JP4909704B2

JP4909704B2 - Electrostatic chuck device

Info

Publication number: JP4909704B2
Application number: JP2006280447A
Authority: JP
Inventors: 直年森田
Original assignee: NGK Spark Plug Co Ltd
Current assignee: NGK Spark Plug Co Ltd
Priority date: 2006-10-13
Filing date: 2006-10-13
Publication date: 2012-04-04
Anticipated expiration: 2026-10-13
Also published as: JP2008098513A

Description

本発明は、半導体の製造において使用されるエッチング装置、イオン注入装置、或いは電子ビーム露光装置などにおいて、半導体ウエハの固定、平面度の矯正、或いは搬送に用いられる静電チャック装置に関する。 The present invention relates to an electrostatic chuck device used for fixing a semiconductor wafer, correcting flatness, or transporting it in an etching apparatus, ion implantation apparatus, electron beam exposure apparatus or the like used in semiconductor manufacturing.

半導体の製造工程において、半導体ウエハ（例えば、シリコンウエハ）に精度良く成膜やドライエッチング等の処理（加工）を施すには、その処理装置において、半導体ウエハの平面度（平坦度）を保ちながら、それを固定（保持）する必要がある。このような固定手段の代表的なものとして、静電気力によって半導体ウエハをチャックする静電チャックがある（特許文献１）。例えば、双極型の静電チャックは、セラミック基板の内部に、対をなす電極（静電電極）が形成されており、その電極間に電圧を印加することで発生する静電気力で半導体ウエハ等の被吸着部材（以下、単にウエハともいう）を吸着、固定するように構成されている。そして、この静電チャックは、通常、アルミニウム又はアルミニウム合金などの金属からなる金属製ベース部材の表面（上面）に、シリコン樹脂などの接着手段を介して接合して静電チャック装置を構成しており、半導体ウエハの処理目的に応じた処理装置に取り付けられてその使用に供される。 In a semiconductor manufacturing process, in order to perform processing (processing) such as film formation and dry etching with high accuracy on a semiconductor wafer (for example, a silicon wafer), the processing apparatus maintains the flatness of the semiconductor wafer. It is necessary to fix (hold) it. A typical example of such fixing means is an electrostatic chuck that chucks a semiconductor wafer by electrostatic force (Patent Document 1). For example, in a bipolar electrostatic chuck, a pair of electrodes (electrostatic electrodes) are formed inside a ceramic substrate, and a semiconductor wafer or the like is generated by electrostatic force generated by applying a voltage between the electrodes. A member to be attracted (hereinafter also simply referred to as a wafer) is configured to be attracted and fixed. This electrostatic chuck is usually joined to the surface (upper surface) of a metal base member made of a metal such as aluminum or aluminum alloy via an adhesive means such as silicon resin to constitute an electrostatic chuck device. The semiconductor wafer is attached to a processing apparatus according to the processing purpose of the semiconductor wafer and used for the use.

このような静電チャック装置をなす静電チャックには、その裏面に、静電電極に印加するための端子（チャック端子用のメタライズ層）、さらには基板に抵抗発熱ヒーターが内蔵されたものではそのヒーターに印加するための端子（ヒーター端子用のメタライズ層）が複数、焼成により形成されている。そして、その各端子（メタライズ層）には、通常、１本の金属製の軸材（ピン材）からなるチャック側端子（給電端子）がその基端部を介してロウ付け（又はハンダ付け）により接合され、静電チャックの裏面に突出状に設けられている（特許文献２）。このような静電チャックは、そのチャック側端子の配置に対応して形成された貫通孔を有する金属製ベース部材（以下、単にベース部材ともいう）に接合されて静電チャック装置をなし、各チャック側端子はその貫通孔内において絶縁を保持して配置される。 An electrostatic chuck constituting such an electrostatic chuck device has a terminal (metallized layer for the chuck terminal) applied to the electrostatic electrode on the back surface, and a resistance heating heater built in the substrate. A plurality of terminals (metallized layers for heater terminals) to be applied to the heater are formed by firing. Each terminal (metallized layer) is usually brazed (or soldered) via a base end portion of a chuck side terminal (feed terminal) made of a single metal shaft (pin material). And are provided in a protruding shape on the back surface of the electrostatic chuck (Patent Document 2). Such an electrostatic chuck is joined to a metal base member (hereinafter also simply referred to as a base member) having a through-hole formed corresponding to the arrangement of the chuck side terminals to form an electrostatic chuck device. The chuck side terminal is disposed while maintaining insulation in the through hole.

このような各チャック側端子は、従来、静電チャック装置を半導体ウエハの各処理装置に取り付ける際において、その処理装置側の静電チャック装置取付け部に設けられた相手側（処理装置側）の端子（以下、単に相手側端子という）にそれぞれ電気的に接合される。そして、この接合は、従来は、静電チャック装置側のチャック側端子の先端面が相手側端子の先端面に、単に先端面同士が突合せ状をなして押付けられる形態の当接ないし圧接による接合とされていた。このため、その電気的な接合は、実質的には点ないし微小面積での接触となるものが普通であった。 Each of these chuck-side terminals is conventionally provided on the other side (processing apparatus side) provided in the electrostatic chuck apparatus mounting portion on the processing apparatus side when the electrostatic chuck apparatus is mounted on each processing apparatus of the semiconductor wafer. Each is electrically joined to a terminal (hereinafter simply referred to as a mating terminal). Conventionally, this joining is performed by contact or pressure welding in which the tip surface of the chuck-side terminal on the electrostatic chuck device side is pressed against the tip surface of the mating terminal and the tip surfaces are pressed together in a butting manner. It was said. For this reason, the electrical connection is usually a point or contact in a very small area.

ところが、このような両端子による端子接合構造では、両端子間の接触面積が十分に確保されないことがある。このため、静電チャック装置に内蔵された抵抗発熱体からなるヒーターへの電圧印加用のヒーター端子のように、比較的大電流を要する場合には、接触抵抗が増大し、接合の信頼性が得られないことがあるといった指摘があった。この対策としては、図７に示したように、静電チャック装置１のチャック側端子３１をベース部材２１の貫通孔内において突出状にし、処理装置側の相手側端子をソケット端子１３１とし、チャック側端子３１がソケット端子１３１内に深く圧入されるように、両端子間の接触を多面接触として接触面積を大きく確保するようにした端子接合構造が採用されてきている。
特開２００４−６５０５号公報特開２００４−３１５９９号公報 However, in such a terminal joint structure using both terminals, a sufficient contact area between the two terminals may not be ensured. For this reason, when a relatively large current is required, such as a heater terminal for applying a voltage to a heater composed of a resistance heating element built in the electrostatic chuck device, the contact resistance is increased, and the reliability of bonding is increased. There was an indication that there were things that could not be obtained. As measures against this, as shown in FIG. 7, the chuck side terminal 31 of the electrostatic chuck device 1 is projected in the through hole of the base member 21, and the mating terminal on the processing device side is used as the socket terminal 131. A terminal joining structure has been adopted in which the contact between both terminals is multifaceted so as to ensure a large contact area so that the side terminal 31 is deeply press-fitted into the socket terminal 131.
JP 2004-6505 A JP 2004-31599 A

静電チャック装置側のチャック側端子を処理装置側の相手側端子をなすソケット端子（内）に圧入して接合する端子接合構造においては、静電チャック装置側の複数のチャック側端子の配置と、処理装置側の複数のソケット端子の配置とが、平面上、高精度で対応していることが要請される。しかし、チャック側端子の配置と、ソケット端子の配置とは、双方の端子相互間の寸法精度確保のために付与されている許容誤差（例えば±０．５ｍｍ）により、対応する両端子間には、僅かではあるがその誤差範囲において平面的な不一致（位置ずれ）が生じることがある。また、チャック側端子はセラミック基板の裏面（のメタライズ層）に垂直に接合されるべきであるが、誤差により微小な傾斜が発生していることもある。 In the terminal bonding structure in which the chuck side terminal on the electrostatic chuck apparatus side is press-fitted into the socket terminal (inside) that forms the mating terminal on the processing apparatus side and bonded, the arrangement of a plurality of chuck side terminals on the electrostatic chuck apparatus side The arrangement of the plurality of socket terminals on the processing apparatus side is required to correspond with high precision on a plane. However, the arrangement of the chuck-side terminals and the socket terminals are arranged between the corresponding terminals due to the tolerance (for example, ± 0.5 mm) given to ensure the dimensional accuracy between the two terminals. However, a slight mismatch (positional deviation) may occur in the error range. Further, the chuck side terminal should be bonded perpendicularly to the back surface (the metallized layer) of the ceramic substrate, but a slight inclination may occur due to an error.

