JP6898990B2 - 走査プローブ顕微鏡及び走査プローブ顕微鏡の走査速度をステップイン走査モードで増大させる方法 - Google Patents

走査プローブ顕微鏡及び走査プローブ顕微鏡の走査速度をステップイン走査モードで増大させる方法 Download PDF

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JP6898990B2
JP6898990B2 JP2019521770A JP2019521770A JP6898990B2 JP 6898990 B2 JP6898990 B2 JP 6898990B2 JP 2019521770 A JP2019521770 A JP 2019521770A JP 2019521770 A JP2019521770 A JP 2019521770A JP 6898990 B2 JP6898990 B2 JP 6898990B2
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measurement
probe
scanning
embodied
actuator
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JP2019533813A (ja
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クリストフ バウアー
クリストフ バウアー
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カール・ツァイス・エスエムティー・ゲーエムベーハー
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2019521770A 2016-10-28 2017-10-26 走査プローブ顕微鏡及び走査プローブ顕微鏡の走査速度をステップイン走査モードで増大させる方法 Active JP6898990B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102016221319.9A DE102016221319A1 (de) 2016-10-28 2016-10-28 Rastersondenmikroskop und Verfahren zum Erhöhen einer Abtastgeschwindigkeit eines Rastersondenmikroskops im Step-in Abtastmodus
DE102016221319.9 2016-10-28
PCT/EP2017/077431 WO2018078011A1 (en) 2016-10-28 2017-10-26 Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode

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JP2019533813A JP2019533813A (ja) 2019-11-21
JP6898990B2 true JP6898990B2 (ja) 2021-07-07

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JP2019521770A Active JP6898990B2 (ja) 2016-10-28 2017-10-26 走査プローブ顕微鏡及び走査プローブ顕微鏡の走査速度をステップイン走査モードで増大させる方法

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US (1) US11054439B2 (zh)
JP (1) JP6898990B2 (zh)
KR (1) KR102204809B1 (zh)
DE (1) DE102016221319A1 (zh)
GB (1) GB2569253B (zh)
TW (1) TWI663404B (zh)
WO (1) WO2018078011A1 (zh)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10062049A1 (de) 2000-12-13 2002-06-27 Witec Wissenschaftliche Instr Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop
JP2004122278A (ja) * 2002-10-01 2004-04-22 Canon Inc 走査型プローブの制御装置とそれによる加工装置および観察装置、プローブの加振方法とそれを用いた加工方法
JP4021298B2 (ja) * 2002-10-10 2007-12-12 エスアイアイ・ナノテクノロジー株式会社 サンプリング走査プローブ顕微鏡および走査方法
DE10332451B4 (de) * 2003-07-17 2005-06-16 Infineon Technologies Ag Verfahren und Vorrichtung zum Bestimmen eines Höhenprofils auf einer Substratoberfläche
JP4073847B2 (ja) * 2003-08-25 2008-04-09 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡及び走査方法
JP4181491B2 (ja) * 2003-12-10 2008-11-12 日本電子株式会社 走査形プローブ顕微鏡
JP2007309919A (ja) 2006-04-20 2007-11-29 Hitachi Kenki Fine Tech Co Ltd 走査プローブ顕微鏡
US7770439B2 (en) * 2006-10-17 2010-08-10 Veeco Instruments Inc. Method and apparatus of scanning a sample using a scanning probe microscope
US7770231B2 (en) * 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
JP2009109377A (ja) * 2007-10-31 2009-05-21 Jeol Ltd 走査プローブ顕微鏡
TWM356994U (en) * 2008-10-23 2009-05-11 Nanovie Co Ltd Scanning probe microscope and its piezoelectric scanner
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
JP5283089B2 (ja) * 2009-02-02 2013-09-04 国立大学法人金沢大学 走査型プローブ顕微鏡
KR101915333B1 (ko) * 2011-01-31 2018-11-05 인피니트시마 리미티드 적응 모드 스캐닝 탐침 현미경
GB201201640D0 (en) 2012-01-31 2012-03-14 Infinitesima Ltd Photothermal probe actuation
GB201313064D0 (en) * 2013-07-22 2013-09-04 Infinitesima Ltd Probe Microscope

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Publication number Publication date
GB2569253A (en) 2019-06-12
DE102016221319A1 (de) 2018-05-03
WO2018078011A1 (en) 2018-05-03
JP2019533813A (ja) 2019-11-21
US20190250185A1 (en) 2019-08-15
GB201904447D0 (en) 2019-05-15
KR102204809B1 (ko) 2021-01-20
GB2569253B (en) 2022-02-23
US11054439B2 (en) 2021-07-06
TWI663404B (zh) 2019-06-21
KR20190053266A (ko) 2019-05-17
TW201830021A (zh) 2018-08-16

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