M356994 五、新型說明： 【新型所屬之技術領域】 、本創作係關於一種掃描探針顯微鏡及其壓電掃描器 尤私一種可使用低於3〇伏特電壓驅動，提供掃描探針 顯微鏡在微米尺度範圍’得到奈米尺度之三維空間解析 度的掃描探針顯微鏡。 【先前技術】 般拎描揀針顯微鏡（Scanning pr〇be Mic「〇^〇 )所使用之掃描器，其驅動電壓均高於⑽伏特，、告 成驅動掃描器之電子控制器必須能夠供應高電壓：並： 必須設法解決目抑高電 ^以 擾問題：主I订生的同電子訊唬雜訊干 〃因在於為滿足前述條件而擴大叢備規模 ，將造成掃描探針顯微鏡之雷^4 表備規杈 - 鏡之電子控制器體積過大、成本 過间。又驅動壓雪槁 „ 丄 乂尽 鏡受高電壓盥+ 尚電壓’使得掃描探針顯微 現又间逼壓與電場 私 又 慮靜電鱼t M Hα评電與交流訊號，須透過考 描探針顯微鏡之機M Q ^成知 ,.. 不呈蒞槓過大，成本過高。 使用直流高電壓雷调 、， 型電子儀+ ，’、，亚不付合目前家用小M356994 V. New description: [New technical field], this creation is about a scanning probe microscope and its piezoelectric scanner. It can be driven by a voltage less than 3 volts, and provides a scanning probe microscope at the micrometer scale. Scope 'Scanning probe microscopy with three-dimensional resolution of the nanoscale. [Prior Art] Scanners used in Scanning pr〇be Mic "〇^〇" have a drive voltage higher than (10) volts, and the electronic controller that drives the scanner must be able to supply high voltage. :And: You must try to solve the problem of high-powered interference: the main I-ordered electronic signal noise is due to the expansion of the size of the cluster to meet the aforementioned conditions, which will cause the scanning probe microscope to thunder ^4 Table preparation rules - the electronic controller of the mirror is too large and costly. It also drives the snow pressure 槁 丄乂 丄乂 镜 受 受 受 受 受 受 受 受 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描Considering the electrostatic fish t M Hα evaluation and communication signal, it must be known through the probe probe microscope MQ ^.. not too large, the cost is too high. Use DC high voltage Thunder, , type electronic instrument +, ',, Asia does not pay for the current small household
土电卞m益的電源規格，座 J 言之，惟有使用低丄 電腦等電子產品；換 ，方能使此類電源驅動的掃描探針顯微鏡 不是僅能在實驗室内使用。 使用之楚子產品’而 【新型内容】 M356994 ^有鑑於此，創作人主要目的在提出一種低電壓壓電 掃描器，提供掃描探針顯微鏡使用，以有效解決傳== 描探針顯微鏡使用直流高壓電源驅動 ▼ <电磁雜兮孔 問題’且可縮小體積、降低成本’並以直流低電壓驅動 而適合推廣為個人使用的電子設備。 為達成前述目的採取的主要技術手段係令前述壓# 掃描器包括有： ^包 一底座，其上具有一容置空間；The power supply specifications of the earth and electricity industry, the J word, only use electronic products such as low-voltage computers; in order to enable such power-driven scanning probe microscopes can not be used only in the laboratory. The use of Chu products' and [new content] M356994 ^ In view of this, the creator's main purpose is to propose a low-voltage piezoelectric scanner that provides a scanning probe microscope to effectively solve the problem of using The high-voltage power supply drives the <electromagnetic choke problem, and can reduce the size and cost, and is driven by DC low voltage and is suitable for popular use as an electronic device for personal use. The main technical means adopted to achieve the foregoing objectives is that the aforementioned pressure scanner includes: a package, a base having an accommodation space thereon;
