference between the two dimensions is more preferably 20% or less of the larger value of the two dimensions, and the absolute value of the difference between the two dimensions is preferred. More preferably, the value is 10% or less of the larger of the two dimensions. Further, in this specification, the fact that two members are engaged is not limited to a mode in which the two members are in contact, and the minimum value of the distance between the two members is 2 mm or less. Means. When the two members are engaged, it is more preferable that the minimum value of the distance between the two members is 1.5 mm or less, and the minimum value of the distance between the two members is 1 mm. More preferably, it is as follows.

  As shown in FIGS. 2, 7, and 8, an electrode terminal unit 70 is accommodated in the through hole 42 formed in each insulating tube 40. More specifically, a part of the electrode terminal unit 70 (hereinafter referred to as “first portion P1”) is accommodated in the through hole 42 formed in each insulating tube 40. In the present embodiment, the first portion P1 of the electrode terminal unit 70 is a portion excluding the lower end portion of the second columnar member 72 in the electrode terminal unit 70. As shown in FIG. 7, the inner diameter R1 of the through hole 42 formed in the insulating tube 40 is substantially the same as the maximum outer diameter R2 of the first portion P1 in the electrode terminal unit 70. Therefore, relative movement of the electrode terminal unit 70 with respect to the insulating tube 40 in the surface direction (direction orthogonal to the Z-axis direction) is restricted. The first portion P1 of the electrode terminal unit 70 corresponds to a specific portion in the claims.

As shown in FIGS. 2, 5, and 8, a cap member (hereinafter described later) is provided at the position of the enlarged diameter portion 23 (that is, the position close to the lower end) in the through hole 22 formed in the support 20. In order to distinguish it from other cap members, an “upper cap member 80”) is accommodated. The upper cap member 80 is a substantially circular plate-like member as viewed in the Z-axis direction, and is made of an insulator such as ceramics mainly composed of AlN (aluminum nitride) or Al ₂ O ₃ (alumina). The upper cap member 80 is also called a retainer. The upper cap member 80 corresponds to the cap member in the claims.

  As shown in FIG. 8, the outer diameter of the upper cap member 80 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support body 20. Therefore, the upper cap member 80 is in a state of being supported by the support 20 so that relative movement in the surface direction with respect to the support 20 is restricted. For example, the outer peripheral surface of the upper cap member 80 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined by an inorganic adhesive. In the present embodiment, in the Z-axis direction, the upper surface of the outer peripheral portion of the upper cap member 80 is related to the step of the through hole 22 formed in the support 20 (the boundary between the enlarged diameter portion 23 and other portions). Accordingly, the upward movement of the upper cap member 80 is restricted.

  As shown in FIG. 5, two convex portions 84 projecting in the surface direction (radial direction) are formed on the outer peripheral surface of the upper cap member 80. The two convex portions 84 formed on the upper cap member 80 are fitted to the two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23 thereof) formed in the support body 20. is doing. Thereby, the relative rotation (rotation around the Z axis) of the upper cap member 80 with respect to the support 20 is restricted. The convex portion 84 formed on the upper cap member 80 corresponds to the cap-side convex portion in the claims, and the concave portion 24 formed in the through hole 22 of the support body 20 corresponds to the support-side concave portion in the claims. Equivalent to.

  As shown in FIGS. 5 and 8, the upper cap member 80 has a plurality of (four) through holes 82 extending in the Z-axis direction. The shape of the cross section orthogonal to the Z-axis direction of each through hole 82 is substantially circular. The lower end portion of the insulating tube 40 is accommodated in the through hole 82 formed in the upper cap member 80. As shown in FIG. 8, the inner diameter R4 of the through hole 82 formed in the upper cap member 80 is substantially the same as the outer diameter R3 of the lower end portion of the insulating tube 40. Therefore, relative movement in the surface direction (direction perpendicular to the Z-axis direction) of the insulating tube 40 (particularly, the lower end portion of the insulating tube 40) with respect to the upper cap member 80 is restricted, and as a result, the upper cap member 80 is supported. The relative movement in the surface direction of the insulating tube 40 with respect to the support 20 is restricted. The through hole 82 formed in the upper cap member 80 corresponds to the third through hole in the claims.

