CN111107787B - X射线成像参考扫描 - Google Patents

X射线成像参考扫描 Download PDF

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Publication number
CN111107787B
CN111107787B CN201880061786.4A CN201880061786A CN111107787B CN 111107787 B CN111107787 B CN 111107787B CN 201880061786 A CN201880061786 A CN 201880061786A CN 111107787 B CN111107787 B CN 111107787B
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Prior art keywords
ray
grating
ray detector
scan data
relative
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Chinese (zh)
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CN111107787A (zh
Inventor
A·亚罗申科
T·克勒
P·B·T·诺埃尔
F·德马尔科
L·B·格罗曼
K·维勒
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48—Diagnostic techniques
    • A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4291—Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48—Diagnostic techniques
    • A61B6/488—Diagnostic techniques involving pre-scan acquisition
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/58—Testing, adjusting or calibrating thereof
    • A61B6/582—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
    • G01N2223/3301—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts beam is modified for scan, e.g. moving collimator

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201880061786.4A 2017-09-25 2018-09-21 X射线成像参考扫描 Active CN111107787B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17192846.8 2017-09-25
EP17192846.8A EP3459461A1 (en) 2017-09-25 2017-09-25 X-ray imaging reference scan
PCT/EP2018/075643 WO2019057915A1 (en) 2017-09-25 2018-09-21 X-RAY IMAGING REFERENCE SCAN

Publications (2)

Publication Number Publication Date
CN111107787A CN111107787A (zh) 2020-05-05
CN111107787B true CN111107787B (zh) 2023-08-29

Family

ID=60009429

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880061786.4A Active CN111107787B (zh) 2017-09-25 2018-09-21 X射线成像参考扫描

Country Status (5)

Country Link
US (1) US11231378B2 (enExample)
EP (2) EP3459461A1 (enExample)
JP (1) JP6961077B2 (enExample)
CN (1) CN111107787B (enExample)
WO (1) WO2019057915A1 (enExample)

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US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
US11215572B2 (en) 2020-05-18 2022-01-04 Sigray, Inc. System and method for x-ray absorption spectroscopy using a crystal analyzer and a plurality of detector elements
US11549895B2 (en) 2020-09-17 2023-01-10 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
WO2022126071A1 (en) 2020-12-07 2022-06-16 Sigray, Inc. High throughput 3d x-ray imaging system using a transmission x-ray source
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
DE112023001408T5 (de) 2022-03-15 2025-02-13 Sigray, Inc. System und verfahren für die kompakte laminographie unter verwendung einer mikrofokus-transmissionsröntgenquelle und eines röntgendetektors mit variabler vergrösserung
JP2025515085A (ja) 2022-05-02 2025-05-13 シグレイ、インコーポレイテッド Ｘ線シーケンシャルアレイ波長分散型分光計
CN115861250B (zh) * 2022-12-14 2023-09-22 深圳技术大学 自适应数据集的半监督医学图像器官分割方法及系统
CN121013975A (zh) 2023-02-16 2025-11-25 斯格瑞公司 具有至少两个堆叠的平面布拉格衍射器的x射线探测器系统
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
WO2025101530A1 (en) 2023-11-07 2025-05-15 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
CN120195197A (zh) * 2023-12-21 2025-06-24 清华大学 辐射成像设备和方法
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam
US20250305971A1 (en) * 2024-03-28 2025-10-02 Tokyo Electron Limited X-ray methods and systems for semiconductor substrate alignment

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CN102651998A (zh) * 2009-12-10 2012-08-29 皇家飞利浦电子股份有限公司 用于微分相衬成像的扫描系统
CN104582573A (zh) * 2012-08-20 2015-04-29 皇家飞利浦有限公司 在微分相位对比成像中对齐源光栅到相位光栅距离以用于多阶相位调谐
EP3062093A1 (en) * 2013-10-23 2016-08-31 Nanovision Technology (Beijing) Co., Ltd. Photon count-based radiation imaging system, method, and apparatus
WO2017001294A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Scanning x-ray apparatus with full-field detector

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JP6430636B2 (ja) * 2015-08-26 2018-11-28 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． デュアルエネルギー微分位相コントラスト撮像

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CN102651998A (zh) * 2009-12-10 2012-08-29 皇家飞利浦电子股份有限公司 用于微分相衬成像的扫描系统
JP2012040237A (ja) * 2010-08-20 2012-03-01 Fujifilm Corp 放射線撮影システム及びその画像生成方法
CN104582573A (zh) * 2012-08-20 2015-04-29 皇家飞利浦有限公司 在微分相位对比成像中对齐源光栅到相位光栅距离以用于多阶相位调谐
EP3062093A1 (en) * 2013-10-23 2016-08-31 Nanovision Technology (Beijing) Co., Ltd. Photon count-based radiation imaging system, method, and apparatus
WO2017001294A1 (en) * 2015-06-30 2017-01-05 Koninklijke Philips N.V. Scanning x-ray apparatus with full-field detector

Also Published As

Publication number Publication date
EP3687403B1 (en) 2021-05-05
US20200232937A1 (en) 2020-07-23
JP2020534904A (ja) 2020-12-03
WO2019057915A1 (en) 2019-03-28
US11231378B2 (en) 2022-01-25
JP6961077B2 (ja) 2021-11-05
EP3459461A1 (en) 2019-03-27
EP3687403A1 (en) 2020-08-05
CN111107787A (zh) 2020-05-05

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