罩蓋’係相對盖合於如述底座上，兮習装L 上及罩盍上形成 有一中空套筒； 一壓電片，係設於前述底座的容置空間，該壓電片 具有一上電極與一下電極，該上電極被切割成數個分判 電極，各分割電極分別連接可調整的電壓訊號，該下電 極則可連接另一調整的電壓或接地； 一延伸管，係以垂直方向暨立在前述壓電片的上電 極’其底端同時跨設於各分割電極上，其頂端係由= 的套筒穿出； 1 -探針模組’係設於延伸管的頂端部上，該探針模 組主要係於一探針座内設有一探針； 前述壓電片的工作電壓為低於30伕4主^ , 仇特之低電壓，經 以低電壓驅動後，該壓電片可提供垂吉 直於壓電片方向約 —微米的位移；又對壓電片上各分判雷&、 』€極分別供應電壓 ’以控制該壓電片之扭曲程度，進而佶π _ 便件延伸管頂端受 堡電片扭曲變形影響*面使其上的探社ρ 〜杈組產生平行於 該壓電片平面之位移。又因壓電片各 门分刀刦電極係分別由 4 .M356994 不同的電壓驅動，故可達到四個象限的平面位移，復以 壓電片原可產生垂直方向的位移， 玟可構成二維立體空 ““ϋ。料低電壓壓電m經應用在掃描探針 顯微鏡上’可取得奈米等級的樣品表面形貌。 【實施方式】 f先如第一、二圖所示，係本創作應用在掃描探針 顯微鏡的一較佳實施例，其包括有： 一外框架（10)，主要係於一上板（11)與一下板（12)之 間設有數根支柱（彳3)所組成； 一内框架（20)，係位於前述外框架（1〇)的上板（1彳）與 下板（12)之間，該内框架（2〇)具有一底板（21)及一位於底 板（21)上方的升降板（22)，該升降板（22)與底板（21)之間 設有複數組步進器，以調整升降板（22)與底板（21)的相 對距離，於本實施例中，内框架（2〇)的一端設有兩組粗 調螺旋步進器（23)，另端設有一微調螺旋步進器（24); 又前述底板（21)表面形成有一線溝（21 〇)，供埋設電源線 ，又底板（21)兩端分別以垂直方向朝上延伸形成有側板 而玉u形狀，其中一侧板上設有一電源連接器（25)，該 電源連接器（25)除與線溝（210)内的電源線連接外，亦與 外部的電子控制器連接’以取得工作電源；再者，該升 降板（22)的底面係設置待掃描的樣品； 一避震設施，係設於前述外框架（1 〇)與内框架（2〇) 之間’以賦予内框架（20)具有避震效果；該避震設施可 延自以下的組合之一：彈簧式、氣墊式。於本實施例中 5 M356994 ，該避震設施係由四組彈簧（3〇)組成，各彈菩（3〇)的— 端係連結於外框架（10)之上板（11)各角落處，彈簧（3^另 端則連結至内框架（2〇)的底板（21)各相對位置上， 弹簧（30)之彈性使内框架（2〇)具有緩衝避震作用丨1用 -壓電掃插器(40)，係設於内框架(2〇)的底板(上 ，並相對於升降板(22)底面所設置的樣品；又如前揭所 述，該粗調螺旋步進器（23)與微調螺旋步進器（Μ) 郎升降板(22)與底板(21)的距離，進一步而言，該 累方疋/進态(23)可使升降板(22)上的樣品與壓電掃描： ⑽)之探針的距離拉近i 1〇〇微米以内，再利用微調； 紅步進器（24)將樣品與探針的距離拉近至彳微米以内。 有關前述壓電掃描器（4 〇)之詳細構造係如第 示，其包括： —吓 一底座（41)，係呈矩形塊狀，其上形成有—圓 容置空間（410); 罩蓋（42) ’係相對蓋合於前述底座（41)上’該罩 蓋(42)概呈圓盤狀，其中央形成有一貫通上下端的中空 套筒（420); ^电片（43) ’係設於前述底座（41)的容置空間 ⑷〇)内’請配合參閱第四圖所示，該壓電片(43)具有一 電極” 了电極，该上電極被切割成數個分割電極， 於本實施例中’上電極被等分切割成4個分割電極( + x,_ y’ y)並透過刀別連接電源線而施以不同的電壓訊號 而5亥下電極則可連接另—調整的電壓或接地，該電源 線與接地線係埋設於内框架（2Q)之底板（21)上的線溝 M356994 ) 並與電源連接器（25)連接；前述壓電片（43)亦 可為一壓電管或一壓電塊； -延伸管（44)，係以垂直方向豎立在前述壓電片 (43)的上電極，其底端同時跨設於各分割電極（ + x，_x，+y， -y)上，其頂端則由罩蓋（42)的套筒（42〇)穿出 一探針模組（45) ’係設於延伸管（44)的頂端部上， 该操針模組（4 5)主要係於—筒狀的探針座（4 51)内設有一 探針⑽)’冑針座(45”的筒壁上形成有一鎖定孔，供 固定探針之用，探針座⑽）底部並設有_底座（453)。 於本貫施例中’該探針(452)係掃描坑道顯微鏡(stm)尖 由上述可知，該壓電掃描器（40)係將壓電片（43)之 上電極切割成4個分割電極（ ,1 x，y，_x，-y)，並分別施加 相對於下電㈣4組獨立電壓，在未施加電塵前，壓電 二㈣的四個分割電極（ + x，_x，+y，_y)未產生形變（如第四 圖所不），俟分割電極（+ χ _ ， ，y’-y)为別施加不同極性的 電壓後，將使壓電片（43)形變， V ⑽建進而使延伸管（44)產生 傾斜位移，例如在分宝丨+ 八—,， 在刀0J包極卜幻施加+V電壓，並同時在 刀軎丨J電極（-X)施加_V電壓佶 土使侍昼電片（43)產生形變， V致y刀割電極（ + X)向上突出（如笫 / Yw 弟五圖所不），而分割電極 (-X)向下凹陷，使得位於 w置之延伸管（44)向分割電 極（-X)的方向傾斜，進而使延袖 “ c、 使延伸官（44)頂端上的探針模组 (45)有朝分割電極（_x)方肖 f )万向之位移，其位移幅度 由上述說明可瞭解本創作 之掃描探針顯微鏡及其壓 7 M356994 電掃描器的詳細㈣，至⑨其工4乍方式《進一步詳述如 后： 。月參閱第_、六圖所示，本創作之掃描探針顯微鏡 係利用粗調螺旋步進器（23)將固設在内框架（20)升降板 (22)底面的樣品（5〇)，移動至與探針（452)之距離趨近至 1 〇〇 U米左右，再使用微調螺旋步進器（24)，讓探針 (452)更接近樣品（50)表面的距離到1微米以内，此時可 使用該壓電掃描器（4Q)取得樣品（5Q)，並且可達到奈米 尺度解析度，最後將該表面形貌訊號，經由電源線、電 源連接器（25)傳送至外部之電子控制器，再連結至電腦 ’而在電腦的顯示器上繪出樣品(50)之表面形貌。 由於本創作係採用低電壓直流電源以驅動壓電掃描 益’因而使掃描探針顯微鏡可由如個人電腦之攜帶式電 ^裝置所控制’同時因不復存在高電壓電子雜訊干擾問 題故可省去相關的防制措施，其體積因此得以縮小， 、亦可降低，而適合推廣為攜帶式的個人隨身裝置。 一以上揭示之圖示及說明，僅為本創作可行的實施例 ^’非用以限定本創作之保護範圍；凡所屬技術領域 :常知識者，依本創作之特徵範，，所做之其他等 效變化或修夠，皆靡 應涵1在本創作下列之申請專利範圍 内0 【圖式簡單說明】 第圖’係本創作之立體圖。 第二圖：係本創作之平面圖。 8 M356994 第三圖：係本創作壓電掃描器之分解圖。 第四圖：係本創作壓電片之一動作示意圖 第五圖：係本創作壓電片又一動作示意圖 第六圖：係本創作之局部立體圖。a cover is formed on the base, and a hollow sleeve is formed on the cover L and the cover. A piezoelectric piece is disposed in the receiving space of the base, and the piezoelectric piece has an upper portion. The electrode and the lower electrode are cut into a plurality of dividing electrodes, each of which is connected to an adjustable voltage signal, and the lower electrode can be connected to another adjusted voltage or ground; an extension tube is vertically cum The bottom electrode of the piezoelectric piece is disposed at the bottom end of the piezoelectric electrode at the same time, and the top end thereof is passed through the sleeve of the =; the probe module is disposed on the top end of the extension tube. The probe