JP7004058B2 - 異方導電性フィルム及び接続構造体 - Google Patents
異方導電性フィルム及び接続構造体 Download PDFInfo
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- JP7004058B2 JP7004058B2 JP2020219026A JP2020219026A JP7004058B2 JP 7004058 B2 JP7004058 B2 JP 7004058B2 JP 2020219026 A JP2020219026 A JP 2020219026A JP 2020219026 A JP2020219026 A JP 2020219026A JP 7004058 B2 JP7004058 B2 JP 7004058B2
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- conductive film
- anisotropic conductive
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- axis
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- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
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Description
所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムの略フィルム幅方向に延び、該配列軸が異方導電性フィルムの長手方向に所定の軸ピッチで連続的に配列しており、異方導電性フィルムで接続する電子部品の端子配列領域と異方導電性フィルムとを、各端子の長手方向とフィルム幅方向が合うように重ねた場合に、各端子上に3個以上40個以下の導電粒子が存在するように、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸の傾斜角が端子の外形に応じて定められている異方導電性フィルムを提供する。
任意に選択した、長さがフィルムの長手方向の5~400μm、幅がフィルム幅の領域において、導電粒子が3~3200個存在し、該領域において所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムのフィルム幅方向と斜交し、該配列軸が異方導電性フィルムの長手方向に並列している異方性導電フィルムを提供する。
図2Bの場合 Tanθ=(L2+L4-D)/(L1-D)≒(L2+L4)/L1 式(2)
ここで、導電粒子の粒径Dに対して端子長L1や端子幅L2が十分に大きい場合、
(L2/L1)≦Tanθ≦(L2+L4)/L1
で近似できる。
図2Aの場合 粒子ピッチP1=(L3-D)/(n-1)≒L3 /2
図2Bの場合 粒子ピッチP1=(L5-D)/(n-1)≒L5 /2
図2Bに示したように、 P1≒L5 /2
で近似できる。
図2Aの場合 軸ピッチP2=(L2-D)/ 2
図2Bの場合 軸ピッチP2={(L2+L4)-D}/ 2
示した異方導電性フィルム1Aでは矩形状の長辺側端部近傍に端子列がある一般的なCOGに用いられるICチップを想定した電子部品20の、出力側端子21に対応した導電粒子の配列領域3aと入力側端子24に対応した導電粒子の配列領域3bが、導電粒子が配置されていないバッファー領域4を挟んで異方導電性フィルム1Aの長手方向に連続的に形成されている。このように電子部品の端子配列に応じて導電粒子の配列領域を複数列設けることによっても、接続に寄与しない導電粒子を低減し、異方導電性フィルムの製造コストを抑えることができる。なお、バッファー領域4には、導電粒子が全く存在しない領域だけでなく、異方性接続に支障がきたされない限りで導電粒子が所定の規則的な配列には配置されていない領域を含めることができる。このような領域の存在を許容することで、導電粒子の配置不良を若干含んだものであっても異方導電性フィルムの製品として提供することが可能となり、製品の歩留まりを向上させ、コストを削減することができる。
なお、図5に示したように、導電粒子をフィルム一面に存在している場合、導電粒子の配置は、上述したように端子幅又は端子面積が最小の端子配列の端子に合わせて設計することが好ましい。
実施例1~11、比較例1、2
(1)COG接続用の異方導電性フィルムの製造
実施例1~11、比較例1、2に関し、表1に示す組成の樹脂組成物をそれぞれ調製し、それを、フィルム厚さ50μmのPETフィルム上に塗布し、80℃のオーブンにて5分間乾燥させ、PETフィルム上にそれぞれ以下に示す厚みで形成した。
外形 1.8×20mm、厚さ0.5mm
厚み 0.2mm
バンプ仕様 金メッキ、高さ12μm、サイズ15×100μm、バンプ間距離13μm、バンプ個数 1300個(外形の長辺側に650個ずつが配列)
アライメントマーク 100μm×100μm
ガラス材質 コーニング社製
外形 30×50mm
厚み 0.5mm
電極 ITO配線
各実施例及び比較例の異方導電性フィルムを、表2~表4に示したバンプサイズのICチップとそれに対応するガラス基板との間に挟み、加熱加圧(180℃、80MPa、5秒)して評価用接続物を得、その評価用接続物について以下の試験を行った。
評価用接続前の端子200個をガラス面側から観察することにより、端子1個あたりに載っている捕捉可能な導電粒子数を調べ、次の基準で評価した。
A:10個以上
B:5個以上10個未満
C:3個以上5個未満
D:3個未満
評価用接続物の導通抵抗を測定し、次の基準で評価した。
