JP7023121B2 - アクティブ除振装置 - Google Patents

アクティブ除振装置 Download PDF

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Publication number
JP7023121B2
JP7023121B2 JP2018004179A JP2018004179A JP7023121B2 JP 7023121 B2 JP7023121 B2 JP 7023121B2 JP 2018004179 A JP2018004179 A JP 2018004179A JP 2018004179 A JP2018004179 A JP 2018004179A JP 7023121 B2 JP7023121 B2 JP 7023121B2
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JP
Japan
Prior art keywords
stage
control
vibration
resonance
thrust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018004179A
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English (en)
Japanese (ja)
Other versions
JP2019124265A (ja
Inventor
伊知郎 岸本
成吾 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurashiki Kako Co Ltd
Original Assignee
Kurashiki Kako Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurashiki Kako Co Ltd filed Critical Kurashiki Kako Co Ltd
Priority to JP2018004179A priority Critical patent/JP7023121B2/ja
Priority to KR1020207019899A priority patent/KR102524277B1/ko
Priority to CN201880085570.1A priority patent/CN111566379B/zh
Priority to PCT/JP2018/040116 priority patent/WO2019138656A1/ja
Priority to TW108100906A priority patent/TWI802630B/zh
Publication of JP2019124265A publication Critical patent/JP2019124265A/ja
Application granted granted Critical
Publication of JP7023121B2 publication Critical patent/JP7023121B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Paper (AREA)
JP2018004179A 2018-01-15 2018-01-15 アクティブ除振装置 Active JP7023121B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018004179A JP7023121B2 (ja) 2018-01-15 2018-01-15 アクティブ除振装置
KR1020207019899A KR102524277B1 (ko) 2018-01-15 2018-10-29 능동형 제진장치
CN201880085570.1A CN111566379B (zh) 2018-01-15 2018-10-29 主动隔振装置
PCT/JP2018/040116 WO2019138656A1 (ja) 2018-01-15 2018-10-29 アクティブ除振装置
TW108100906A TWI802630B (zh) 2018-01-15 2019-01-09 主動隔振裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018004179A JP7023121B2 (ja) 2018-01-15 2018-01-15 アクティブ除振装置

Publications (2)

Publication Number Publication Date
JP2019124265A JP2019124265A (ja) 2019-07-25
JP7023121B2 true JP7023121B2 (ja) 2022-02-21

Family

ID=67218249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018004179A Active JP7023121B2 (ja) 2018-01-15 2018-01-15 アクティブ除振装置

Country Status (5)

Country Link
JP (1) JP7023121B2 (zh)
KR (1) KR102524277B1 (zh)
CN (1) CN111566379B (zh)
TW (1) TWI802630B (zh)
WO (1) WO2019138656A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116822157B (zh) * 2023-06-05 2024-05-07 哈尔滨工业大学 一种柔性基础激振台共振抑制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195064A (ja) 2004-01-05 2005-07-21 Laserfront Technologies Inc 機械テーブル除振装置及び除振方法
JP2007155038A (ja) 2005-12-06 2007-06-21 Showa Science Co Ltd 除振装置
JP4970904B2 (ja) 2006-11-06 2012-07-11 倉敷化工株式会社 アクティブ除振装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3616399B2 (ja) * 1993-03-26 2005-02-02 昭和電線電纜株式会社 能動型除振装置
JPH088159A (ja) * 1994-06-17 1996-01-12 Nikon Corp 走査型露光装置
KR100483982B1 (ko) 1996-06-07 2005-08-10 가부시키가이샤 니콘 진동절연장치및노광장치
JP4144980B2 (ja) * 1999-09-22 2008-09-03 オリンパス株式会社 ステージ装置
JP2004363085A (ja) * 2003-05-09 2004-12-24 Ebara Corp 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法
JP2006283966A (ja) * 2005-03-10 2006-10-19 Kurashiki Kako Co Ltd アクティブ除振装置
JP4528338B2 (ja) * 2008-03-04 2010-08-18 キヤノン株式会社 制振装置、露光装置及びデバイス製造方法
CN102235458B (zh) * 2010-05-07 2013-05-22 上海微电子装备有限公司 一种主动减震隔振装置
JP6587487B2 (ja) * 2015-09-30 2019-10-09 倉敷化工株式会社 アクティブ除振装置及びそのセンサの設置方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195064A (ja) 2004-01-05 2005-07-21 Laserfront Technologies Inc 機械テーブル除振装置及び除振方法
JP2007155038A (ja) 2005-12-06 2007-06-21 Showa Science Co Ltd 除振装置
JP4970904B2 (ja) 2006-11-06 2012-07-11 倉敷化工株式会社 アクティブ除振装置

Also Published As

Publication number Publication date
TWI802630B (zh) 2023-05-21
TW201933018A (zh) 2019-08-16
WO2019138656A1 (ja) 2019-07-18
KR20200105841A (ko) 2020-09-09
JP2019124265A (ja) 2019-07-25
CN111566379A (zh) 2020-08-21
KR102524277B1 (ko) 2023-04-20
CN111566379B (zh) 2022-03-04

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