こうしたことから、静電チャック装置を処理装置側の静電チャック装置取付け部に取り付ける際において、処理装置側のソケット端子に静電チャック装置側のチャック側端子が圧入されるときには、チャック側端子が正規の深さまで円滑に挿入できない場合があった。すなわち、両端子間の挿入接合に際しては、対応する両端子の平面上の位置の不一致による位置ずれにより、各ソケット端子の中央に各チャック側端子が圧入されることはないことから、チャック側端子にはその圧入方向とは異なる方向（横方向）の力がかかることがあった。より具体的には、両端子間の平面上の誤差（心ずれ）や、チャック側端子の傾斜の存在により、静電チャック装置を処理装置側の取付け部に取り付ける際において、複数のチャック側端子を対応する相手側のソケット端子に圧入するとき、静電チャックの裏面から突出しているチャック側端子に横方向の力が作用するためである。チャック側端子にこのような横方向の力が作用するときには、チャック側端子の根元にせん断力や大な曲げモーメントがかかるなどより、その根元端面のロウ付け箇所がセラミック基板の端子（メタライズ層）から引き剥がされる形で分離したり、そのロウに破断やクラックが発生するなどの問題があった。 For this reason, when the electrostatic chuck device is attached to the electrostatic chuck device mounting portion on the processing device side, when the chuck side terminal on the electrostatic chuck device side is press-fitted into the socket terminal on the processing device side, the chuck side terminal is In some cases, it could not be smoothly inserted to the normal depth. That is, at the time of insertion joining between both terminals, each chuck side terminal is not press-fitted into the center of each socket terminal due to misalignment due to the mismatch of the positions of the corresponding terminals on the plane. In some cases, a force in a direction (lateral direction) different from the press-fitting direction is applied. More specifically, when attaching the electrostatic chuck device to the processing device side mounting portion due to a planar error (center misalignment) between both terminals or the inclination of the chuck side terminal, a plurality of chuck side terminals This is because a lateral force acts on the chuck-side terminal protruding from the back surface of the electrostatic chuck when press-fitting into a corresponding mating socket terminal. When such a lateral force is applied to the chuck side terminal, a shearing force or a large bending moment is applied to the base of the chuck side terminal, so that the brazed portion of the base end face is a ceramic substrate terminal (metallized layer) There are problems such as separation in the form of being peeled off from the steel, and breakage or cracks in the wax.

本発明は、こうした問題点に鑑みてなされたもので、その目的は、静電チャック装置のチャック側端子が処理装置側のソケット端子などの相手側端子に接合される際における前記問題点を発生させることのないチャック側端子を備えた静電チャック装置を提供することにある。 The present invention has been made in view of such problems, and the object thereof is to generate the above problems when the chuck side terminal of the electrostatic chuck apparatus is joined to a counterpart terminal such as a socket terminal on the processing apparatus side. It is an object of the present invention to provide an electrostatic chuck device having a chuck-side terminal that is not caused to occur.

上記課題を解決するための請求項１に記載の発明は、セラミック基板に静電電極が形成されてなる静電チャックと、この静電チャックの裏面に接合された金属製ベース部材とを含んでなる静電チャック装置であって、前記静電チャックの裏面から突出状に所定の配置で複数形成された金属製のチャック側端子が、前記金属製ベース部材に所定の配置で複数形成された貫通孔内に絶縁を保持してそれぞれ配置されてなるものにおいて、
前記各チャック側端子は、該静電チャック装置が取付けられる処理装置側において該チャック側端子の配置に対応して配置された相手側端子をなす複数の各処理装置側ソケット端子に圧入されて接合されるものであり、
前記チャック側端子を、前記静電チャックの裏面の電極端子に基端が接合された可撓性のある電線と、その電線の先端に接合された先端部材とで形成してなると共に、前記電線は前記貫通孔内において自身の外周面に空隙を保持して配置されていることを特徴とする。 The invention described in claim 1 for solving the above-described problems includes an electrostatic chuck in which an electrostatic electrode is formed on a ceramic substrate, and a metal base member bonded to the back surface of the electrostatic chuck. An electrostatic chuck device comprising: a plurality of metal chuck side terminals formed in a predetermined arrangement projecting from the back surface of the electrostatic chuck, wherein a plurality of metal chuck side terminals are formed in the metal base member in a predetermined arrangement In what is each arranged to hold insulation in the hole,
Each chuck side terminal is press-fitted into and joined to a plurality of processing device side socket terminals forming counterpart terminals arranged corresponding to the arrangement of the chuck side terminals on the processing device side to which the electrostatic chuck device is attached. Is,
The chuck-side terminal is formed by a flexible electric wire having a base end bonded to the electrode terminal on the back surface of the electrostatic chuck, and a tip member bonded to the tip of the electric wire. Is characterized in that it is disposed in the through-hole with a gap held on its outer peripheral surface .

請求項２に記載の発明は、セラミック基板に静電電極が形成されてなる静電チャックと、この静電チャックの裏面に接合された金属製ベース部材とを含んでなる静電チャック装置であって、前記静電チャックの裏面から突出状に所定の配置で複数形成された金属製のチャック側端子が、前記金属製ベース部材に所定の配置で複数形成された貫通孔の内周面にそれぞれ固定された環状又は筒状をなす絶縁部材の内側に配置されてなるものにおいて、
前記各チャック側端子は、該静電チャック装置が取付けられる処理装置側において該チャック側端子の配置に対応して配置された相手側端子をなす複数の各処理装置側ソケット端子に圧入されて接合されるものであり、
前記チャック側端子を、前記静電チャックの裏面の電極端子に基端が接合された可撓性のある電線と、その電線の先端に接合された先端部材とで形成してなると共に、前記電線は前記貫通孔内において自身の外周面に空隙を保持して配置されていることを特徴とする。 The invention according to claim 2 is an electrostatic chuck device comprising an electrostatic chuck having an electrostatic electrode formed on a ceramic substrate and a metal base member bonded to the back surface of the electrostatic chuck. A plurality of metal chuck side terminals formed in a predetermined arrangement projecting from the back surface of the electrostatic chuck are respectively formed on inner peripheral surfaces of the through holes formed in the metal base member in a predetermined arrangement. In what is arranged inside the fixed annular or cylindrical insulating member,
Each chuck side terminal is press-fitted into and joined to a plurality of processing device side socket terminals forming counterpart terminals arranged corresponding to the arrangement of the chuck side terminals on the processing device side to which the electrostatic chuck device is attached. Is,
The chuck-side terminal is formed by a flexible electric wire having a base end bonded to the electrode terminal on the back surface of the electrostatic chuck, and a tip member bonded to the tip of the electric wire. Is characterized in that it is disposed in the through-hole with a gap held on its outer peripheral surface .

請求項３に記載の発明は、前記絶縁部材が、前記貫通孔の内周面に接着により固定されていることを特徴とする請求項２に記載の静電チャック装置である。そして、請求項４に記載の発明は、前記先端部材はその基端にソケット端子を備えており、そのソケット端子内に前記電線の先端が嵌合されて接合されていることを特徴とする請求項１〜３のいずれか１項に記載の静電チャック装置である。 The invention according to claim 3 is the electrostatic chuck device according to claim 2, wherein the insulating member is fixed to the inner peripheral surface of the through-hole by adhesion. According to a fourth aspect of the present invention, the distal end member includes a socket terminal at a proximal end thereof, and the distal end of the electric wire is fitted into and joined to the socket terminal. Item 4. The electrostatic chuck device according to any one of Items 1 to 3.

請求項５に記載の発明は、前記先端部材はその基端にソケット端子を備えており、そのソケット端子内に前記電線の先端が嵌合されて接合されており、
前記絶縁部材はその内周面にメスねじを備える一方、前記先端部材のソケット端子又はソケット端子寄り部位の外周面にはこのメスねじに螺合するオスねじを備えており、これらのねじにより前記絶縁部材に前記先端部材をねじ込むことで、該先端部材を固定すると共に前記ソケット端子内に前記電線の先端を嵌合して接合してなることを特徴とする請求項２又は３に記載の静電チャック装置である。 In the invention according to claim 5, the tip member has a socket terminal at the base end, and the tip of the electric wire is fitted and joined in the socket terminal,
The insulating member is provided with a female screw on the inner peripheral surface thereof, and a male screw that is screwed into the female screw is provided on the outer peripheral surface of the socket member or the portion near the socket terminal of the tip member. The static member according to claim 2 or 3, wherein the tip member is fixed by screwing the tip member into an insulating member, and the tip of the electric wire is fitted and joined into the socket terminal. This is an electric chuck device.

