JP2020503490A5 - - Google Patents
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- Publication number
- JP2020503490A5 JP2020503490A5 JP2019536584A JP2019536584A JP2020503490A5 JP 2020503490 A5 JP2020503490 A5 JP 2020503490A5 JP 2019536584 A JP2019536584 A JP 2019536584A JP 2019536584 A JP2019536584 A JP 2019536584A JP 2020503490 A5 JP2020503490 A5 JP 2020503490A5
- Authority
- JP
- Japan
- Prior art keywords
- wall
- gas
- permeable inner
- plenum
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 49
- 239000000203 mixture Substances 0.000 claims 10
- 238000006243 chemical reaction Methods 0.000 claims 8
- 239000012466 permeate Substances 0.000 claims 7
- 238000002485 combustion reaction Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 2
- 239000000835 fiber Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 239000007800 oxidant agent Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000003570 air Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000006260 foam Substances 0.000 claims 1
- 239000002737 fuel gas Substances 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000006262 metallic foam Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 230000001568 sexual effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762443062P | 2017-01-06 | 2017-01-06 | |
| US62/443,062 | 2017-01-06 | ||
| PCT/US2018/012279 WO2018129111A1 (en) | 2017-01-06 | 2018-01-04 | Systems and methods for improved waste gas abatement |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020503490A JP2020503490A (ja) | 2020-01-30 |
| JP2020503490A5 true JP2020503490A5 (https=) | 2021-02-12 |
| JP6951785B2 JP6951785B2 (ja) | 2021-10-20 |
Family
ID=62790968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019536584A Active JP6951785B2 (ja) | 2017-01-06 | 2018-01-04 | 改良された排ガス削減のためのシステムおよび方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10690341B2 (https=) |
| EP (1) | EP3565654A4 (https=) |
| JP (1) | JP6951785B2 (https=) |
| KR (1) | KR102450538B1 (https=) |
| CN (1) | CN110461437B (https=) |
| SG (1) | SG11201906205UA (https=) |
| TW (1) | TWI763761B (https=) |
| WO (1) | WO2018129111A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020076602A1 (en) * | 2018-10-11 | 2020-04-16 | Corning Incorporated | Abatement systems including an oxidizer head assembly and methods for using the same |
| GB2579197B (en) | 2018-11-22 | 2021-06-09 | Edwards Ltd | Abatement method |
| CN111412481B (zh) * | 2020-03-19 | 2023-01-10 | 长江存储科技有限责任公司 | 废气处理装置 |
| US11466851B2 (en) * | 2020-04-24 | 2022-10-11 | Grand Mate Co., Ltd. | Smoke removal device |
| KR102427056B1 (ko) * | 2020-06-02 | 2022-08-01 | 씨에스케이(주) | 스크러버용 버너 |
| GB2608816A (en) * | 2021-07-13 | 2023-01-18 | Edwards Ltd | Abatement apparatus |
| GB2608817A (en) * | 2021-07-13 | 2023-01-18 | Edwards Ltd | Modular abatement apparatus |
| GB2608819B (en) * | 2021-07-13 | 2025-07-09 | Alzeta Corp | Pilot unit |
| GB2625846A (en) * | 2022-12-27 | 2024-07-03 | Csk Inc | Scrubber burner |
| GB2636688A (en) * | 2023-09-05 | 2025-07-02 | Edwards Ltd | Abatement apparatus and method of abatement |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0549476B1 (en) * | 1991-12-24 | 1998-09-23 | Tokyo Gas Co., Ltd. | Surface combustion burner |
| JP2682362B2 (ja) * | 1992-12-09 | 1997-11-26 | 日本鋼管株式会社 | 排熱回収型燃焼装置 |
| US5439372A (en) * | 1993-06-28 | 1995-08-08 | Alzeta Corporation | Multiple firing rate zone burner and method |
| US5510093A (en) * | 1994-07-25 | 1996-04-23 | Alzeta Corporation | Combustive destruction of halogenated compounds |