As shown in FIGS. 2, 6, and 8, the position of the enlarged diameter portion 23 (that is, the position close to the lower end) in the through hole 22 formed in the support 20 is lower than the upper cap member 80. A cap member (hereinafter referred to as “lower cap member 90” for distinguishing from the above-described upper cap member 80) is accommodated in the position on the side. The lower cap member 90 is a substantially circular plate-like member as viewed in the Z-axis direction, and is made of an insulator such as ceramics mainly composed of AlN (aluminum nitride) or Al ₂ O ₃ (alumina). . The lower cap member 90 is also called a retainer.

  As shown in FIG. 8, the outer diameter of the lower cap member 90 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support body 20. Therefore, the lower cap member 90 is supported by the support 20 so that relative movement in the surface direction with respect to the support 20 is restricted. For example, the outer peripheral surface of the lower cap member 90 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined by an inorganic adhesive. In the present embodiment, in the Z-axis direction, the upper surface of the lower cap member 90 is in contact with the lower surface of the upper cap member 80, thereby restricting the upper cap member 90 from moving upward. Yes.

  As shown in FIG. 6, two convex portions 94 projecting in the surface direction (radial direction) are formed on the outer peripheral surface of the lower cap member 90. The two convex portions 94 formed on the lower cap member 90 are the above-described two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23 thereof) formed on the support 20. It is mated with. Thereby, relative rotation (rotation around the Z axis) of the lower cap member 90 with respect to the support 20 is restricted.

  As shown in FIGS. 6 and 8, the lower cap member 90 has a plurality of (four) through holes 92 extending in the Z-axis direction. The shape of the cross section orthogonal to the Z-axis direction of each through hole 92 is non-circular. More specifically, as shown in a partially enlarged view in FIG. 6, the shape of the cross section perpendicular to the Z-axis direction of each through-hole 92 is substantially D-shaped (that is, the circle is the center point of the circle). The shape of the larger part when divided into two parts by a straight line that does not pass through. A portion of the electrode terminal unit 70 (hereinafter referred to as “second portion P2”) is accommodated in the through hole 92 formed in the lower cap member 90. In the present embodiment, the second portion P2 of the electrode terminal unit 70 is the first portion P1 (the portion accommodated in the through hole 42 formed in the insulating tube 40) of the electrode terminal unit 70 described above. It is a part adjacent to the lower side. That is, the second portion P2 of the electrode terminal unit 70 is a part of a portion where the diameter of the second columnar member 72 is reduced. The shape of the cross section perpendicular to the Z-axis direction of the second portion P <b> 2 of the electrode terminal unit 70 is substantially the same as the cross-sectional shape of the through hole 92 formed in the lower cap member 90. That is, the cross-sectional shape of the second portion P2 in the electrode terminal unit 70 is non-circular, and more specifically, is substantially D-shaped. Since the lower cap member 90 and the second portion P2 of the electrode terminal unit 70 have such a configuration, the second portion P2 of the electrode terminal unit 70 is in the Z-axis direction with respect to the lower cap member 90. Relative rotation (rotation about the Z-axis) about an axis parallel to is restricted.

  As shown in FIGS. 2 and 8, a male screw 79 is formed in a part on the lower end side of the electrode terminal unit 70 (hereinafter referred to as “third portion P3”). The nut 68 is screwed. The upper surface of the nut 68 is in contact with the lower surface of the lower cap member 90. Thus, the electrode terminal unit 70 is fixed to the lower cap member 90 so that the movement in the Z-axis direction with respect to the lower cap member 90 is restricted by screwing.

A-2. Manufacturing method of heating device 100:
The manufacturing method of the heating apparatus 100 of this embodiment is as follows, for example. First, the holding body 10 and the support body 20 are produced.

A method for producing the holder 10 is, for example, as follows. First, an organic material such as toluene is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide (Y ₂ O ₃ ) powder, 20 parts by weight of an acrylic binder, and appropriate amounts of a dispersant and a plasticizer. Add a solvent and mix with a ball mill to prepare a slurry for green sheets. The green sheet slurry is formed into a sheet by a casting apparatus and then dried to produce a plurality of green sheets.

  Further, a metallized paste is prepared by adding and kneading conductive powder such as tungsten or molybdenum to a mixture of organic solvents such as aluminum nitride powder, acrylic binder, and terpineol. By printing this metallized paste using, for example, a screen printing apparatus, an unsintered conductor layer that will later become the resistance heating element 50, the power receiving electrode 54, and the like is formed on a specific green sheet. Further, an unsintered conductor portion that will later become the via conductor 52 is formed by printing the green sheet with a via hole provided in advance.