請求項６に記載の発明は、前記先端部材はその基端にソケット端子を備えており、そのソケット端子内に前記電線の先端が嵌合されて接合されており、
そのソケット端子又はソケット端子寄り部位の外周面を介して、前記絶縁部材の内周面に接着により固定されていることを特徴とする請求項２又は３に記載の静電チャック装置である。 In the invention according to claim 6, the tip member has a socket terminal at a base end thereof, and the tip of the electric wire is fitted and joined in the socket terminal.
4. The electrostatic chuck device according to claim 2, wherein the electrostatic chuck device is fixed to the inner peripheral surface of the insulating member by adhesion via the outer peripheral surface of the socket terminal or a portion near the socket terminal. 5.

請求項７に記載の発明は、前記先端部材の先端をオス端子形状としたことを特徴とする請求項１〜６のいずれか１項に記載の静電チャック装置である。請求項８に記載の発明は、前記電線が複数の素線（芯線）を束にしてなるものであることを特徴とする請求項１〜７のいずれか１項に記載の静電チャック装置である。請求項９に記載の発明は、前記電線が軟銅撚り線からなることを特徴とする請求項１〜７のいずれか１項に記載の静電チャック装置である。請求項１０に記載の発明は、前記静電チャックはその内部に抵抗発熱体からなるヒーターが設けられており、前記チャック側端子が、そのヒーターへの給電用のものであることを特徴とする請求項１〜９のいずれか１項に記載の静電チャック装置である。 The invention according to claim 7 is the electrostatic chuck device according to any one of claims 1 to 6, wherein the tip of the tip member has a male terminal shape. The invention according to claim 8 is the electrostatic chuck device according to any one of claims 1 to 7, wherein the electric wire is a bundle of a plurality of strands (core wires). is there. The invention according to claim 9 is the electrostatic chuck device according to any one of claims 1 to 7, wherein the electric wire is made of a annealed copper stranded wire. The invention according to claim 10 is characterized in that the electrostatic chuck is provided with a heater made of a resistance heating element, and the chuck side terminal is for supplying power to the heater. It is an electrostatic chuck apparatus of any one of Claims 1-9.

請求項１〜４に記載の本発明の静電チャック装置においては、チャック側端子は、従来のように金属製の１本の軸材（ピン材）からなるのではなく、可とう性のある（撓み変形可能な又は柔軟性のある）電線と、その先端に接合した先端部材（金属製先端部材）との接合構造からなるものとされている。したがって、このような静電チャック装置のチャック側端子をなす先端部材と、処理装置側の相手側端子とが嵌合で接合される際において、両端子間に平面的な誤差（位置ずれ）があったとして、その先端部材が相手側端子（例えばソケット端子）に圧入されるときは、先端部材にはその誤差に対応して横方向から力を受けることになるが、静電チャックの裏面に接合されているのが可とう性のある電線であることから、その裏面における接合部には大きな力や曲げモーメントがかかることを防止できる。 In the electrostatic chuck device according to the first to fourth aspects of the present invention, the chuck side terminal is not made of a single metal shaft member (pin material) as in the prior art, but is flexible. The electric wire (which can be flexibly deformed or flexible) and a tip structure (metal tip member) joined to the tip of the electric wire are used. Therefore, when the tip member constituting the chuck side terminal of the electrostatic chuck apparatus and the mating terminal on the processing apparatus side are joined by fitting, a planar error (positional deviation) is caused between the terminals. If the tip member is press-fitted into a mating terminal (for example, a socket terminal), the tip member will receive a force from the lateral direction corresponding to the error, Since it is a flexible electric wire that is joined, it is possible to prevent a large force or bending moment from being applied to the joint on the back surface.

すなわち、チャック側端子と相手側端子との間に、平面上の誤差があると、その接合において、チャック側端子をなす先端部材には相手側端子から横方向の力を受け、その先端部材は横方向の力により、正規位置より傾斜したり横に移動（偏心）したり、或いは先端部材自身が変形することで、その誤差を吸収する。しかし、このような場合においても、チャック側端子の基端側に可撓性のある電線が用いられていることから、従来のような金属製の１本の軸材からなるチャック側端子による場合に比べると、その根元である電線の基端に大きな力（せん断力）や曲げモーメントが発生することを防止できる。したがって、前記電線の基端と、静電チャックの裏面の端子との接合がロウ付け等の接合手段によって接合されているとしても、その接合が破断する等の問題の発生を有効に防止できる。なお、前記電線は、先端部材と相手側端子とが接合される際の力（軸方向の力や横方向の力）によって座屈しない程度の強度のあるものを用いればよい。 That is, if there is an error in the plane between the chuck side terminal and the counterpart terminal, the tip member forming the chuck side terminal receives a lateral force from the counterpart terminal in the joining, and the tip member is By the lateral force, the error is absorbed by inclining or moving laterally (eccentric) from the normal position, or by deforming the tip member itself. However, even in such a case, since a flexible electric wire is used on the base end side of the chuck side terminal, the case of using a chuck side terminal made of a single metal shaft as in the past As compared with, it is possible to prevent a large force (shearing force) or bending moment from being generated at the base end of the electric wire which is the base. Therefore, even if the base end of the electric wire and the terminal on the back surface of the electrostatic chuck are joined by joining means such as brazing, it is possible to effectively prevent the occurrence of problems such as breakage of the joint. In addition, the said electric wire should just use the intensity | strength of the grade which is not buckled by the force (axial force or lateral force) at the time of joining a front-end | tip member and the other party terminal.

なお、請求項２に記載のように、ベース部材の貫通孔内に絶縁部材を配置する場合にはは、絶縁部材はその貫通孔内から脱落ないし分離しないように取付けられていればよい。そして、その手段としては、請求項３に記載の本発明のように接着によるのが、静電チャック装置の組立ての簡易、迅速化より好ましい。ただし、圧入による固定としてもよいし、貫通孔の内周面にねじを形成するとともに、絶縁部材の外周面にねじを形成して、ねじ込み方式とすることもできる。また、前記電線と先端部材との接合は、請求項４に記載のように、前記電線の先端を先端部材におけるソケット端子内に嵌合して接合するのが好ましいが、この場合には、圧入による嵌合としてもよいし、嵌合においてロウ付け（又はハンダ付け）或いは導電性接着剤で接着してもよいし、或いはソケット端子を外から潰して電線の先端を圧着するようにしてもよい。 When the insulating member is disposed in the through hole of the base member as described in claim 2, the insulating member may be attached so as not to drop or separate from the through hole. And as the means, it is more preferable to use the adhesion as in the present invention as set forth in claim 3 than to simplify and speed up the assembly of the electrostatic chuck device. However, it may be fixed by press fitting, or a screw may be formed by forming a screw on the inner peripheral surface of the through hole and forming a screw on the outer peripheral surface of the insulating member. The wire and the tip member are preferably joined by fitting the tip of the wire into the socket terminal of the tip member, as described in claim 4. The fitting may be performed by fitting, brazing (or soldering) or bonding with a conductive adhesive, or the socket terminal may be crushed from the outside and the tip of the wire may be crimped. .

また、請求項５又は６に記載の本発明によれば、先端部材が、貫通孔の内周面に固定された絶縁部材の内周面に固定されているため、先端部材自身の位置の安定が得られる。すなわち、本発明においてチャック側端子は、可撓性のある電線の先端に先端部材が接合されてなるものであるから、先端部材は電線の変形にしたがって傾斜したり、横に移動する。一方、電線の変形にしたがって先端部材が自由に傾斜したり、自由に横に移動したりしては、相手側端子との円滑な接合ができない。しかし、本発明のように、先端部材が、貫通孔の内周面に固定された絶縁部材の内周面に固定されている場合には、先端部材自身の位置の安定が得られることから、相手側端子との円滑な接合ができる。つまり、請求項５又は６に記載の絶縁部材は、先端部材がふらついたり、自由に動いたりすることの防止の役割をも果たしている。 According to the invention of claim 5 or 6, since the tip member is fixed to the inner peripheral surface of the insulating member fixed to the inner peripheral surface of the through hole, the position of the tip member itself is stabilized. Is obtained. That is, in the present invention, the chuck-side terminal is formed by joining a tip member to the tip of a flexible electric wire, and therefore the tip member is inclined or moves sideways as the electric wire is deformed. On the other hand, if the tip member freely tilts or freely moves sideways according to the deformation of the electric wire, smooth joining with the mating terminal cannot be performed. However, as in the present invention, when the tip member is fixed to the inner peripheral surface of the insulating member fixed to the inner peripheral surface of the through hole, the stability of the position of the tip member itself can be obtained. Smooth joining with the mating terminal is possible. That is, the insulating member according to claim 5 or 6 also plays a role of preventing the tip member from wobbling or freely moving.

