JP2020178125A5 - - Google Patents

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Publication number
JP2020178125A5
JP2020178125A5 JP2020113252A JP2020113252A JP2020178125A5 JP 2020178125 A5 JP2020178125 A5 JP 2020178125A5 JP 2020113252 A JP2020113252 A JP 2020113252A JP 2020113252 A JP2020113252 A JP 2020113252A JP 2020178125 A5 JP2020178125 A5 JP 2020178125A5
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JP
Japan
Prior art keywords
substrate
grip plate
grip
plate
claw portion
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JP2020113252A
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English (en)
Japanese (ja)
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JP6970787B2 (ja
JP2020178125A (ja
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Priority claimed from JP2016073092A external-priority patent/JP2017183665A/ja
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Priority claimed from JP2020113252A external-priority patent/JP6970787B2/ja
Publication of JP2020178125A publication Critical patent/JP2020178125A/ja
Publication of JP2020178125A5 publication Critical patent/JP2020178125A5/ja
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JP2020113252A 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置 Active JP6970787B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020113252A JP6970787B2 (ja) 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016073092A JP2017183665A (ja) 2016-03-31 2016-03-31 基板搬送装置、基板処理装置及び基板処理方法
JP2020113252A JP6970787B2 (ja) 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2016073092A Division JP2017183665A (ja) 2016-03-31 2016-03-31 基板搬送装置、基板処理装置及び基板処理方法

Publications (3)

Publication Number Publication Date
JP2020178125A JP2020178125A (ja) 2020-10-29
JP2020178125A5 true JP2020178125A5 (enExample) 2021-02-25
JP6970787B2 JP6970787B2 (ja) 2021-11-24

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Application Number Title Priority Date Filing Date
JP2020113252A Active JP6970787B2 (ja) 2016-03-31 2020-06-30 基板搬送装置及び基板処理装置

Country Status (1)

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JP (1) JP6970787B2 (enExample)

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