  Next, a plurality of these green sheets (for example, 20 sheets) are subjected to thermocompression bonding, and the outer periphery is cut as necessary to produce a green sheet laminate. The green sheet laminate is cut by machining to produce a substantially disk-shaped molded body, the molded body is degreased, and the degreased body is fired to produce a fired body. The surface of the fired body is polished. The holding body 10 is manufactured through the above steps.

  Moreover, the production method of the support 20 is as follows, for example. First, an organic solvent such as methanol is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide powder, 3 parts by weight of PVA binder, and an appropriate amount of a dispersant and a plasticizer. Mix to obtain a slurry. This slurry is granulated with a spray dryer to produce a raw material powder. Next, a raw material powder is filled in a rubber mold in which a core corresponding to the through hole 22 is arranged, and cold isostatic pressing is performed to obtain a molded body. The obtained molded body is degreased and the degreased body is fired. The support 20 is produced by the above steps.

  Next, the holding body 10 and the support body 20 are joined. After performing lapping processing on the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 as necessary, at least one of the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 is, for example, a rare earth or an organic solvent. A known bonding agent made into a paste by mixing is uniformly applied and then degreased. Next, the holding body 10 and the support body 20 are joined by overlapping the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 and performing normal pressure firing while applying a load.

  After joining the holding body 10 and the support body 20, the insulating tube 40 is inserted into each through hole 22 of the support body 20. At this time, the movement of the insulating tube 40 in the surface direction is restricted by fitting the tip of the insulating tube 40 into the second recess 12 formed on the back surface S2 of the holding body 10 (that is, (Positioned in the surface direction). In this state, the electrode terminal unit 70 (the first portion P1 thereof) is inserted into the through hole 42 formed in each insulating tube 40, and then the upper cap member 80 is installed. At this time, the lower end portion of the insulating tube 40 is inserted into each through hole 82 formed in the upper cap member 80. Next, the lower cap member 90 is installed. At this time, the electrode terminal unit 70 (the second portion P2 thereof) is inserted into each through hole 92 formed in the lower cap member 90. Thereafter, the upper end portion of the electrode terminal unit 70 (specifically, the first columnar member 71) is brazed to the power receiving electrode 54 with, for example, a gold brazing material.

  Thereafter, if necessary, the upper cap member 80 and the lower cap member 90 are bonded to the support 20 with an inorganic adhesive. Finally, the nut 68 is screwed onto the male screw 79 formed on the electrode terminal unit 70 (the third portion P3 thereof). With the above manufacturing method, the heating device 100 having the above-described configuration is manufactured.

A-3. Effects of the first embodiment:
As described above, the heating apparatus 100 according to the present embodiment includes the holding body 10 and the support body 20. The holding body 10 is a plate-like member having a substantially planar holding surface S1 substantially orthogonal to the Z-axis direction and a back surface S2 opposite to the holding surface S1. The support 20 is a tubular member that is joined to the back surface S2 of the holding body 10 and has a through hole 22 that extends in the Z-axis direction. Further, a resistance heating element 50 is disposed inside the holding body 10. A power receiving electrode 54 electrically connected to the resistance heating element 50 is disposed at a position overlapping the through hole 22 of the support body 20 on the back surface S2 of the holding body 10 as viewed in the Z-axis direction. In addition, the heating device 100 of the present embodiment includes an electrode terminal unit 70 and an insulating tube 40, at least a part of which is disposed in the through hole 22 of the support 20. The electrode terminal unit 70 is joined to the power receiving electrode 54 via a metal brazing material 56. The insulating tube 40 has a through hole 42 extending in the Z-axis direction. The through hole 42 of the insulating tube 40 accommodates the first portion P1 that is at least a part of the electrode terminal unit 70, and has an inner diameter R1 that is substantially the same as the maximum outer diameter R2 of the first portion P1. Further, in the heating device 100 of the present embodiment, the front end portion (upper end portion) of the insulating tube 40 on the side facing the holding body 10 in the direction (plane direction) orthogonal to the Z-axis direction on the back surface S2 of the holding body 10. A second recessed portion 12 including a stepped portion engaged with is formed. Since the heating device 100 of the present embodiment has such a configuration, as described below, while suppressing an increase in the amount of heat transfer from the holder 10 to the support 20 (amount of heat extraction), There exists an effect that it can suppress that the junction part of the electrode terminal unit 70 and the receiving electrode 54 is damaged.