なお、請求項５又は６に記載の本発明においては、チャック側端子の先端部材が、ベース部材の貫通孔の内周面に固定された絶縁部材の内周面に固定されているため、相手側端子から横方向の力を受けたとき、絶縁部材が変形しない限り、先端部材自体が、傾斜したり横に移動（偏心）するように変形することで、前記誤差を吸収することになる。そして、このような場合にも、電線が撓み変形できるため、チャック側端子の根元である電線の基端に大きな力や曲げモーメントが発生しないから、その基端が静電チャックの裏面の端子から分離する等の問題を発生させない。なお、絶縁部材としては、電気的絶縁性がある素材からなるものであればよく、したがってセラミック製でもよいが、先端部材が相手側端子との接合において、相対的に傾斜や横への移動が容易にできるように、ある程度の変形が可能の柔軟性ないし弾性のある合成樹脂で形成するのが好ましい。 In the present invention according to claim 5 or 6, since the tip member of the chuck side terminal is fixed to the inner peripheral surface of the insulating member fixed to the inner peripheral surface of the through hole of the base member, When receiving a lateral force from the side terminal, unless the insulating member is deformed, the tip member itself is deformed so as to be inclined or moved (eccentric) to absorb the error. In such a case, since the electric wire can be bent and deformed, a large force or bending moment is not generated at the base end of the electric wire that is the base of the chuck side terminal. Does not cause problems such as separation. The insulating member may be made of an electrically insulating material, and may be made of ceramic. However, the tip member is relatively inclined or laterally moved when the tip member is joined to the mating terminal. In order to facilitate the formation, it is preferable to form the resin with a flexible or elastic synthetic resin that can be deformed to some extent.

なお、請求項７に記載のように、前記先端部材の先端をオス端子形状としたものでは、処理装置側の相手側端子がメス端子形状のものであっても対応できる。本発明において、可撓性のある電線は、適度の撓み変形が可能であればよく、その材質、構成は限定されるものではないが、請求項８に記載のように、単線よりも、複数の素線（導線又は芯線）を束にしてなるものが好ましく、特に好ましくは、請求項９に記載のような軟銅撚り線である。因みに、先端部材は銅又は銅合金の軸材又は鉄系金属から形成するとよい。本願発明における静電チャック装置のチャック側端子については、静電チャックに対する給電用のものに限定されるものではない。 In addition, as described in claim 7, when the tip of the tip member has a male terminal shape, it is possible to cope with the counterpart terminal on the processing apparatus side having a female terminal shape. In the present invention, the flexible electric wire only needs to be able to be moderately deformed and its material and configuration are not limited. However, as described in claim 8, a plurality of electric wires can be used. Of these, a strand made of bundled strands (conductive wire or core wire) is preferable, and an annealed copper stranded wire as described in claim 9 is particularly preferable. Incidentally, the tip member may be formed of a shaft material of iron or copper or a ferrous metal. The chuck-side terminal of the electrostatic chuck device according to the present invention is not limited to a power supply for the electrostatic chuck.

すなわち、請求項９に記載の本発明のように、ヒーターへの給電用のものにも適用できる。抵抗発熱体（発熱抵抗体ともいわれる）からなるヒーターのように、大電流が流れる場合には、チャック側端子をなす先端部材と、処理装置側の相手側端子とで十分な接触面積が確保される必要があり、両端子間の接合における圧入力を大きく必要とする。したがって、むしろ、このようなものほど、チャック側端子に過大な横荷重がかかりやすく、その根元に大きなせん断力や曲げモーメントがかかる。しかし、本発明では前記電線を用いていることから、その基端（根元）には、大きな力がかからないので、とりわけ効果的である。 That is, the present invention can also be applied to a power supply to a heater as in the present invention described in claim 9. When a large current flows, such as a heater consisting of a resistance heating element (also called a heating resistor), a sufficient contact area is secured between the tip member forming the chuck side terminal and the mating terminal on the processing apparatus side. This requires a large pressure input at the junction between both terminals. Therefore, rather, the larger the lateral load is more likely to be applied to the chuck-side terminal, and a greater shearing force and bending moment are applied to the root of the chuck side terminal. However, in the present invention, since the electric wire is used, a large force is not applied to the base end (base), which is particularly effective.

本発明を実施するための最良の形態について、図１〜図６に基いて詳細に説明する。図１は、本発明に係る静電チャック装置１の中央縦破断面図及びその要部拡大図であり、図２は分解図（断面図）と、その一部部品の拡大断面図である。図３は、図１の静電チャック装置の製造途中を説明する図であって、電線をセラミック基板にロウ付けしたものに、ベース部材を接着した段階の断面図、その要部拡大図である。図４は、図３において、絶縁部材をベース部材の貫通孔に固定した段階の断面図、その要部拡大図である。図５は、図４において、チャック側端子をなす電線に先端部材を接合する状態を説明する部分拡大断面図である。 The best mode for carrying out the present invention will be described in detail with reference to FIGS. FIG. 1 is a central longitudinal sectional view of an electrostatic chuck device 1 according to the present invention and an enlarged view of a main part thereof, and FIG. 2 is an exploded view (sectional view) and an enlarged sectional view of a part thereof. FIG. 3 is a diagram for explaining the manufacturing process of the electrostatic chuck device of FIG. 1, and is a cross-sectional view of a stage where a base member is bonded to an electric wire brazed to a ceramic substrate, and an enlarged view of a main part thereof. . FIG. 4 is a cross-sectional view of the stage where the insulating member is fixed to the through hole of the base member in FIG. FIG. 5 is a partially enlarged cross-sectional view for explaining a state in which the tip member is joined to the electric wire forming the chuck side terminal in FIG. 4.

本形態における静電チャック装置１は、静電チャック１ａをなすセラミック基板２をアルミニウム合金製のベース部材２１に、図示しない接着剤（例えばシリコン樹脂）層によって接着して構成されている。このような静電チャック装置１をなす静電チャック１ａは、一定厚さで略円形の平板形状を呈するセラミック基板２から形成されており、本例ではアルミナ（Ａｌ_２Ｏ_３）を主成分とするセラミック多層（積層）構造の焼結体であり、例えば、厚さが５ｍｍで、直径が、３００ｍｍ、２００ｍｍ又は１５０ｍｍとされる。このセラミック基板２は、表面（上面）３が図示しない半導体ウエハ等の被吸着部材を吸着、保持する平面からなる吸着面とされ、裏面（下面）４がベース部材２１の平面からなる表面（上面）２３に接合される接着面とされている。このセラミック基板２は、その内部に静電力によって被吸着部材を吸着するための静電電極５，５が対をなすように埋設状に設けられている。この静電電極５，５は電極間に電圧を印加することで靜電力を発生させる双極型のものが例示されている。また、本形態の静電チャック装置１においては、セラミック基板２の内部に、電圧を印加することで発熱する抵抗発熱体からなるヒーター１５が埋設状に設けられており、静電チャック１ａを温度制御するように設定されている。なお、セラミック基板２の内部には、図示はなしないが、ベース部材２１に形成されたガス流路に送り込まれたＨｅガスが、セラミック基板２の表面３であるウエハの吸着面に供給されるように、ガス流路がトンネル状に設けられている。 The electrostatic chuck device 1 in this embodiment is configured by adhering a ceramic substrate 2 forming an electrostatic chuck 1a to an aluminum alloy base member 21 with an adhesive (for example, silicon resin) layer (not shown). The electrostatic chuck 1a constituting the electrostatic chuck device 1 is formed of a ceramic substrate 2 having a constant thickness and a substantially circular flat plate shape. In this example, alumina (Al ₂ O ₃ ) is a main component. The sintered body has a ceramic multilayer (laminated) structure. For example, the thickness is 5 mm and the diameter is 300 mm, 200 mm, or 150 mm. The ceramic substrate 2 has a surface (upper surface) 3 that is a suction surface made of a flat surface that sucks and holds a member to be sucked such as a semiconductor wafer (not shown), and a back surface (lower surface) 4 that is a surface (upper surface) that is a plane of the base member 21 ) 23 to be bonded to 23. The ceramic substrate 2 is embedded in the ceramic substrate 2 so that electrostatic electrodes 5 and 5 for attracting the member to be attracted by electrostatic force are paired. The electrostatic electrodes 5 and 5 are illustrated as bipolar types that generate negative power by applying a voltage between the electrodes. Further, in the electrostatic chuck device 1 of this embodiment, a heater 15 made of a resistance heating element that generates heat when a voltage is applied is embedded inside the ceramic substrate 2, and the electrostatic chuck 1 a is heated to a temperature. It is set to control. Although not shown, the He gas sent into the gas flow path formed in the base member 21 is supplied to the inside of the ceramic substrate 2 to the adsorption surface of the wafer, which is the surface 3 of the ceramic substrate 2. In addition, the gas flow path is provided in a tunnel shape.

