JP6951785B2 - 改良された排ガス削減のためのシステムおよび方法 - Google Patents

改良された排ガス削減のためのシステムおよび方法 Download PDF

Info

Publication number
JP6951785B2
JP6951785B2 JP2019536584A JP2019536584A JP6951785B2 JP 6951785 B2 JP6951785 B2 JP 6951785B2 JP 2019536584 A JP2019536584 A JP 2019536584A JP 2019536584 A JP2019536584 A JP 2019536584A JP 6951785 B2 JP6951785 B2 JP 6951785B2
Authority
JP
Japan
Prior art keywords
gas
wall
permeable inner
permeable
plenum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019536584A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020503490A (ja
JP2020503490A5 (https=
Inventor
ジェイ． シルバースタイン，マイケル
ジェイ． シルバースタイン，マイケル
フレデリック バーツ，デイヴィッド
フレデリック バーツ，デイヴィッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alzeta Corp
Original Assignee
Alzeta Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alzeta Corp filed Critical Alzeta Corp
Publication of JP2020503490A publication Critical patent/JP2020503490A/ja
Publication of JP2020503490A5 publication Critical patent/JP2020503490A5/ja
Application granted granted Critical
Publication of JP6951785B2 publication Critical patent/JP6951785B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10G—CRACKING HYDROCARBON OILS; PRODUCTION OF LIQUID HYDROCARBON MIXTURES, e.g. BY DESTRUCTIVE HYDROGENATION, OLIGOMERISATION, POLYMERISATION; RECOVERY OF HYDROCARBON OILS FROM OIL-SHALE, OIL-SAND, OR GASES; REFINING MIXTURES MAINLY CONSISTING OF HYDROCARBONS; REFORMING OF NAPHTHA; MINERAL WAXES
    • C10G70/00—Working-up undefined normally gaseous mixtures obtained by processes covered by groups C10G9/00, C10G11/00, C10G15/00, C10G47/00, C10G51/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN  A CARRIER GAS OR AIR 
    • F23C99/00—Subject-matter not provided for in other groups of this subclass
    • F23C99/006—Flameless combustion stabilised within a bed of porous heat-resistant material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • F23D14/125—Radiant burners heating a wall surface to incandescence
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • F23D14/14—Radiant burners using screens or perforated plates
    • F23D14/145—Radiant burners using screens or perforated plates combustion being stabilised at a screen or a perforated plate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/08—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating
    • F23G5/12—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/24—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a vertical, substantially cylindrical, combustion chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/24—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a vertical, substantially cylindrical, combustion chamber
    • F23G5/245—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having a vertical, substantially cylindrical, combustion chamber with perforated bottom or grate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/556—Organic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/10—Burner material specifications ceramic
    • F23D2212/103—Fibres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2212/00—Burner material specifications
    • F23D2212/20—Burner material specifications metallic
    • F23D2212/201—Fibres
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00—Supplementary heating arrangements
    • F23G2204/10—Supplementary heating arrangements using auxiliary fuel
    • F23G2204/103—Supplementary heating arrangements using auxiliary fuel gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P30/00—Technologies relating to oil refining and petrochemical industry

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Incineration Of Waste (AREA)
JP2019536584A 2017-01-06 2018-01-04 改良された排ガス削減のためのシステムおよび方法 Active JP6951785B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762443062P 2017-01-06 2017-01-06
US62/443,062 2017-01-06
PCT/US2018/012279 WO2018129111A1 (en) 2017-01-06 2018-01-04 Systems and methods for improved waste gas abatement

Publications (3)

Publication Number Publication Date
JP2020503490A JP2020503490A (ja) 2020-01-30
JP2020503490A5 JP2020503490A5 (https=) 2021-02-12
JP6951785B2 true JP6951785B2 (ja) 2021-10-20

Family

ID=62790968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019536584A Active JP6951785B2 (ja) 2017-01-06 2018-01-04 改良された排ガス削減のためのシステムおよび方法

Country Status (8)

Country Link
US (2) US10690341B2 (https=)
EP (1) EP3565654A4 (https=)
JP (1) JP6951785B2 (https=)
KR (1) KR102450538B1 (https=)
CN (1) CN110461437B (https=)
SG (1) SG11201906205UA (https=)
TW (1) TWI763761B (https=)
WO (1) WO2018129111A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020076602A1 (en) * 2018-10-11 2020-04-16 Corning Incorporated Abatement systems including an oxidizer head assembly and methods for using the same
GB2579197B (en) 2018-11-22 2021-06-09 Edwards Ltd Abatement method
CN111412481B (zh) * 2020-03-19 2023-01-10 长江存储科技有限责任公司 废气处理装置
US11466851B2 (en) * 2020-04-24 2022-10-11 Grand Mate Co., Ltd. Smoke removal device
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2608816A (en) * 2021-07-13 2023-01-18 Edwards Ltd Abatement apparatus
GB2608817A (en) * 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus
GB2608819B (en) * 2021-07-13 2025-07-09 Alzeta Corp Pilot unit
GB2625846A (en) * 2022-12-27 2024-07-03 Csk Inc Scrubber burner
GB2636688A (en) * 2023-09-05 2025-07-02 Edwards Ltd Abatement apparatus and method of abatement