  In the heating device 100, since the electrode terminal unit 70 is joined to the power receiving electrode 54 via the metal brazing material 56, for example, when the heating device 100 is assembled after brazing or a connector for using the heating device 100. When a load in the surface direction is applied to the electrode terminal unit 70 during connection, stress in the surface direction (shear stress) is concentrated at the joint between the electrode terminal unit 70 and the power receiving electrode 54, and this stress concentration is reduced. As a cause, the joint may be damaged.

  However, in the heating device 100 of the present embodiment, the back surface S2 of the holding body 10 includes a stepped portion that is engaged with the tip (upper end) of the insulating tube 40 on the side facing the holding body 10 in the surface direction. A second recess 12 is formed. Due to the presence of the second recess 12, the relative movement in the surface direction of the insulating tube 40 (particularly, the distal end portion (upper end portion) of the insulating tube 40 facing the holding body 10) with respect to the holding body 10 is restricted. Can do. Further, the insulating tube 40 is formed with a through hole 42 that accommodates the first portion P1 of the electrode terminal unit 70 and has an inner diameter R1 that is substantially the same as the maximum outer diameter R2 of the first portion P1. Yes. Therefore, when the relative movement in the surface direction of the insulating tube 40 with respect to the holding body 10 is restricted due to the presence of the second recess 12, the electrode terminal unit 70 with respect to the holding body 10 (particularly, the holding body 10 in the electrode terminal unit 70 is The relative movement in the surface direction of the opposite end portion (upper end portion) is restricted. In other words, relative movement in the surface direction of the electrode terminal unit 70 with respect to the power receiving electrode 54 formed on the back surface S2 of the holding body 10 is restricted. Therefore, according to the heating device 100 of the present embodiment, the engagement between the insulating tube 40 that houses the electrode terminal unit 70 and the second recess 12 even when a load in the surface direction acts on the electrode terminal unit 70. The stress in the surface direction is also dispersed at the location, and the stress in the surface direction can be suppressed from concentrating on the joint between the electrode terminal unit 70 and the power receiving electrode 54. It can suppress that a part breaks.

  In particular, in the heating device 100 of the present embodiment, a stepped portion that engages with the tip (upper end) of the insulating tube 40 on the side facing the holding body 10 in the surface direction is a part of the second recess 12. The second recess 12 is configured to engage with both the outer peripheral surface OS and the inner peripheral surface IS of the distal end portion of the insulating tube 40 facing the holding body 10 in the surface direction. Therefore, in the heating device 100 of this embodiment, the relative movement in the surface direction of the insulating tube 40 with respect to the holding body 10 can be effectively regulated. Therefore, according to the heating device 100 of the present embodiment, it is possible to effectively suppress the stress in the surface direction from being concentrated on the joint portion between the electrode terminal unit 70 and the power receiving electrode 54, and the joint portion is damaged. This can be effectively suppressed.

  As described in JP-A-2014-165416, a plurality of through holes having an inner diameter substantially the same as the outer diameter of the electrode terminal are provided at the tip portion of the support that faces the holding body. In the configuration of the conventional heating apparatus in which a part of the electrode terminal is accommodated in each through hole, relative movement in the surface direction with respect to the holding body is restricted in the part accommodated in the through hole of the support body in the electrode terminal. For this reason, even when a load in the surface direction acts on the electrode terminal, the stress in the surface direction is dispersed also at the contact portion between the electrode terminal and the through hole, and the eye direction is applied to the joint between the electrode terminal and the power receiving electrode. Concentration of stress can be suppressed, and damage to the joint can be suppressed. However, in this configuration, the inner diameter of each through hole is reduced (outside of the electrode terminal) in order to suppress movement in the surface direction of the electrode terminal accommodated in each through hole formed in the tip portion of the support. The volume of the tip of the support is increased, the contact area between the support and the support is increased, and the amount of heat transferred from the support to the support ( This is not preferable in terms of heating efficiency. In the heating device 100 of the present embodiment, each electrode terminal unit 70 is accommodated in the through hole 42 of the insulating tube 40 instead of the through hole of the support 20, so that the side of the support 20 facing the holding body 10 is not provided. It is possible to suppress an increase in the volume of the tip portion (an increase in the contact area between the support 20 and the holding body 10). Therefore, according to the heating device 100 of the present embodiment, the electrode terminal unit 70, the power receiving electrode 54, and the electrode terminal unit 70 are suppressed while suppressing an increase in the amount of heat transfer from the holder 10 to the support 20 (the amount of heat extraction). It can suppress that the junction part of this is damaged.

