JP6961335B2 - 磁気ラッチ補助を備える基板容器 - Google Patents
磁気ラッチ補助を備える基板容器 Download PDFInfo
- Publication number
- JP6961335B2 JP6961335B2 JP2016201954A JP2016201954A JP6961335B2 JP 6961335 B2 JP6961335 B2 JP 6961335B2 JP 2016201954 A JP2016201954 A JP 2016201954A JP 2016201954 A JP2016201954 A JP 2016201954A JP 6961335 B2 JP6961335 B2 JP 6961335B2
- Authority
- JP
- Japan
- Prior art keywords
- door
- magnetic
- magnetic couplers
- couplers
- door frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 191
- 239000000758 substrate Substances 0.000 title claims description 49
- 239000000463 material Substances 0.000 claims description 23
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 6
- 238000000418 atomic force spectrum Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000005389 magnetism Effects 0.000 description 4
- 229910052779 Neodymium Inorganic materials 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562242032P | 2015-10-15 | 2015-10-15 | |
| US62/242,032 | 2015-10-15 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017076799A JP2017076799A (ja) | 2017-04-20 |
| JP2017076799A5 JP2017076799A5 (https=) | 2019-11-14 |
| JP6961335B2 true JP6961335B2 (ja) | 2021-11-05 |
Family
ID=58551570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016201954A Active JP6961335B2 (ja) | 2015-10-15 | 2016-10-13 | 磁気ラッチ補助を備える基板容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6961335B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3539420A1 (de) | 2018-03-16 | 2019-09-18 | Eppendorf AG | Laborschrankvorrichtung zum lagern von laborproben mit magnetverschluss |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60160539U (ja) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | 半導体ウエハ等収納容器 |
| US6336567B1 (en) * | 1997-06-13 | 2002-01-08 | Kakizaki Manufacturing Co., Ltd. | Magnetic secured container closure with release by movement of magnetic member |
| JPH11317438A (ja) * | 1997-11-12 | 1999-11-16 | Intevac Inc | 基板キャリアの磁気支持を利用する基板支持装置 |
| US20070175792A1 (en) * | 2006-02-02 | 2007-08-02 | Barry Gregerson | Magnetic seal for wafer containers |
| TWI365836B (en) * | 2009-05-08 | 2012-06-11 | Gudeng Prec Industral Co Ltd | Wafer container with the magnetic latch |
-
2016
- 2016-10-13 JP JP2016201954A patent/JP6961335B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017076799A (ja) | 2017-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5103605B2 (ja) | ウェーハキャリア | |
| CN107924788B (zh) | 电磁接触器 | |
| CN104221116A (zh) | 电磁接触器 | |
| JP7132143B2 (ja) | ロータコアの製造装置及びロータコアの製造方法 | |
| JP6577048B2 (ja) | 磁気的に連結されるカセットを備えた底部開口ポッド | |
| JP6961335B2 (ja) | 磁気ラッチ補助を備える基板容器 | |
| JP2018515936A (ja) | 磁気ドア密封を含む、基板キャリアドアアセンブリ、基板キャリア、及び方法 | |
| JP2018515936A5 (https=) | ||
| KR20180069863A (ko) | 엘리베이터 카 패널 | |
| TWI588069B (zh) | 用於收納基板之卡匣 | |
| CN207261672U (zh) | 电气动电磁阀和用于电气动电磁阀的隔挡阀元件 | |
| KR20190087967A (ko) | 폐쇄 디바이스, 폐쇄 디바이스를 갖는 진공 시스템, 및 폐쇄 디바이스를 동작시키는 방법 | |
| US20090201112A1 (en) | Method of encasing a magnet and an encased magnet | |
| CN111937097A (zh) | 磁性吸盘 | |
| TWI710046B (zh) | 具有磁性閂鎖輔助之基板容器 | |
| US20140241848A1 (en) | Electric switchable magnet slitvalve | |
| KR20250005305A (ko) | 자기 래칭을 갖는 레티클 용기 | |
| CN211016334U (zh) | Led箱体显示模组安全扣锁 | |
| CN113202435A (zh) | 一种基于磁场作用的保压控制装置及保真控制器 | |
| JP4977314B2 (ja) | 電磁弁等の電磁石装置及び電磁弁 | |
| CN114171282B (zh) | 电磁解锁机构 | |
| TWI688030B (zh) | 收納容器的蓋體及收納容器 | |
| JP2009052382A (ja) | 引戸 | |
| JP4925117B2 (ja) | 金型落下防止付き型締装置 | |
| TW201900284A (zh) | 噴嘴單元、及具備噴嘴單元的環境氣體置換裝置、與環境氣體置換方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20171124 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20180406 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20190920 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190930 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190930 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20191015 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201030 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201117 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210212 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210413 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210813 |
|
| C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20210813 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20210823 |
|
| C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20210824 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210928 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211013 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6961335 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |