CN111107787B - X射线成像参考扫描 - Google Patents

X射线成像参考扫描 Download PDF

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Publication number
CN111107787B
CN111107787B CN201880061786.4A CN201880061786A CN111107787B CN 111107787 B CN111107787 B CN 111107787B CN 201880061786 A CN201880061786 A CN 201880061786A CN 111107787 B CN111107787 B CN 111107787B
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ray
grating
ray detector
scan data
relative
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Chinese (zh)
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CN111107787A (zh
Inventor
A·亚罗申科
T·克勒
P·B·T·诺埃尔
F·德马尔科
L·B·格罗曼
K·维勒
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041Phase-contrast imaging, e.g. using grating interferometers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48Diagnostic techniques
    • A61B6/484Diagnostic techniques involving phase contrast X-ray imaging
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4291Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48Diagnostic techniques
    • A61B6/488Diagnostic techniques involving pre-scan acquisition
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/58Testing, adjusting or calibrating thereof
    • A61B6/582Calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/30Accessories, mechanical or electrical features
    • G01N2223/33Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G01N2223/3301Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts beam is modified for scan, e.g. moving collimator

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201880061786.4A 2017-09-25 2018-09-21 X射线成像参考扫描 Active CN111107787B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17192846.8 2017-09-25
EP17192846.8A EP3459461A1 (en) 2017-09-25 2017-09-25 X-ray imaging reference scan
PCT/EP2018/075643 WO2019057915A1 (en) 2017-09-25 2018-09-21 X-RAY IMAGING REFERENCE SCAN

Publications (2)

Publication Number Publication Date
CN111107787A CN111107787A (zh) 2020-05-05
CN111107787B true CN111107787B (zh) 2023-08-29

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CN201880061786.4A Active CN111107787B (zh) 2017-09-25 2018-09-21 X射线成像参考扫描

Country Status (5)

Country Link
US (1) US11231378B2 (enExample)
EP (2) EP3459461A1 (enExample)
JP (1) JP6961077B2 (enExample)
CN (1) CN111107787B (enExample)
WO (1) WO2019057915A1 (enExample)

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DE112019002822T5 (de) 2018-06-04 2021-02-18 Sigray, Inc. Wellenlängendispersives röntgenspektrometer
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
CN114729907B (zh) 2019-09-03 2023-05-23 斯格瑞公司 用于计算机层析x射线荧光成像的系统和方法
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
DE112021004828T5 (de) 2020-09-17 2023-08-03 Sigray, Inc. System und verfahren unter verwendung von röntgenstrahlen für tiefenauflösende messtechnik und analyse
JP7626856B2 (ja) 2020-12-07 2025-02-04 シグレイ、インコーポレイテッド 透過x線源を用いた高スループット3d x線撮像システム
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
US11992350B2 (en) 2022-03-15 2024-05-28 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
DE112023002079T5 (de) 2022-05-02 2025-02-27 Sigray, Inc. Sequenzielles wellenlängendispersives röntgenspektrometer
CN115861250B (zh) * 2022-12-14 2023-09-22 深圳技术大学 自适应数据集的半监督医学图像器官分割方法及系统
US12209977B2 (en) 2023-02-16 2025-01-28 Sigray, Inc. X-ray detector system with at least two stacked flat Bragg diffractors
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
CN120195197A (zh) * 2023-12-21 2025-06-24 清华大学 辐射成像设备和方法
WO2025151383A1 (en) 2024-01-08 2025-07-17 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
US12431256B2 (en) 2024-02-15 2025-09-30 Sigray, Inc. System and method for generating a focused x-ray beam
US20250305971A1 (en) * 2024-03-28 2025-10-02 Tokyo Electron Limited X-ray methods and systems for semiconductor substrate alignment

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CN102651998A (zh) * 2009-12-10 2012-08-29 皇家飞利浦电子股份有限公司 用于微分相衬成像的扫描系统
JP2012040237A (ja) * 2010-08-20 2012-03-01 Fujifilm Corp 放射線撮影システム及びその画像生成方法
CN104582573A (zh) * 2012-08-20 2015-04-29 皇家飞利浦有限公司 在微分相位对比成像中对齐源光栅到相位光栅距离以用于多阶相位调谐
EP3062093A1 (en) * 2013-10-23 2016-08-31 Nanovision Technology (Beijing) Co., Ltd. Photon count-based radiation imaging system, method, and apparatus
WO2017001294A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Scanning x-ray apparatus with full-field detector

Also Published As

Publication number Publication date
US11231378B2 (en) 2022-01-25
EP3687403A1 (en) 2020-08-05
EP3459461A1 (en) 2019-03-27
WO2019057915A1 (en) 2019-03-28
US20200232937A1 (en) 2020-07-23
JP2020534904A (ja) 2020-12-03
JP6961077B2 (ja) 2021-11-05
EP3687403B1 (en) 2021-05-05
CN111107787A (zh) 2020-05-05

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