OK:2Ω未満
NG:2Ω以上
評価用接続物を温度85℃、湿度85%RHの恒温槽に500時間おき、導通抵抗を測定し、次の基準で評価した。
OK:8Ω未満
NG:8Ω以上
ショート発生率の評価用ICとして次のIC(7.5μmスペースの櫛歯TEG(test element group))を用意した。
外径 1.5×13mm
厚み 0.5mm
バンプ仕様 金メッキ、高さ15μm、サイズ25×140μm、バンプ間距離7.5μm
OK:200ppm未満
NG:200ppm以上
2、2a、2b、2c 導電粒子
3a、3b 導電粒子の配列領域
4 バッファー領域
5 アライメントマークに対応した導電粒子配列領域
10 絶縁接着剤層
20 ICチップ、電子部品
21 出力側端子、バンプ
22a、22b 出力側端子の角隅部、端部
24 入力側端子、バンプ
25 サイド端子
A1、A2 配列軸
D 粒子径
L1 端子長
L2 端子幅
L3 端子における対角線の長さ
L4 端子間距離
L5 1ピッチと端子長L1の矩形における対角線の長さ
P1 粒子ピッチ
P2 軸ピッチ
θ 配列軸のフィルム幅方向に対する角度(傾斜角)
Claims (19)
- 絶縁接着剤層に導電粒子を配置することを含む、異方導電性フィルムの製造方法であって、
該異方導電性フィルムにおいては、所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムの略フィルム幅方向に延び、該配列軸が異方導電性フィルムの長手方向に所定の軸ピッチで連続的に配列しており、異方導電性フィルムで接続する電子部品の端子配列領域と異方導電性フィルムとを、各端子の長手方向とフィルム幅方向が合うように重ねた場合に、各端子上に3個以上40個以下の導電粒子が存在し且つ各端子を3本以上の配列軸が横切るように、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸がフィルム幅方向となす角度(以下、配列軸の傾斜角という)が端子の外形に応じて定められていることを特徴とする異方導電性フィルムの製造方法。 - 絶縁接着剤層に導電粒子を配置することを含む、異方導電性フィルムの製造方法であって、
該異方導電性フィルムにおいては、任意に選択した、長さがフィルムの長手方向の5~400μm、幅がフィルム幅の領域において、導電粒子が3~3200個存在し、該領域において所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムのフィルム幅方向と斜交し、該配列軸が異方導電性フィルムの長手方向に並列しており、導電粒子の配列軸は、異方導電性フィルムで接続する電子部品の一つの端子に3本以上横切るように配置されていることを特徴とする異方導電性フィルムの製造方法。 - 異方導電性フィルムで接続する電子部品が、配列ピッチの異なる複数の端子配列領域を有する場合に、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸の傾斜角が、前記複数の端子配列領域に含まれる端子のうち幅もしくは面積が最小の端子の外形に応じて定められている請求項1又は2記載の異方導電性フィルムの製造方法。
- 導電粒子配列領域が、異方導電性フィルムで接続する電子部品の端子配列領域の外形に対応して異方導電性フィルムの長手方向に複数列形成されている請求項1~3のいずれかに記載の異方導電性フィルムの製造方法。
- 電子部品のアライメントマークの外形に対応した導電粒子配列領域が、異方導電性フィルムの長手方向に周期的に形成されている請求項1~4のいずれかに記載の異方導電性フィルムの製造方法。
- 導電粒子の配列軸として、異方導電性フィルムのフィルム幅方向に対する傾斜角が異なる複数種の配列軸が存在する請求項1~5のいずれかに記載の異方導電性フィルムの製造方法。
- 絶縁接着剤層と、該絶縁接着剤層に配置された導電粒子を含み、対向する電子部品の端子間を異方性導電接続するための異方導電性フィルムであって、
所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムの略フィルム幅方向に延び、該配列軸が異方導電性フィルムの長手方向に所定の軸ピッチで連続的に配列しており、異方導電性フィルムで接続する電子部品の端子配列領域と異方導電性フィルムとを、各端子の長手方向とフィルム幅方向が合うように重ねた場合に、各端子上に3個以上40個以下の導電粒子が存在し且つ各端子を3本以上の配列軸が横切るように、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸がフィルム幅方向となす角度(以下、配列軸の傾斜角という)が端子の外形に応じて定められている異方導電性フィルム。 - 異方導電性フィルムで接続する電子部品が、配列ピッチの異なる複数の端子配列領域を有する場合に、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸の傾斜角が、前記複数の端子配列領域に含まれる端子のうち幅もしくは面積が最小の端子の外形に応じて定められている請求項7記載の異方導電性フィルム。
- 導電粒子配列領域が、異方導電性フィルムで接続する電子部品の端子配列領域の外形に対応して異方導電性フィルムの長手方向に複数列形成されている請求項7又は8記載の異方導電性フィルム。
- 電子部品のアライメントマークの外形に対応した導電粒子配列領域が、異方導電性フィルムの長手方向に周期的に形成されている請求項7~9のいずれかに記載の異方導電性フィルム。
- 導電粒子の配列軸として、異方導電性フィルムのフィルム幅方向に対する傾斜角が異なる複数種の配列軸が存在する請求項7~10のいずれかに記載の異方導電性フィルム。