module is mainly provided with a probe in a probe holder; the operating voltage of the piezoelectric piece is lower than 30伕4 main ^, the low voltage of the enemy, after being driven by a low voltage, the piezoelectric The sheet can provide a displacement of about 1 micron from the direction of the piezoelectric sheet; and the voltage is supplied to each of the piezoelectric strips to control the distortion of the piezoelectric sheet, and then 佶 π _ The tip of the extension tube is affected by the distortion of the bunker piece. Co. ρ ~ bifurcation group generation displacement parallel to the plane of the piezoelectric sheet. Moreover, since the electrodes of the piezoelectric film are driven by different voltages of 4. M356994, the plane displacement of the four quadrants can be achieved, and the piezoelectric sheet can be vertically displaced, and the two can form a two-dimensional shape. Three-dimensional empty "". The low-voltage piezoelectric m is applied to a scanning probe microscope to obtain a nanoscale sample surface topography. [Embodiment] f First, as shown in the first and second figures, a preferred embodiment of the present invention is applied to a scanning probe microscope, which comprises: an outer frame (10) mainly attached to an upper plate (11) Between the lower plate (12) is provided with a plurality of struts (彳3); an inner frame (20) is located at the upper plate (1 彳) and the lower plate (12) of the outer frame (1 前述) The inner frame (2〇) has a bottom plate (21) and a lifting plate (22) above the bottom plate (21), and a multi-array stepper is arranged between the lifting plate (22) and the bottom plate (21). In order to adjust the relative distance between the lifting plate (22) and the bottom plate (21), in the embodiment, one end of the inner frame (2〇) is provided with two sets of coarse adjustment spiral stepper (23), and the other end is provided with a fine adjustment. a spiral stepper (24); and a surface groove (21 〇) is formed on the surface of the bottom plate (21) for embedding a power line, and the two ends of the bottom plate (21) are respectively extended in a vertical direction to form a side plate and a u-shaped shape A power connector (25) is disposed on one side of the board, and the power connector (25) is connected to the power line in the trench (210), and external The sub-controller is connected to obtain the working power; further, the bottom surface of the lifting plate (22) is provided with the sample to be scanned; and the suspension device is disposed on the outer frame (1 〇) and the inner frame (2 〇) There is a suspension effect between the inner frame (20); the suspension device can be extended from one of the following combinations: spring type, air cushion type. In the present embodiment, 5 M356994, the suspension facility is composed of four sets of springs (3 turns), and the ends of each of the bombs (3〇) are connected to the corners of the upper plate (11) of the outer frame (10). The spring (3^ the other end is connected to the opposite position of the bottom plate (21) of the inner frame (2〇), and the elasticity of the spring (30) causes the inner frame (2〇) to have a shock absorber effect. The sweeper (40) is disposed on the bottom plate of the inner frame (2〇) and is disposed on the bottom surface of the lifting plate (22); as described above, the coarse adjustment spiral stepper ( 23) and fine-tuning the spiral stepper (Μ) Lang lifting plate (22) and the bottom plate (21) distance, further, the enthalpy 疋 / forward state (23) can make the sample on the lifting plate (22) Piezoelectric scanning: (10)) The distance of the probe is close to i 1 μm and then fine-tuned; the red stepper (24) draws the distance between the sample and the probe to within 彳 micron. The detailed structure of the device (4 〇) is as shown in the figure, which includes: - a base (41), which is in the form of a rectangular block, on which a circular accommodation space (410) is formed; a cover (42) Relative cover The cover (42) has a disk shape on the base (41), and a hollow sleeve (420) penetrating through the upper and lower ends is formed in the center thereof; and the electric piece (43) is disposed on the base (41). Set the space (4) 〇) inside. Please refer to the fourth figure. The piezoelectric piece (43) has an electrode. The upper electrode is cut into a plurality of divided electrodes. In this embodiment, the upper electrode is Divided into 4 divided electrodes ( + x, _ y' y) and applied different voltage signals through the knife to connect the power line and 5 Hai lower electrode can be connected to another adjusted voltage or ground. The grounding wire is embedded in the wire groove M356994 of the bottom plate (21) of the inner frame (2Q) and connected to the power connector (25); the piezoelectric piece (43) may also be a piezoelectric tube or a piezoelectric a stretching tube (44) erected in a vertical direction on the upper electrode of the piezoelectric sheet (43), and a bottom end thereof is simultaneously disposed on each of the divided electrodes (+x, _x, +y, -y), The top end of the cover (42) is pierced by a sleeve (42) and a probe module (45) is attached to the top end of the extension tube (44). The handle module (45) Mainly in the cylindrical probe holder (4 51) is provided with a probe (10))" a locking hole is formed in the wall of the needle holder (45" for fixing the probe, and the bottom of the probe holder (10) There is also a _ base (453). In the present embodiment, the probe (452) is a scanning tunnel microscope (stm) tip. As described above, the piezoelectric scanner (40) cuts the electrode on the piezoelectric sheet (43) into four divided electrodes. ( , 1 x, y, _x, -y), and apply four independent voltages relative to the power-off (four), respectively, before the application of electric dust, the piezoelectric two (four) of the four split electrodes ( + x, _x, + y, _y) No deformation (as shown in the fourth figure), the 俟 splitting electrode (+ χ _ , , y'-y) will be deformed by applying a voltage of different polarity, and the piezoelectric piece (43) will be deformed, V (10) Further, the extension tube (44) is subjected to a tilt displacement, for example, in the Dibao 丨 + 八—, a +V voltage is applied to the knife 0J, and a _V voltage is applied to the J-electrode (-X). The soil causes the waiter (43) to be deformed, and the V-induced y-cut electrode (+X) protrudes upward (such as 笫/Yw, the fifth figure does not), and the split electrode (-X) is recessed downward