JP6961077B2 - X線撮像参照スキャン - Google Patents
X線撮像参照スキャン Download PDFInfo
- Publication number
- JP6961077B2 JP6961077B2 JP2020516732A JP2020516732A JP6961077B2 JP 6961077 B2 JP6961077 B2 JP 6961077B2 JP 2020516732 A JP2020516732 A JP 2020516732A JP 2020516732 A JP2020516732 A JP 2020516732A JP 6961077 B2 JP6961077 B2 JP 6961077B2
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- JP
- Japan
- Prior art keywords
- ray
- grid
- ray detector
- imaging device
- scan data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
- A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/48—Diagnostic techniques
- A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/48—Diagnostic techniques
- A61B6/488—Diagnostic techniques involving pre-scan acquisition
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/58—Testing, adjusting or calibrating thereof
- A61B6/582—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3301—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts beam is modified for scan, e.g. moving collimator
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Medical Informatics (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Biomedical Technology (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Biophysics (AREA)
- Public Health (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP17192846.8 | 2017-09-25 | ||
| EP17192846.8A EP3459461A1 (en) | 2017-09-25 | 2017-09-25 | X-ray imaging reference scan |
| PCT/EP2018/075643 WO2019057915A1 (en) | 2017-09-25 | 2018-09-21 | X-RAY IMAGING REFERENCE SCAN |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020534904A JP2020534904A (ja) | 2020-12-03 |
| JP2020534904A5 JP2020534904A5 (enExample) | 2021-04-22 |
| JP6961077B2 true JP6961077B2 (ja) | 2021-11-05 |
Family
ID=60009429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020516732A Active JP6961077B2 (ja) | 2017-09-25 | 2018-09-21 | X線撮像参照スキャン |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11231378B2 (enExample) |
| EP (2) | EP3459461A1 (enExample) |
| JP (1) | JP6961077B2 (enExample) |
| CN (1) | CN111107787B (enExample) |
| WO (1) | WO2019057915A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| WO2019236384A1 (en) | 2018-06-04 | 2019-12-12 | Sigray, Inc. | Wavelength dispersive x-ray spectrometer |
| CN112470245B (zh) | 2018-07-26 | 2025-03-18 | 斯格瑞公司 | 高亮度x射线反射源 |
| US11056308B2 (en) | 2018-09-07 | 2021-07-06 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
| DE112020004169T5 (de) | 2019-09-03 | 2022-05-25 | Sigray, Inc. | System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung |
| US11175243B1 (en) | 2020-02-06 | 2021-11-16 | Sigray, Inc. | X-ray dark-field in-line inspection for semiconductor samples |
| CN115667896B (zh) | 2020-05-18 | 2024-06-21 | 斯格瑞公司 | 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法 |
| US11549895B2 (en) | 2020-09-17 | 2023-01-10 | Sigray, Inc. | System and method using x-rays for depth-resolving metrology and analysis |
| WO2022126071A1 (en) | 2020-12-07 | 2022-06-16 | Sigray, Inc. | High throughput 3d x-ray imaging system using a transmission x-ray source |
| US12480892B2 (en) | 2020-12-07 | 2025-11-25 | Sigray, Inc. | High throughput 3D x-ray imaging system using a transmission x-ray source |
| US12360067B2 (en) | 2022-03-02 | 2025-07-15 | Sigray, Inc. | X-ray fluorescence system and x-ray source with electrically insulative target material |
| WO2023177981A1 (en) | 2022-03-15 | 2023-09-21 | Sigray, Inc. | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector |
| WO2023215204A1 (en) | 2022-05-02 | 2023-11-09 | Sigray, Inc. | X-ray sequential array wavelength dispersive spectrometer |
| CN115861250B (zh) * | 2022-12-14 | 2023-09-22 | 深圳技术大学 | 自适应数据集的半监督医学图像器官分割方法及系统 |
| US12209977B2 (en) | 2023-02-16 | 2025-01-28 | Sigray, Inc. | X-ray detector system with at least two stacked flat Bragg diffractors |
| US12181423B1 (en) | 2023-09-07 | 2024-12-31 | Sigray, Inc. | Secondary image removal using high resolution x-ray transmission sources |
| US12429437B2 (en) | 2023-11-07 | 2025-09-30 | Sigray, Inc. | System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes |
| CN120195197A (zh) * | 2023-12-21 | 2025-06-24 | 清华大学 | 辐射成像设备和方法 |
