JP7285154B2 - holding device - Google Patents

Description

The technology disclosed in this specification relates to a holding device that holds an object.

For example, a holding device is used to hold an object (for example, a semiconductor wafer) when manufacturing semiconductors. Also known is a heating device (also called a “susceptor”) that holds an object (eg, semiconductor wafer) and heats it to a predetermined processing temperature (eg, about 400 to 800° C.). A heating apparatus is used as part of a semiconductor manufacturing apparatus such as, for example, a film forming apparatus (CVD film forming apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.).

Generally, the heating device comprises a holder and a support member. The holder has a surface (hereinafter referred to as "holding surface") substantially orthogonal to a predetermined direction (hereinafter referred to as "first direction") and a surface opposite to the holding surface (hereinafter referred to as "back surface"). It is a plate-shaped member having Also, the support member is a tubular member that is joined to the back surface of the holder and has a through hole formed therein that extends in the first direction. A heating resistor is arranged as an internal electrode inside the holder, and a feed electrode (electrode pad) electrically connected to the heating resistor is arranged on the rear surface of the holder. A terminal member is accommodated in the through hole formed in the support member, and the terminal member is joined to the power supply electrode arranged on the back surface of the holder via a metal brazing material as a connection portion. It is When a voltage is applied to the heating resistor through the terminal member and the power supply electrode, the heating resistor generates heat, and the object (eg, semiconductor wafer) held on the holding surface of the holder is heated to 400 to 800° C., for example. heated to some extent.

Conventionally, as a configuration of a heating device, a through hole having an inner diameter substantially equal to the outer diameter of the terminal member is provided at the tip portion of the supporting member on the side facing the holder, and a portion of the terminal member is provided in the through hole. A housed configuration is known (see, for example, US Pat.

JP 2014-165416 A

In the above-described heating device, a through hole having an inner diameter substantially equal to the outer diameter of the terminal member is provided inside the supporting member made of an insulating material, and a portion of the terminal member is accommodated in the through hole. Therefore, the support member ensures insulation between the terminal members. In addition, in the heating device employing the above configuration, damage to the connection portion connecting the terminal member and the power supply electrode is suppressed. That is, in the heating device adopting the above configuration, the portion of the terminal member accommodated in the through hole of the support member is in a direction orthogonal to the first direction with respect to the holder (hereinafter referred to as the "second direction"). ), even if a load acts in the second direction on the terminal member, the stress in the second direction is dispersed in the contact portion between the terminal member and the through hole, It is possible to suppress concentration of the stress in the second direction on the connection portion between the terminal member and the power supply electrode, and it is possible to suppress damage to the connection portion.

However, in such a configuration of the heating device, in order to suppress the movement of the terminal members accommodated in the through holes formed in the distal end portion of the support member in the second direction, the inner diameter of each through hole is reduced. Since it is necessary to make it small (to be approximately the same as the outer diameter of the terminal member), the volume of the tip portion of the support member becomes large, and the amount of heat transferred from the holder to the support member (the amount of heat transfer). becomes large, which is not preferable in terms of heating efficiency. Therefore, it is preferable to reduce the volume of the tip portion of the support member while ensuring insulation between the terminal members. In other words, in the heating device, the support member is preferably tubular with a cavity (receiving space) as large as possible. The heating device further includes an insulating tube fixed to the holder so as to restrict relative movement in the second direction, the insulating tube having a through hole accommodating at least a portion of the insulating tube. is preferred.

On the other hand, the terminal member may have an enlarged diameter portion whose diameter is enlarged in the first direction with respect to the portion having the smallest diameter of the terminal member. When viewed from the first direction, the diameter-enlarged portion has an outer diameter that is approximately the same as the inner diameter of the insulating tube that defines the through-hole. , relative movement of the terminal member in the second direction can be restricted. However, in the configuration in which the terminal member has the enlarged diameter portion, for example, the terminal member after being connected (for example, after brazing) to the power supply electrode in the heating device is placed from the side opposite to the side connected to the power supply electrode. When the insulating tube is inserted, the surface of the insulating tube on the insertion advancing direction side collides with the enlarged diameter portion, or when the through hole formed in the insulating tube is aligned with the enlarged diameter portion, the above-mentioned The connecting portion may be damaged by the load acting on the terminal member in the second direction.

As described above, in the conventional heating device, while suppressing an increase in the amount of heat transfer (amount of heat dissipation) from the holding body to the supporting member, the terminal member having the enlarged diameter portion while ensuring the insulation between the terminal members. There is a problem that it is difficult to suppress damage to the connection portion connecting between the power supply electrode and the power supply electrode.

In addition, such a problem consists of a holding body, an internal electrode disposed inside the holding body, a terminal member having an enlarged diameter portion, and a terminal member joined to one end of the terminal member, and the terminal member and the internal electrode are connected to each other. and an insulating tube having a through hole for accommodating a terminal member, and is a common problem in general holding devices that hold an object on the surface of a holder.

This specification discloses a technology capable of solving the above-described problems.

The technology disclosed in this specification can be implemented, for example, in the following forms.

(1) The holding device disclosed herein includes a first surface made of an insulator and substantially orthogonal to a first direction, a second surface opposite to the first surface, and a tubular support member made of an insulator and joined to the second surface of the holder and formed with a housing space extending in the first direction; the holder an internal electrode disposed inside the support member; a terminal member at least partially disposed within the housing space of the support member, electrically connected to the internal electrode and extending in the first direction; a connecting portion that is joined to one end and electrically connects the terminal member and the internal electrode; an insulating tube extending in the direction of and formed with a through hole for accommodating at least a portion of the terminal member, and having a connection surface connecting the inner peripheral surface and the outer peripheral surface of the insulating tube on the side of the second surface; and a holding device for holding an object held on the first surface of the holding body, wherein the terminal member has an enlarged diameter with respect to a portion of the terminal member having the smallest diameter. and a first enlarged diameter portion having a diameter smaller than the outer diameter of the enlarged diameter portion and connected to the enlarged diameter portion on the opposite side of the enlarged diameter portion to the second surface side. a base portion, wherein the enlarged diameter portion is connected to a third surface on the second surface side of the holding body, and an outer periphery substantially parallel to the first direction and connected to the third surface; and a fourth surface that connects the outer peripheral surface and the first base, and when viewed in the first direction, the outer diameter of the outer peripheral surface of the enlarged diameter portion is equal to that of the insulating tube. A first inclined surface formed on the fourth surface of the enlarged diameter portion and a second inclined surface formed on the connection surface of the insulating tube, the inner diameter of which is substantially the same as the inner diameter of the formed through hole. and in at least one cross section including the central axis of the terminal member and substantially parallel to the first direction, the first inclined surface The diameter of the enlarged diameter portion formed in the portion including the outer edge of the surface and at the position of the first inclined surface decreases in the first direction toward the first base portion, is formed in a portion including the inner edge of the connection surface, and the diameter of the through hole formed in the insulating tube at the position of the second inclined surface It becomes smaller toward the inner peripheral surface of the pipe.

In this holding device, at least one of the first inclined surface formed on the fourth surface of the enlarged diameter portion of the terminal member and the second inclined surface formed on the connecting surface of the insulating tube is have. Therefore, after the terminal member and the internal electrode are connected (for example, after brazing) in the holding device, the terminal member having the enlarged diameter portion can be smoothly inserted into the insulating tube. Further, when the terminal member is inserted through the insulating tube from the side opposite to the side connected to the internal electrode in the terminal member, the surface of the insulating tube facing the second surface of the holding body direction side surface, connecting surface) and the surface (fourth surface) opposite to the surface facing the second surface of the holding body in the enlarged diameter portion (fourth surface). When aligning the through hole with the expanded diameter portion, it is possible to reduce the load acting on the terminal member in the second direction. Therefore, in this holding device, it is possible to suppress damage to the connecting portion that connects between the terminal member having the enlarged diameter portion and the internal electrode. Therefore, according to the present holding device, it is possible to suppress an increase in the amount of heat transferred from the holding body to the support member (amount of heat loss), and to prevent damage to the connection portion while ensuring insulation between the terminal members. can be suppressed.

(2) In the holding device, the enlarged diameter portion of the terminal member may have both the first inclined surface and the insulating tube may have the second inclined surface. This holding device has both the first inclined surface formed on the enlarged diameter portion of the terminal member and the second inclined surface formed on the insulating tube. Therefore, after the holding device is brazed, the terminal member having the enlarged diameter portion can be smoothly inserted into the insulating tube. Therefore, according to the present holding device, it is possible to more effectively prevent the connecting portion from being damaged.

(3) In the above holding device, the terminal member further includes a first crimped portion and a second crimped portion located on the opposite side of the first crimped portion to the second surface side. and a connection terminal portion that electrically connects the first crimped portion and the second crimped portion, one end of the connection terminal portion being connected to the first crimped portion, The other end of the connection terminal portion has a diameter smaller than the outer diameter of the connection terminal portion connected to the second crimped portion, and the second crimped portion. a second base connected to the second crimped portion on a side opposite to the second surface side of the portion, wherein the second crimped portion is connected to the second surface of the retainer; a fifth surface on the side, a side surface connected to the fifth surface and substantially parallel to the first direction, and a sixth surface connecting the side surface and the second base. , the sixth surface of the second crimped portion includes the outer edge of the sixth surface in at least one cross section that includes the central axis of the terminal member and is substantially parallel to the first direction. a third inclined surface formed in the portion, wherein the diameter of the second crimped portion at the position of the third inclined surface decreases in the first direction toward the second base portion; A configuration having a third inclined surface may be employed. In the holding device, the terminal member further includes the first crimped portion, the second crimped portion, and a connection terminal portion that electrically connects the first crimped portion and the second crimped portion. have. In such a configuration, when the terminal member is inserted into the insulating tube, the surface of the insulating tube facing the second surface of the holding body (the surface on the insertion advancing direction side, the connection surface) is the second crimped portion. It is possible to reduce the collision between the surface (sixth surface) opposite to the surface facing the second surface of the holder in the portion. Therefore, it is possible to suppress damage to the connecting portion that connects between the terminal member having the second crimped portion and the internal electrode. Therefore, according to the present holding device, it is possible to more effectively prevent the connecting portion from being damaged.

Note that the technology disclosed in this specification can be implemented in various forms, for example, in the form of a heating device, an electrostatic chuck, a holding device, a manufacturing method thereof, and the like. be.

1 is a perspective view schematically showing an external configuration of a heating device 100 according to a first embodiment; FIG. It is an explanatory view showing roughly XZ section composition of heating device 100 in a 1st embodiment. It is an explanatory view showing roughly XY section composition of heating device 100 in a 1st embodiment. FIG. 3 is an explanatory view showing an enlarged XZ cross-sectional configuration of a portion (X1 section in FIG. 2) of the heating device 100 in the first embodiment; FIG. 3 is an explanatory view showing an enlarged XZ cross-sectional configuration of a portion (X2 section in FIG. 2) of the heating device 100 in the first embodiment;

A. First embodiment:
A-1. Configuration of heating device 100:
FIG. 1 is a perspective view schematically showing the external configuration of a heating device 100 according to the present embodiment, and FIG. 2 is an explanatory view schematically showing the XZ sectional configuration of the heating device 100 according to the present embodiment. 3 is an explanatory view schematically showing the XY cross-sectional configuration of the heating device 100 in this embodiment. FIG. 4 is an explanatory view showing an enlarged XZ cross-sectional configuration of a part (X1 part in FIG. 2) of the heating device 100 in this embodiment, and FIG. 5 is a part of the heating device 100 in this embodiment ( FIG. 3 is an explanatory view showing an enlarged XZ cross-sectional configuration of (X2 section of FIG. 2). Each figure shows mutually orthogonal XYZ axes for specifying directions. In this specification, for the sake of convenience, the positive direction of the Z-axis is referred to as the upward direction, and the negative direction of the Z-axis is referred to as the downward direction. may Also, in this specification, the direction perpendicular to the Z-axis direction is referred to as the planar direction. The heating device 100 corresponds to a holding device in claims. Also, the Z-axis direction corresponds to the first direction in the claims, and the surface direction corresponds to the second direction in the claims.

The heating device 100 is a device that holds an object (eg, a semiconductor wafer W) and heats it to a predetermined processing temperature (eg, about 400 to 800° C.), and is also called a susceptor. The heating apparatus 100 is used as part of a semiconductor manufacturing apparatus such as, for example, a film forming apparatus (CVD film forming apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.).

As shown in FIGS. 1 and 2, the heating device 100 includes a holder 10 and a columnar support 20. As shown in FIG.

The holder 10 has a surface S1 (hereinafter referred to as "holding surface") substantially perpendicular to the Z-axis direction (vertical direction) and a surface opposite to the holding surface S1 (hereinafter referred to as "back surface S2"). It is a substantially disc-shaped member, and is made of an insulator such as ceramics containing, for example, AlN (aluminum nitride) or Al ₂ O ₃ (alumina) as a main component. In this specification, the main component means the component with the highest content ratio (weight ratio). The diameter of the holder 10 is, for example, about 100 mm or more and 500 mm or less, and the thickness (dimension in the Z-axis direction) of the holder 10 is, for example, about 3 mm or more and 20 mm or less. The Z-axis direction (vertical direction) corresponds to the first direction in the claims, the holding surface S1 of the holding body 10 corresponds to the first surface in the claims, and the back surface S2 of the holding body 10 corresponds to the first surface in the claims. corresponds to the second surface in the claims.

The columnar support 20 is a substantially cylindrical member extending _{substantially} in the Z direction, and, like the holder 10, is made of an insulator such as ceramics containing AlN or _Al2O3 as a main component. The outer diameter of the columnar support 20 is, for example, about 30 mm or more and 90 mm or less, and the height (dimension in the Z-axis direction) of the columnar support 20 is, for example, about 100 mm or more and 300 mm or less. As shown in FIG. 2, the columnar support 20 is formed with a housing space 22 extending in the Z-axis direction from the upper surface S3 to the lower surface S4 of the columnar support 20. As shown in FIG. A cross section (XY cross section) of the accommodation space 22 perpendicular to the Z-axis direction has a substantially circular shape. The columnar support 20 corresponds to a support member in the claims.

As shown in FIG. 2, the holder 10 and the columnar support 20 are arranged such that the back surface S2 of the holder 10 and the upper surface S3 of the columnar support 20 face each other in the Z-axis direction. The columnar support 20 is joined near the center of the rear surface S2 of the holder 10 via a joint 30 made of a known joint material.

As shown in FIGS. 2 and 3, inside the holder 10, two heater electrodes 50, which are heating resistors for heating the holder 10, are arranged. Each heater electrode 50 is made of a conductive material such as tungsten or molybdenum. In this embodiment, each heater electrode 50 constitutes a linear pattern extending in a substantially concentric semicircular shape when viewed in the Z-axis direction. The heater electrode 50 corresponds to an internal electrode in the claims.