このような静電チャック１ａ（セラミック基板２）の裏面４の適所には、裏面４に開口する凹部６が静電電極５及びヒーター１５に対応して形成されている。そして、各凹部６内の底面にはメタライズ層からなる電極端子７がセラミック基板２と同時焼成で形成されており、それぞれビア８を介して各静電電極５，５又は抵抗発熱体１５に電気的に接合されている。なお、凹部６は、その径（内径）がφ１０ｍｍで、深さが４ｍｍとされている。また、セラミック基板２は、焼成後、その表裏両面３，４を平面研磨し、その後において各端子７を含む露出するメタライズ層にＮｉメッキがかけられている。 At an appropriate position on the back surface 4 of the electrostatic chuck 1 a (ceramic substrate 2), a recess 6 opening in the back surface 4 is formed corresponding to the electrostatic electrode 5 and the heater 15. An electrode terminal 7 made of a metallized layer is formed on the bottom surface in each recess 6 by simultaneous firing with the ceramic substrate 2, and is electrically connected to each electrostatic electrode 5, 5 or resistance heating element 15 through a via 8. Are joined together. The recess 6 has a diameter (inner diameter) of φ10 mm and a depth of 4 mm. In addition, after firing, the front and back surfaces 3 and 4 of the ceramic substrate 2 are planarly polished, and thereafter, the exposed metallized layer including the terminals 7 is plated with Ni.

この各端子（電極端子）７には、裏面４から突出する状態でチャック側端子３１を構成する、所定の太さ（直径：例えばφ３ｍｍ）及び長さを有し、適度に撓み変形できる電線３２が、例えば銀ロウ（図示せず）によって、その基端面（根元の端面）３４を介してロウ付けされている（図１の拡大図参照）。この電線３２は、多数の細い素線（軟銅線）を束にして撚ったもの（軟銅撚り線）であり、これを一定長さに切断してなるものであり、本形態では絶縁被膜を除去したものであり、フレキシブルな金属撚り線を呈している。ただし、この電線３２は一定長さに切断されてなる自由状態においては、ほぼ真っ直ぐに保持されてなるもので、ロウ付けされた状態においても同様の直線性を呈している。このような電線３２（以下、金属撚り線３２ともいう）を含んでなる、静電電極５，５用又は抵抗発熱体１５用の各チャック側端子３１は、基板２の裏面４において、詳しくは図示しないが所定の配置でそれぞれ複数設けられている。ただし、本形態ではいずれのチャック側端子３１及びその周囲の構成も同様のため、以下、そのうちの１つに基づいて説明する（図１参照）。 Each terminal (electrode terminal) 7 has a predetermined thickness (diameter: for example, φ3 mm) and length, which constitutes the chuck-side terminal 31 in a state of protruding from the back surface 4, and can be appropriately bent and deformed. Is brazed via a base end face (base end face) 34 of, for example, silver brazing (not shown) (see an enlarged view of FIG. 1). The electric wire 32 is formed by twisting a large number of thin strands (an annealed copper wire) in a bundle (an annealed copper strand), and is obtained by cutting the wire to a certain length. It has been removed and exhibits a flexible metal strand. However, the electric wire 32 is held almost straight in a free state where it is cut to a certain length, and exhibits the same linearity even in a brazed state. Each chuck side terminal 31 for the electrostatic electrodes 5, 5 or the resistance heating element 15, which includes such an electric wire 32 (hereinafter also referred to as a metal stranded wire 32), is described in detail on the back surface 4 of the substrate 2. Although not shown, a plurality of them are provided in a predetermined arrangement. However, in this embodiment, since any chuck side terminal 31 and the surrounding configuration are the same, description will be made based on one of them (see FIG. 1).

なお本形態において、チャック側端子３１を構成する金属撚り線３２は、その先端３５寄り部位が、次記する先端部材３６との接合部３２ｂをなしている。この金属撚り線３２は、その先端（図１の下端）３５が、図１に示したように、ベース部材２１の貫通孔２６の中間部位に位置する長さに設定されている。そして、この金属撚り線３２の先端３５寄り部位の接合部３２ｂには、先端部材３６がその基端３６ｂ側（図１上端側）を介して嵌合されて接合されており、チャック側端子３１を構成している。すなわち、本形態では、先端部材３６の基端３６ｂ側はソケット端子３７とされ、このソケット端子３７内に金属撚り線３２の先端３５が圧入状に嵌合されて、電気的に接合されている。なお、先端部材３６は、導電性を有する金属（例えば銅又は銅合金）を大径部と小径部を同心状に形成した異径軸形状とされ、大径部をソケット端子３７とし、その端面（基端３６ｂ面）に金属撚り線３２の先端３５が嵌合可能の円柱状の空孔３９を備えており、金属撚り線３２の先端３５はこの空孔３９内に圧入状に嵌合されている。そして、ソケット端子３７の先端側には同心で先端に向けて延びる円柱軸部４２を一体で備えており、この円柱軸部４２が相手側端子と接続される端子部（本例ではオス端子）をなしている。 In this embodiment, the portion of the metal stranded wire 32 constituting the chuck-side terminal 31 near the tip 35 forms a joint 32b with the tip member 36 described below. As shown in FIG. 1, the metal stranded wire 32 is set to a length at which the tip (lower end in FIG. 1) 35 is located at an intermediate portion of the through hole 26 of the base member 21. A tip member 36 is fitted and joined to the joint 32b near the tip 35 of the metal stranded wire 32 via the base end 36b side (upper side in FIG. 1). Is configured. That is, in this embodiment, the proximal end 36b side of the distal end member 36 is a socket terminal 37, and the distal end 35 of the metal stranded wire 32 is press-fitted into the socket terminal 37 and electrically joined thereto. . The tip member 36 has a different diameter shaft shape in which a conductive metal (for example, copper or copper alloy) is formed with a large diameter portion and a small diameter portion concentrically. The large diameter portion serves as a socket terminal 37, and its end surface. A cylindrical hole 39 into which the tip 35 of the metal stranded wire 32 can be fitted is provided on the (base end 36b surface), and the tip 35 of the metal stranded wire 32 is fitted into the hole 39 in a press-fit manner. ing. And the cylindrical shaft part 42 which is concentrically extended toward the front-end | tip is integrally provided in the front end side of the socket terminal 37, and this cylindrical shaft part 42 is a terminal part (a male terminal in this example) connected with the other party terminal. I am doing.

上記した金属撚り線３２の基端３４がロウ付けされた静電チャック１ａ（セラミック基板２）は、その裏面４を、ベース部材２１の表面（上面）２３に、接着剤層（例えば、シリコーン樹脂からなる接着剤）を介して接着されている（図３参照）。このベース部材２１は、本例ではアルミニウム製で、セラミック基板２より大径をなし、一定厚さの円板形状を呈しており、その表面２３にセラミック基板２を同心状に配置して接合している。このベース部材２１には、静電チャック１ａのチャック側端子３１の配置に対応する位置で、その厚み方向に貫通する貫通孔２６が適数設けられている（図３参照）。そして、金属撚り線３２は、この各貫通孔２６の中央に同心状に位置されている（図３参照）。なお、貫通孔２６は、横断面が円形の円柱状を成している。ただし、セラミック基板２寄り部位が小径をなす径違い状に形成されている。 The electrostatic chuck 1a (ceramic substrate 2) to which the base end 34 of the metal stranded wire 32 is brazed is applied to the surface (upper surface) 23 of the base member 21 with an adhesive layer (for example, a silicone resin). (See FIG. 3). In this example, the base member 21 is made of aluminum, has a larger diameter than the ceramic substrate 2 and has a disk shape with a constant thickness. The ceramic substrate 2 is concentrically arranged on the surface 23 and bonded. ing. The base member 21 is provided with an appropriate number of through holes 26 penetrating in the thickness direction at positions corresponding to the arrangement of the chuck side terminals 31 of the electrostatic chuck 1a (see FIG. 3). And the metal strand 32 is located concentrically in the center of each through-hole 26 (refer FIG. 3). The through hole 26 has a circular columnar cross section. However, the portion close to the ceramic substrate 2 is formed in a different diameter shape having a small diameter.