- 絶縁接着剤層と、該絶縁接着剤層に配置された導電粒子を含み、対向する電子部品の端子間を異方性導電接続するための異方導電性フィルムであって、
任意に選択した、長さがフィルムの長手方向の5~400μm、幅がフィルム幅の領域において、導電粒子が3~3200個存在し、該領域において所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムのフィルム幅方向と斜交し、該配列軸が異方導電性フィルムの長手方向に並列しており、導電粒子の配列軸は、異方導電性フィルムで接続する電子部品の一つの端子に3本以上横切るように配置されている異方導電性フィルム。 - 絶縁接着剤層に導電粒子を配置することを含む、異方導電性フィルムの設計方法であって、
該異方導電性フィルムにおいては、所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムの略フィルム幅方向に延び、該配列軸が異方導電性フィルムの長手方向に所定の軸ピッチで連続的に配列しており、異方導電性フィルムで接続する電子部品の端子配列領域と異方導電性フィルムとを、各端子の長手方向とフィルム幅方向が合うように重ねた場合に、各端子上に3個以上40個以下の導電粒子が存在し且つ各端子を3本以上の配列軸が横切るように、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸がフィルム幅方向となす角度(以下、配列軸の傾斜角という)を端子の外形に応じて定めることを特徴とする異方導電性フィルムの設計方法。 - 絶縁接着剤層に導電粒子を配置することを含む、異方導電性フィルムの設計方法であって、
該異方導電性フィルムにおいては、任意に選択した、長さがフィルムの長手方向の5~400μm、幅がフィルム幅の領域において、導電粒子が3~3200個存在し、該領域において所定の粒子ピッチの導電粒子の配列軸が、異方導電性フィルムのフィルム幅方向と斜交し、該配列軸が異方導電性フィルムの長手方向に並列するように、導電粒子の配列軸を、異方導電性フィルムで接続する電子部品の一つの端子に3本以上横切るように配置することを特徴とする異方導電性フィルムの設計方法。 - 異方導電性フィルムで接続する電子部品が、配列ピッチの異なる複数の端子配列領域を有する場合に、配列軸における粒子ピッチ、配列軸の軸ピッチ、及び配列軸の傾斜角が、前記複数の端子配列領域に含まれる端子のうち幅もしくは面積が最小の端子の外形に応じて定める、請求項13又は14記載の異方導電性フィルムの設計方法。
- 導電粒子配列領域を、異方導電性フィルムで接続する電子部品の端子配列領域の外形に対応して異方導電性フィルムの長手方向に複数列形成する、請求項13~15のいずれかに記載の異方導電性フィルムの設計方法。
- 電子部品のアライメントマークの外形に対応した導電粒子配列領域を、異方導電性フィルムの長手方向に周期的に形成する請求項13~16のいずれかに記載の異方導電性フィルムの設計方法。
- 導電粒子の配列軸として、異方導電性フィルムのフィルム幅方向に対する傾斜角が異なる複数種の配列軸を存在させる請求項13~17のいずれかに記載の異方導電性フィルムの設計方法。
- 異方導電性フィルムで第1電子部品と第2電子部品が異方導電性接続されている接続構造体の設計方法であって、異方導電性フィルムとして、請求項7~12のいずれかに記載の異方導電性フィルムを使用する、接続構造体の設計方法。
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---|---|---|---|---|
JP7274810B2 (ja) * | 2016-05-05 | 2023-05-17 | デクセリアルズ株式会社 | 異方性導電フィルム |
JP7095227B2 (ja) * | 2016-05-05 | 2022-07-05 | デクセリアルズ株式会社 | 異方性導電フィルム |
WO2017191772A1 (ja) * | 2016-05-05 | 2017-11-09 | デクセリアルズ株式会社 | フィラー配置フィルム |
KR102621211B1 (ko) * | 2016-05-05 | 2024-01-04 | 데쿠세리아루즈 가부시키가이샤 | 이방성 도전 필름 |
US20170338204A1 (en) * | 2016-05-17 | 2017-11-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Device and Method for UBM/RDL Routing |
KR102519126B1 (ko) * | 2018-03-30 | 2023-04-06 | 삼성디스플레이 주식회사 | 표시 장치 |
CN110557887B (zh) * | 2018-05-31 | 2021-10-12 | 京东方科技集团股份有限公司 | 电路对位组件及显示装置 |
JP7237790B2 (ja) * | 2019-03-04 | 2023-03-13 | 株式会社東芝 | 半導体装置 |
KR20210018700A (ko) | 2019-08-09 | 2021-02-18 | 삼성디스플레이 주식회사 | 접착 부재 및 이를 포함한 표시장치 |
TW202130748A (zh) * | 2019-10-15 | 2021-08-16 | 國立大學法人京都大學 | 導電膜、分散體及其等之製造方法、以及含導電膜之裝置 |
JP2022038109A (ja) * | 2020-08-26 | 2022-03-10 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