Further, as shown in FIG. 2, a plurality (four in this embodiment) of the rear surface S2 of the holding body 10 overlaps the accommodation space 22 formed in the columnar support 20 when viewed in the Z-axis direction. A first recess 12 is formed. In this embodiment, the shape of each first concave portion 12 as viewed in the Z-axis direction is substantially circular. A power supply electrode (electrode pad) 54 for supplying power to the heater electrode 50 is provided in each first recess 12 . That is, in the present embodiment, a plurality of (four in the present embodiment) feeding electrodes 54 are provided on the rear surface S2 of the holder 10 at positions overlapping the housing spaces 22 formed in the columnar support 20 as viewed in the Z-axis direction. are placed. In this embodiment, each feeding electrode 54 has a substantially circular shape when viewed in the Z-axis direction, and is made of a material containing tungsten (for example, a mixed material of tungsten and aluminum nitride).

As shown in FIGS. 2 and 3, one end of each heater electrode 50 is arranged near the center of the holder 10 when viewed in the Z-axis direction, and the one end is provided with the holder 10. are connected to the upper ends of the via conductors 52 arranged near the center of the . Further, as shown in FIG. 2 , the lower end of the via conductor 52 connected to the one end of each heater electrode 50 is connected to the feed electrode 54 arranged on the back surface S2 of the holder 10 . The other end of each heater electrode 50 is arranged near the outer periphery of the holder 10. Although not shown, the other end of each heater electrode 50 is connected to the via conductor 52 or the driver electrode arranged on the holder 10. (not shown) to the feed electrode 54 arranged on the rear surface S2 of the holder 10 . As a result, each heater electrode 50 is electrically connected to the power supply electrode 54 through the via conductor 52 and the like.

As shown in FIG. 2 , a plurality of (four in this embodiment) electrode terminal units 70 are housed in the housing space 22 formed in the columnar support 20 . Each electrode terminal unit 70 is composed of a first columnar member 71 , a second columnar member 72 , a third columnar member 73 , and a stranded metal wire 74 . The electrode terminal unit 70 corresponds to a terminal member in claims. The first columnar member 71 corresponds to the first base in the claims, the second columnar member 72 corresponds to the second base in the claims, and the twisted metal wire 74 is It corresponds to the connection terminal portion in the claims.

The first columnar member 71 that constitutes the electrode terminal unit 70 is a substantially cylindrical conductive member arranged on the holding body 10 side (that is, on the upper side) with respect to the stranded metal wire 74, and is made of, for example, nickel (Ni). containing material (for example, pure nickel or an alloy containing nickel (for example, Kovar)). The thermal expansion coefficient of the material forming the first columnar member 71 is, for example, 5×10 ⁻⁶ /° C. or more and 18×10 ⁻⁶ /° C. or less. As shown in FIGS. 2 and 4, the first columnar member 71 is continuous with the enlarged diameter portion 75 near the end (that is, the upper end) on the holding body 10 side. That is, the first columnar member 71 is connected to the enlarged diameter portion 75 on the opposite side of the enlarged diameter portion 75 from the rear surface S2 side of the holder 10 . The enlarged-diameter portion 75 has a diameter larger than that of the electrode terminal unit 70 having the smallest diameter (in the present embodiment, the first columnar member 71, the second columnar member 72 and the third columnar member 73). is the enlarged part. The configuration of the enlarged diameter portion 75 will be described in detail later. A diameter Dt<b>1 of the first columnar member 71 is smaller than the outer diameter DW of the enlarged diameter portion 75 . A diameter Dt1 of the first columnar member 71 is, for example, 1 mm or more and 5 mm or less. As shown in FIG. 2 , the other (lower) end of the first columnar member 71 is joined to the stranded metal wire 74 by an upper crimped portion 76 . The third columnar member 73 is a substantially columnar conductive member arranged on the holding body 10 side (that is, on the upper side) with respect to the enlarged diameter portion 75, and is made of a material containing nickel (Ni) (for example, pure nickel or pure nickel). It is made of an alloy containing nickel (for example, Kovar). An upper end portion of the third columnar member 73 is joined to the power supply electrode 54 via the connection portion 65 .

As shown in FIG. 4 , in the present embodiment, the connecting portion 65 is composed of a cushioning member 60 , a terminal-side brazing portion 81 and an electrode-side brazing portion 82 . The buffer member 60 is, for example, a substantially circular plate-like member as viewed in the Z-axis direction, and is made of a material containing tungsten (for example, pure tungsten or an alloy containing tungsten). The buffer member 60 is a member that functions to reduce the difference in thermal expansion between the first columnar member 71 and the power supply electrode 54 in the electrode terminal unit 70 . Therefore, the coefficient of thermal expansion of the material forming the buffer member 60 is smaller than the coefficient of thermal expansion of the material forming the first columnar member 71 . The thermal expansion coefficient of the material forming the buffer member 60 is, for example, 4×10 ⁻⁶ /° C. or more and 6×10 ⁻⁶ /° C. or less. Also, the difference between the coefficient of thermal expansion of the material forming the buffer member 60 and the coefficient of thermal expansion of the material forming the first columnar member 71 is, for example, 1×10 ⁻⁶ /° C. or more, 12×10 ⁻⁶ /° C. It is below. The diameter of the cushioning member 60 is, for example, 4.5 mm to 10.0 mm. The thickness of the cushioning member 60 is, for example, 0.5 mm or more and 3 mm or less.

As shown in FIG. 4, the lower surface (terminal member side end surface) of the buffer member 60 is joined to the electrode terminal unit 70 (specifically, the upper end surface of the third columnar member 73) by the terminal side brazing portion 81. It is The upper surface (electrode-side end surface) of the buffer member 60 is joined (brazed) to the lower surface (exposed surface) of the power supply electrode 54 by the electrode-side brazing portion 82 . The terminal-side brazing portion 81 and the electrode-side brazing portion 82 are made of, for example, Ni-based (Ni--Cr-based alloy, etc.), Au-based (pure Au, Au--Ni-based alloy, etc.), or Ag-based (pure Ag, etc.). It is brazing material.

The second columnar member 72 that constitutes the electrode terminal unit 70 is a substantially cylindrical conductive member that is arranged on the side (i.e., the lower side) away from the holder 10 with respect to the stranded metal wire 74. For example, It is made of a material containing nickel (Ni) (for example, pure nickel or an alloy containing nickel (for example, Kovar)). The coefficient of thermal expansion of the material forming the second columnar member 72 is, for example, 5×10 ⁻⁶ /° C. or more and 18×10 ⁻⁶ /° C. or less, similar to the coefficient of thermal expansion of the material forming the first columnar member 71 . is. As shown in FIG. 2 , the end (that is, the upper end) of the second columnar member 72 on the side of the holder 10 is joined to the twisted metal wire 74 by a lower crimped portion 77 . In other words, the lower crimped portion 77 is located on the opposite side of the upper crimped portion 76 from the rear surface S2 of the holder 10, and the second columnar member 72 is located at the end of the holder 10 side. It is continuous with the lower crimped portion 77 in the vicinity of the portion (that is, the upper end portion). That is, the second columnar member 72 is continuous with the lower crimped portion 77 on the side of the lower crimped portion 77 opposite to the back surface S2 side of the holder 10 . The lower crimped portion 77 has the smallest diameter portion (the first columnar member 71, the second columnar member 72 and the third columnar member 73 in this embodiment) of the electrode terminal unit 70. This is the part whose diameter is enlarged. The configuration of the lower crimping portion 77 will be detailed later. The diameter of the second columnar member 72 is smaller than the outer diameter of the lower crimped portion 77 . The diameter of the second columnar member 72 is, for example, 1 mm or more and 5 mm or less. In this embodiment, the first columnar member 71, the second columnar member 72, and the third columnar member 73 have the same diameter. In addition, as shown in FIG. 2 , the other (lower) end of the second columnar member 72 protrudes downward from the housing space 22 of the columnar support 20 .

The stranded metal wires 74 constituting the electrode terminal unit 70 are stranded wires having a certain degree of flexibility, and are made of, for example, a material containing nickel (Ni) (for example, pure nickel or an alloy containing nickel (for example, Kovar)). ing. As described above, the stranded metal wire 74 is connected to the first columnar member 71 (specifically, the upper crimped portion 76) and the second columnar member 72 (specifically, the lower crimped portion 77). ing. That is, the stranded metal wire 74 electrically connects the upper crimped portion 76 and the lower crimped portion 77 . The diameter of the stranded metal wire 74 is, for example, 1 mm or more and 3 mm or less. The length of the stranded metal wire 74 (specifically, the length between the lower end of the upper crimped portion 76 and the upper end of the lower crimped portion 77 of the stranded metal wire 74) is, for example, 5 mm or more and 30 mm or less. is. During use of the heating device 100 , the temperature of the holder 10 increases due to the heat generated by the heater electrode 50 . A difference in thermal expansion may occur between 71 and a second columnar member 72 relatively far from the holder 10 . When such a thermal expansion difference occurs, stress is generated in the electrode terminal unit 70 . Since the metal twisted wire 74 that constitutes the electrode terminal unit 70 has a certain degree of flexibility, the stress generated in the electrode terminal unit 70 can be absorbed and relieved.

A lower end portion of the second columnar member 72 constituting the electrode terminal unit 70 is connected to a power source (not shown) directly or via a connector (not shown) or the like. When a voltage is applied from a power source to each heater electrode 50 through each electrode terminal unit 70, each power supply electrode 54, each via conductor 52, etc., each heater electrode 50 generates heat, and a The held object (eg, semiconductor wafer W) is heated to a predetermined temperature (eg, approximately 400 to 800.degree. C.).

As shown in FIGS. 2, 4 and 5, a plurality of (four in this embodiment) insulating tubes 40 are accommodated within the accommodating space 22 formed in the columnar support 20 . Each insulating tube 40 is a substantially cylindrical member extending in the Z-axis direction, and is made of an insulator such as ceramics whose main component is AlN (aluminum nitride) or Al ₂ O ₃ (alumina). As shown in FIGS. 4 and 5, each insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction. A cross section (XY cross section) of the through-hole 42 perpendicular to the Z-axis direction has a substantially circular shape. The thickness WI (the length in the X-axis direction when viewed in the Y-axis direction) of the insulating tube 40 is, for example, 0.5 mm or more and 3 mm or less. Also, the inner diameter DI of the through hole 42 is, for example, 3 mm or more and 10 mm or less. The upper end surface USi of the insulating tube 40 is joined to the back surface S2 of the holder 10 . The structure of the upper end of the insulating tube 40 will be detailed later.

As shown in FIG. 2, on the back surface S2 of the holder 10, a plurality of (four in this embodiment) second electrodes are disposed at a position overlapping the housing space 22 formed in the columnar support 20 as viewed in the Z-axis direction. is formed. In this embodiment, the shape of each of the second recesses 14 when viewed in the Z-axis direction is substantially circular, like the first recesses 12 . The second recess 14 is shallower than the first recess 12 and is continuous with the first recess 12 . As a result, each of the second recesses 14 is integrated with the first recesses 12 and has two levels of depth (a deep portion (the first recesses 12) and a periphery of the portion). It constitutes a recess formed by a surrounding shallow portion (second recess 14). Into each of the second recesses 14 is inserted the tip (that is, the upper end) of the insulating tube 40 on the side facing the holder 10 . The second recess 14 is engaged with the outer peripheral surface OSi at the upper end of the insulating tube 40 inserted into the second recess 14 . Since the insulating tube 40 and the second concave portion 14 are configured as described above, the insulating tube 40 (in particular, the upper end portion of the insulating tube 40) with respect to the holding body 10 does not move in the plane direction (direction perpendicular to the Z-axis direction). Relative movement is restricted. The second recess 14 (part of the second recess 14) formed in the back surface S2 of the holder 10 can be said to be a stepped portion that engages with the upper end portion of the insulating tube 40 in the surface direction. .

As shown in FIGS. 2 and 4 , electrode terminal units 70 are accommodated in through holes 42 formed in each insulating tube 40 . More specifically, a portion of the electrode terminal unit 70 (hereinafter referred to as “first portion P1”) is accommodated in the through hole 42 formed in each insulating tube 40 . In this embodiment, the first portion P1 of the electrode terminal unit 70 is the portion of the electrode terminal unit 70 excluding the lower end portion of the second columnar member 72 . As shown in FIGS. 2, 4 and 5, the inner diameter DI of the through hole 42 formed in the insulating tube 40 is equal to the maximum outer diameter of the first portion P1 of the electrode terminal unit 70 (in this embodiment, the diameter is increased). It is substantially the same as the maximum outer diameter DW of the portion 75 and the maximum outer diameter DS of the lower crimped portion 77). Therefore, relative movement of the electrode terminal unit 70 with respect to the insulating tube 40 in the plane direction (direction orthogonal to the Z-axis direction) is restricted. The first portion P1 of the electrode terminal unit 70 corresponds to at least part of the terminal member in the claims.

A-2. Detailed configuration of the upper end of the insulating tube 40:
The configuration of the upper end portion of the insulating tube 40 will be described in more detail. FIG. 4 is a cross section including the central axis of the electrode terminal unit 70 and parallel to the Z-axis direction. In the present embodiment, the following upper end portion of the insulating tube 40, the enlarged diameter portion 75 and the lower crimped portion 77 are observed in all cross sections including the central axis of the electrode terminal unit 70 and substantially parallel to the Z-axis direction. Each configuration is adopted.

As shown in FIG. 4, the insulating tube 40 has an inner peripheral surface ISi and an outer peripheral surface OSi substantially parallel to the Z-axis direction and an inner peripheral surface ISi at its upper end (that is, on the side of the back surface S2 of the holder 10). It has a connection surface CSi that connects with the outer peripheral surface OSi. The connection surface CSi corresponds to the connection surface in the claims.

A connection surface CSi of the insulating tube 40 is composed of an upper end surface USi and a chamfered portion SSi. In other words, the chamfered portion SSi is formed on the connection surface CSi. The upper end surface USi is a surface substantially parallel to the surface direction, and the outer edge of the upper end surface USi is connected to the outer peripheral surface OSi. Also, the upper end surface USi is joined to the bottom surface of the second recess 14 . The chamfered portion SSi is a surface inclined at an inclination angle θi (the included angle formed by the upper end surface USi and the chamfered portion SSi) with respect to the upper end surface USi. connected to That is, the chamfered portion SSi is formed in a portion including the inner edge of the connection surface CSi. Also, the diameter Di of the through hole 42 formed in the insulating tube 40 at the position of the chamfered portion SSi decreases toward the inner peripheral surface ISi in the Z-axis direction. The connection surface CSi corresponds to the connection surface in the claims, and the chamfered portion SSi corresponds to the second inclined surface in the claims.

The width Wi of the upper end surface USi at the connection surface CSi of the insulating tube 40 (the length in the X-axis direction of the upper end surface USi when viewed in the Y-axis direction) is From the viewpoint of ensuring a sufficient contact area, it is preferably, for example, 0.25 mm or more (1/2 or more of the thickness WI of the insulating tube 40 in the X-axis direction when viewed in the Y-axis direction). The included angle (tilt angle θi) formed by the upper end surface USi and the chamfered portion SSi is, for example, 40° or more from the viewpoint of suppressing damage to the connecting portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted. is preferred. Also, from the viewpoint of suppressing damage to the connection portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted, the inclination angle θi is preferably 80° or less, for example.

A-3. Detailed configuration of the enlarged diameter portion 75:
The enlarged diameter portion 75 of the electrode terminal unit 70 will be described in more detail. As described above, the outer diameter DW of the enlarged diameter portion 75 is larger than the diameter Dt1 of the first columnar member 71 . Further, the outer diameter DW of the expanded diameter portion 75 (specifically, the outer diameter DW on the outer peripheral surface OSw described later) is substantially the same as the inner diameter DI of the through hole 42 formed in the insulating tube 40 . The outer diameter DW of the enlarged diameter portion 75 is, for example, 3 mm or more and 8 mm or less. Also, the length TW of the expanded diameter portion 75 in the Z-axis direction is, for example, 2 mm or more and 30 mm or less.

As shown in FIG. 4, the enlarged diameter portion 75 has an upper end surface USw, an outer peripheral surface OSw, and a connection surface CSw. The upper end surface USw is a surface of the enlarged diameter portion 75 located on the rear surface S2 side of the holder 10 . The upper end surface USw is a surface parallel to the plane direction, and the inner edge of the upper end surface USw is connected to the outer peripheral surface TS3 of the third columnar member 73 . The outer peripheral surface OSw is a surface substantially parallel to the Z-axis direction, and the upper end of the outer peripheral surface OSw is connected to the upper end surface USw. The connection surface CSw is composed of a lower end surface LSw and a chamfered portion SSw. In other words, the chamfered portion SSw is formed on the connection surface CSw. The lower end surface LSw is a surface substantially parallel to the surface direction, and the outer edge of the lower end surface LSw is connected to the chamfered portion SSw, and the inner edge of the lower end surface LSw is connected to the outer peripheral surface TS1 of the first columnar member 71. . The chamfered portion SSw is a surface that is inclined at an inclination angle θw (the included angle formed by the lower end surface LSw and the chamfered portion SSw) relative to the lower end surface LSw, and the inner edge of the chamfered portion SSw is connected to the lower end surface LSw. In addition, the outer edge of the chamfered portion SSw is connected to the outer peripheral surface OSw. That is, the chamfered portion SSw is formed in a portion including the outer edge of the connection surface CSw. Also, the diameter Dw of the enlarged diameter portion 75 at the position of the chamfered portion SSw decreases toward the first columnar member 71 in the Z-axis direction. As described above, the connection surface CSw can be said to be a surface that connects the outer peripheral surface OSw and the first columnar member 71 . Note that the upper end surface USw corresponds to the third surface in the claims. The connection surface CSw corresponds to the fourth surface in the claims, and the chamfered portion SSw corresponds to the first inclined surface in the claims.

The width Ww of the lower end surface LSw of the connection surface CSw of the enlarged diameter portion 75 (the length in the X-axis direction of the lower end surface LSw when viewed in the Y-axis direction) is, for example, 0.5 mm or less (the connection surface CSw when viewed in the Y-axis direction). 1/2 or less of the length WW in the X-axis direction). In the method of manufacturing the heating device 100 described later, when the first columnar member 71 (electrode terminal unit 70) is inserted into the through hole 42 formed in the insulating tube 40, the upper end surface USi of the insulating tube 40 may collide. This is from the viewpoint of reducing the area of the end surface LSw. The included angle (tilt angle θw) formed by the lower end surface LSw and the chamfered portion SSw is, for example, 40° or more from the viewpoint of suppressing damage to the connecting portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted. is preferred. In addition, from the viewpoint of suppressing damage to the connection portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted, the inclination angle θw is preferably, for example, 80° or less.

In this embodiment, the inclination angle θi at the chamfered portion SSi of the insulating tube 40 and the inclination angle θw at the chamfered portion SSw of the enlarged diameter portion 75 are the same angle. As the value of the inclination angle θi and the value of the inclination angle θw are closer to each other, the first columnar member 71 (the electrode terminal unit 70 ) is formed in the through hole 42 formed in the insulating tube 40 in the manufacturing method of the heating device 100 described later. can be inserted in a state in which the longitudinal direction of the insulating tube 40 and the longitudinal direction of the first columnar member 71 are maintained substantially parallel, and the application of stress to the connection portion 65 can be suppressed. . Moreover, the area of the chamfered portion SSw in the enlarged diameter portion 75 is preferably larger than the area of the chamfered portion SSi in the insulating tube 40 from the viewpoint of suppressing damage to the connecting portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted. . Further, the sum of the width Wi of the upper end surface USi at the connecting surface CSi of the insulating tube 40 and the width Ww of the lower end surface LSw at the connecting surface CSw of the enlarged diameter portion 75 is the thickness WI of the insulating tube 40 and the enlarged diameter portion 75 is preferably 1/2 or less of the total length WW of the connection surface CSw in the X-axis direction in .

A-4. Detailed configuration of the lower crimping portion 77:
The lower crimped portion 77 of the electrode terminal unit 70 will be described in more detail. As described above, the outer diameter DS of the lower crimped portion 77 is larger than the diameter Dt2 of the second columnar member 72 . The outer diameter DS of the lower crimped portion 77 is, for example, 2 mm or more and 6 mm or less.

As shown in FIG. 5, the lower crimped portion 77 has an upper end surface USs, an outer peripheral surface OSs, and a connection surface CSs. The upper end surface USs is the surface of the lower crimped portion 77 located on the back surface S2 side of the holder 10 . The upper end surface USs is a surface substantially parallel to the surface direction, and has a substantially annular shape centering on the center point of the second columnar member 72, for example, when viewed in the Z-axis direction. The outer peripheral surface OSs is a surface substantially parallel to the Z-axis direction, and the upper end of the outer peripheral surface OSs is connected to the upper end surface USs. The connection surface CSs is composed of a lower end surface LSs and a chamfered portion SSs. In other words, the chamfered portion SSs is formed on the connection surface CSs. The lower end surface LSs is a surface substantially parallel to the surface direction, and the outer edge of the lower end surface LSs is connected to the chamfered portion SSs, and the inner edge of the lower end surface LSs is connected to the outer peripheral surface TS2 of the second columnar member 72. . The chamfered portion SSs is a surface that is inclined at an inclination angle θs (the included angle formed by the lower end surface LSs and the chamfered portion SSs) with respect to the lower end surface LSs, and the inner edge of the chamfered portion SSs is connected to the lower end surface LSs. In addition, the outer edge of the chamfered portion SSs is connected to the outer peripheral surface OSs. That is, the chamfered portion SSs is formed in a portion including the outer edge of the connection surface CSs. Also, the diameter Ds of the lower crimped portion 77 at the position of the chamfered portion SSs decreases toward the second columnar member 72 in the Z-axis direction. As described above, the connection surface CSs can be said to be a surface that connects the outer peripheral surface OSs and the second columnar member 72 . The upper end surface USs corresponds to the fifth surface in the claims, and the outer peripheral surface OSs corresponds to the side surface in the claims. The connection surface CSs corresponds to the sixth surface in the claims, and the chamfered portion SSs corresponds to the third inclined surface in the claims.

