JP6927007B2 - 移載設備、移載方法 - Google Patents

移載設備、移載方法 Download PDF

Info

Publication number
JP6927007B2
JP6927007B2 JP2017237284A JP2017237284A JP6927007B2 JP 6927007 B2 JP6927007 B2 JP 6927007B2 JP 2017237284 A JP2017237284 A JP 2017237284A JP 2017237284 A JP2017237284 A JP 2017237284A JP 6927007 B2 JP6927007 B2 JP 6927007B2
Authority
JP
Japan
Prior art keywords
cassette
container
transfer
transfer machine
processing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017237284A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019106433A (ja
Inventor
喜隆 出口
喜隆 出口
尚也 末廣
尚也 末廣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2017237284A priority Critical patent/JP6927007B2/ja
Priority to TW107124556A priority patent/TWI787306B/zh
Priority to CN201811212773.0A priority patent/CN109911620B/zh
Priority to KR1020180141476A priority patent/KR102535629B1/ko
Publication of JP2019106433A publication Critical patent/JP2019106433A/ja
Application granted granted Critical
Publication of JP6927007B2 publication Critical patent/JP6927007B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP2017237284A 2017-12-12 2017-12-12 移載設備、移載方法 Active JP6927007B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017237284A JP6927007B2 (ja) 2017-12-12 2017-12-12 移載設備、移載方法
TW107124556A TWI787306B (zh) 2017-12-12 2018-07-17 移載設備與移載方法
CN201811212773.0A CN109911620B (zh) 2017-12-12 2018-10-18 移载设备、移载方法
KR1020180141476A KR102535629B1 (ko) 2017-12-12 2018-11-16 이송 설비, 이송 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017237284A JP6927007B2 (ja) 2017-12-12 2017-12-12 移載設備、移載方法

Publications (2)

Publication Number Publication Date
JP2019106433A JP2019106433A (ja) 2019-06-27
JP6927007B2 true JP6927007B2 (ja) 2021-08-25

Family

ID=66959535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017237284A Active JP6927007B2 (ja) 2017-12-12 2017-12-12 移載設備、移載方法

Country Status (4)

Country Link
JP (1) JP6927007B2 (zh)
KR (1) KR102535629B1 (zh)
CN (1) CN109911620B (zh)
TW (1) TWI787306B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12037193B2 (en) * 2019-09-02 2024-07-16 Murata Machinery, Ltd. Wafer delivery device, wafer storage container, and wafer storage system
JP7400616B2 (ja) * 2020-05-01 2023-12-19 株式会社ダイフク 移載設備及び容器の移載方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3136466B2 (ja) * 1995-12-13 2001-02-19 三井造船株式会社 スタッカークレーン式立体自動倉庫
JP2001002213A (ja) * 1999-06-18 2001-01-09 Hirata Corp フローティングユニット及び位置決め装置
JP4048409B2 (ja) * 2001-10-22 2008-02-20 株式会社ダイフク 搬送設備
JP4614091B2 (ja) * 2005-08-16 2011-01-19 株式会社ダイフク フローティングユニット及び物品支持装置
JP2007096140A (ja) * 2005-09-30 2007-04-12 Asyst Shinko Inc 懸垂式昇降搬送台車における物品の授受方法並びに装置
US20080240892A1 (en) * 2007-03-28 2008-10-02 International Business Machines Corporation Storage buffer device for automated material handling systems
JP2009038326A (ja) * 2007-08-06 2009-02-19 Yaskawa Electric Corp カセットフローティングステージおよびこれを用いたカセットステーション
JP4796024B2 (ja) * 2007-08-30 2011-10-19 東京エレクトロン株式会社 容器交換システム及び容器交換方法
KR101077566B1 (ko) * 2008-08-20 2011-10-28 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
KR101088050B1 (ko) * 2009-02-25 2011-11-30 세메스 주식회사 기판 처리 장치
JP5727466B2 (ja) * 2009-05-18 2015-06-03 ブルックス オートメーション インコーポレイテッド 基板用容器貯蔵システムと相互作用する一体システム
JP5765577B2 (ja) * 2011-12-28 2015-08-19 株式会社ダイフク スタッカークレーン
KR101511963B1 (ko) * 2013-09-16 2015-04-14 주식회사 에스에프에이 카세트 공급시스템
JP6256694B2 (ja) * 2014-06-13 2018-01-10 株式会社ダイフク コンテナ昇降搬送装置
JP6052515B2 (ja) * 2014-06-13 2016-12-27 株式会社ダイフク コンテナ昇降搬送装置
JP6048686B2 (ja) * 2014-09-25 2016-12-21 村田機械株式会社 一時保管装置と搬送システム及び一時保管方法

Also Published As

Publication number Publication date
KR102535629B1 (ko) 2023-05-23
TWI787306B (zh) 2022-12-21
KR20190070263A (ko) 2019-06-20
JP2019106433A (ja) 2019-06-27
CN109911620B (zh) 2021-12-21
CN109911620A (zh) 2019-06-21
TW201927665A (zh) 2019-07-16

Similar Documents

Publication Publication Date Title
TWI777900B (zh) 搬送車
EP3476772B1 (en) Conveyance system
WO2012043110A1 (ja) 移載システム
JP2005150129A (ja) 移載装置及び移載システム
JP6927007B2 (ja) 移載設備、移載方法
JP5249098B2 (ja) 基板処理システム及び基板処理方法
JP5586739B2 (ja) 基板処理装置、ストッカー装置および基板収納容器の搬送方法
TWI664691B (zh) 搬運裝置
JP2020070155A (ja) 物品移載設備
JP6794976B2 (ja) 移載設備、移載方法
CN111038986B (zh) 容纳系统
JP2021176155A (ja) 移載設備及び容器の移載方法
CN115744712A (zh) 塔式升降机、包括其的物流系统以及使用其的传送方法
KR102189275B1 (ko) 이송 로봇 및 이를 포함하는 이송 장치
JP2020083525A (ja) 移載装置
TWI276590B (en) Conveyance system
JP2023041307A (ja) 物品移載装置
JP2005231868A (ja) 物品搬送装置
JP2009035349A (ja) 搬送システム及び移送装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191209

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200917

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201218

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210706

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210719

R150 Certificate of patent or registration of utility model

Ref document number: 6927007

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250