JP7012473B2 - モジュール、半導体モジュール及びボンディングツール - Google Patents
モジュール、半導体モジュール及びボンディングツール Download PDFInfo
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- JP7012473B2 JP7012473B2 JP2017134887A JP2017134887A JP7012473B2 JP 7012473 B2 JP7012473 B2 JP 7012473B2 JP 2017134887 A JP2017134887 A JP 2017134887A JP 2017134887 A JP2017134887 A JP 2017134887A JP 7012473 B2 JP7012473 B2 JP 7012473B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48455—Details of wedge bonds
- H01L2224/48456—Shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
- H01L2224/78314—Shape
- H01L2224/78315—Shape of the pressing surface, e.g. tip or head
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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Description
Claims (8)
- 導電パッドに対して圧着される帯状の導電リボンが、前記導電リボンの幅方向に離散的に配列された複数の圧痕を有する主接合部を介して前記導電パッドに対して圧着されたモジュールであって、
前記導電リボンと前記導電パッドとを接合し、前記導電リボンの幅方向に直線状に連続して設けられる直線状の窪みからなる圧痕を有する直線状接合部を備え、
前記導電リボンは、前記直線状接合部を起点として前記導電パッドから離間する方向に向けて起立されている
ことを特徴とするモジュール。 - 前記直線状接合部の前記主接合部側に隣接配置されると共に前記導電リボンの幅方向に離散的に複数設けられる圧痕を有する点状接合部を備えることを特徴とする請求項1記載のモジュール。
- 前記導電リボンの幅方向と直交する断面視にて、前記直線状接合部の圧痕と前記点状接合部の圧痕とを合わせた形状が、前記主接合部の前記圧痕の形状と一致されていることを特徴とする請求項2記載のモジュール。
- 請求項1~3のいずれか一項に記載のモジュールからなる、あるいは、請求項1~3のいずれか一項に記載のモジュールを備え、
前記導電パッドに対して前記導電リボンによって接続された半導体チップを備える
ことを特徴とする半導体モジュール。 - 先端面側を帯状の導電リボンに対して押圧させて超音波振動を伝達することによって前記導電リボンを導電パッドに圧着させる棒状のボンディングツールであって、
前記先端面に設けられると共に2次元的に配列される複数の突起部を有する主当接部と、
前記先端面の前記主当接部と隣接する領域に設けられると共に前記突起部同士の間を埋設した直線的に連続した形状を有する直線状突起部と
を有することを特徴とするボンディングツール。 - 前記先端面を有すると共に前記直線状突起部が前記先端面の端部に配置された基台を有し、
前記基台は、前記直線状突起部が配置された端部に位置する角部に前記直線状突起部と連続した形状を有する面取り部を備えている
ことを特徴とする請求項5記載のボンディングツール。 - 前記直線状突起部は、
同一断面形状にて直線状に連続する先端部と、
前記先端部よりも前記主当接部側に設けられると共に前記先端部が連続する方向に離散的に配列された複数の段部と
を有することを特徴とする請求項5または6記載のボンディングツール。 - 前記直線状突起部が連続する方向にて前記主当接部を間に挟んで配置される一対の壁部を有することを特徴とする請求項5~7いずれか一項に記載のボンディングツール。
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JP7012473B2 true JP7012473B2 (ja) | 2022-01-28 |
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Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020093055A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093037A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093056A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093043A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093060A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093044A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093057A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093036A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093047A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093041A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093054A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093042A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093059A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
JP2020093046A (ja) * | 2018-12-12 | 2020-06-18 | 株式会社三洋物産 | 遊技機 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011003631A (ja) | 2009-06-17 | 2011-01-06 | Mitsubishi Electric Corp | 電力半導体装置 |
JP2012124247A (ja) | 2010-12-07 | 2012-06-28 | Mitsubishi Electric Corp | 接合具、半導体装置の製造方法および半導体装置 |
JP2012152792A (ja) | 2011-01-27 | 2012-08-16 | Mitsubishi Electric Corp | 超音波接合装置および超音波接合方法 |
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- 2017-07-10 JP JP2017134887A patent/JP7012473B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011003631A (ja) | 2009-06-17 | 2011-01-06 | Mitsubishi Electric Corp | 電力半導体装置 |
JP2012124247A (ja) | 2010-12-07 | 2012-06-28 | Mitsubishi Electric Corp | 接合具、半導体装置の製造方法および半導体装置 |
JP2012152792A (ja) | 2011-01-27 | 2012-08-16 | Mitsubishi Electric Corp | 超音波接合装置および超音波接合方法 |
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