| US12429436B2 (en) | 2024-01-08 | 2025-09-30 | Sigray, Inc. | X-ray analysis system with focused x-ray beam and non-x-ray microscope |
| US12431256B2 (en) | 2024-02-15 | 2025-09-30 | Sigray, Inc. | System and method for generating a focused x-ray beam |
| US20250305971A1 (en) * | 2024-03-28 | 2025-10-02 | Tokyo Electron Limited | X-ray methods and systems for semiconductor substrate alignment |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1731099A1 (en) * | 2005-06-06 | 2006-12-13 | Paul Scherrer Institut | Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source |
| WO2011070519A1 (en) * | 2009-12-10 | 2011-06-16 | Koninklijke Philips Electronics N.V. | Scanning system for differential phase contrast imaging |
| JP2013513418A (ja) * | 2009-12-10 | 2013-04-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 微分位相コントラストイメージングシステム |
| WO2011070489A1 (en) * | 2009-12-10 | 2011-06-16 | Koninklijke Philips Electronics N.V. | Non- parallel grating arrangement with on-the-fly phase stepping, x-ray system and use |
| JP5438649B2 (ja) * | 2010-03-26 | 2014-03-12 | 富士フイルム株式会社 | 放射線撮影システム及び位置ずれ判定方法 |
| JP2011224329A (ja) * | 2010-03-30 | 2011-11-10 | Fujifilm Corp | 放射線撮影システム及び方法 |
| JP2012040237A (ja) * | 2010-08-20 | 2012-03-01 | Fujifilm Corp | 放射線撮影システム及びその画像生成方法 |
| US9486175B2 (en) * | 2011-07-04 | 2016-11-08 | Koninklijke Philips N.V. | Phase contrast imaging apparatus |
| JP5475737B2 (ja) * | 2011-10-04 | 2014-04-16 | 富士フイルム株式会社 | 放射線撮影装置及び画像処理方法 |
| WO2014027333A1 (en) | 2012-08-17 | 2014-02-20 | Koninklijke Philips N.V. | Correction in x-ray imaging systems for differential phase contrast imaging |
| WO2014030115A1 (en) * | 2012-08-20 | 2014-02-27 | Koninklijke Philips N.V. | Aligning source-grating-to-phase-grating distance for multiple order phase tuning in differential phase contrast imaging |
| US9357975B2 (en) * | 2013-12-30 | 2016-06-07 | Carestream Health, Inc. | Large FOV phase contrast imaging based on detuned configuration including acquisition and reconstruction techniques |
| JP2015008884A (ja) * | 2013-06-28 | 2015-01-19 | 株式会社日立メディコ | X線画像診断装置 |
| EP3013233B1 (en) * | 2013-06-28 | 2017-11-15 | Koninklijke Philips N.V. | Correction in slit-scanning phase contrast imaging |
| WO2015038793A1 (en) * | 2013-09-12 | 2015-03-19 | The United States Of America, As Represented By The Secretary, Department Of Health & Human Services | Demodulation of intensity modulation in x-ray imaging |
| EP3062093B1 (en) * | 2013-10-23 | 2023-07-26 | Nanovision Technology (Beijing) Co., Ltd. | Photon count-based radiation imaging system, method, and apparatus |
| RU2677763C1 (ru) | 2013-12-17 | 2019-01-21 | Конинклейке Филипс Н.В. | Получение фазы для систем сканирования с дифференциальным фазовым контрастом |
| JP5725681B1 (ja) * | 2014-01-22 | 2015-05-27 | レーザーテック株式会社 | 干渉計及び位相シフト量測定装置 |
| JP2016032573A (ja) * | 2014-07-31 | 2016-03-10 | キヤノン株式会社 | トールボット干渉計、トールボット干渉システム、及び縞走査法 |
| JP6369206B2 (ja) * | 2014-08-06 | 2018-08-08 | コニカミノルタ株式会社 | X線撮影システム及び画像処理装置 |
| JP6543838B2 (ja) * | 2014-08-28 | 2019-07-17 | 株式会社緑野リサーチ | 位相撮影装置およびその復元方法 |
| EP3102269B1 (en) | 2014-10-02 | 2017-07-05 | Koninklijke Philips N.V. | Cushion element for a patient interface |
| US10945690B2 (en) | 2015-06-30 | 2021-03-16 | Koninklijke Philips N.V. | Scanning X-ray apparatus with full-field detector |
| JP6430636B2 (ja) * | 2015-08-26 | 2018-11-28 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | デュアルエネルギー微分位相コントラスト撮像 |
-
2017
- 2017-09-25 EP EP17192846.8A patent/EP3459461A1/en not_active Withdrawn
-
2018
- 2018-09-21 US US16/650,220 patent/US11231378B2/en active Active
- 2018-09-21 CN CN201880061786.4A patent/CN111107787B/zh active Active
- 2018-09-21 JP JP2020516732A patent/JP6961077B2/ja active Active
- 2018-09-21 EP EP18770036.4A patent/EP3687403B1/en active Active
- 2018-09-21 WO PCT/EP2018/075643 patent/WO2019057915A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP3459461A1 (en) | 2019-03-27 |
| CN111107787A (zh) | 2020-05-05 |
| US20200232937A1 (en) | 2020-07-23 |
| EP3687403A1 (en) | 2020-08-05 |
| CN111107787B (zh) | 2023-08-29 |
| WO2019057915A1 (en) | 2019-03-28 |
| JP2020534904A (ja) | 2020-12-03 |
| EP3687403B1 (en) | 2021-05-05 |
| US11231378B2 (en) | 2022-01-25 |
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