ベース部材２１におけるこのような貫通孔２６の内側には、合成樹脂などの絶縁材からなり、円筒状をなす絶縁部材５１がチャック側端子３１を包囲する配置で嵌入され、貫通孔２６の内周面に接着等によって固定されている。この絶縁部材５１は、外周面が貫通孔２６の内周面に沿う径違いの円筒形状を呈している。そして、絶縁部材５１の内周面は、それぞれ同心で、セラミック基板２の裏面４から金属撚り線３２の中間部位までが金属撚り線３２の外周面に若干の空隙を保持するように形成された小径孔５３で、金属撚り線３２の長さ方向の中間部位から金属撚り線３２の先端３５を若干超えた部位までが小径孔５３の内径より大きい中径孔５４とされ、残りのベース部材２１の裏面２４側までが中径孔５４の内径より大きい大径孔５５をなしている。なお、中径孔５４の内周面には、先端部材３６をなすソケット端子３７が嵌入されるように形成されている。ただし、本形態では、その中径孔５４の内周面の大径孔５５寄り部位にはメスねじ５６が形成されており、ソケット端子３７の外周面に形成されたオスねじ３８を介して先端部材３６が螺合されるように形成されている。 Inside the through hole 26 in the base member 21, a cylindrical insulating member 51 made of an insulating material such as a synthetic resin is fitted to surround the chuck-side terminal 31. It is fixed to the surface by bonding or the like. The insulating member 51 has a cylindrical shape whose outer peripheral surface is different in diameter along the inner peripheral surface of the through hole 26. The inner peripheral surface of the insulating member 51 is concentric and formed so that the back surface 4 of the ceramic substrate 2 and the intermediate portion of the metal stranded wire 32 hold some gaps on the outer peripheral surface of the metal stranded wire 32. In the small-diameter hole 53, the middle diameter hole 54 larger than the inner diameter of the small-diameter hole 53 is formed from the intermediate portion in the length direction of the metal strand 32 to a portion slightly beyond the tip 35 of the metal strand 32, and the remaining base member 21. A large-diameter hole 55 larger than the inner diameter of the medium-diameter hole 54 is formed up to the back surface 24 side. A socket terminal 37 forming the tip member 36 is formed on the inner peripheral surface of the medium diameter hole 54 so as to be fitted therein. However, in this embodiment, a female screw 56 is formed near the large-diameter hole 55 on the inner peripheral surface of the medium-diameter hole 54, and the tip is inserted through the male screw 38 formed on the outer peripheral surface of the socket terminal 37. The member 36 is formed to be screwed together.

しかして、本形態では、貫通孔２６の内側に固定されている絶縁部材５１の内側のメスネジ５６に対し、先端部材３６におけるソケット端子３７のオスねじ３８を螺合することで、同時に、先端部材３６のソケット端子３７の空孔３９内に金属撚り線３２の先端３５寄り部位である接合部３２ｂを嵌合させ、先端部材３６が絶縁部材５１の内周面に固定させている。なお、本形態では、図３〜５に示したように、金属撚り線３２がロウ付けされた静電チャック１ａを、ベース部材２１の表面（上面）２３に、接着剤層（例えば、シリコーン樹脂からなる接着剤）を介して接着し（図３参照）、次いで、絶縁部材５１をベース部材２１の貫通孔２６内に固定し（図４参照）、その後、図５に示したように、先端部材３６を絶縁部材５１の内周面に前記したようにしてねじ込むことで、金属撚り線３２の先端３５に接合している。そして、この取り付け状態において、ソケット端子３７の先端側に延びる円柱軸部４２は、絶縁部材５１の大径孔５５内において周囲に空隙Ｋを保持して配置されている。なお円柱軸部４２は、上記もしたように、ウエハの処理装置の静電チャック装置取付け部に設けられた相手側端子に接合される端子をなすところであり、相手側端子次第ではメス端子でもよいが本形態ではオス端子をなしている（図１参照）。本形態では、この円柱軸部４２の先端は半球面状に形成されているが、金属撚り線３２に先端部材３６が接合された状態において、ベース部材２１の裏面２４より若干突出するように設定されている。 Thus, in this embodiment, the male screw 38 of the socket terminal 37 in the tip member 36 is screwed into the female screw 56 inside the insulating member 51 fixed to the inside of the through hole 26. A joint portion 32 b that is closer to the tip 35 of the metal stranded wire 32 is fitted into the hole 39 of the socket terminal 37 of 36, and the tip member 36 is fixed to the inner peripheral surface of the insulating member 51. In this embodiment, as shown in FIGS. 3 to 5, the electrostatic chuck 1 a to which the metal strands 32 are brazed is attached to the surface (upper surface) 23 of the base member 21 with an adhesive layer (for example, a silicone resin). (See FIG. 3), and then the insulating member 51 is fixed in the through hole 26 of the base member 21 (see FIG. 4). Thereafter, as shown in FIG. By screwing the member 36 into the inner peripheral surface of the insulating member 51 as described above, the member 36 is joined to the tip 35 of the metal stranded wire 32. In this attached state, the cylindrical shaft portion 42 extending toward the distal end side of the socket terminal 37 is disposed with a gap K around the large-diameter hole 55 of the insulating member 51. As described above, the cylindrical shaft portion 42 forms a terminal to be joined to the mating terminal provided in the electrostatic chuck device mounting portion of the wafer processing apparatus, and may be a female terminal depending on the mating terminal. However, in this embodiment, it is a male terminal (see FIG. 1). In this embodiment, the tip of the cylindrical shaft portion 42 is formed in a hemispherical shape, but is set so as to slightly protrude from the back surface 24 of the base member 21 in a state where the tip member 36 is joined to the metal strand 32. Has been.

しかして、このような本形態の静電チャック装置１において、チャック側端子３１は、従来のように金属製の１本の軸材からなるのではなく、可撓性のある金属撚り線３２と、その先端３５に接合した先端部材３６との接合構造からなるものとされている。したがって、このような静電チャック装置１のチャック側端子３１をなす先端部材３６と、図示しない処理装置側の相手側端子とが嵌合で接合される際において、両端子間に平面的な誤差があったとして、その先端部材３６が相手側端子に圧入されるときは、先端部材３６にはその誤差に対応して横方向から力Ｐを受けることになるが、静電チャック１ａの裏面４に接合されているのが可とう性のある電線３２であることから、その裏面における接合部（電極端子７）には大きな力や曲げモーメントがかかることを防止できる。つまり、その接合において、チャック側端子３１をなす先端部材３６には相手側端子から横方向の力Ｐを受け、先端部材３６は横方向の力により、正規位置より、図１の拡大図中に２点鎖線で示したように変形してその誤差を吸収する。しかし、このような場合においても、チャック側端子３１の基端側に可撓性のある電線３２が用いられていることから、従来のような金属製の１本の軸材からなるチャック側端子による場合に比べると、その根元である電線３２の基端に大きな力（せん断力）や曲げモーメントが発生することを防止できる。したがって、この電線３２の基端３４と、静電チャック１ａの裏面の電極端子７との接合がロウ付け等の接合手段によって接合されているとしても、その接合が破断する等の問題の発生を有効に防止できる。 Therefore, in the electrostatic chuck device 1 of this embodiment, the chuck-side terminal 31 is not made of a single metal shaft member as in the prior art, but a flexible metal strand 32 and , And a tip structure 36 joined to the tip 35. Accordingly, when the tip member 36 constituting the chuck side terminal 31 of the electrostatic chuck apparatus 1 and the mating terminal on the processing apparatus side (not shown) are joined by fitting, a planar error is generated between both terminals. If the tip member 36 is press-fitted into the mating terminal, the tip member 36 receives a force P from the lateral direction corresponding to the error, but the back surface 4 of the electrostatic chuck 1a. Since it is the flexible electric wire 32 that is joined to the wire, it is possible to prevent a large force or bending moment from being applied to the joint (electrode terminal 7) on the back surface. That is, in the joining, the distal end member 36 forming the chuck side terminal 31 receives a lateral force P from the counterpart terminal, and the distal end member 36 is moved from the normal position by the lateral force in the enlarged view of FIG. The deformation is absorbed as indicated by the two-dot chain line to absorb the error. However, even in such a case, since the flexible electric wire 32 is used on the proximal end side of the chuck side terminal 31, the chuck side terminal made of a single metal shaft as in the prior art is used. As compared with the case of the above, it is possible to prevent a large force (shearing force) or bending moment from being generated at the base end of the electric wire 32 that is the base. Therefore, even if the joint between the base end 34 of the electric wire 32 and the electrode terminal 7 on the back surface of the electrostatic chuck 1a is joined by a joining means such as brazing, problems such as breakage of the joint may occur. It can be effectively prevented.

とくに、本形態では、先端部材３６がベース部材２１の貫通孔２６の内周面に固定された絶縁部材５１の内周面にねじ込み方式によって固定されているため、先端部材３６自身の位置の安定が得られる。したがって、静電チャック装置１を半導体ウエハの各処理装置に取り付ける際においては、その先端部材３６を、その処理装置側の静電チャック装置取付け部に設けられた相手側端子との円滑に接合できる。なお、本形態のように先端部材３６が絶縁部材５１に固定されている場合におけるチャック側端子３１と相手側端子との平面上の誤差の吸収は、基本的に先端部材３６自身の変形に依存することになる。 In particular, in this embodiment, since the tip member 36 is fixed to the inner peripheral surface of the insulating member 51 fixed to the inner peripheral surface of the through hole 26 of the base member 21 by a screwing method, the position of the tip member 36 itself is stabilized. Is obtained. Therefore, when the electrostatic chuck apparatus 1 is attached to each processing apparatus for semiconductor wafers, the tip member 36 can be smoothly joined to the counterpart terminal provided at the electrostatic chuck apparatus mounting portion on the processing apparatus side. . In addition, when the tip member 36 is fixed to the insulating member 51 as in the present embodiment, the absorption of the error on the plane between the chuck side terminal 31 and the counterpart terminal basically depends on the deformation of the tip member 36 itself. Will do.