The width Ws of the lower end surface LSs of the connection surface CSs of the lower crimped portion 77 (the length in the X-axis direction of the lower end surface LSs when viewed in the Y-axis direction) is 0.5 mm or less (the width of the connection surface CSs when viewed in the Y-axis direction). 1/2 or less of the length WS in the X-axis direction). In the method of manufacturing the heating device 100 described later, when the second columnar member 72 (the electrode terminal unit 70) is inserted into the through hole 42 formed in the insulating tube 40, the bottom surface of the insulating tube 40 may collide with the upper end surface USi. This is from the viewpoint of reducing the area of the end surface LSs. The included angle (tilt angle θs) formed by the lower end surface LSs and the chamfered portion SSs is, for example, 40° or more from the viewpoint of suppressing damage to the connecting portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted. is preferred. In addition, from the viewpoint of suppressing damage to the connection portion 65 and the insulating tube 40 when the electrode terminal unit 70 is inserted, the inclination angle θs is preferably 80° or less, for example.

In this embodiment, the inclination angle θi at the chamfered portion SSi of the insulating tube 40 and the inclination angle θs at the chamfered portion SSs of the lower crimped portion 77 are the same angle. As the value of the inclination angle θi and the value of the inclination angle θs are closer to each other, the second columnar member 72 (electrode terminal unit 70) is formed in the through hole 42 formed in the insulating tube 40 in the manufacturing method of the heating device 100 described later. can be inserted in a state in which the longitudinal direction of the insulating tube 40 and the longitudinal direction of the second columnar member 72 are maintained substantially parallel, and the application of stress to the connecting portion 65 can be suppressed. . Further, the sum of the width Wi of the upper end surface USi on the connecting surface CSi of the insulating tube 40 and the width Ws of the lower end surface LSs on the connecting surface CSs of the lower crimped portion 77 is the thickness WI of the insulating tube 40 and the lower crimped portion. It is preferably 1/2 or less of the total length WS of the connection surface CSs in the X-axis direction in the portion 77 .

A-5. Manufacturing method of heating device 100:
A method for manufacturing the heating device 100 of the present embodiment is, for example, as follows. First, the holder 10 and the columnar support 20 are produced.

A method for manufacturing the holder 10 is, for example, as follows. First, to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide (Y ₂ O ₃ ) powder, 20 parts by weight of an acrylic binder, and appropriate amounts of a dispersant and a plasticizer, an organic solvent such as toluene is added. A solvent is added and mixed in a ball mill to prepare a green sheet slurry. This green sheet slurry is formed into a sheet by a casting apparatus and then dried to produce a plurality of green sheets. The green sheet is preliminarily provided with via holes, first concave portions 12 and second concave portions 14, which will be described later.

Alternatively, a metallized paste is prepared by adding conductive powder such as tungsten or molybdenum to a mixture of aluminum nitride powder, an acrylic binder, and an organic solvent such as terpineol and kneading the mixture. By printing this metallizing paste using, for example, a screen printer, an unsintered conductor layer that will later become the heater electrode 50, the power supply electrode 54, and the like is formed on a specific green sheet. In addition, by printing in a state in which via holes are provided in advance in the green sheet, an unsintered conductor portion that becomes the via conductor 52 later is formed.

Next, a plurality (for example, 20) of these green sheets are thermocompressed, and the periphery is cut as necessary to produce a green sheet laminate. This green sheet laminate is cut by machining to produce a substantially disk-shaped molded body, the molded body is degreased, and the degreased body is sintered to produce a sintered body. The surface of this sintered body is polished. The holder 10 is produced by the above steps.

Also, a method for producing the columnar support 20, for example, is as follows. First, an organic solvent such as methanol is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide powder, 3 parts by weight of a PVA binder, and appropriate amounts of a dispersant and a plasticizer, followed by a ball mill. Mix to obtain a slurry. This slurry is granulated with a spray dryer to produce a raw material powder. Next, the raw material powder is filled into a rubber mold in which a core corresponding to the housing space 22 is arranged, and is subjected to cold isostatic pressing to obtain a compact. The molded body obtained is degreased, and the degreased body is fired. Through the steps described above, the columnar support 20 is manufactured.

Next, the holder 10 and the columnar support 20 are joined together. After the back surface S2 of the holder 10 and the upper surface S3 of the columnar support 20 are subjected to lapping as necessary, at least one of the rear surface S2 of the holder 10 and the upper surface S3 of the columnar support 20 is coated with, for example, a rare earth or organic compound. After uniformly applying a known bonding agent made into a paste by mixing a solvent or the like, it is degreased. Next, the rear surface S2 of the holder 10 and the upper surface S3 of the columnar support 20 are placed on top of each other, and the holder 10 and the columnar support 20 are joined together by normal pressure firing while applying a load.

After the holder 10 and the columnar support 20 are joined together, each cushioning member 60 is inserted into the housing space 22, and the electrode-side end surface of each cushioning member 60 is attached to the exposed surface of each power supply electrode 54 with brazing material (for example, brazing material). The electrode-side brazing portion 82 is formed by brazing using a Ni-based, Au-based, or Ag-based brazing material. Also, each electrode terminal unit 70 is inserted into the housing space 22, and the buffer member side end surface of each electrode terminal unit 70 (specifically, the third columnar member 73) is aligned with the terminal member side end surface of each buffer member 60. , brazing material (for example, Ni-based, Au-based, or Ag-based brazing material) is used for brazing to form the terminal-side brazing portion 81 . Each brazing can be performed using a vacuum furnace under predetermined brazing conditions (in vacuum, temperature: about 950° C. to 1150° C., time: about 10 minutes to 30 minutes).

Next, the insulating tube 40 is prepared. One end face of the insulating tube 40 (specifically, the end face on the back surface S2 side of the holder 10) is formed with the above-described chamfered portion SSi. The chamfered portion SSi can be formed, for example, by chamfering the inner peripheral edge of the insulating tube 40 .

Next, the electrode terminal unit 70 is prepared. The electrode terminal unit 70 can be produced by the following method. First, a first rod-shaped member serving as the first columnar member 71 , the third columnar member 73 , the enlarged diameter portion 75 and the upper crimped portion 76 , and a second columnar member 72 and the lower crimped portion 77 . and a wire member to be the metal strand 74 are prepared. Next, by grinding the first rod-shaped member, it is processed to have the respective outer diameters of the first columnar member 71, the third columnar member 73, the enlarged diameter portion 75, and the upper crimped portion . Similarly, by grinding the second rod-shaped member, it is processed to have the respective outer diameters of the second columnar member 72 and the lower crimped portion 77 . The upper crimped portion 76 and the lower crimped portion 77 are partially hollowed in the Z-axis direction (for example, the lower portion of the upper crimped portion 76 and the upper portion of the lower crimped portion 77). . Further, the above-described chamfered portion SSw and chamfered portion SSs are formed in the enlarged diameter portion 75 and the lower crimped portion 77, respectively. The chamfered portion SSw and the chamfered portion SSs can be formed, for example, by chamfering predetermined outer peripheral edges of the enlarged diameter portion 75 and the lower crimped portion 77 .

An insulating tube 40 is inserted into each accommodation space 22 of the columnar support 20 . Specifically, each electrode terminal unit 70 (the first portion P1 thereof) is inserted into the through hole 42 formed in each insulating tube 40 . At this time, the upper end of the insulating tube 40 is fitted into the second recess 14 formed in the rear surface S2 of the holder 10, and the upper end surface USi of the connecting surface CSi of the insulating tube 40 is positioned in the second recess 14. By joining the insulating tube 40 to the bottom surface, the insulating tube 40 is placed in a state in which movement in the planar direction is restricted (that is, in a state in which it is positioned in the planar direction).