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0549476B1 (en) * 1991-12-24 1998-09-23 Tokyo Gas Co., Ltd. Surface combustion burner
JP2682362B2 (ja) * 1992-12-09 1997-11-26 日本鋼管株式会社 排熱回収型燃焼装置
US5439372A (en) * 1993-06-28 1995-08-08 Alzeta Corporation Multiple firing rate zone burner and method
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
GB9608061D0 (en) * 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
TW342436B (en) 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
US5768888A (en) * 1996-11-08 1998-06-23 Matros Technologies, Inc. Emission control system
KR100694903B1 (ko) * 1998-12-01 2007-03-13 가부시키가이샤 에바라 세이사꾸쇼 폐기가스처리장치
DE19928096A1 (de) * 1999-06-19 2000-12-21 Krieger Gmbh & Co Kg Gasbeheizter Infrarot-Strahler für eine Infrarot-Trocknungseinheit
US6187080B1 (en) 1999-08-09 2001-02-13 United Microelectronics Inc. Exhaust gas treatment apparatus including a water vortex means and a discharge pipe
JP2002166126A (ja) * 2000-12-04 2002-06-11 Sumitomo Seika Chem Co Ltd 燃焼排ガスの処理装置
US6596054B2 (en) * 2001-07-23 2003-07-22 Advanced Technology Materials, Inc. Method for carbon monoxide reduction during thermal/wet abatement of organic compounds
EP1291069B1 (de) * 2001-08-30 2005-01-05 DAS-DÜNNSCHICHT ANLAGEN SYSTEME GmbH DRESDEN Verfahren und Einrichtung zur Reinigung insbesondere von fluorhaltigen Abgasen in einem Brenner mit räumlicher Trennung der Einspeisung von Gasen
EP1583720A1 (en) * 2003-01-14 2005-10-12 The BOC Group plc Treatment of chemical waste
JP2005098680A (ja) * 2003-08-20 2005-04-14 Japan Pionics Co Ltd 有害ガスの浄化装置
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
GB0417378D0 (en) 2004-08-04 2004-09-08 Boc Group Plc Gas abatement
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US7682574B2 (en) 2004-11-18 2010-03-23 Applied Materials, Inc. Safety, monitoring and control features for thermal abatement reactor
CN101300411B (zh) * 2005-10-31 2012-10-03 应用材料公司 制程减降反应器
JP4937886B2 (ja) * 2006-12-05 2012-05-23 株式会社荏原製作所 燃焼式排ガス処理装置
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
US8215951B2 (en) 2009-04-15 2012-07-10 Alzeta Corporation High temperature fiber composite burner surface
JP5622686B2 (ja) * 2011-08-19 2014-11-12 大陽日酸株式会社 燃焼除害装置
PL220161B1 (pl) * 2011-12-08 2015-09-30 Univ Jagielloński Sposób równoczesnego usuwania NO i cząstek węglowych oraz pyłów nieorganicznych ze spalin i reaktor katalityczny do usuwania NO i cząstek węglowych oraz pyłów nieorganicznych ze spalin
GB2504335A (en) * 2012-07-26 2014-01-29 Edwards Ltd Radiant burner for the combustion of manufacturing effluent gases.
JP6318235B2 (ja) * 2013-04-25 2018-04-25 エドワーズ リミテッド 放射バーナ
GB2514341B (en) * 2013-05-20 2016-08-24 Edwards Ltd Radiant burner combustion monitoring
CN105090999B (zh) * 2014-05-12 2018-11-20 日本派欧尼株式会社 废气的燃烧式净化装置
CN105864801A (zh) * 2015-02-09 2016-08-17 日本派欧尼株式会社 废气的燃烧式净化装置

Also Published As

Publication number Publication date
CN110461437B (zh) 2022-09-13
EP3565654A4 (en) 2020-10-28
EP3565654A1 (en) 2019-11-13
TWI763761B (zh) 2022-05-11
CN110461437A (zh) 2019-11-15
SG11201906205UA (en) 2019-08-27
TW201836701A (zh) 2018-10-16
US10690341B2 (en) 2020-06-23
KR20190112725A (ko) 2019-10-07
JP2020503490A (ja) 2020-01-30
WO2018129111A1 (en) 2018-07-12
US20180259182A1 (en) 2018-09-13
KR102450538B1 (ko) 2022-10-04
US20200309367A1 (en) 2020-10-01

Similar Documents

Publication Publication Date Title
JP6951785B2 (ja) 改良された排ガス削減のためのシステムおよび方法
CN101069041B (zh) 在工艺污染物减量过程中用以降低颗粒沉积的反应器设计
US6969250B1 (en) Exhaust gas treating device
KR101036734B1 (ko) 공정 저감 반응로
TWI442007B (zh) 有害物質之燃燒破壞
US5603905A (en) Apparatus for combustive destruction of troublesome substances
US10174942B2 (en) Combustion-type exhaust gas treatment apparatus
JP4704432B2 (ja) 生産工程からの有毒ガスの洗浄装置
TW201714662A (zh) 廢氣處理裝置
KR100417720B1 (ko) 유해물질의연소분해방법및장치
JP2015525332A (ja) 二重同軸処理モジュール
JP4619798B2 (ja) 有害ガスの浄化装置
JP2001355820A (ja) 排ガスの処理方法および処理装置
CN105864801A (zh) 废气的燃烧式净化装置
KR20050023120A (ko) 유해 가스의 정화 장치
JP2013044479A (ja) 塩化珪素化合物を含む排ガスの浄化方法
WO2025090011A1 (zh) 一种用于处理气体污染物的反应器以及其头部组件

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201223

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20201223

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210622

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210706

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210709

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210831

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210916

R150 Certificate of patent or registration of utility model

Ref document number: 6951785

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250