so that it is located at w The extension tube (44) is inclined in the direction of the split electrode (-X), so that the sleeve is "c", and the probe module (45) on the top end of the extension (44) is directed toward the split electrode (_x). f) universal position The displacement range can be understood from the above description to understand the details of the scanning probe microscope and its pressure 7 M356994 electric scanner (4), to 9 of its work 4" "more details as follows:. See the _, 6 As shown, the scanning probe microscope of the present invention uses a coarse adjustment spiral stepper (23) to move a sample (5〇) fixed to the bottom surface of the inner frame (20) lifting plate (22) to the probe (452). The distance is close to 1 〇〇U m, and then use the fine-tuning spiral stepper (24) to bring the probe (452) closer to the surface of the sample (50) to within 1 micron. The electric scanner (4Q) takes the sample (5Q) and can reach the nanometer scale resolution. Finally, the surface topography signal is transmitted to the external electronic controller via the power line and the power connector (25), and then connected to The computer's surface topography of the sample (50) is drawn on the computer's display. Since this creation uses a low-voltage DC power supply to drive the piezoelectric scanning benefit, the scanning probe microscope can be carried by a portable computer such as a personal computer. The device is controlled 'at the same time because there is no high The problem of electronic noise interference can save the relevant control measures, and the volume can be reduced or reduced, and it is suitable for being promoted as a portable personal portable device. The illustrations and descriptions of one or more disclosures are only The creation of a feasible embodiment ^' is not intended to limit the scope of protection of this creation; any technical field: common knowledge, according to the characteristics of this creation, other equivalent changes or repairs made, all should be 1 In the scope of the following patent application of this creation 0 [Simple description of the drawing] The first picture is a perspective view of the creation. The second picture: is the plan of the creation. 8 M356994 The third picture: the decomposition of the piezoelectric scanner Figure. The fourth picture: a schematic diagram of one of the piezoelectric sheets created by the present invention. The fifth picture: another schematic diagram of the action of the piezoelectric sheet. The sixth picture: a partial perspective view of the creation.
【主要元件符號說明】 (1 〇)外框架 (12)下板 (2 0)内框架 (210)線溝 (23)粗調螺旋步進器 (25)電源連接器 (40)壓電掃描器 (410〉容置空間 (420)套筒 (44)延伸管 (451)探針座 (453)底座， (1 1)上板 (13)支柱 (21) 底板 (22) 升降板 (24)微調螺旋步進器 (30)彈簧 (41) 底座 (42) 罩蓋 (43) 壓電片 (45)探針模組 (452)探針 (50)樣品[Main component symbol description] (1 〇) outer frame (12) lower plate (20) inner frame (210) wire groove (23) coarse adjustment spiral stepper (25) power connector (40) piezoelectric scanner (410> accommodation space (420) sleeve (44) extension tube (451) probe holder (453) base, (1 1) upper plate (13) post (21) bottom plate (22) lifting plate (24) fine adjustment Spiral Stepper (30) Spring (41) Base (42) Cover (43) Piezo (45) Probe Module (452) Probe (50) Sample