The heating device 100 having the configuration described above is manufactured mainly by the manufacturing method described above.

A-6. Effect of this embodiment:
As described above, the heating device 100 of the present embodiment is made of an insulator and has a holding surface S1 substantially orthogonal to the Z-axis direction and a back surface S2 opposite to the holding surface S1. The holding surface of the holding body 10 is provided with a holding body 10 and a tubular columnar support body 20 formed of an insulator, joined to the back surface S2 of the holding body 10, and formed with a housing space 22 extending in the Z-axis direction. A heating device 100 holds a wafer W on S1. A heater electrode 50 is arranged inside the holder 10 . The heating device 100 also includes an electrode terminal unit 70 whose first portion P1 is arranged in the accommodation space 22 of the columnar support 20, is electrically connected to the heater electrode 50, and extends in the Z-axis direction. The heating device 100 also includes a connecting portion 65 joined to one end of the electrode terminal unit 70 to electrically connect the electrode terminal unit 70 and the heater electrode 50 . Insulating tube 40 at least partially disposed in accommodation space 22 of columnar support 20 extends in the Z-axis direction and through hole 42 is formed to accommodate first portion P1 of electrode terminal unit 70. An insulating tube 40 is provided. The insulating tube 40 has a connection surface CSi that connects the inner peripheral surface ISi and the outer peripheral surface OSi of the insulating tube 40 on the rear surface S2 side of the holder 10 . Further, in the heating device 100 of the present embodiment, the electrode terminal unit 70 has the enlarged diameter portion 75 and the first columnar member 71 . The first columnar member 71 has a diameter Dt1 that is smaller than the outer diameter DW of the enlarged diameter portion 75, and is connected to the enlarged diameter portion 75 on the side of the enlarged diameter portion 75 opposite to the back surface S2 side of the holder 10. It is a member. The enlarged-diameter portion 75 has a diameter larger than that of the electrode terminal unit 70 having the smallest diameter (in the present embodiment, the first columnar member 71, the second columnar member 72 and the third columnar member 73). is the enlarged part. The enlarged diameter portion 75 includes an upper end surface USw on the back surface S2 side of the holder 10, an outer peripheral surface OSw connected to the upper end surface USw and substantially parallel to the Z-axis direction, an outer peripheral surface OSw, and the first columnar member 71. and a connection surface CSw that connects the As viewed in the Z-axis direction, the outer diameter DW of the outer peripheral surface OSw of the enlarged diameter portion 75 is substantially the same as the inner diameter DI of the through hole 42 formed in the insulating tube 40 . In the heating device 100 of the present embodiment, the enlarged diameter portion 75 has the chamfered portion SSw formed in the portion including the outer edge of the connection surface CSw, and the insulating tube 40 is formed in the portion including the inner edge of the connection surface CSi. It has a formed chamfer SSi. In all cross sections including the central axis of the electrode terminal unit 70 and substantially parallel to the Z-axis direction, the diameter Dw of the enlarged diameter portion 75 at the position of the chamfered portion SSw is equal to or greater than that of the first columnar member 71 in the Z-axis direction. , and the diameter Di of the through hole 42 formed in the insulating tube 40 at the position of the chamfered portion SSi decreases toward the inner peripheral surface ISi of the insulating tube 40 in the Z-axis direction.

The heating device 100 of the present embodiment has both the chamfered portion SSw formed on the connection surface CSw of the enlarged diameter portion 75 of the electrode terminal unit 70 and the chamfered portion SSi formed on the connection surface CSi of the insulating tube 40 . are doing. Therefore, the insulation of the electrode terminal unit 70 having the enlarged diameter portion 75 after connection (for example, after brazing) between the electrode terminal unit 70 and the heater electrode 50 (specifically, the power supply electrode 54) in the heating device 100 Insertion into the tube 40 becomes smooth. In addition, the electrode terminal unit 70 is inserted through the insulating tube 40 from the opposite side of the electrode terminal unit 70 to the side connected to the heater electrode 50 (specifically, from the second columnar member 72). At this time, the surface of the insulating tube 40 facing the back surface S2 of the holder 10 (the surface on the insertion advancing direction side, connection surface CSi) and the surface of the enlarged diameter portion 75 opposite to the surface facing the back surface S2 of the holder 10 colliding with the surface (connection surface CSw), and the load in the surface direction acts on the electrode terminal unit 70 when the through hole 42 formed in the insulating tube 40 is aligned with the enlarged diameter portion 75. can be reduced. Therefore, in the heating device 100 of the present embodiment, damage to the connection portion 65 connecting the electrode terminal unit 70 having the enlarged diameter portion 75 and the heater electrode 50 (specifically, the power supply electrode 54) is avoided. can be suppressed. Therefore, according to the heating device 100 of the present embodiment, it is possible to suppress an increase in the amount of heat transfer (amount of heat transfer) from the holder 10 to the columnar support 20 and to ensure the insulation between the electrode terminal units 70. In addition, damage to the connecting portion 65 can be suppressed. Note that when the outer diameter DW of the enlarged diameter portion 75 is the maximum diameter among the diameters of the electrode terminal unit 70, at least one of the chamfered portion SSw of the enlarged diameter portion 75 and the chamfered portion SSi of the insulating tube 40 is It is preferable to have

In addition, since the heating device 100 of the present embodiment has both the chamfered portion SSw of the enlarged diameter portion 75 of the electrode terminal unit 70 and the chamfered portion SSi of the insulating tube 40, the heating device 100 The insertion of the electrode terminal unit 70 having the enlarged diameter portion 75 into the insulating tube 40 becomes smoother after the brazing. Therefore, according to the heating device 100 of the present embodiment, it is possible to more effectively prevent the connecting portion 65 from being damaged.

Moreover, in the heating device 100 of the present embodiment, the electrode terminal unit 70 further has an upper crimped portion 76 , a lower crimped portion 77 , a twisted metal wire 74 , and a second columnar member 72 . The lower crimped portion 77 is located on the opposite side of the upper crimped portion 76 from the rear surface S2 side of the holder 10 . The stranded metal wire 74 electrically connects the upper crimped portion 76 and the lower crimped portion 77 . One end of the stranded metal wire 74 is connected to the upper crimped portion 76 and the other end of the stranded metal wire 74 is connected to the lower crimped portion 77 . The second columnar member 72 has a diameter smaller than the outer diameter DS of the lower crimped portion 77 , and is attached to the lower crimped portion 77 on the side of the lower crimped portion 77 opposite to the back surface S2 side of the holder 10 . Connected. The lower crimped portion 77 includes an upper end surface USs on the back surface S2 side of the holder 10, an outer peripheral surface OSs connected to the upper end surface USs and substantially parallel to the Z-axis direction, an outer peripheral surface OSs, and the second columnar member 72. and a connection surface CSs that connects the The lower crimped portion 77 has a chamfered portion SSs formed in a portion including the outer edge of the connection surface CSs. In all cross sections including the central axis of the electrode terminal unit 70 and substantially parallel to the Z-axis direction, the diameter Ds of the lower crimped portion 77 at the position of the chamfered portion SSs is the second columnar member in the Z-axis direction. 72 becomes smaller. In the heating device 100 of the present embodiment, the electrode terminal unit 70 further includes an upper crimped portion 76, a lower crimped portion 77, and a stranded metal wire that electrically connects the upper crimped portion 76 and the lower crimped portion 77. 74. In such a configuration, when the electrode terminal unit 70 is inserted into the insulating tube 40, the surface of the insulating tube 40 facing the back surface S2 of the holder 10 (the surface on the insertion advancing direction side, the connection surface CSi) faces downward. Collision between the crimped portion 77 and the surface (connection surface CSs) opposite to the surface facing the back surface S2 of the holder 10 can be reduced. Therefore, it is possible to suppress damage to the connecting portion 65 that connects between the electrode terminal unit 70 having the lower crimped portion 77 and the heater electrode 50 (specifically, the power supply electrode 54). Therefore, according to the heating device 100 of the present embodiment, it is possible to more effectively prevent the connecting portion 65 from being damaged.