  Further, in the heating device 100 of the present embodiment, the movement of the insulating tube 40 in the surface direction is restricted by the presence of the second recess 12 formed on the back surface S2 of the holding body 10 (that is, the surface direction). As a result, positioning in the surface direction of the electrode terminal unit 70 accommodated in the through hole 42 of the insulating tube 40 can be easily and accurately realized.

  Moreover, the heating apparatus 100 of the present embodiment further includes an upper cap member 80 supported by the support body 20 so that relative movement in the surface direction with respect to the support body 20 is restricted. The upper cap member 80 is formed with a through hole 82 that extends in the Z-axis direction and has an inner diameter R4 that is substantially the same as the outer diameter R3 of the insulating tube 40. A portion (lower end) of the insulating tube 40 is accommodated in the through hole 82 of the upper cap member 80. Thus, in the heating apparatus 100 of the present embodiment, the upper cap member 80 is supported by the support body 20 so that relative movement in the surface direction with respect to the support body 20 is restricted, and the support body 20 is a holding body. 10, it can be said that the relative movement of the upper cap member 80 in the surface direction with respect to the holding body 10 is restricted. A part (lower end) of the insulating tube 40 is accommodated in the through hole 82 formed in the upper cap member 80. Therefore, in the heating apparatus 100 of the present embodiment, the relative movement in the surface direction of the insulating tube 40 with respect to the holding body 10 can be effectively restricted by the presence of the upper cap member 80, and as a result, the holding body 10 ( In addition, relative movement in the surface direction of the electrode terminal unit 70 with respect to the power receiving electrode 54) formed on the back surface S2 of the holding body 10 can be effectively restricted. Therefore, according to the heating device 100 of the present embodiment, even if a load in the surface direction acts on the electrode terminal unit 70, the surface of the joint between the electrode terminal unit 70 and the power receiving electrode 54 is caused by the load. Concentration of stress in the direction can be effectively suppressed, and damage to the joint portion between the electrode terminal unit 70 and the power receiving electrode 54 can be effectively suppressed.

  In the heating device 100 of the present embodiment, the upper cap member 80 is disposed in the through hole 22 of the support 20. A convex portion 84 is formed on the outer peripheral portion of the upper cap member 80, and a concave portion 24 that fits with the convex portion 84 of the upper cap member 80 is formed on the inner peripheral portion of the through hole 22 of the support 20. ing. Thus, in the heating device 100 of the present embodiment, the convex portion 84 formed on the upper cap member 80 and the concave portion 24 formed in the through hole 22 of the support body 20 are fitted to each other, so The relative rotation of the upper cap member 80 (rotation around the Z axis) is restricted, and as a result, the relative rotation of the insulating tube 40 accommodated in the through hole 82 of the upper cap member 80 with respect to the support 20 is restricted. Has been. Since the support 20 is joined to the holding body 10, it can be said that the relative rotation of the insulating tube 40 accommodated in the through hole 82 of the upper cap member 80 with respect to the holding body 10 is restricted. Therefore, in the heating device 100 of the present embodiment, the relative rotation of the insulating tube 40 with respect to the holding body 10 is restricted due to the presence of the upper cap member 80, and the electrode terminal unit 70 and the power receiving electrode 54 are rotated with the rotation of the insulating tube 40. It can suppress that the stress of a surface direction generate | occur | produces in a junction part. Therefore, according to the heating device 100 of the present embodiment, it is possible to effectively suppress the stress in the surface direction from being concentrated on the joint portion between the electrode terminal unit 70 and the power receiving electrode 54, and the joint portion is damaged. This can be effectively suppressed.

B. Second embodiment:
FIG. 9 is an explanatory diagram schematically showing a cross-sectional configuration of the heating device 100a according to the second embodiment. FIG. 9 shows an XZ cross-sectional configuration of the heating device 100a of the second embodiment at the same position as that in FIG. 7 (position X1 in FIG. 2). Below, about the structure same as the structure of the heating apparatus 100 of 1st Embodiment mentioned above among the structures of the heating apparatus 100a of 2nd Embodiment, the description is abbreviate | omitted suitably by attaching | subjecting the same code | symbol.