| GB9608061D0 (en) * | 1996-04-16 | 1996-06-19 | Boc Group Plc | Removal of noxious substances from gas streams |
| TW342436B (en) | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
| US5768888A (en) * | 1996-11-08 | 1998-06-23 | Matros Technologies, Inc. | Emission control system |
| KR100694903B1 (ko) * | 1998-12-01 | 2007-03-13 | 가부시키가이샤 에바라 세이사꾸쇼 | 폐기가스처리장치 |
| DE19928096A1 (de) * | 1999-06-19 | 2000-12-21 | Krieger Gmbh & Co Kg | Gasbeheizter Infrarot-Strahler für eine Infrarot-Trocknungseinheit |
| US6187080B1 (en) | 1999-08-09 | 2001-02-13 | United Microelectronics Inc. | Exhaust gas treatment apparatus including a water vortex means and a discharge pipe |
| JP2002166126A (ja) * | 2000-12-04 | 2002-06-11 | Sumitomo Seika Chem Co Ltd | 燃焼排ガスの処理装置 |
| US6596054B2 (en) * | 2001-07-23 | 2003-07-22 | Advanced Technology Materials, Inc. | Method for carbon monoxide reduction during thermal/wet abatement of organic compounds |
| EP1291069B1 (de) * | 2001-08-30 | 2005-01-05 | DAS-DÜNNSCHICHT ANLAGEN SYSTEME GmbH DRESDEN | Verfahren und Einrichtung zur Reinigung insbesondere von fluorhaltigen Abgasen in einem Brenner mit räumlicher Trennung der Einspeisung von Gasen |
| EP1583720A1 (en) * | 2003-01-14 | 2005-10-12 | The BOC Group plc | Treatment of chemical waste |
| JP2005098680A (ja) * | 2003-08-20 | 2005-04-14 | Japan Pionics Co Ltd | 有害ガスの浄化装置 |
| US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
| GB0417378D0 (en) | 2004-08-04 | 2004-09-08 | Boc Group Plc | Gas abatement |
| US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
| US7682574B2 (en) | 2004-11-18 | 2010-03-23 | Applied Materials, Inc. | Safety, monitoring and control features for thermal abatement reactor |
| CN101300411B (zh) * | 2005-10-31 | 2012-10-03 | 应用材料公司 | 制程减降反应器 |
| JP4937886B2 (ja) * | 2006-12-05 | 2012-05-23 | 株式会社荏原製作所 | 燃焼式排ガス処理装置 |
| GB0706544D0 (en) * | 2007-04-04 | 2007-05-09 | Boc Group Plc | Combustive destruction of noxious substances |
| US8215951B2 (en) | 2009-04-15 | 2012-07-10 | Alzeta Corporation | High temperature fiber composite burner surface |
| JP5622686B2 (ja) * | 2011-08-19 | 2014-11-12 | 大陽日酸株式会社 | 燃焼除害装置 |
| PL220161B1 (pl) * | 2011-12-08 | 2015-09-30 | Univ Jagielloński | Sposób równoczesnego usuwania NO i cząstek węglowych oraz pyłów nieorganicznych ze spalin i reaktor katalityczny do usuwania NO i cząstek węglowych oraz pyłów nieorganicznych ze spalin |
| GB2504335A (en) * | 2012-07-26 | 2014-01-29 | Edwards Ltd | Radiant burner for the combustion of manufacturing effluent gases. |
| JP6318235B2 (ja) * | 2013-04-25 | 2018-04-25 | エドワーズ リミテッド | 放射バーナ |
| GB2514341B (en) * | 2013-05-20 | 2016-08-24 | Edwards Ltd | Radiant burner combustion monitoring |
| CN105090999B (zh) * | 2014-05-12 | 2018-11-20 | 日本派欧尼株式会社 | 废气的燃烧式净化装置 |
| CN105864801A (zh) * | 2015-02-09 | 2016-08-17 | 日本派欧尼株式会社 | 废气的燃烧式净化装置 |
-
2018
- 2018-01-04 US US15/861,779 patent/US10690341B2/en active Active
- 2018-01-04 JP JP2019536584A patent/JP6951785B2/ja active Active
- 2018-01-04 WO PCT/US2018/012279 patent/WO2018129111A1/en not_active Ceased
- 2018-01-04 TW TW107100391A patent/TWI763761B/zh active
- 2018-01-04 SG SG11201906205UA patent/SG11201906205UA/en unknown
- 2018-01-04 EP EP18735978.1A patent/EP3565654A4/en active Pending
- 2018-01-04 KR KR1020197021864A patent/KR102450538B1/ko active Active
- 2018-01-04 CN CN201880015794.5A patent/CN110461437B/zh active Active
-
2020
- 2020-06-16 US US16/902,440 patent/US20200309367A1/en not_active Abandoned
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