B. Variant:
The technology disclosed in this specification is not limited to the above-described embodiments, and can be modified in various forms without departing from the scope of the invention. For example, the following modifications are possible.

In the above embodiment, a configuration having either one of the chamfered portion SSi in the insulating tube 40 and the chamfered portion SSw in the enlarged diameter portion 75 may be employed. Further, in the above-described embodiment, a configuration in which the lower crimped portion 77 does not have the chamfered portion SSw may be employed.

In the above-described embodiment, in at least one cross section that includes the central axis of the electrode terminal unit 70 and is substantially parallel to the Z-axis direction, the upper end portion of the insulating tube 40, the enlarged diameter portion 75, and the lower crimped portion 77 are Each configuration may be adopted. Of the plurality of cross sections that include the central axis of the electrode terminal unit 70 and are substantially parallel to the Z-axis direction, preferably one-third or more, more preferably one-half or more of the cross sections, each of the above configurations is adopted. be done. It is preferable that the cross sections adopting the respective configurations are continuous with each other.

In the above embodiment, a configuration may be adopted in which the connection surface CSi of the insulating tube 40 does not have the upper end surface USi. A configuration in which the connection surface CSw of the enlarged diameter portion 75 does not have the lower end surface LSw may be employed, and a configuration in which the connection surface CSs of the lower crimped portion 77 does not have the lower end surface LSs may be employed. .

A configuration without the cushioning member 60 may be employed in the connecting portion 65 of the above-described embodiment. That is, the power supply electrode 54 and the electrode terminal unit 70 may be connected by the terminal-side brazing portion 81 or the electrode-side brazing portion 82 .

Further, the materials forming each member in the heating device 100 of the above-described embodiment are merely examples, and each member may be formed of another material. Moreover, the manufacturing method of the heating device 100 in the above-described embodiment is merely an example, and various modifications are possible.

Further, in the above-described embodiment, the configuration around the power supply electrode 54 electrically connected to the heater electrode 50 disposed inside the holder 10 has been described. The configuration is not limited to the configuration around the power supply electrode 54, but can be similarly applied to the configuration around the power supply electrode electrically connected to other internal electrodes (RF electrode, etc.) arranged inside the holder 10.

Further, the present invention is not limited to the heating apparatus 100, but includes a holder, an internal electrode (a heater electrode, a chuck electrode, an RF electrode, etc.) arranged inside the holder, a terminal member, an internal electrode and a terminal member. and an insulating tube formed with a through-hole accommodating at least a portion of the terminal member, and holding an object on the surface of the holder (for example, an electrostatic chuck, etc.).

10: Holder 12: First recess 14: Second recess 20: Columnar support 22: Accommodating space 30: Joint 40: Insulating tube 42: Through hole 50: Heater electrode 52: Via conductor 54: Feeding electrode 60 : Cushioning member 65: Connection part 70: Electrode terminal unit 71: First columnar member 72: Second columnar member 73: Third columnar member 74: Metal twisted wire 75: Expanded diameter part 76: Upper crimping part 77: Lower caulking portion 81: Terminal-side brazing portion 82: Electrode-side brazing portion 100: Heating device CSi: Connection surface CSs: Connection surface CSw: Connection surface ISi: Inner peripheral surface LSs: Lower end surface LSw: Lower end surface OSi: Outer periphery surface OSs: outer peripheral surface OSw: outer peripheral surface P1: first portion S1: holding surface S2: back surface S3: upper surface S4: lower surface SSi: inclined surface SSs: inclined surface SSw: inclined surface TS1: outer peripheral surface TS2: outer peripheral surface TS3: Outer peripheral surface USi: upper surface USs: upper surface USw: upper surface W: semiconductor wafer

Claims (3)

a plate-like holder made of an insulator and having a first surface substantially orthogonal to a first direction and a second surface opposite to the first surface;
a tubular support member made of an insulator, joined to the second surface of the holder, and formed with a housing space extending in the first direction;
an internal electrode disposed inside the holder;
a terminal member, at least a portion of which is disposed within the housing space of the support member, is electrically connected to the internal electrode, and extends in the first direction;
a connecting portion that is joined to one end of the terminal member and electrically connects the terminal member and the internal electrode;
An insulating tube, at least a portion of which is disposed within the accommodation space of the support member, is formed with a through hole extending in the first direction and accommodating at least a portion of the terminal member, and the second an insulating tube having a connection surface connecting the inner peripheral surface and the outer peripheral surface of the insulating tube on the surface side;
A holding device for holding an object held on the first surface of the holding body,
The terminal member is
an enlarged diameter portion having a diameter enlarged with respect to a portion having a minimum diameter of the terminal member;
a first base having a diameter smaller than the outer diameter of the enlarged diameter portion and connected to the enlarged diameter portion on a side opposite to the second surface side of the enlarged diameter portion;
The enlarged diameter portion is
a third surface on the side of the second surface of the holding body;
an outer peripheral surface connected to the third surface and substantially parallel to the first direction;
a fourth surface connecting the outer peripheral surface and the first base;
When viewed from the first direction, the outer diameter of the outer peripheral surface of the enlarged diameter portion is substantially the same as the inner diameter of the through hole formed in the insulating tube,
at least one of a first inclined surface formed on the fourth surface of the enlarged diameter portion and a second inclined surface formed on the connecting surface of the insulating tube,
In at least one cross section including the central axis of the terminal member and substantially parallel to the first direction,
The first inclined surface is formed in a portion including the outer edge of the fourth surface, and the diameter of the enlarged diameter portion at the position of the first inclined surface becomes smaller toward the base of 1,
The second inclined surface is formed in a portion including the inner edge of the connection surface, and the diameter of the through hole formed in the insulating tube at the position of the second inclined surface is , which decreases toward the inner peripheral surface of the insulating tube,
A holding device characterized by: A holding device according to claim 1, wherein
having both the first inclined surface on the enlarged diameter portion of the terminal member and the second inclined surface on the insulating tube,
A holding device characterized by: In the holding device according to claim 1 or claim 2,
The terminal member further
a first caulking portion;
a second crimped portion located on the side opposite to the second surface side with respect to the first crimped portion;
a connection terminal portion electrically connecting the first crimped portion and the second crimped portion, one end of the connection terminal portion being connected to the first crimped portion; the other end of the connection terminal portion is connected to the second crimped portion;
A second base portion having a diameter smaller than the outer diameter of the second crimped portion and connected to the second crimped portion on the side opposite to the second surface side of the second crimped portion. and
The second crimping part is
a fifth surface on the side of the second surface of the holding body;
a side surface connected to the fifth surface and substantially parallel to the first direction;
a sixth surface connecting the side surface and the second base;
The sixth surface of the second crimped portion includes the outer edge of the sixth surface in at least one cross section that includes the central axis of the terminal member and is substantially parallel to the first direction. a third inclined surface formed in the third inclined surface, wherein the diameter of the second crimped portion at the position of the third inclined surface decreases toward the second base portion in the first direction in the first direction having 3 inclined planes,
A holding device characterized by:

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