  As shown in FIG. 9, the heating device 100 a of the second embodiment mainly differs from the heating device 100 of the first embodiment in the configuration of the back surface S <b> 2 of the holding body 10. Specifically, in the heating device 100a of the second embodiment, the configuration of each second recess 12a formed on the back surface S2 of the holding body 10 is the same as that of the second recess 12 in the heating device 100 of the first embodiment. Different from the configuration. That is, in the heating device 100 a of the second embodiment, each second recess 12 a is shallower than the first recess 11 and is continuous with the first recess 11. Thereby, each 2nd recessed part 12a is united with the 1st recessed part 11, and the recessed part (the deep part (1st recessed part 11) of a depth) and the circumference | surroundings of this part have the depth of two steps. A shallow depth portion (a concave portion constituted by the second concave portion 12a) is formed.

  In the first recess 11, the power receiving electrode 54 is arranged as in the first embodiment. In addition, a distal end portion (that is, an upper end portion) of the insulating tube 40 on the side facing the holding body 10 is inserted into the second recess 12a. The second recessed portion 12a is engaged with the outer peripheral surface OS at the upper end portion of the insulating tube 40 inserted into the second recessed portion 12a (however, the second recessed portion 12a is engaged with the inner peripheral surface IS of the insulating tube 40). Absent). Since the insulating tube 40 and the second recessed portion 12a have such a configuration, the surface of the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 in the surface direction (a direction orthogonal to the Z-axis direction). Relative movement is restricted. In addition, it can be said that the 2nd recessed part 12a (a part of 2nd recessed part 12a) formed in back surface S2 of the holding body 10 is a level | step-difference part engaged with the upper end part of the insulating tube 40 in a surface direction. .

  As described above, in the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, the tip of the insulating tube 40 on the side facing the holding body 10 in the surface direction is formed on the back surface S2 of the holding body 10. Since the second recessed portion 12a including the stepped portion engaged with the portion (upper end portion) is formed, the insulating tube 40 with respect to the holding body 10 (particularly, the tip of the insulating tube 40 on the side facing the holding body 10) Part (upper end part)) in the surface direction can be restricted. Therefore, according to the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, the electrode terminal unit 70 is accommodated even when a load in the surface direction acts on the electrode terminal unit 70. It is possible to suppress the stress in the surface direction from being dispersed also at the engagement portion between the insulating tube 40 and the second recess 12a and to concentrate the stress in the surface direction at the joint between the electrode terminal unit 70 and the power receiving electrode 54. It is possible to suppress damage to the joint between the electrode terminal unit 70 and the power receiving electrode 54.

C. Third embodiment:
FIG. 10 is an explanatory diagram schematically showing a cross-sectional configuration of the heating device 100b according to the third embodiment. FIG. 10 shows an XZ cross-sectional configuration of the heating device 100b of the third embodiment at the same position (position X1 in FIG. 2) as FIG. Below, about the structure same as the structure of the heating apparatus 100 of 1st Embodiment mentioned above among the structures of the heating apparatus 100b of 3rd Embodiment, the description is abbreviate | omitted suitably by attaching | subjecting the same code | symbol.

  As shown in FIG. 10, the heating device 100 b of the third embodiment mainly differs from the heating device 100 of the first embodiment in the configuration of the back surface S <b> 2 of the holding body 10. Specifically, in the heating device 100 of the first embodiment, the first recess 11 is formed on the back surface S2 of the holding body 10, but in the heating device 100b of the third embodiment, the back surface S2 of the holding body 10 is formed. The first recess 11 is not formed. In addition, in the heating device 100b of the third embodiment, a plurality of (four) second recesses 12 are formed on the back surface S2 of the holding body 10 as in the heating device 100 of the first embodiment. The second recess 12 is a substantially annular groove (slit) that surrounds the power receiving electrode 54 formed on the back surface S <b> 2 of the holder 10. In each second recess 12, a distal end portion (that is, an upper end portion) of the insulating tube 40 facing the holding body 10 is inserted, and each second recess 12 is inserted into the second recess 12. The upper end portion of the inserted insulating tube 40 is engaged with both the outer peripheral surface OS and the inner peripheral surface IS. Since the insulating tube 40 and the second recess 12 have such a configuration, the surface of the insulating tube 40 (particularly, the upper end portion of the insulating tube 40) with respect to the holding body 10 in the surface direction (a direction perpendicular to the Z-axis direction). Relative movement is restricted. In addition, it can be said that the 2nd recessed part 12 (a part of 2nd recessed part 12) formed in back surface S2 of the holding body 10 is a level | step-difference part engaged with the upper end part of the insulating tube 40 in a surface direction. .

