JP6970787B2 - 基板搬送装置及び基板処理装置 - Google Patents

基板搬送装置及び基板処理装置 Download PDF

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JP6970787B2
JP6970787B2 JP2020113252A JP2020113252A JP6970787B2 JP 6970787 B2 JP6970787 B2 JP 6970787B2 JP 2020113252 A JP2020113252 A JP 2020113252A JP 2020113252 A JP2020113252 A JP 2020113252A JP 6970787 B2 JP6970787 B2 JP 6970787B2
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substrate
grip
grip plate
plate
claw portion
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JP2020178125A5 (enExample
JP2020178125A (ja
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正明 古矢
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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JP2020113252A 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置 Active JP6970787B2 (ja)

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JP2020113252A JP6970787B2 (ja) 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置

Applications Claiming Priority (2)

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JP2016073092A JP2017183665A (ja) 2016-03-31 2016-03-31 基板搬送装置、基板処理装置及び基板処理方法
JP2020113252A JP6970787B2 (ja) 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置

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JP2016073092A Division JP2017183665A (ja) 2016-03-31 2016-03-31 基板搬送装置、基板処理装置及び基板処理方法

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JP2020178125A JP2020178125A (ja) 2020-10-29
JP2020178125A5 JP2020178125A5 (enExample) 2021-02-25
JP6970787B2 true JP6970787B2 (ja) 2021-11-24

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