JP2023117329A (ja) * | 2022-02-10 | 2023-08-23 | デクセリアルズ株式会社 | 導電フィルムの設計方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003208931A (ja) | 2002-10-04 | 2003-07-25 | Hitachi Chem Co Ltd | 接続部材 |
JP4887700B2 (ja) | 2005-09-09 | 2012-02-29 | 住友ベークライト株式会社 | 異方導電性フィルムおよび電子・電機機器 |
WO2013089199A1 (ja) | 2011-12-16 | 2013-06-20 | 旭化成イーマテリアルズ株式会社 | 異方導電性フィルム付き半導体チップ、異方導電性フィルム付き半導体ウェハ、及び半導体装置 |
JP2014075317A (ja) | 2012-10-05 | 2014-04-24 | Sumitomo Bakelite Co Ltd | 導電接続シート、半導体装置および電子機器 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE794600A (fr) | 1972-01-28 | 1973-05-16 | Usel Hubert | Cartouche sans etui pour mise a feu electrique |
JPH0582199A (ja) * | 1991-05-28 | 1993-04-02 | Minato Electron Kk | 異方導電性コネクタを有するコネクタ配置構造および異方導電性コネクタ |
JPH09320345A (ja) * | 1996-05-31 | 1997-12-12 | Whitaker Corp:The | 異方導電性フィルム |
JPH1021741A (ja) * | 1996-07-03 | 1998-01-23 | Asahi Chem Ind Co Ltd | 異方導電性組成物及びフィルム |
JP3371894B2 (ja) * | 1999-09-17 | 2003-01-27 | ソニーケミカル株式会社 | 接続材料 |
JP5196703B2 (ja) * | 2004-01-15 | 2013-05-15 | デクセリアルズ株式会社 | 接着フィルム |
JP5082199B2 (ja) | 2005-03-31 | 2012-11-28 | 凸版印刷株式会社 | インクジェット塗工機のインクジェット吐出データ多階調化方法 |
JP4880533B2 (ja) * | 2007-07-03 | 2012-02-22 | ソニーケミカル&インフォメーションデバイス株式会社 | 異方性導電膜及びその製造方法、並びに接合体 |
JP5499448B2 (ja) * | 2008-07-16 | 2014-05-21 | デクセリアルズ株式会社 | 異方性導電接着剤 |
JP2010199087A (ja) * | 2010-05-11 | 2010-09-09 | Sony Chemical & Information Device Corp | 異方性導電膜及びその製造方法、並びに、接合体及びその製造方法 |
US20120295098A1 (en) * | 2011-05-19 | 2012-11-22 | Trillion Science, Inc. | Fixed-array anisotropic conductive film using surface modified conductive particles |
JP2013105636A (ja) * | 2011-11-14 | 2013-05-30 | Dexerials Corp | 異方性導電フィルム、接続方法、及び接合体 |
JP6209313B2 (ja) * | 2012-02-20 | 2017-10-04 | デクセリアルズ株式会社 | 異方性導電フィルム、接続構造体、接続構造体の製造方法及び接続方法 |
CN107960139B (zh) | 2015-05-27 | 2019-11-08 | 迪睿合株式会社 | 各向异性导电膜和连接结构体 |
-
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003208931A (ja) | 2002-10-04 | 2003-07-25 | Hitachi Chem Co Ltd | 接続部材 |
JP4887700B2 (ja) | 2005-09-09 | 2012-02-29 | 住友ベークライト株式会社 | 異方導電性フィルムおよび電子・電機機器 |
WO2013089199A1 (ja) | 2011-12-16 | 2013-06-20 | 旭化成イーマテリアルズ株式会社 | 異方導電性フィルム付き半導体チップ、異方導電性フィルム付き半導体ウェハ、及び半導体装置 |
JP2014075317A (ja) | 2012-10-05 | 2014-04-24 | Sumitomo Bakelite Co Ltd | 導電接続シート、半導体装置および電子機器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022046718A (ja) * | 2015-05-27 | 2022-03-23 | デクセリアルズ株式会社 | 異方導電性フィルム及び接続構造体 |
JP7397357B2 (ja) | 2015-05-27 | 2023-12-13 | デクセリアルズ株式会社 | 異方導電性フィルムの製造方法及び異方導電性フィルム |
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