  As described above, in the heating device 100b of the third embodiment, similarly to the heating device 100 of the first embodiment, the tip on the side facing the holding body 10 in the insulating tube 40 in the surface direction is formed on the back surface S2 of the holding body 10. Since the second recessed portion 12 including the stepped portion engaged with the portion (upper end portion) is formed, the insulating tube 40 with respect to the holding body 10 (particularly, the tip of the insulating tube 40 on the side facing the holding body 10) Part (upper end part)) in the surface direction can be restricted. Therefore, according to the heating device 100b of the third embodiment, similarly to the heating device 100 of the first embodiment, the electrode terminal unit 70 is accommodated even when a load in the surface direction acts on the electrode terminal unit 70. It is possible to suppress the stress in the surface direction from being dispersed also in the engagement portion between the insulating tube 40 and the second recess 12 and to concentrate the stress in the surface direction at the joint between the electrode terminal unit 70 and the power receiving electrode 54. It is possible to suppress damage to the joint between the electrode terminal unit 70 and the power receiving electrode 54.

D. Variation:
The technology disclosed in the present specification is not limited to the above-described embodiment, and can be modified into various forms without departing from the gist thereof. For example, the following modifications are possible.

  The structure of the heating apparatus 100 in the said embodiment is an illustration to the last, and can deform | transform variously. For example, in the embodiment described above, is the second recess 12 as the stepped portion engaged with the insulating tube 40 in the surface direction engaged with both the outer peripheral surface OS and the inner peripheral surface IS of the insulating tube 40? (FIG. 7 and FIG. 10), it engages only with the outer peripheral surface OS of the insulating tube 40 (FIG. 9), but the second recess 12 as the stepped portion is engaged only with the inner peripheral surface IS of the insulating tube 40. It may be combined. Further, the stepped portion is not necessarily configured as a concave portion, and may be configured as a convex portion or a stepped portion.

  Moreover, in the said embodiment, although the electrode terminal unit 70 is comprised from three members, the 1st columnar member 71, the 2nd columnar member 72, and the metal strand 73, the electrode terminal unit 70 is 1 It may be composed of one or two members, or may be composed of four or more members.

  Moreover, in the said embodiment, although the lower end part of the electrode terminal unit 70 protrudes outside from the through-hole 22 of the support body 20, and the through-hole 42 of the insulating tube 40, the whole electrode terminal unit 70 is the support body 20. The through holes 22 and the through holes 42 of the insulating tube 40 may be accommodated.

  In the above embodiment, the upper cap member 80 and the lower cap member 90 are accommodated in the through hole 22 of the support body 20, but at least one of the upper cap member 80 and the lower cap member 90 is The support 20 may be arranged outside the through hole 22 instead of inside the through hole 22. Even in such a configuration, the upper cap member 80 and / or the lower cap member 90 may be attached to another part of the support 20 using, for example, an adhesive or a bonding member (for example, the lower surface S4 of the support 20). It is possible to fix to.

  Further, in the above embodiment, the convex portion 84 is formed on the outer peripheral surface of the upper cap member 80, and the convex portion 84 is fitted with the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. However, conversely, a concave portion is formed on the outer peripheral surface of the upper cap member 80, and the concave portion is engaged with a convex portion formed on the inner peripheral surface of the through hole 22 of the support body 20. Good. In this case, the concave portion formed in the upper cap member 80 corresponds to the cap-side concave portion in the claims, and the convex portion formed in the through hole 22 of the support 20 is the support side in the claims. It corresponds to a convex part. Similarly, in the above embodiment, the convex portion 94 is formed on the outer peripheral surface of the lower cap member 90, and the convex portion 94 is formed with the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. On the contrary, a concave portion is formed on the outer peripheral surface of the lower cap member 90, and the concave portion is fitted with a convex portion formed on the inner peripheral surface of the through hole 22 of the support 20. You may do that. Note that the number of convex portions or concave portions formed in each member can be arbitrarily changed. Further, it is not always necessary to form these convex portions or concave portions in each member.

  In the above embodiment, the heating device 100 includes the upper cap member 80 and the lower cap member 90. However, the heating device 100 includes at least one of the upper cap member 80 and the lower cap member 90. You may not. In the above embodiment, the electrode terminal unit 70 is fixed to the lower cap member 90 so as to be restricted from moving in the Z-axis direction with respect to the lower cap member 90 by screwing. Is not limited to screwing, and may be fixed by other means (for example, means using a fixing member). Further, the electrode terminal unit 70 is not necessarily fixed to the lower cap member 90.