前記形態では、チャック側端子３１をなす先端部材３６を、絶縁部材５１の内周面に形成したメスねじ５６に螺合して固定した場合を例示したが、この固定は、上記もしたように、先端部材３６のソケット端子３７又はソケット端子３７寄り部位の外周面を介して、絶縁部材５１の内周面に接着によるものとしてもよい。 In the above embodiment, the case where the tip member 36 constituting the chuck side terminal 31 is screwed and fixed to the female screw 56 formed on the inner peripheral surface of the insulating member 51 is exemplified, but this fixing is performed as described above. Further, the inner peripheral surface of the insulating member 51 may be bonded to the inner peripheral surface of the insulating member 51 via the outer peripheral surface of the tip member 36 near the socket terminal 37 or the socket terminal 37.

もっとも、チャック側端子３１をなす先端部材３６が金属撚り線３２に対して分離不能に接合されている場合には、先端部材３６は絶縁部材５１の内周面にネジ込みや接着によって固定されていなくともよい。このような静電チャックの一例について、図６に基づいて説明する。ただし、この静電チャック２０１は、チャック側端子２３１をなす先端部材３６の絶縁部材２５１の内周面に対する固定を締り嵌めによっている点のみが上記した実施の形態のものと相違するのみで、その他の点は基本的に共通するためその相違点のみ説明し、共通する部位には同一の符号を付してその説明を省略する。 However, when the tip member 36 that forms the chuck-side terminal 31 is joined to the metal strand 32 in an inseparable manner, the tip member 36 is fixed to the inner peripheral surface of the insulating member 51 by screwing or bonding. Not necessary. An example of such an electrostatic chuck will be described with reference to FIG. However, the electrostatic chuck 201 is different from the above-described embodiment only in that the tip member 36 constituting the chuck-side terminal 231 is fixed to the inner peripheral surface of the insulating member 251 by an interference fit. Since this point is basically the same, only the differences will be described, and the same parts are denoted by the same reference numerals and the description thereof will be omitted.

本例では、ベース部材２１に設けられた貫通孔２６が横断面円形でストレートの孔とされており、この貫通孔２６内に対して、円筒状をなす絶縁部材２５１が挿入されている。絶縁部材２５１は、その外周面を貫通孔２６の内周面に接着剤で接着することで固定されている。一方、先端部材３６は、前記形態のものと同様の形状をなしているが、そのソケット端子３７の外周面３７ｂにはネジは形成されておらず、しかも、ソケット端子３７の外径は絶縁部材２５１の内径より僅かに大きく設定されており、ソケット端子３７が絶縁部材２５１内において締り嵌め状態に保持されている。一方、先端部材３６のソケット端子３７の空孔３９内には金属撚り線３２の先端３５寄り部位である接合部３２ｂが嵌合させられて接合されている。 In this example, the through hole 26 provided in the base member 21 is a straight hole having a circular cross section, and a cylindrical insulating member 251 is inserted into the through hole 26. The insulating member 251 is fixed by bonding its outer peripheral surface to the inner peripheral surface of the through hole 26 with an adhesive. On the other hand, the tip member 36 has the same shape as that of the above-described embodiment, but no screw is formed on the outer peripheral surface 37b of the socket terminal 37, and the outer diameter of the socket terminal 37 is an insulating member. The socket terminal 37 is held in an interference fit state in the insulating member 251. On the other hand, a joining portion 32 b that is a portion closer to the tip 35 of the metal stranded wire 32 is fitted and joined in the hole 39 of the socket terminal 37 of the tip member 36.

本例の静電チャック２０１は、例えば、部品としての金属撚り線３２の先端３５に予めソケット端子３７を介して先端部材３６を接合しておき、その状態のものを静電チャック１ａの裏面４側の電極端子７にロウ付けし、この状態の静電チャック１ａを、ベース部材２１の表面（上面）２３に接着剤層を介して接着し、次いで、絶縁部材２５１をベース部材２１の貫通孔２６内に圧入することで、締り嵌め状態に組立てられる。ただし、金属撚り線３２と先端部材３６との接合には、例えば、導電性接着剤をソケット端子３７の空孔３９内に充填しておいて、金属撚り線３２の先端３５を嵌合して接合するか、或いは半田又はロウ付けによって接合する手段をとることができる。さらには、このような接合を用いることなく、その嵌合後において、ソケット端子３７を外周面から圧着し（カシメ）て金属撚り線３２の先端３５を固定してもよい。また、先端部材３６と金属撚り線３２の接合に導電性接着剤を用いるような場合には、図１の実施の形態において説明したのと同様の組立て順で、組立てることもできる。 In the electrostatic chuck 201 of this example, for example, a tip member 36 is joined to a tip 35 of a metal strand 32 as a component via a socket terminal 37 in advance, and the state in this state is the back surface 4 of the electrostatic chuck 1a. The electrostatic chuck 1 a in this state is brazed to the electrode terminal 7 on the side, and is bonded to the surface (upper surface) 23 of the base member 21 via an adhesive layer, and then the insulating member 251 is attached to the through hole of the base member 21. By being press-fitted into 26, it is assembled in an interference fit state. However, for joining the metal stranded wire 32 and the tip member 36, for example, a conductive adhesive is filled in the hole 39 of the socket terminal 37, and the tip 35 of the metal stranded wire 32 is fitted. It is possible to take a means of joining or joining by soldering or brazing. Further, without using such joining, after the fitting, the socket terminal 37 may be crimped (crimped) from the outer peripheral surface to fix the tip 35 of the metal stranded wire 32. When a conductive adhesive is used for joining the tip member 36 and the metal strand 32, the assembly can be performed in the same assembly order as described in the embodiment of FIG.

上記した各静電チャック１、２０１においては、いずれも先端部材３６を貫通孔２６内において絶縁部材５１，２５１を介して固定したが、本発明では、電線の強度ないし可撓性次第では、このような固定をすることを要しない。すなわち、図６において、例えば、ソケット端子３７の外径が絶縁部材２５１の内径より僅かに小さくされており、ソケット端子３７が絶縁部材２５１内において遊嵌（隙間嵌）状態にあるとしても、先端部材３６と相手側端子との接合において支障がなければよいためである。そして、このように先端部材３６が貫通孔２６内において絶縁部材５１，２５１に固定されていない場合には、先端部材３６は、その隙間がある分、容易に傾斜し或いは横方向に変位ないし偏心することができるため、相手側端子との両端子間の位置ずれが大きな場合であっても接合が可能となる。そして、このような場合においても、金属撚り線３２の基端３４とチャックの裏面の端子７とを接合するロウ付け部には大きなせん断力及び曲げモーメントはかからない。 In each of the electrostatic chucks 1 and 201 described above, the tip member 36 is fixed in the through hole 26 via the insulating members 51 and 251. However, in the present invention, depending on the strength or flexibility of the electric wire, There is no need to fix it. That is, in FIG. 6, for example, even if the outer diameter of the socket terminal 37 is slightly smaller than the inner diameter of the insulating member 251 and the socket terminal 37 is loosely fitted (gap fit) in the insulating member 251, This is because there is no problem in joining the member 36 and the mating terminal. When the tip member 36 is not fixed to the insulating members 51 and 251 in the through hole 26 as described above, the tip member 36 is easily inclined or displaced or eccentric in the lateral direction due to the clearance. Therefore, even if the positional deviation between the two terminals with the counterpart terminal is large, the joining is possible. Even in such a case, a large shearing force and bending moment are not applied to the brazed portion that joins the base end 34 of the metal strand 32 and the terminal 7 on the back surface of the chuck.

上記形態ではいずれも、電線（金属撚り線）の先端を、先端部材の基端のソケット端子内に嵌合した接合構造のものとして具体化したが、本発明ではチャック側端子を、可撓性のある電線と、その先端に接合された先端部材とで形成してなるものであればよく、その接合構造自体は、そのようなソケット端子による嵌合構造に限定されるものではない。具体的には、図示はしないが、先端部材の基端を、横断面がＵ字形状のワイヤバレル（電線圧着部）形状としておき、このワイヤバレルに電線の先端（先端寄り部位）を嵌めて、そのワイヤバレルを圧着によりカシメを行うことで接合してもよい。 In any of the above embodiments, the tip of the electric wire (metal stranded wire) is embodied as a joint structure that fits into the socket terminal at the base end of the tip member. However, in the present invention, the chuck side terminal is flexible. As long as it is formed by a wire having a tip and a tip member joined to the tip of the wire, the joint structure itself is not limited to such a fitting structure using socket terminals. Specifically, although not shown, the base end of the tip member is formed in a wire barrel shape (wire crimping portion) having a U-shaped cross section, and the tip of the wire (the tip side portion) is fitted into this wire barrel. The wire barrel may be joined by crimping by crimping.

