JP6963906B2 - 表示装置及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 99
- 239000010408 film Substances 0.000 claims description 90
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 30
- 239000001301 oxygen Substances 0.000 claims description 30
- 229910052760 oxygen Inorganic materials 0.000 claims description 30
- 239000004973 liquid crystal related substance Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 8
- 238000009832 plasma treatment Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 23
- 238000000137 annealing Methods 0.000 description 10
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000000059 patterning Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000004093 laser heating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 101100489584 Solanum lycopersicum TFT1 gene Proteins 0.000 description 1
- 101100214488 Solanum lycopersicum TFT2 gene Proteins 0.000 description 1
- -1 Zinc Oxide Nitride Chemical class 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
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Description
(4)前記酸化物半導体が前記ゲート電極で覆われていない部分の抵抗率は、チャネル領域における抵抗率よりも大きいことを特徴とする(1)に記載の表示装置。
Claims (19)
- 酸化物半導体で構成される薄膜トランジスタ(TFT)を有する複数の画素が形成された表示装置であって、
前記酸化物半導体のチャネル幅方向の幅はゲート電極の前記チャネル幅方向の幅よりも大きいことを特徴とするTFTを有し、
ゲート絶縁膜は前記ゲート電極と前記酸化物半導体との間に形成され、前記酸化物半導体が前記ゲート電極で覆われていない部分は、前記ゲート絶縁膜以外のシリコン酸化膜によって覆われていることを特徴とする表示装置。 - 前記ゲート電極は走査線で形成されており、前記走査線の延在方向が前記TFTのチャネル長方向であることを特徴とする請求項1に記載の表示装置。
- 前記チャネル幅方向において、前記酸化物半導体は前記ゲート電極の両側において、前記ゲート電極と重複していない領域を有することを特徴とする請求項1に記載の表示装置。
- 前記酸化物半導体が前記ゲート電極で覆われていない部分の抵抗率は、前記酸化物半導体のチャネル領域における抵抗率よりも大きいことを特徴とする請求項1に記載の表示装置。
- 前記TFTのドレイン電極あるいはソース電極は映像信号線であることを特徴とする請求項1に記載の表示装置。
- 前記TFTのドレイン電極およびソース電極は前記ゲート電極よりも下層に形成されていることを特徴とする請求項1に記載の表示装置。
- 前記TFTのドレイン電極およびソース電極は前記酸化物半導体と直接接触していることを特徴とする請求項1に記載の表示装置。
- 前記表示装置は液晶表示装置であることを特徴とする請求項1乃至7のいずれか1項に記載の表示装置。
- 前記表示装置は有機EL表示装置であることを特徴とする請求項1乃至7のいずれか1項に記載の表示装置。
- 酸化物半導体の上にゲート絶縁膜を形成し、その上にゲート電極を形成した薄膜トランジスタ(TFT)を有する表示装置の製造方法であって、
前記酸化物半導体のチャネル幅方向の幅を前記ゲート電極の前記チャネル幅方向の幅よりも大きく形成し、
前記酸化物半導体が前記ゲート電極によって覆われていない部分を酸化させることを特徴とする表示装置の製造方法。 - 前記ゲート電極および前記酸化物半導体が前記ゲート電極によって覆われていない部分を覆ってシリコン酸化膜を形成し、前記シリコン酸化膜を300℃以上でアニールすることを特徴とする請求項10に記載の表示装置の製造方法。
- 前記ゲート電極および前記酸化物半導体が前記ゲート電極によって覆われていない部分を覆ってシリコン酸化膜を形成し、前記シリコン酸化膜にレーザを照射することを特徴とする請求項10に記載の表示装置の製造方法。
- 前記ゲート電極を形成後、N 2 Oプラズマ処理を行うことを特徴とする請求項10に記載の表示装置の製造方法。
- 前記ゲート電極を形成後、酸素雰囲気中において、前記酸化物半導体が前記ゲート電極によって覆われていない部分にレーザを照射することを特徴とすることを特徴とする請求項10に記載の表示装置の製造方法。
- 酸化物半導体の上にゲート絶縁膜を形成し、その上にゲート電極を形成した薄膜トランジスタ(TFT)を有する表示装置の製造方法であって、
前記酸化物半導体のチャネル幅方向の幅を前記ゲート電極の前記チャネル幅方向の幅よりも大きく形成し、
前記ゲート電極によって覆われていない部分の前記ゲート絶縁膜を除去し、前記酸化物半導体が前記ゲート電極によって覆われていない部分を酸化させることを特徴とする表示装置の製造方法。 - 前記ゲート電極および前記酸化物半導体が前記ゲート電極によって覆われていない部分を覆ってシリコン酸化膜を形成し、前記シリコン酸化膜を300℃以上でアニールすることを特徴とする請求項15に記載の表示装置の製造方法。
- 前記ゲート電極および前記酸化物半導体が前記ゲート電極によって覆われていない部分を覆ってシリコン酸化膜を形成し、前記シリコン酸化膜にレーザを照射することを特徴とする請求項15に記載の表示装置の製造方法。
- 前記ゲート電極を形成後、N 2 Oプラズマ処理を行うことを特徴とする請求項15に記載の表示装置の製造方法。
- 前記ゲート電極を形成後、酸素雰囲気中において、前記酸化物半導体が前記ゲート電極によって覆われていない部分にレーザを照射することを特徴とすることを特徴とする請求項15に記載の表示装置の製造方法。
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