  Moreover, the shape and number of each member which comprises the heating apparatus 100 of the said embodiment are an example to the last, and can deform | transform variously. For example, in the above embodiment, the heating device 100 is provided with four combinations of the electrode terminal unit 70, the insulating tube 40 that houses the electrode terminal unit 70, and the power receiving electrode 54 that is joined to the electrode terminal unit 70. However, the number of the combinations provided in the heating device 100 can be arbitrarily set. In the above embodiment, all of the combinations have the same configuration. However, if at least one of the combinations has the configuration of the above embodiment, the remaining combinations have other configurations. Also good.

  Moreover, the heating apparatus 100 of the said embodiment is good also as providing other structural members, such as temperature measuring bodies, such as a thermocouple and a platinum resistor, and a high frequency electrode.

  Moreover, the formation material of each member which comprises the heating apparatus 100 in the said embodiment is an example to the last, and each member may be formed with another material. For example, in the above embodiment, the holding body 10 and the support body 20 may be made of ceramics whose main component is aluminum nitride or alumina, or may be made of other ceramics, or an insulating material other than ceramics. It may be made.

  Moreover, the manufacturing method of the heating apparatus 100 in the said embodiment is an example to the last, and can deform | transform variously.

DESCRIPTION OF SYMBOLS 10: Holding body 11: 1st recessed part 12: 2nd recessed part 20: Support body 22: Through-hole 23: Expanded part 24: Recessed part 30: Joining part 40: Insulating tube 42: Through-hole 50: Resistance heating element 52 : Via conductor 54: Power receiving electrode 56: Metal brazing material 68: Nut 70: Electrode terminal unit 71: 1st columnar member 72: 2nd columnar member 73: Metal strand 79: Male screw 80: Upper cap member 82: Through hole 84: Convex part 90: Lower cap member 92: Through hole 94: Convex part 100: Heating device IS: Inner peripheral surface OS: Outer peripheral surface P1: First part P2: Second part P3: Third Part S1: Holding surface S2: Back surface S3: Upper surface S4: Lower surface

Claims (4)

A plate-shaped holding body that is formed of an insulator and has a substantially planar first surface that is substantially orthogonal to the first direction and a second surface opposite to the first surface;
A tubular support formed of an insulator, joined to the second surface of the holding body, and formed with a first through hole extending in the first direction;
A resistance heating element disposed inside the holding body;
A power receiving electrode disposed at a position overlapping the first through hole of the support body on the second surface of the holding body in the first direction view, and electrically connected to the resistance heating element;
An electrode terminal disposed at least in part in the first through hole of the support and joined to the power receiving electrode via a metal brazing material;
At least a portion of the insulating tube disposed in the first through-hole of the support body, extending in the first direction, accommodating a specific portion that is at least a portion of the electrode terminal, and the specific An insulating tube formed with a second through hole having an inner diameter substantially the same as the maximum outer diameter of the portion;
A heating device for heating an object held on the first surface of the holding body,
A stepped portion is formed on the second surface of the holding body in a second direction perpendicular to the first direction and is engaged with a tip portion of the insulating tube facing the holding body. Being
A heating device characterized by that. The heating device according to claim 1, further comprising:
A cap member supported by the support so that relative movement in the second direction with respect to the support is restricted, and extending in the first direction and substantially the same as the outer diameter of the insulating tube. A cap member formed with a third through hole having an inner diameter of
A portion of the insulating tube is accommodated in the third through hole of the cap member.
A heating device characterized by that. The heating device according to claim 2, wherein
The cap member is disposed in the first through hole of the support;
At least one of a cap side concave portion and a cap side convex portion is formed on the outer peripheral portion of the cap member,
At least one of a support-side convex portion that fits with the cap-side concave portion and a support-side concave portion that fits with the cap-side convex portion is formed on the inner peripheral portion of the first through hole of the support body. Being
A heating device characterized by that. In the heating device according to any one of claims 1 to 3,
The step portion formed on the second surface of the holding body is a part of a recess,
The concave portion is engaged with both the outer peripheral surface and the inner peripheral surface of the distal end portion of the insulating tube facing the holding body in the second direction.
A heating device characterized by that.

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