さらに上記形態では、チャック側端子をなす先端部材の先端をオス端子形状のものとして具体化したが、本発明においてはこれに限定されるものではない。静電チャック装置が取り付けられる処理装置側の相手側端子に対応する端子形状（構造）とすればよいことはいうまでもない。 Further, in the above embodiment, the tip of the tip member forming the chuck side terminal is embodied as a male terminal shape, but the present invention is not limited to this. Needless to say, the terminal shape (structure) may correspond to the counterpart terminal on the processing apparatus side to which the electrostatic chuck apparatus is attached.

また上記形態では、チャック側端子が金属製ベース部材に形成された貫通孔の内周面に固定された環状又は筒状をなす絶縁部材の内側に配置されてなるものにおいて具体化したが、チャック側端子はその貫通孔内に絶縁を保持して配置されていればよく、したがって、上記したような別部品からなる絶縁部材を用いることなく、貫通孔の内周面に塗布等により絶縁層を形成することも可能である。そして、電線は可撓性のあるものであればよく、また、絶縁被膜付きのものであってもよい。 Further, in the above embodiment, the chuck side terminal is embodied in an arrangement in which the chuck side terminal is disposed inside the annular or cylindrical insulating member fixed to the inner peripheral surface of the through hole formed in the metal base member. The side terminals only need to be arranged so as to retain insulation in the through-holes. Therefore, an insulating layer is applied to the inner peripheral surface of the through-holes by coating or the like without using an insulating member made of another component as described above. It is also possible to form. And an electric wire should just be flexible, and may have an insulating film.

本発明の静電チャック装置の中央縦破断面図及びその要部拡大図。The center longitudinal cross-sectional view of the electrostatic chuck apparatus of this invention and its principal part enlarged view. 図１の静電チャック装置の分解図（断面図）と、その一部部品の拡大断面図。The exploded view (sectional drawing) of the electrostatic chuck apparatus of FIG. 1, and the expanded sectional view of the one part component. 図１の静電チャック装置の製造途中を説明する図であって、電線をセラミック基板にロウ付けしたものに、ベース部材を接着した段階の断面図、その要部拡大図。It is a figure explaining the manufacture middle of the electrostatic chuck apparatus of FIG. 1, Comprising: Sectional drawing of the step which adhere | attached the base member on what brazed the electric wire to the ceramic substrate, and the principal part enlarged view. 図３において、絶縁部材をベース部材の貫通孔に固定した段階の断面図、その要部拡大図。In FIG. 3, sectional drawing of the step which fixed the insulating member to the through-hole of the base member, The principal part enlarged view. 図４において、チャック側端子をなす電線に先端部材を接合する状態を説明する部分拡大断面図。In FIG. 4, the partial expanded sectional view explaining the state which joins a front-end | tip member to the electric wire which makes a chuck | zipper side terminal. 本発明の静電チャック装置の別形態を説明する中央縦破断面図及びその要部拡大図。The center longitudinal cross-sectional view explaining the another form of the electrostatic chuck apparatus of this invention, and its principal part enlarged view. 処理装置側の相手側端子をソケット端子とし、静電チャック装置のチャック側端子を貫通孔内において突出状のものとした説明図。Explanatory drawing which made the other party terminal by the side of a processing apparatus a socket terminal, and made the chuck | zipper side terminal of an electrostatic chuck apparatus the thing of a projection shape in a through-hole.

Explanation of symbols

１、２０１静電チャック装置
１ａ静電チャック
２セラミック基板
４静電チャックの裏面
５静電電極
１５ヒーター
２１金属製ベース部材
２６ベース部材の貫通孔
３１、２３１チャック側端子
３２電線（金属撚り線）
３４金属撚り線の基端
３５金属撚り線（電線）の先端
３６先端部材
３６ｂ先端部材の基端
３７ソケット端子
３７ｂソケット端子の外周面
３８先端部材のソケット端子の外周面のオスねじ
５１、２５１絶縁部材
５６絶縁部材の内周面のメスねじ DESCRIPTION OF SYMBOLS 1,201 Electrostatic chuck apparatus 1a Electrostatic chuck 2 Ceramic substrate 4 Back surface of electrostatic chuck 5 Electrostatic electrode 15 Heater 21 Metal base member 26 Base member through-holes 31 and 231 Chuck side terminal 32 Electric wire (metal stranded wire)
34 Metal stranded wire proximal end 35 Metal stranded wire (electric wire) distal end 36 Tip member 36b Tip member proximal end 37 Socket terminal 37b Socket terminal outer peripheral surface 38 Male screw 51, 251 of outer peripheral surface of socket terminal of tip member Insulation Member 56 Female screw on inner surface of insulating member

Claims

An electrostatic chuck device comprising: an electrostatic chuck having an electrostatic electrode formed on a ceramic substrate; and a metal base member joined to the back surface of the electrostatic chuck. A plurality of metal chuck-side terminals formed in a predetermined arrangement in a protruding shape are respectively arranged in the through holes formed in a plurality of predetermined arrangements in the metal base member while maintaining insulation.
Each chuck side terminal is press-fitted into and joined to a plurality of processing device side socket terminals forming counterpart terminals arranged corresponding to the arrangement of the chuck side terminals on the processing device side to which the electrostatic chuck device is attached. Is,
The chuck-side terminal is formed by a flexible electric wire having a base end bonded to the electrode terminal on the back surface of the electrostatic chuck, and a tip member bonded to the tip of the electric wire. The electrostatic chuck device is characterized in that it is arranged in the through-hole with a gap held on its outer peripheral surface .

An electrostatic chuck device comprising: an electrostatic chuck having an electrostatic electrode formed on a ceramic substrate; and a metal base member joined to the back surface of the electrostatic chuck. A plurality of metal chuck-side terminals formed in a projecting manner in a predetermined arrangement form an annular or cylindrical shape fixed to the inner peripheral surface of each of the through holes formed in the metal base member in a predetermined arrangement. In what is arranged inside the insulating member,
Each chuck side terminal is press-fitted into and joined to a plurality of processing device side socket terminals forming counterpart terminals arranged corresponding to the arrangement of the chuck side terminals on the processing device side to which the electrostatic chuck device is attached. Is,
The chuck-side terminal is formed by a flexible electric wire having a base end bonded to the electrode terminal on the back surface of the electrostatic chuck, and a tip member bonded to the tip of the electric wire. The electrostatic chuck device is characterized in that it is arranged in the through-hole with a gap held on its outer peripheral surface .

The electrostatic chuck apparatus according to claim 2, wherein the insulating member is fixed to an inner peripheral surface of the through hole by adhesion.

The said front-end | tip member is equipped with the socket terminal in the base end, The front-end | tip of the said electric wire is fitted and joined in the socket terminal, The any one of Claims 1-3 characterized by the above-mentioned. Electrostatic chuck device.

The tip member has a socket terminal at the base end, and the tip of the electric wire is fitted and joined in the socket terminal;
The insulating member is provided with a female screw on the inner peripheral surface thereof, and a male screw that is screwed into the female screw is provided on the outer peripheral surface of the socket member or the portion near the socket terminal of the tip member. The static member according to claim 2 or 3, wherein the tip member is fixed by screwing the tip member into an insulating member, and the tip of the electric wire is fitted and joined into the socket terminal. Electric chuck device.

The tip member has a socket terminal at the base end, and the tip of the electric wire is fitted and joined in the socket terminal;
The electrostatic chuck device according to claim 2 or 3, wherein the electrostatic chuck device is fixed to the inner peripheral surface of the insulating member via an outer peripheral surface of the socket terminal or a portion close to the socket terminal.

The electrostatic chuck device according to claim 1, wherein the tip of the tip member has a male terminal shape.

The electrostatic chuck device according to claim 1, wherein the electric wire is a bundle of a plurality of strands.

The electrostatic chuck apparatus according to any one of claims 1 to 7, wherein the electric wire is made of an annealed copper stranded wire.

10. The electrostatic chuck according to claim 1, wherein a heater made of a resistance heating element is provided in the electrostatic chuck, and the chuck side terminal is for supplying power to the heater. The electrostatic chuck device according to the item.

The tip member is integrally provided with a cylindrical shaft portion concentrically extending toward the tip on the tip side, and the cylindrical shaft portion is disposed with a gap in the through hole. The electrostatic chuck device according to any one of claims 1 to 10.